Upper chamber liner
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The broken lines in the figures form no part of the claimed design.
The upper chamber liner is shown broken away in
All surfaces not shown, form no part of the claimed design.
Claims
The ornamental design for an upper chamber liner, as shown and described.
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Type: Grant
Filed: Nov 7, 2013
Date of Patent: Aug 19, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Shu-Kwan Lau (Sunnyvale, CA), Mehmet Tugrul Samir (Mountain View, CA), Anzhong Chang (San Jose, CA), Paul Brillhart (Pleasanton, CA), Richard O. Collins (Santa Clara, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/472,048