Upper chamber liner

- Applied Materials, Inc.
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Description

FIG. 1 is a top perspective view of an upper chamber liner showing our new design;

FIG. 2 is another top perspective view thereof;

FIG. 3 is a bottom perspective view thereof;

FIG. 4 is another bottom perspective view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a side view thereof;

FIG. 8 is another side view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 5;

FIG. 10 is an enlarged top view of the upper portion of FIG. 9; and,

FIG. 11 is an enlarged bottom view of the lower portion of FIG. 9.

The broken lines in the figures form no part of the claimed design.

The upper chamber liner is shown broken away in FIGS. 10 and 11 to indicate that no particular length is claimed.

All surfaces not shown, form no part of the claimed design.

Claims

The ornamental design for an upper chamber liner, as shown and described.

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Patent History
Patent number: D711331
Type: Grant
Filed: Nov 7, 2013
Date of Patent: Aug 19, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Shu-Kwan Lau (Sunnyvale, CA), Mehmet Tugrul Samir (Mountain View, CA), Anzhong Chang (San Jose, CA), Paul Brillhart (Pleasanton, CA), Richard O. Collins (Santa Clara, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/472,048