Boat of substrate processing apparatus
Latest KOKUSAI ELECTRIC CORPORATION Patents:
- Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
- Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
- Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
- PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPLAY METHOD, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
- Substrate processing apparatus and ceiling heater
The dashed-dot-dashed lines represent the boundary lines of the claimed design. The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.
Claims
The ornamental design for a boat of substrate processing apparatus, as shown and described.
D655255 | March 6, 2012 | Takebayashi |
D734730 | July 21, 2015 | Yoshida |
D737785 | September 1, 2015 | Yoshida |
D738329 | September 8, 2015 | Yoshida |
D739831 | September 29, 2015 | Takagi |
D740769 | October 13, 2015 | Takagi |
D747279 | January 12, 2016 | Yoshida |
D769201 | October 18, 2016 | Kusakabe |
D772183 | November 22, 2016 | Kusakabe |
D789310 | June 13, 2017 | Kusakabe |
D791721 | July 11, 2017 | Kusakabe |
D839219 | January 29, 2019 | Yoshida |
D846514 | April 23, 2019 | Yoshida |
D847105 | April 30, 2019 | Okajima |
D893438 | August 18, 2020 | Hasegawa |
D920935 | June 1, 2021 | Sambu |
D940669 | January 11, 2022 | Sambu |
20130284683 | October 31, 2013 | Jdira |
20160093487 | March 31, 2016 | Huussen |
1640260 | September 2019 | JP |
Type: Grant
Filed: Sep 14, 2020
Date of Patent: Oct 4, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Satoshi Fujii (Toyama)
Primary Examiner: Patricia A Palasik
Application Number: 29/750,438