Wafer boat
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The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.
Claims
The ornamental design for a wafer boat, as shown and described.
D361752 | August 29, 1995 | Yamaga |
D366868 | February 6, 1996 | Ohsawa |
D378675 | April 1, 1997 | Iwai |
D378823 | April 15, 1997 | Watanabe |
D380454 | July 1, 1997 | Iwai |
5752609 | May 19, 1998 | Kato |
D404015 | January 12, 1999 | Honma |
D404371 | January 19, 1999 | Shimazu |
5897311 | April 27, 1999 | Nishi |
D409158 | May 4, 1999 | Shimazu |
D411176 | June 22, 1999 | Shimazu |
6062853 | May 16, 2000 | Shimazu |
6065615 | May 23, 2000 | Uchiyama |
6099302 | August 8, 2000 | Hong |
6099645 | August 8, 2000 | Easley |
6287112 | September 11, 2001 | Van Voorst Vader |
6341935 | January 29, 2002 | Tseng |
D570308 | June 3, 2008 | Sato |
D570309 | June 3, 2008 | Sato |
D580894 | November 18, 2008 | Sato |
7484958 | February 3, 2009 | Kobayashi |
D600221 | September 15, 2009 | Sato |
D600222 | September 15, 2009 | Sato |
D616394 | May 25, 2010 | Sato |
D616395 | May 25, 2010 | Sato |
D655255 | March 6, 2012 | Takebayashi |
D655682 | March 13, 2012 | Takebayashi |
D737785 | September 1, 2015 | Yoshida |
D738329 | September 8, 2015 | Yoshida |
D739831 | September 29, 2015 | Takagi |
D740769 | October 13, 2015 | Takagi |
D747279 | January 12, 2016 | Yoshida |
20020092815 | July 18, 2002 | Kim |
20020113027 | August 22, 2002 | Minami |
20020130061 | September 19, 2002 | Hengst |
20020187023 | December 12, 2002 | Araki |
20030024888 | February 6, 2003 | Payne |
20050145584 | July 7, 2005 | Buckley |
- U.S. Appl. No. 29/525,561, filed Apr. 30, 2015, Tokyo Electron Limited.
- U.S. Appl. No. 29/525,563, filed Apr. 30, 2015, Tokyo Electron Limited.
- U.S. Appl. No. 29/525,566, filed Apr. 30, 2015, Tokyo Electron Limited.
Type: Grant
Filed: Apr 30, 2015
Date of Patent: Jun 13, 2017
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventors: Yoshinori Kusakabe (Iwate), Masami Oikawa (Iwate)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/525,559