Boat for substrate processing apparatus
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Description
Claims
We claim the ornamental design for a boat for substrate processing apparatus, as shown and described.
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Patent History
Patent number: D747279
Type: Grant
Filed: Jan 27, 2014
Date of Patent: Jan 12, 2016
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Hidenari Yoshida (Toyama), Tomoshi Taniyama (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/480,455
Type: Grant
Filed: Jan 27, 2014
Date of Patent: Jan 12, 2016
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Hidenari Yoshida (Toyama), Tomoshi Taniyama (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/480,455
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)