Boat for substrate processing apparatus
Latest KOKUSAI ELECTRIC CORPORATION Patents:
- SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
- PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
- SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR PROCESSING APPARATUS, AND RECORDING MEDIUM
The broken lines show portions of a boat for substrate processing apparatus that form no part of the claimed design.
The “dash-dot” broken line in
The “dash-dot” broken line in
Claims
We claim the ornamental design for a boat for substrate processing apparatus, as shown (and described).
D655255 | March 6, 2012 | Takebayashi |
D655682 | March 13, 2012 | Takebayashi |
D734730 | July 21, 2015 | Yoshida |
D737785 | September 1, 2015 | Yoshida |
D738329 | September 8, 2015 | Yoshida |
D739831 | September 29, 2015 | Takagi |
D740769 | October 13, 2015 | Takagi |
D747279 | January 12, 2016 | Yoshida |
D769201 | October 18, 2016 | Kusakabe |
D772183 | November 22, 2016 | Kusakabe |
D789310 | June 13, 2017 | Kusakabe |
D791721 | July 11, 2017 | Kusakabe |
D827592 | September 4, 2018 | Ichino |
D836572 | December 25, 2018 | Riker |
D836573 | December 25, 2018 | Ichino |
D839219 | January 29, 2019 | Yoshida |
D843958 | March 26, 2019 | Okajima |
D846514 | April 23, 2019 | Yoshida |
D847105 | April 30, 2019 | Okajima |
D873782 | January 28, 2020 | Garcia |
D893438 | August 18, 2020 | Hasegawa |
20130284683 | October 31, 2013 | Jdira |
20160093487 | March 31, 2016 | Huussen |
1494458 | April 2014 | JP |
1537629 | November 2015 | JP |
Type: Grant
Filed: Dec 11, 2018
Date of Patent: Jun 1, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Makoto Sambu (Toyama), Makoto Tsuri (Toyama)
Primary Examiner: Michael C Stout
Assistant Examiner: Fritzgerald L Butac
Application Number: 29/672,957