Boat for substrate processing apparatus
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The broken lines show portions of a boat for substrate processing apparatus that form no part of the claimed design.
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Claims
We claim the ornamental design for a boat for substrate processing apparatus, as shown (and described).
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Type: Grant
Filed: Dec 11, 2018
Date of Patent: Jun 1, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Makoto Sambu (Toyama), Makoto Tsuri (Toyama)
Primary Examiner: Michael C Stout
Assistant Examiner: Fritzgerald L Butac
Application Number: 29/672,957