Boat of substrate processing apparatus
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Description
The broken lines shown in the drawing views of
Claims
The ornamental design for a boat of substrate processing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
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Patent History
Patent number: D846514
Type: Grant
Filed: May 3, 2018
Date of Patent: Apr 23, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hidenari Yoshida (Toyama), Yusaku Okajima (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/646,328
Type: Grant
Filed: May 3, 2018
Date of Patent: Apr 23, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hidenari Yoshida (Toyama), Yusaku Okajima (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/646,328
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)