Boat of substrate processing apparatus
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The broken lines shown in the drawings represent portions of the boat of substrate processing apparatus that form no part of the claimed design. The dash-dot-dash lines in
Claims
The ornamental design for a boat of substrate processing apparatus, as shown and described.
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Type: Grant
Filed: May 3, 2018
Date of Patent: Apr 30, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Toyama), Hidenari Yoshida (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/646,355