Boat for substrate processing apparatus
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Description
Claims
The ornamental design for a boat for substrate processing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D839219
Type: Grant
Filed: Aug 10, 2016
Date of Patent: Jan 29, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hidenari Yoshida (Toyama), Toru Kagaya (Toyama), Atsushi Hirano (Kyoto)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/573,943
Type: Grant
Filed: Aug 10, 2016
Date of Patent: Jan 29, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hidenari Yoshida (Toyama), Toru Kagaya (Toyama), Atsushi Hirano (Kyoto)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/573,943
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)