Inspection Of Solids Or Liquids By Charged Particles Patents (Class 250/306)
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Patent number: 9140810Abstract: A proton computed tomography (pCT) detector system, including two tracking detectors in sequence on a first side of an object to be imaged, two tracking detectors in sequence on an opposite side of the object to be imaged, a calorimeter, and a computer cluster, wherein the tracking detectors include plastic scintillation fibers. All fibers in the detector system are read out by Silicon Photomultipliers (SiPM). A method of imaging an object by emitting protons from a source through two tracking detectors, through and around the object, and through two opposite tracking detectors, detecting energy of the protons with a calorimeter, and imaging the object.Type: GrantFiled: June 30, 2014Date of Patent: September 22, 2015Assignees: Board of Trustees of Northern Illinois University, Fermi Research Alliance, LLC, University of WollongongInventors: Nicholas Karonis, George Coutrakon, Kirk Duffin, Bela Erdelyi, Kevin Naglich, Scott Penfold, Paul Rubinov, Victor Rykalin, Vishnu Zutshi
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Patent number: 9129772Abstract: Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid.Type: GrantFiled: May 28, 2014Date of Patent: September 8, 2015Assignee: Hitachi High-Technologies CorporationInventors: Eiko Nakazawa, Hiroyuki Kobayashi, Susumu Kuwabata
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Patent number: 9116091Abstract: A method of preparing a sample for a charged-particle microscope includes: Providing a substantially plate-like sample holder having opposed first and second major surfaces substantially parallel to one another, comprising at least one aperture connecting said major surfaces and across which a membrane has been spanned upon said first major surface, which membrane comprises at least one perforation; Spanning a film of liquid across said perforation, which liquid comprises at least one study specimen suspended therein; Plunging the sample holder onto a bath of cryogen, whereby the sample holder is held with said first major surface pointing toward the cryogen and arranged substantially parallel to an exposed surface of the cryogen; and Applying a blast of cryogenic fluid to said film from a nozzle pointing toward said second major surface, immediately prior to the film making contact with said cryogen. A corresponding apparatus is also described.Type: GrantFiled: September 26, 2014Date of Patent: August 25, 2015Assignee: FEI COMPANYInventors: Hervé-William Rémigy, Karin Smulders-Weemers, Mikhail Mikhaylovich Ovsyanko, Frank Nijpels, Kasim Stefan Sader
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Patent number: 9111721Abstract: Provided are a device and method capable of machining a machining target such as a sample, a probe, or a sample table without requiring a high degree of device operation skill. First, a shape generation process of determining a shape of a machining target on the basis of an ion beam scanning signal and an absorption current of the machining target is performed. Next, a machining pattern positioning process of positioning a machining pattern over an image of the machining target is performed. Further, an ion beam stopping process of stopping ion beam irradiation is performed from a result of comparison between the image of the machining target and the machining pattern while the machining target is machined through the ion beam irradiation.Type: GrantFiled: January 13, 2012Date of Patent: August 18, 2015Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Shinya Kitayama, Satoshi Tomimatsu, Tsuyoshi Onishi
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Patent number: 9099283Abstract: A signal processing unit (21) of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals (11) obtained by scanning a charged particle beam (2) at two types of scanning speeds, a scanning speed within the bandwidths of a detector (12) and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H?1 (s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.Type: GrantFiled: November 8, 2010Date of Patent: August 4, 2015Assignee: Hitachi High-Technologies CorporationInventors: Yoshinobu Hoshino, Shigeru Kawamata, Eisaku Oho
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Patent number: 9087675Abstract: Provided is an ion source emitter that does not cause significant extraction voltage changes even when an apex portion of the emitter is repeatedly regenerated. The emitter has a shape of a triangular pyramid with the single atom at the apex. An apex portion of the emitter is substantially shaped like a hexagon when viewed from the apex side.Type: GrantFiled: June 20, 2012Date of Patent: July 21, 2015Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Yoshimi Kawanami, Hironori Moritani, Hiroyuki Muto
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Patent number: 9080981Abstract: Methods for fabricating nanoscale array structures suitable for surface enhanced Raman scattering, structures thus obtained, and methods to characterize the nanoscale array structures suitable for surface enhanced Raman scattering. Nanoscale array structures may comprise nanotrees, nanorecesses and tapered nanopillars.Type: GrantFiled: June 11, 2014Date of Patent: July 14, 2015Assignees: Lawrence Livermore National Security, LLC, The Board of Trustees of the University of IllinoisInventors: Tiziana C. Bond, Robin Miles, James C. Davidson, Gang Logan Liu
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Patent number: 9075225Abstract: Among other things, an imaging device has a photosensitive array of pixels, and a surface associated with the array is configured to receive a specimen with at least a part of the specimen at a distance from the surface equivalent to less than about half of an average width of the pixels.Type: GrantFiled: April 27, 2011Date of Patent: July 7, 2015Assignee: Alentic Microscience Inc.Inventor: Alan Marc Fine
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Patent number: 9052336Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.Type: GrantFiled: November 4, 2014Date of Patent: June 9, 2015Assignee: Bruker Nano, Inc.Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
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Patent number: 9040908Abstract: A method and apparatus for altering the orientation of a charged particle beam sample is presented. Embodiments of the method includes providing a first work piece on a sample stage having a sample stage plane, the first work piece including a lamella plane in a first orientation. A sample is milled from the first work piece using an ion beam so that the sample is substantially free from the first work piece. A probe is attached to the sample, the probe including a shaft having a shaft axis, the shaft axis oriented at a shaft angle in relation to the sample stage plane, the shaft angle being non-normal to the sample stage plane. The probe is rotated about the shaft axis through a rotational angle so that the lamella plane is in a second orientation. The sample is attached to or placed on the sample on either the first work piece, the first work piece being the work piece from which the sample was milled, or on a second work piece, the second work piece being a work piece from which the sample was not milled.Type: GrantFiled: June 28, 2013Date of Patent: May 26, 2015Assignee: FEI COMPANYInventor: Richard J. Young
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Patent number: 9040909Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.Type: GrantFiled: November 20, 2012Date of Patent: May 26, 2015Assignee: FEI CompanyInventors: N. William Parker, Mark W. Utlaut
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Publication number: 20150136976Abstract: The purpose of the present invention is to provide an overlay error measuring device for correcting a pattern displacement other than an overlay error to thereby achieve high-precision overlay error measurement. To accomplish the abovementioned purpose, the present invention proposes an overlay error measuring device which measures a dimension between a plurality of patterns belonging to different layers using a signal obtained by a charged particle beam device, and when measuring the dimension, corrects an amount corresponding to a pattern shift due to an optical proximity effect and measures the dimension between the plurality of patterns.Type: ApplicationFiled: June 10, 2013Publication date: May 21, 2015Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventor: Ryoichi Matsuoka
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Patent number: 9035236Abstract: A method is proposed herein to detect high atomic number materials, such as Special Nuclear Materials, within a container based on muon tomography. The container is modeled as a plurality of volume elements. Information related to an initial trajectory and a final trajectory of each muon passing through the container is received. Additionally, a set of initial outer prong vectors and a set of final outer prong vectors are created. Then, a plurality of vector combinations are created from a selected initial vector and a selected final vector. A metric is determined and associated with each vector combination. A subset of the plurality of vector combinations is associated with each volume element and an estimated scattering density is determined and assigned to the volume element. Based on the estimated scattering density assigned to the volume elements, a three dimensional image of the container may be generated.Type: GrantFiled: June 7, 2012Date of Patent: May 19, 2015Assignee: Atomic Energy of Canada LimitedInventors: Vinicius Anghel, Guy Jonkmans, Cybele Jewett, Martin Thompson
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Method for operating a particle beam device and/or for analyzing an object in a particle beam device
Patent number: 9035247Abstract: A method for operating a particle beam device and/or for analyzing an object in a particle beam device are provided. For example, the particle beam device is an electron beam device, an ion beam device, or a combination device having an electron beam device and an ion beam device. In various embodiments, the method steps of a so-called stereoscopy method and a multi-detector method may be combined with one another in such a manner that simple and rapid analysis of the object is made possible.Type: GrantFiled: September 30, 2013Date of Patent: May 19, 2015Assignee: Carl Zeiss Microscopy GmbHInventor: Jaroslaw Paluszynski -
Patent number: 9029765Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).Type: GrantFiled: May 13, 2013Date of Patent: May 12, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
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Publication number: 20150122992Abstract: Method and apparatus for analysis and display of fine grained mineral samples. A portion of the sample is illuminated with a charged particle beam. Emitted radiation is detected, and a sample emission spectrum is generated and fit with a plurality of standard emission spectra of minerals in a candidate mineral composition. A mineral composition whose emission spectrum best fits the sample emission spectrum is selected from a plurality of candidate mineral compositions. An assigned color is received for each mineral in the selected mineral composition, and the assigned colors are blended according to the proportion of each mineral in the selected mineral composition. An image pixel corresponding to the portion of the sample is rendered for display.Type: ApplicationFiled: November 6, 2013Publication date: May 7, 2015Applicant: FEI CompanyInventors: Michael James Owen, Garth Howell, Ashley Donaldson
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Patent number: 9024256Abstract: An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect provides an electron beam microscope with a time resolution of less than 1 picosecond with more than 105 electrons in a single shot or image group. Yet another aspect employs a super-cooled component in an electron microscope.Type: GrantFiled: August 6, 2014Date of Patent: May 5, 2015Assignee: Board of Trustees of Michigan State UniversityInventors: Chong-Yu Ruan, Martin Berz, Zhensheng Tao
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Patent number: 9024272Abstract: A pattern measuring apparatus which can identify a kind of gaps formed by a manufacturing process having a plurality of exposing steps such as SADP, particularly, which can suitably access a gap even if a sample has the gap that is not easily accessed is disclosed. A feature amount regarding one end side of a pattern having a plurality of patterns arranged therein and a plurality of kinds of feature amounts regarding the other end side of the pattern are extracted from a signal detected on the basis of scanning of a charged particle beam. With respect to proper kinds of feature amounts among the plurality of kinds of feature amounts, the feature amount on one side of the pattern and that on the other end side of the pattern are compared. On the basis of the comparison, the kinds of spaces among the patterns are determined.Type: GrantFiled: December 1, 2010Date of Patent: May 5, 2015Assignee: Hitachi High-Technologies CorporationInventors: Kei Sakai, Yafeng Zhang, Norio Hasegawa
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Publication number: 20150108349Abstract: A second stage screening system configured to resolve a threat alarm detected in a cargo by a first stage screening system. The second stage screening system includes layers of first muon detectors placed above the cargo to detect a first coordinate and an angle of incidence of incoming muons and layers of second muon detectors placed below the cargo to detect an actual coordinate and an actual angle of exit of the incoming muons. The first and second detectors measure a momentum of the incoming muons. A processing unit receives threat sensitivity vectors determined from the first stage, operates a cargo positioning system that centers a high-Z threat within the cargo, relative to the first and second muon detectors, and analyzes the momentum and a distribution of deflection angles between the angles of incidence and exit to resolve the threat alarm.Type: ApplicationFiled: October 16, 2014Publication date: April 23, 2015Inventors: Joseph Bendahan, Edward James Morton, David Yaish, Yossi Kolkovich, Jacques Goldberg
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Publication number: 20150110243Abstract: The present invention is a self-contained mobile inspection system and method and, more specifically, improved methods and systems for detecting materials concealed within a wide variety of receptacles and/or cargo containers. In particular, the present invention is an improved method and system with a novel boom structure that reduces the weight of the boom. The single, light-weight boom of the inspection system is relatively compact in a stowed configuration and has a low height and center of gravity lending to greater maneuverability.Type: ApplicationFiled: December 12, 2013Publication date: April 23, 2015Applicant: Rapiscan Systems, Inc.Inventors: Edward James Morton, Francis Baldwin, Andreas F. Kotowski
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Patent number: 9012842Abstract: A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.Type: GrantFiled: December 20, 2012Date of Patent: April 21, 2015Assignee: Hitachi High-Technologies CorporationInventors: Wataru Kotake, Shigeru Kawamata, Sukehiro Ito
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Patent number: 9009861Abstract: Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.Type: GrantFiled: June 24, 2011Date of Patent: April 14, 2015Assignee: Korea Research Institute of Standards and ScienceInventors: Byong Chon Park, Ju Youb Lee, Woon Song, Jin Ho Choi, Sang Jung Ahn, Joon Lyou, Won Young Song, Jae Wan Hong, Seung Hun Baek
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Patent number: 9006652Abstract: A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function. The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.Type: GrantFiled: May 7, 2014Date of Patent: April 14, 2015Assignee: FEI CompanyInventor: Bart Buijsse
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Patent number: 9000367Abstract: Provided is a method for evaluating a polymer material, wherein the state of dispersion of a filler in a polymer material can be quickly and quantitatively evaluated. The method for evaluating a polymer material which is a polymer material containing the polymer compound and the filler and of which at least an upper surface is a flat surface. The polymer material 1 is cut in a direction at an angle ? of 1 to 60° with respect to the surface of the polymer material using a focused ion beam (FIB) 10, and a smooth surface 1A of the polymer material, formed by the cutting, is then photographed in a direction perpendicular to the smooth surface.Type: GrantFiled: February 8, 2012Date of Patent: April 7, 2015Assignee: Bridgestone CorporationInventors: Satoshi Nakamura, Yuji Kurotani, Tatsuro Tanabe, Takaaki Igarashi
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Patent number: 9000365Abstract: Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile of the sample (201) is acquired, the feature quantities of the secondary electron profile at the positions of edges (303, 305) are detected, and based on the detected feature quantities, whether each gap adjacent to each of the edges (303, 305) is the core gap (211) or the spacer gap (212) is determined. Furthermore, the waveform profile of the spacer (207) is previously stored, the secondary electron profile of the sample (201) is acquired, a matching degree of the secondary electron profile and the stored waveform profile at the position of each spacer (207) is detected, and based on the detected matching degree, whether the each gap adjacent to each spacer (207) is the core gap (211) or the spacer gap (212) is determined.Type: GrantFiled: April 7, 2010Date of Patent: April 7, 2015Assignee: Hitachi High-Technologies CorporationInventors: Yuzuru Mochizuki, Maki Tanaka, Miki Isawa, Satoru Yamaguchi
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Patent number: 8993961Abstract: The electric charged particle beam microscope includes an electric charged particle source; a condenser lens converging electric charged particles emitted from the electric charged particle source on a specimen; a deflector scanning the converged electric charged particles over the specimen; a control unit of the deflector; a specimen stage on which the specimen is mounted; a detector detecting the electric charged particles; a computer forming an image from a control signal from the deflector and an output signal from the detector; and a display part connected with the computer. The control unit of the deflector can change the scan rate of the electric charged particles. A first rate scan image is obtained at a first rate and a second rate scan image is obtained at a second rate slower than the first rate.Type: GrantFiled: January 21, 2011Date of Patent: March 31, 2015Assignee: Hitachi High-Technologies CorporationInventors: Ruriko Tsuneta, Hideki Kikuchi
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Patent number: 8993981Abstract: Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.Type: GrantFiled: October 20, 2011Date of Patent: March 31, 2015Assignee: Carl Zeiss Microscopy, LLCInventors: John Notte, IV, Randall G. Percival, Milton Rahman, Louise Barriss, Russell Mello, Mark D. DiManna
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Patent number: 8987682Abstract: A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).Type: GrantFiled: December 10, 2013Date of Patent: March 24, 2015Assignee: JEOL Ltd.Inventor: Mitsuru Hamochi
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Patent number: 8987665Abstract: An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons emitted from the electron source, a specimen stage positioned in the vacuum chamber under the probe forming lens for holding the specimen, and an x-ray detector positioned within the vacuum chamber. The x-ray detector includes an x-ray sensitive solid-state sensor and a mechanical support system for supporting and positioning the detector, including the sensor, within the vacuum chamber. The entirety of the mechanical support system is contained within the vacuum chamber. Multiple detectors of different types may be supported within the vacuum chamber on the mechanical support system. The mechanical support system may also include at least one thermoelectric cooler element for thermo-electrically cooling the x-ray sensors.Type: GrantFiled: December 18, 2012Date of Patent: March 24, 2015Assignee: FEI CompanyInventors: Frederick H. Schamber, Cornelis G. van Beek
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Patent number: 8987692Abstract: A charged particle beam source device adapted for generating a charged particle beam is provided. The charged particle beam source device includes an emitter tip adapted for providing charged particles. Furthermore, an extractor electrode having an aperture opening is provided for extracting the charged particles from the emitter tip. An aperture angle of the charged particle beam is 2 degrees or below the aperture angle being defined by a width of the aperture opening and a distance between the emitter tip and the extractor electrode, wherein the distance between the emitter tip and the extractor electrode is a range from 0.1 mm to 2 mm.Type: GrantFiled: March 10, 2014Date of Patent: March 24, 2015Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventor: Pavel Adamec
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Patent number: 8988065Abstract: According to an embodiment, a microprobe includes a base and a lever. The base includes a first electrode provided on a surface thereof. The lever is supported by the base and includes a second electrode and a third electrode. The second electrode is connected between the first electrode and the third electrode. The third electrode is formed to project from the second electrode in a first direction in a main surface of the lever. A width of the third electrode in a second direction perpendicular to the first direction in the main surface defines a width of an electrical contact area when a scanning operation is performed by use of the third electrode in a third direction perpendicular to the main surface.Type: GrantFiled: February 27, 2014Date of Patent: March 24, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Yongfang Li, Yasushi Tomizawa
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Patent number: 8981293Abstract: An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned below and spaced from the scanning electron microscope device and supporting the inspection object; and a transferring device connected to the scanning electron microscope chamber and the automated optical inspection and transferring the scanning electron microscope device and the automated optical inspection device to positions over the stage. Air is in a gap between the chamber and the inspection object. Accordingly, an inspection object of a large size may be inspected for analysis without damage to the inspection object.Type: GrantFiled: March 6, 2014Date of Patent: March 17, 2015Assignee: Samsung Display Co., Ltd.Inventors: Dong-Hyun Gong, Young-Gil Park, Jae-Kwon Lee, Jung-Un Kim, Do-Soon Jung, Hyun-Jung Kim, Geum-Tae Kim
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Patent number: 8981294Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.Type: GrantFiled: October 30, 2012Date of Patent: March 17, 2015Assignee: B-Nano Ltd.Inventors: Dov Shachal, Rafi De Picciotto
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Publication number: 20150060660Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.Type: ApplicationFiled: June 12, 2014Publication date: March 5, 2015Applicant: FEI COMPANYInventors: Marcus Straw, Mark Emerson
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Patent number: 8969801Abstract: To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample (19) has: a control electrode (18) that discriminates between secondary electrons from the sample (19) and reflected electrons; a secondary electron conversion electrode (13) that generates secondary electrons by the impact of reflected electrons; a withdrawing electrode (12) that withdraws those secondary electrons; an energy filter (11) that discriminates between the secondary electrons withdrawn and electrons reflected from the sample (19); and a control calculation means (36) that selects a combination of voltages applied to the secondary electron conversion electrode (13), the withdrawing electrode (12), and energy filter (11).Type: GrantFiled: September 27, 2012Date of Patent: March 3, 2015Assignee: Hitachi High-Technologies CorporationInventors: Nobuhiro Okai, Yasunari Sohda, Ritsuo Fukaya, Zhigang Wang
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Patent number: 8963084Abstract: A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.Type: GrantFiled: March 11, 2014Date of Patent: February 24, 2015Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbHInventor: Stefan Lanio
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Patent number: 8963081Abstract: When a time-of-flight mass selector having a chopper using a deflector selects the masses of the ions, an ion beam is deflected. As a result, at least a part of the ion beams diagonally pass through an aperture electrode with respect to the axis. Accordingly, there has been a problem that a position on an object irradiated with a cluster ion beam, results in moving. This mass selector includes: a flight tube having an equipotential space that makes a charged substance fly therein; a deflector that is installed in a downstream side with respect to the flight tube in a direction in which the charged substance flies; a first aperture electrode that is installed in a downstream side with respect to the deflector in a direction in which the charged substance flies; and a second aperture electrode that is installed in between the deflector and the first aperture electrode.Type: GrantFiled: February 26, 2014Date of Patent: February 24, 2015Assignee: Canon Kabushiki KaishaInventor: Kota Iwasaki
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Patent number: 8963103Abstract: A device for sterilizing a sample chamber in an automated live cell microscope, having a sample holding frame contained in a housing of the microscope. The device includes a UVC sterilizing unit that emits an ultraviolet light with a wavelength of 280 nm to 100 nm (UVC radiation). The UVC sterilizing unit is arranged so that it is able to travel through the sample chamber for sterilization purposes.Type: GrantFiled: April 30, 2014Date of Patent: February 24, 2015Assignee: Carl Zeiss Microscopy GmbHInventors: Tim Plohnke, Alexander Scheps, Timo Rojahn, Tobias Klinge
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Patent number: 8963085Abstract: A method of obtaining PINEM images includes providing femtosecond optical pulse, generating electron pulses, and directing the electron pulses towards a sample. The method also includes overlapping the femtosecond optical pulses and the electron pulses spatially and temporally at the sample and transferring energy from the femtosecond optical pulses to the electron pulses. The method further includes detecting electron pulses having an energy greater than a zero loss value, providing imaging in space and time.Type: GrantFiled: September 24, 2013Date of Patent: February 24, 2015Assignee: California Institute of TechnologyInventors: Ahmed H. Zewail, David J. Flannigan, Brett Barwick
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Patent number: 8963083Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.Type: GrantFiled: August 6, 2013Date of Patent: February 24, 2015Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Matthias Firnkes, Stefan Lanio, Gerald Schönecker, Dieter Winkler
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Patent number: 8957372Abstract: A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing toward an objective lens (13). The first and second condenser lenses are disposed between the electron source (50) and the objective lens (13). First deflecting means (133) is disposed in a beam passage opening formed in the first condenser lens (121). Second deflecting means (136) is disposed in a beam passage opening formed in the second condenser lens (122). An aperture plate (113) having a plurality of apertures (113a) of different diameters is mounted between the first deflecting means (133) and the second deflecting means (136). An electron detector (102) having a beam passage aperture (102a) is mounted between the second deflecting means (136) and the objective lens (13).Type: GrantFiled: September 16, 2013Date of Patent: February 17, 2015Assignee: JEOL Ltd.Inventor: Tatsuru Kuramoto
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Patent number: 8952340Abstract: A high-frequency acceleration type ion acceleration and transportation apparatus is a beamline after an ion beam is accelerated by a high-frequency acceleration system having an energy spread with respect to set beam energy and includes an energy analysis deflection electromagnet and a horizontal beam focusing element. In the ion acceleration and transportation apparatus, a double slit that is configured by an energy spread confining slit and an energy analysis slit is additionally disposed at a position at which energy dispersion and a beam size are to be appropriate. The position is determined based on a condition of the energy analysis deflection electromagnet and the horizontal beam focusing element, and the double slit performs energy separation and energy definition and decreases the energy spread of the ion beam by performing adjustment for a smaller energy spread while suppressing a decrease in the amount of a beam current.Type: GrantFiled: June 24, 2014Date of Patent: February 10, 2015Assignee: SEN CorporationInventors: Mitsuaki Kabasawa, Tatsuo Nishihara, Kazuhiro Watanabe, Yuuji Takahashi, Tatsuya Yamada
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Patent number: 8952330Abstract: System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a sample; a secondary electron (“SE”) detector for detecting secondary electrons reflected from the sample in response to the electron beam; and a dual-layer shield disposed around and enclosing the SE detector. The shield comprises a magnetic shielding lamina layer and a metallic foil layer.Type: GrantFiled: January 17, 2014Date of Patent: February 10, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chi Tsao, Syun-Jie Jhan, Yi-Cheng Shih, Chwen Yu
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Patent number: 8952328Abstract: The invention relates to a charged particle detector system comprising a conversion plate (110) to convert incoming radiation to secondary electrons. These secondary electrons are then detected by a secondary electron detector (120), thereby providing information of the incoming radiation. Often this information is limited to, in first approximation, the flux of incoming radiation. In the case of, for example, backscattered electrons this is the current of the incoming backscattered electrons. The invention proposes to form the conversion plate as, for example, an energy dependent detector, for example a photodiode to detect electrons, so that the detector system simultaneously provides information of, for example, current (S1) and mean energy (S2) of the incoming radiation. The detector system is especially suited for use in a SEM or a DualBeam apparatus.Type: GrantFiled: August 3, 2012Date of Patent: February 10, 2015Assignee: FEI CompanyInventors: Albertus Aemillius Seyno Sluijterman, Eric Gerardus Theodoor Bosch, Patrick David Vogelsang, Johannes Adrianus Carolus Cooijmans
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Patent number: 8946627Abstract: A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.Type: GrantFiled: November 15, 2013Date of Patent: February 3, 2015Assignee: Applied Materials Israel, Ltd.Inventors: Ishai Schwarzband, Yakov Weinberg
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Patent number: 8946628Abstract: There is a limit in range and distance in which an electron beam can interfere and electron interference is implemented within a range of a coherence length. Therefore, interference images are consecutively recorded for each interference region width from an interference image of a reference wave and an observation region adjacent to the reference wave by considering that a phase distribution regenerated and observed by an interference microscopy is a differential between phase distributions of two waves used for interference and a differential image between phase distributions of a predetermined observation region and a predetermined reference wave is acquired by acquiring integrating phase distributions acquired by individually regenerating the interference images. This work enables a wide range of interference image which is more than a coherence length by arranging phase distribution images performed and acquired in the respective phase distributions in a predetermined order.Type: GrantFiled: February 3, 2012Date of Patent: February 3, 2015Assignee: Hitachi, Ltd.Inventors: Ken Harada, Hiroto Kasai
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Patent number: 8946630Abstract: A method, system, and computer program product to automatically evaluate a scanning electron microscope (SEM) image are described. The method includes obtaining a source image and the SEM image taken of the source image. The method also includes evaluating the SEM image based on comparing source contours extracted from the source image and SEM contours extracted from the SEM image to determine whether the SEM image passes or fails.Type: GrantFiled: March 29, 2013Date of Patent: February 3, 2015Assignee: International Business Machines CorporationInventors: Maria Gabrani, Virginia Estellers
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Patent number: 8946629Abstract: An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz.Type: GrantFiled: April 22, 2014Date of Patent: February 3, 2015Assignee: Ebara CorporationInventors: Masahiro Hatakeyama, Yasushi Toma, Shoji Yoshikawa, Kiwamu Tsukamoto
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Publication number: 20150021474Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.Type: ApplicationFiled: August 6, 2013Publication date: January 22, 2015Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventors: Matthias FIRNKES, Stefan LANIO, Gerald SCHÖNECKER, Dieter WINKLER
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Patent number: 8937282Abstract: An improved mineral analysis system includes mineral definitions that include not only characteristics of the minerals, but also variability in those characteristics. The variabilities allow the calculation of ranges of expected values for different quality of measurements, for example, for different numbers of x-ray counts. Match probabilities can therefore be calculated to more accurately determine the composition of a mineral sample.Type: GrantFiled: October 26, 2012Date of Patent: January 20, 2015Assignee: FEI CompanyInventors: Michael James Owen, Michael Buhot