Schottky Barrier Patents (Class 257/471)
  • Patent number: 9412737
    Abstract: When an IGBT has a barrier layer 10 that separates an upper body region 8a from a lower body region 8b, conductivity modulation is enhanced and on-resistance decreases. When the IGBT also has a Schottky contact region 6 that extends to reach the barrier layer 10, a diode structure can be obtained. In this case, however, a saturation current increases as well as short circuit resistance decreases. The Schottky contact region 6 is separated from the emitter region 4 by the upper body region 8a. By selecting an impurity concentration in the region 8a, an increase in a saturation current can be avoided. Alternatively, a block structure that prevents a depletion layer extending from the region 6 into the region 8a from joining a depletion layer extending from the region 4 into the region 8a may be provided in an area separating the region 6 from the region 4.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: August 9, 2016
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Jun Saito, Satoru Machida, Yusuke Yamashita
  • Patent number: 9397231
    Abstract: A semiconductor device having a wide depletion region for increasing the breakdown voltage of the device includes an epitaxial layer of a first conductive type. An anode electrode and a cathode electrode are arranged on the epitaxial layer to be separated from each other. A first drift layer of the first conductive type formed in the epitaxial layer. A Schottky contact area is at a region of contact between the anode electrode and the first drift layer. An impurity region of a second conductive type is different from the first conductive type at the epitaxial layer. An insular impurity region is formed below the Schottky contact area.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: July 19, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun-Ju Kim, Jae-June Jang, Hoon Chang, Jae-Ho Kim, Kyu-Heon Cho
  • Patent number: 9385186
    Abstract: A high voltage device with composite structure comprises a high voltage power MOS transistor HVNMOS and a JFET. The high voltage power MOS transistor HVNMOS comprises a drain, a source, a gate and a substrate, and a P-type well region Pwell as a conducting channel which is arranged between the source and the drain. The JFET comprises the drain, the source, the gate and the substrate, and an N-type well region Nwell as a conducting channel which is arranged between the source and the drain. The high voltage power MOS transistor HVNMOS and the JFET share the same drain, and the drain is processed by using N-type double diffusion process. The embodiment of the present invention further presents a starting circuit using the high voltage device with composite structure.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: July 5, 2016
    Assignee: Shenzhen Sunmoon Microelectronics Co., Ltd.
    Inventor: Zhaohua Li
  • Patent number: 9379181
    Abstract: A semiconductor device is provided with a semiconductor substrate in which a power semiconductor element part and a temperature sensing diode part are provided. The temperature sensing diode part includes a first semiconductor region, a second semiconductor region, a first base region, and a first drift region. In the semiconductor substrate, an isolation trench is formed, which passes through the first base region, extends to the first drift region, and surrounds an outer periphery of the temperature sensing diode part. At least a part of one of side walls of the isolation trench is in contact with the power semiconductor element part, and the other side wall of the isolation trench is in contact with the temperature sensing diode part.
    Type: Grant
    Filed: April 22, 2014
    Date of Patent: June 28, 2016
    Assignees: TOYOTA JIDOSHA KABUSHIKI KAISHA, DENSO CORPORATION
    Inventor: Masahiro Sugimoto
  • Patent number: 9355937
    Abstract: A semiconductor device includes a semiconductor substrate, a first metal layer, a barrier metal layer, and a second metal layer. The semiconductor substrate includes a front surface and a back surface. A semiconductor element and an electrode of the semiconductor element are located on the front surface. An opening in the back surface reaches a lower surface of the electrode, and the opening is defined by a side surface and a bottom surface. The first metal layer covers the side surface and the bottom surface. The barrier metal layer covers the first metal layer in the opening. The second metal layer is in contact with solder in the opening and is closer to the electrode than parts of the barrier metal layer. The second metal layer is laminated on the barrier metal layer and covers at least a part of the barrier metal layer in the opening.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: May 31, 2016
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Hidetoshi Koyama
  • Patent number: 9312408
    Abstract: The disclosure relates to an image sensor comprising a substrate region in a semiconductor material; an active layer in contact with the substrate region; and a photodiode array formed in the active layer. The substrate region has a doping level such that the resistivity of the substrate region is less than 6 mOhm·cm.
    Type: Grant
    Filed: June 12, 2015
    Date of Patent: April 12, 2016
    Assignee: STMicroelectronics SA
    Inventor: Didier Dutartre
  • Patent number: 9306005
    Abstract: According to example embodiments, an electronic device includes: a semiconductor layer; a graphene directly contacting a desired (and/or alternatively predetermined) area of the semiconductor layer; and a metal layer on the graphene. The desired (and/or alternatively predetermined) area of the semiconductor layer include one of: a constant doping density, a doping density that is equal to or less than 1019 cm?3, and a depletion width of less than or equal to 3 nm.
    Type: Grant
    Filed: December 11, 2013
    Date of Patent: April 5, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyung-eun Byun, Seong-jun Park, David Seo, Hyun-jae Song, Jae-ho Lee, Hyun-jong Chung, Jin-seong Heo
  • Patent number: 9263599
    Abstract: A semiconductor system having a trench MOS barrier Schottky diode is described, including an n-type epitaxial layer, in which at least two etched trenches are located in a two-dimensional manner of presentation on an n+-type substrate which acts as the cathode zone. An electrically floating, p-type layer, which acts as the anode zone of the p-n type diode, is located in the n-type epitaxial layer, at least in a location below the trench bottom. An oxide layer is located between a metal layer and the surface of the trenches. The n-type epitaxial layer may include two n-type layers of different doping concentrations.
    Type: Grant
    Filed: June 9, 2010
    Date of Patent: February 16, 2016
    Assignee: ROBERT BOSCH GMBH
    Inventors: Ning Qu, Alfred Goerlach
  • Patent number: 9245614
    Abstract: A semiconductor device having a high degree of freedom of layout has a first part AR1, in which a plurality of p-type wells PW and n-type wells NW are alternately arranged to be adjacent to each other along an X-axis direction. A common power feeding region (ARP2) for the plurality of wells PW is arranged on one side so as to interpose the AR1 in a Y-axis direction, and a common power feeding region (ARN2) for the plurality of wells NW is arranged on the other side. In the power feeding region (ARP2) for the PW wells, a p+-type power-feeding diffusion layer P+(DFW) having an elongate shape extending in the X-axis direction is formed. A plurality of gate layers GT extending in the X-axis direction to cross the boundary between the PW and NW wells are arranged in the AR1, and a plurality of MIS transistors are correspondingly formed.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: January 26, 2016
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Ken Shibata, Yuta Yanagitani
  • Patent number: 9236519
    Abstract: An embodiment of a geiger-mode avalanche photodiode includes: a body of semiconductor material, having a first surface and a second surface; a cathode region of a first type of conductivity, which extends within the body; and an anode region of a second type of conductivity, which extends within the cathode region and faces the first surface, the anode and cathode regions defining a junction. The anode region includes at least two subregions, which extend at a distance apart within the cathode region starting from the first surface, and delimit at least one gap housing a portion of the cathode region, the maximum width of the gap and the levels of doping of the two subregions and of the cathode region being such that, by biasing the junction at a breakdown voltage, a first depleted region occupies completely the portion of the cathode region within the gap.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: January 12, 2016
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Massimo Cataldo Mazzillo, Delfo Nunziato Sanfilippo
  • Patent number: 9231120
    Abstract: A Schottky diode includes a device structure having a central portion and a plurality of fingers. Distal portions of the fingers overlie leakage current control (LCC) regions. An LCC region is relatively narrow and deep, terminating in proximity to a buried layer of like polarity. Under reverse bias, depletion regions forming in an active region lying between the buried layer and the LCC regions occupy the entire extent of the active region and thereby provide a carrier depleted wall. An analogous depletion region occurs in the active region residing between any pair of adjacent fingers. If the fingers include latitudinal oriented fingers and longitudinal oriented fingers, depletion region blockades in three different orthogonal orientations may occur. The formation of the LCC regions may include the use of a high dose, low energy phosphorous implant using an LCC implant mask and the isolation structures as an additional hard mask.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: January 5, 2016
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Weize Chen, Xin Lin, Patrice M. Parris
  • Patent number: 9214549
    Abstract: A high voltage device having Schottky diode includes a semiconductor substrate, a Schottky diode formed on the semiconductor substrate, at least a first doped region having a first conductive type formed in the semiconductor substrate and under the Schottky diode, and a control gate positioned on the semiconductor substrate. The control gate covers a portion of the Schottky diode and the first doped region positioned on the semiconductor substrate.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: December 15, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Min-Hsuan Tsai
  • Patent number: 9184286
    Abstract: A semiconductor device of the present invention is a semiconductor device having a semiconductor layer comprising a wide band gap semiconductor, wherein the semiconductor layer includes: a first conductivity-type source region, a second conductivity-type channel region and a first conductivity-type drain region, which are formed in this order from the surface side of the semiconductor layer; a source trench lying from the surface of the semiconductor layer through the source region and the channel region to the drain region; a gate insulating film formed so as to contact the channel region; a gate electrode facing the channel region with the gate insulating film interposed therebetween; and a first breakdown voltage holding region of a second conductivity type formed selectively on the side face or the bottom face of the source trench, and the semiconductor device includes a barrier formation layer, which is joined with the drain region in the source trench, for forming, by junction with the drain region, a j
    Type: Grant
    Filed: February 1, 2012
    Date of Patent: November 10, 2015
    Assignee: ROHM CO., LTD.
    Inventor: Yuki Nakano
  • Patent number: 9142624
    Abstract: A semiconductor device includes a semiconductor base body having an n+-type semiconductor layer and an n?-type semiconductor layer p+-type diffusion regions selectively formed on a surface of the n?-type semiconductor layer, and a barrier metal layer formed on a surface of the n?-type semiconductor layer and surfaces of p+-type diffusion regions. A Schottky junction is between the barrier metal layer and the n?-type semiconductor layer. An ohmic junction is between the barrier metal layer and the p+-type diffusion regions. Platinum is diffused into the semiconductor base body such that a concentration of platinum becomes maximum in a surface of the n?-type semiconductor layer.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: September 22, 2015
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventor: Yoshifumi Matsuzaki
  • Patent number: 9142316
    Abstract: An OTP anti-fuse memory array without additional selectors and a manufacturing method are provided. Embodiments include forming wells of a first polarity in a substrate, forming a bitline of the first polarity in each well, and forming plural metal gates across each bitline, wherein no source/drain regions are formed between the metal gates.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: September 22, 2015
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Yanxiang Liu, Min-hwa Chi, Anurag Mittal
  • Patent number: 9142618
    Abstract: A semiconductor device according to an embodiment includes: a first diamond semiconductor layer of a first conductivity type including a main surface having a first plane orientation; a trench structure formed in the first diamond semiconductor layer; a second diamond semiconductor layer formed on the first diamond semiconductor layer in the trench structure and having a lower dopant concentration than the first diamond semiconductor layer; a third diamond semiconductor layer of a second conductivity type formed on the second diamond semiconductor layer and having a higher dopant concentration than the second diamond semiconductor layer; a first electrode electrically connected to the first diamond semiconductor layer; and a second electrode electrically connected to the third diamond semiconductor layer.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: September 22, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Mariko Suzuki, Tadashi Sakai, Naoshi Sakuma, Masayuki Katagiri, Yuichi Yamazaki
  • Patent number: 9142554
    Abstract: Embodiments of semiconductor devices and driver circuits include a semiconductor substrate having a first conductivity type, an isolation structure (including a sinker region and a buried layer), an active device within area of the substrate contained by the isolation structure, and a diode circuit. The buried layer is positioned below the top substrate surface, and has a second conductivity type. The sinker region extends between the top substrate surface and the buried layer, and has the second conductivity type. The active device includes a body region of the second conductivity type, and the diode circuit is connected between the isolation structure and the body region. The diode circuit may include one or more Schottky diodes and/or PN junction diodes. In further embodiments, the diode circuit may include one or more resistive networks in series and/or parallel with the Schottky and/or PN diode(s).
    Type: Grant
    Filed: November 7, 2012
    Date of Patent: September 22, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Weize Chen, Hubert M. Bode, Richard J. De Souza, Patrice M. Parris
  • Patent number: 9129990
    Abstract: Embodiments of semiconductor devices and driver circuits include a semiconductor substrate having a first conductivity type, an isolation structure (including a sinker region and a buried layer), an active device within area of the substrate contained by the isolation structure, and a diode circuit. The buried layer is positioned below the top substrate surface, and has a second conductivity type. The sinker region extends between the top substrate surface and the buried layer, and has the second conductivity type. The active device includes a drain region of the second conductivity type, and the diode circuit is connected between the isolation structure and the drain region. The diode circuit may include one or more Schottky diodes and/or PN junction diodes. In further embodiments, the diode circuit may include one or more resistive networks in series and/or parallel with the Schottky and/or PN diode(s).
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: September 8, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Weize Chen, Hubert M. Bode, Richard J. De Souza, Patrice M. Parris
  • Patent number: 9117936
    Abstract: A diode (200) is disclosed having improved efficiency, smaller form factor, and reduced reverse biased leakage current. Schottky diodes (212) are formed on the sidewalls (210) of a mesa region (206). The mesa region (206) is a cathode of the Schottky diode (212). The current path through the mesa region (206) has a lateral and a vertical current path. The diode (200) further comprises a MOS structure (214), p-type regions (220), MOS structures (230), and p-type regions (232). MOS structure (214) with the p-type regions (220) pinch-off the lateral current path under reverse bias conditions. P-type regions (220), MOS structures (230), and p-type regions (232) each pinch-off the vertical current path under reverse bias conditions. MOS structure (214) and MOS structures (230) reduce resistance of the lateral and vertical current path under forward bias conditions. The mesa region (206) can have a uniform or non-uniform doping concentration.
    Type: Grant
    Filed: July 15, 2014
    Date of Patent: August 25, 2015
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Gordon M. Grivna, Jefferson W. Hall, Mohammed Tanvir Quddus
  • Patent number: 9111769
    Abstract: A semiconductor device of the present invention includes a semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode being in contact with a surface of the semiconductor layer. The semiconductor layer includes a drift layer that forms the surface of the semiconductor layer and a high-resistance layer that is formed on a surface layer portion of the drift layer and that has higher resistance than the drift layer. The high-resistance layer is formed by implanting impurity ions from the surface of the semiconductor layer and then undergoing annealing treatment at less than 1500° C.
    Type: Grant
    Filed: May 16, 2012
    Date of Patent: August 18, 2015
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 9111852
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode formed to come into contact with a surface of the semiconductor layer, and has a threshold voltage Vth of 0.3 V to 0.7 V and a leakage current Jr of 1×10?9 A/cm2 to 1×10?4 A/cm2 in a rated voltage VR.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: August 18, 2015
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 9082691
    Abstract: A nitride semiconductor device includes a substrate, a first Inx1Ga1-x1-y1Aly1N layer, a second Inx2Ga1-x2-y2Aly2N layer, an interlayer insulating film, a source electrode, a drain electrode, a first gate electrode, a Schottky electrode, a second gate electrode, an interconnection layer. The second Inx2Ga1-x2-y2Aly2N layer is provided on a surface of the first Inx1Ga1-x1-y1Aly1N layer. The second Inx2Ga1-x2-y2Aly2N layer has a wider band gap than the first Inx1Ga1-x1-y1Aly1N layer. The first gate electrode is provided between the source electrode and the drain electrode on a surface of the second Inx2Ga1-x2-y2Aly2N layer. The Schottky electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the first gate electrode and the drain electrode. The second gate electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the Schottky electrode and the drain electrode. The interconnection layer electrically connects the source electrode, the Schottky electrode, and the second gate electrode.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: July 14, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Akira Yoshioka, Yasunobu Saito, Hidetoshi Fujimoto, Tetsuya Ohno, Wataru Saito
  • Patent number: 9041059
    Abstract: A manufacturing method for antenna switching circuit includes the following steps of: providing a GaAs wafer, which includes a capping layer; disposing an isolation layer to the GaAs wafer for forming a device area; and disposing a gate metal on the capping layer within the device area, wherein an interface between the gate metal and the capping layer forms a Schottky contact, and the Schottky contact is parallel connected with an impedance. The present invention also discloses a semiconductor structure for antenna switching circuit.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: May 26, 2015
    Assignee: MAXTEK TECHNOLOGY CO., LTD.
    Inventors: Ke-Kung Liao, Tung-Sheng Chang, Chun-Yen Ku, Shih-Yu Chen
  • Publication number: 20150137060
    Abstract: Devices and methods for forming a device are disclosed. The device includes a substrate and a selector diode disposed over the substrate. The diode includes first and second terminals. The first terminal is disposed between the second terminal and the substrate. The diode includes a Schottky Barrier (SB) disposed at about an interface of the first and second terminals. The SB includes a tunable SB height defined by a SB region having segregated dopants. The device includes a memory element disposed over and coupled to the selector diode.
    Type: Application
    Filed: November 20, 2013
    Publication date: May 21, 2015
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yuan SUN, Eng Huat TOH
  • Patent number: 9029974
    Abstract: A semiconductor device according to an embodiment is at least partially arranged in or on a substrate and includes a recess forming a mesa, wherein the mesa extends along a direction into the substrate to a bottom plane of the recess and includes a semiconducting material of a first conductivity type, the semiconducting material of the mesa including at least locally a first doping concentration not extending further into the substrate than the bottom plane. The semiconductor device further includes an electrically conductive structure arranged at least partially along a sidewall of the mesa, the electrically conductive structure forming a Schottky or Schottky-like electrical contact with the semiconducting material of the mesa, wherein the substrate comprises the semiconducting material of the first conductivity type comprising at least locally a second doping concentration different from the first doping concentration along a projection of the mesa into the substrate.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: May 12, 2015
    Assignee: Infineon Technologies AG
    Inventors: Romain Esteve, Jens Konrath, Daniel Kueck, David Laforet, Cedric Ouvrard, Roland Rupp, Andreas Voerckel, Wolfgang Werner
  • Publication number: 20150123235
    Abstract: A semiconductor device includes a substrate, a counter-doping region, and a Schottky barrier diode (SBD) in which a breakdown voltage is improved by using counter doping, and a manufacturing method thereof. A breakdown voltage may be improved by lowering a concentration of impurity on the region and enhancing the characteristics of the semiconductor device including the SBD.
    Type: Application
    Filed: June 25, 2014
    Publication date: May 7, 2015
    Applicant: MagnaChip Semiconductor, Ltd.
    Inventors: Yong Won LEE, Jin Woo HAN, Dae Won HWANG, Kyung Wook KIM
  • Publication number: 20150115326
    Abstract: In an embodiment, an electronic device includes a semiconductor layer having a surface, a gate and a first current electrode on the surface and a dielectric layer extending between the gate and the first current electrode and including charged ions having a predetermined charge profile.
    Type: Application
    Filed: October 31, 2013
    Publication date: April 30, 2015
    Inventors: Gerhard Prechtl, Clemens Ostermaier, Oliver Häberlen
  • Patent number: 9018685
    Abstract: The invention relates to a structure comprising an n-type substrate (1) having a bottom surface (10) and a top surface (11), a drain (D) contacting the bottom surface (10) of the substrate (1), a first n-type semiconductor region (2) having a top surface (21) provided with a contact area (210), a source (S) contacting the contact area (210), and a second p-type semiconductor region (3) arranged inside the first semiconductor region (2) and defining first and second conduction channels (C1, C2) between the drain and the source, characterized in that said structure comprises first and second metal gratings (G1, G2), each of which has a portion (40, 71) contacting the first semiconductor region (2) so as to form a Schottky junction.
    Type: Grant
    Filed: July 13, 2011
    Date of Patent: April 28, 2015
    Assignees: Institut National des Sciences Appliquees de Lyon, Centre National de la Recherche Scientifique
    Inventors: Dominique Tournier, Pierre Brosselard, Florian Chevalier
  • Patent number: 9006858
    Abstract: In a Schottky diode having an n+-type substrate, an n-type epitaxial layer, at least two p-doped trenches introduced into the n-type epitaxial layer, mesa regions between adjacent trenches, a metal layer functioning as a cathode electrode, and another metal layer functioning as an anode electrode, the thickness of the epitaxial layer is more than four times the depth of the trenches.
    Type: Grant
    Filed: November 12, 2012
    Date of Patent: April 14, 2015
    Assignee: Robert Bosch GmbH
    Inventors: Ning Qu, Alfred Goerlach
  • Patent number: 8993444
    Abstract: Embodiments of the present invention generally relate to methods for lowering the dielectric constant of low-k dielectric films used in semiconductor fabrication. In one embodiment, a method for lowering the dielectric constant (k) of a low-k silicon-containing dielectric film, comprising exposing a porous low-k silicon-containing dielectric film to a hydrofluoric acid solution and subsequently exposing the low-k silicon-containing dielectric film to a silylation agent. The silylation agent reacts with Si—OH functional groups in the porous low-k dielectric film to increase the concentration of carbon in the low-k dielectric film.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: March 31, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Kelvin Chan, Jin Xu, Kang Sub Yim, Alexandros T. Demos
  • Publication number: 20150076597
    Abstract: A semiconductor component and a method for producing a semiconductor component are described. The semiconductor component includes a semiconductor body including an inner zone and an edge zone, and a passivation layer, which is arranged at least on a surface of the semiconductor body adjoining the edge zone. The passivation layer includes a semiconductor oxide and that includes a defect region having crystal defects that serve as getter centers for contaminations.
    Type: Application
    Filed: September 15, 2014
    Publication date: March 19, 2015
    Inventors: Hans-Joachim Schulze, Manfred Pfaffenlehner, Markus Schmitt
  • Patent number: 8969993
    Abstract: A wide gap semiconductor device includes a substrate and a Schottky electrode. The substrate formed of a wide gap semiconductor material has a main face, and includes a first-conductivity-type region and a second-conductivity-type region. The Schottky electrode is arranged adjoining the main face of the substrate. At the substrate, there is foamed a trench having a side face continuous with the main face and a bottom continuous with the side face. The Schottky electrode adjoins the first-conductivity-type region at the side face of the trench and the main face, and adjoins the second-conductivity-type region at the bottom of the trench. The side face of the trench is inclined relative to the main face of the substrate.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: March 3, 2015
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Keiji Wada, Takeyoshi Masuda, Toru Hiyoshi
  • Patent number: 8969927
    Abstract: Embodiments of a gate contact for a semiconductor device and methods of fabrication thereof are disclosed. In one embodiment, a semiconductor device includes a semiconductor structure and a dielectric layer on a surface of the semiconductor structure, where the dielectric layer has an opening that exposes an area of the semiconductor structure. A gate contact for the semiconductor device is formed on the exposed area of the semiconductor structure through the opening in the dielectric layer. The gate contact includes a proximal end on a portion of the exposed area of the semiconductor structure, a distal end opposite the proximal end, and sidewalls that each extend between the proximal end and the distal end of the gate contact. For each sidewall of the gate contact, an air region separates the sidewall and the distal end of the gate contact from the dielectric layer.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: March 3, 2015
    Assignee: Cree, Inc.
    Inventors: Fabian Radulescu, Helmut Hagleitner
  • Patent number: 8969995
    Abstract: High-efficiency Schottky diodes (HED) and rectifier systems having such semiconductor devices are provided, which Schottky diodes (HED) are composed of at least one Schottky diode combined with an additional semiconductor element, e.g., with magnetoresistors (TMBS) or with pn diodes (TJBS), and have trenches. Such high-efficiency Schottky diodes make it possible to construct rectifiers which are suitable for higher temperatures and can therefore be used in motor vehicle generators, without particular cooling measures such as heat sinks being required.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: March 3, 2015
    Assignee: Robert Bosch GmbH
    Inventors: Richard Spitz, Alfred Goerlach, Gert Wolf, Markus Mueller
  • Publication number: 20150054115
    Abstract: A trench Schottky rectifier device includes a substrate having a first conductivity type, a plurality of trenches formed in the substrate, and an insulating layer formed on sidewalls of the trenches. The trenches are filled with conductive structure. There is an electrode overlying the conductive structure and the substrate, and thus a Schottky contact forms between the electrode and the substrate. A plurality of embedded doped regions having a second conductivity type are formed in the substrate and located under the trenches. Each doped region and the substrate form a PN junction to pinch off current flowing toward the Schottky contact so as to suppress current leakage.
    Type: Application
    Filed: October 29, 2014
    Publication date: February 26, 2015
    Inventors: Kou-Liang CHAO, Mei-Ling CHEN, Tse-Chuan SU, Hung-Hsin KUO
  • Patent number: 8963276
    Abstract: A semiconductor device that can achieve a high-speed operation at a time of switching, and the like. The semiconductor device includes: a p-type buried layer buried within an n?-type semiconductor layer; and a p-type surface layer formed in a central portion of each of cells. In a contact cell, the p-type buried layer is in contact with the p-type surface layer. The semiconductor device further includes: a p+-type contact layer formed on the p-type surface layer of the contact cell; and an anode electrode provided on the n?-type semiconductor layer. The anode electrode forms a Schottky junction with the n?-type semiconductor layer and forms an ohmic junction with the p+-type contact layer.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: February 24, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Hiroshi Watanabe, Naoki Yutani, Yoshiyuki Nakaki, Kenichi Ohtsuka
  • Patent number: 8963167
    Abstract: An improved diode energy converter for chemical kinetic electron energy transfer is formed using nanostructures and includes identifiable regions associated with chemical reactions isolated chemically from other regions in the converter, a region associated with an area that forms energy barriers of the desired height, a region associated with tailoring the boundary between semiconductor material and metal materials so that the junction does not tear apart, and a region associated with removing heat from the semiconductor.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: February 24, 2015
    Assignee: Neokismet, LLC
    Inventors: Jawahar M. Gidwani, Anthony C. Zuppero
  • Patent number: 8952481
    Abstract: The present disclosure relates to a semiconductor device having a Schottky contact that provides both super surge capability and low reverse-bias leakage current. In one preferred embodiment, the semiconductor device is a Schottky diode and even more preferably a Silicon Carbide (SiC) Schottky diode. However, the semiconductor device may more generally be any type of semiconductor device having a Schottky contact such as, for example, a Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET).
    Type: Grant
    Filed: November 20, 2012
    Date of Patent: February 10, 2015
    Assignee: Cree, Inc.
    Inventors: Qingchun Zhang, Jennifer Duc
  • Publication number: 20150035111
    Abstract: A semiconductor device includes first and second electrodes. First semiconductor regions of a first conductivity type are positioned between the first electrode and the second electrode and contact the first electrode. These semiconductor regions are arranged along a first direction. A second semiconductor region of the first conductivity type also contacts the first electrode and is disposed around the plurality of first semiconductor regions. The second semiconductor region has a dopant concentration that is higher than the first semiconductor regions. A semiconductor layer of a second conductivity type has portions that are between the first semiconductor regions and the second semiconductor region. These portions are in Schottky contact with the first electrode.
    Type: Application
    Filed: February 21, 2014
    Publication date: February 5, 2015
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tsuyoshi OTA, Yoichi HORI, Takao NODA
  • Patent number: 8946725
    Abstract: A semiconductor structure includes a GaN substrate with a first surface and a second surface. The GaN substrate is characterized by a first conductivity type and a first dopant concentration. A first electrode is electrically coupled to the second surface of the GaN substrate. The semiconductor structure further includes a first GaN epitaxial layer of the first conductivity type coupled to the first surface of the GaN substrate and a second GaN layer of a second conductivity type coupled to the first GaN epitaxial layer. The first GaN epitaxial layer comprises a channel region. The second GaN epitaxial layer comprises a gate region and an edge termination structure. A second electrode coupled to the gate region and a third electrode coupled to the channel region are both disposed within the edge termination structure.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: February 3, 2015
    Assignee: Avogy, Inc.
    Inventors: Donald R. Disney, Hui Nie, Isik C. Kizilyalli, Richard J. Brown
  • Patent number: 8936964
    Abstract: The present invention provides a silicon carbide Schottky-barrier diode device and a method for manufacturing the same. The silicon carbide Schottky bather diode device includes a primary n? epitaxial layer, an n+ epitaxial region, and a Schottky metal layer. The primary n? epitaxial layer is deposited on an n+ substrate joined with an ohmic metal layer at an undersurface thereof. The n+ epitaxial region is formed by implanting n+ ions into a central region of the primary n? epitaxial layer. The Schottky metal layer is deposited on the n+ epitaxial layer.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: January 20, 2015
    Assignee: Hyundai Motor Company
    Inventors: Kyoung Kook Hong, Jong Seok Lee
  • Patent number: 8933531
    Abstract: A semiconductor device including a base substrate; a semiconductor layer which is disposed on the base substrate and has a 2-Dimensional Electron Gas (2DEG) generated within the semiconductor layer; a plurality of first ohmic electrodes which are disposed on the central region of the semiconductor layer and have island-shaped cross sections; a second ohmic electrode which is disposed on edge regions of the semiconductor layer; and a Schottky electrode part has first bonding portions bonded to the first ohmic electrodes, and a second bonding portion bonded to the semiconductor layer. A depletion region is provided to be spaced apart from the 2DEG when the semiconductor device is driven at an on-voltage and is provided to be expanded to the 2DEG when the semiconductor device is driven at an off-voltage, the depletion region being generated within the semiconductor layer by bonding the semiconductor layer and the second bonding portion.
    Type: Grant
    Filed: November 1, 2012
    Date of Patent: January 13, 2015
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Woo Cul Jeon, Jung Hee Lee, Young Hwan Park, Ki Yeol Park
  • Patent number: 8928031
    Abstract: Semiconductor devices are formed using a thin epitaxial layer (nanotube) formed on sidewalls of dielectric-filled trenches. In one embodiment, a semiconductor device is formed in a second semiconductor layer disposed on a first semiconductor layer of opposite conductivity type and having trenches formed therein where the trenches extend from the top surface to the bottom surface of the second semiconductor layer. The semiconductor device includes a first epitaxial layer formed on sidewalls of the trenches where the first epitaxial layer is substantially charge balanced with adjacent semiconductor regions. The semiconductor device further includes a first dielectric layer formed in the trenches adjacent the first epitaxial layer and a gate electrode disposed in an upper portion of at least some of the trenches above the first dielectric layer and insulated from the sidewalls of the trenches by a gate dielectric layer.
    Type: Grant
    Filed: April 2, 2014
    Date of Patent: January 6, 2015
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
  • Publication number: 20150001616
    Abstract: A Schottky diode includes first and second trenches formed in a semiconductor layer where the first and second trenches are lined with a thin dielectric layer and filled partially with a trench conductor layer with the remaining portion being filled with a first dielectric layer. Well regions are formed spaced-apart in a top portion of the semiconductor layer between the first and second trenches. A Schottky metal layer is formed on a top surface of the semiconductor layer between the first and second trenches. The Schottky diode is formed with the Schottky metal layer as the anode and the semiconductor layer between the first and second trenches as the cathode. The trench conductor layer in the first and second trenches is electrically connected to the anode of the Schottky diode. In one embodiment, the Schottky diode is formed integrated with a trench field effect transistor on the same semiconductor substrate.
    Type: Application
    Filed: September 15, 2014
    Publication date: January 1, 2015
    Inventors: Daniel Calafut, Yi Su, Jongoh Kim, Hong Chang, Hamza Yilmaz, Daniel S. Ng
  • Publication number: 20150001667
    Abstract: A semiconductor device includes a semiconductor base body having an n+-type semiconductor layer and an n?-type semiconductor layer p+-type diffusion regions selectively formed on a surface of the n?-type semiconductor layer, and a barrier metal layer formed on a surface of the n?-type semiconductor layer and surfaces of p+-type diffusion regions. A Schottky junction is between the barrier metal layer and the n?-type semiconductor layer. An ohmic junction is between the barrier metal layer and the p+-type diffusion regions. Platinum is diffused into the semiconductor base body such that a concentration of platinum becomes maximum in a surface of the n?-type semiconductor layer.
    Type: Application
    Filed: July 3, 2012
    Publication date: January 1, 2015
    Applicant: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventor: Yoshifumi Matsuzaki
  • Publication number: 20150001666
    Abstract: The invention provides a Schottky diode structure. An exemplary embodiment of a Schottky diode structure includes a semiconductor substrate having an active region. A first well region having a first conductive type is formed in the active region. A first doped region having the first conductive type is formed on the first well region. A first electrode is disposed on the active region, covering the first doped region. A second electrode is disposed on the active region, contacting to the first well region. A gate structure is disposed on the first well region. A second doped region, having a second conductive type opposite to the first conductive type, and is formed on the first well region. The gate structure and the second doped region are disposed between the first and second electrodes.
    Type: Application
    Filed: June 26, 2013
    Publication date: January 1, 2015
    Inventor: Puo-Yu CHIANG
  • Publication number: 20140374842
    Abstract: A semiconductor device includes a drift region of a first doping type, a junction between the drift region and a device region, and a field electrode structure in the drift region. The field electrode structure includes a field electrode, a field electrode dielectric adjoining the field electrode, arranged between the field electrode and the drift region, and having an opening, and at least one of a field stop region and a generation region. The semiconductor device further includes a coupling region of a second doping type complementary to the first doping type. The coupling region is electrically coupled to the device region and coupled to the field electrode.
    Type: Application
    Filed: June 19, 2013
    Publication date: December 25, 2014
    Inventors: Hans Weber, Franz Hirler
  • Patent number: 8916946
    Abstract: The present invention is intended to provide a compact and simple optical semiconductor device that reduces crosstalk (leakage current) between light receiving elements. According to the present invention, since a back surface electrode is a mirror-like thin film, crosstalk to an adjacent light receiving element can be suppressed, thereby reducing a detection error of a light intensity. By disposing a patterned back surface electrode or by disposing an ohmic electrode at the bottom of an insulating film over the whole back surface, contact resistance on the back surface can be reduced. By using the optical semiconductor elements with a two-dimensional arrangement and by using a mirror-like thin film as the back surface electrode, crosstalk can be reduced. By accommodating the optical semiconductor elements in the housing in a highly hermetic condition, the optical semiconductor elements can be protected from an external environment.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: December 23, 2014
    Assignees: Nippon Telegraph and Telephone Corporation, NTT Electronics Corporation
    Inventors: Yoshiyuki Doi, Yoshifumi Muramoto, Takaharu Ohyama
  • Patent number: 8912622
    Abstract: A semiconductor device includes a first-conductivity-type semiconductor substrate, a first first-conductivity-type semiconductor layer, a second first-conductivity-type semiconductor layer, a second-conductivity-type bottom layer, a Schottky metal, and a cathode electrode. The first first-conductivity-type semiconductor layer is provided on the semiconductor substrate and has a lower first-conductivity-type impurity concentration than the semiconductor substrate. The second first-conductivity-type semiconductor layer is provided on the first first-conductivity-type semiconductor layer and has a higher first-conductivity-type impurity concentration than the first first-conductivity-type semiconductor layer. The Schottky metal is provided on the second first-conductivity-type semiconductor layer. The Schottky metal contacts with partly the first first-conductivity-type semiconductor layer.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: December 16, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masatoshi Arai, Takashi Tabuchi
  • Patent number: 8912621
    Abstract: During fabrication of a semiconductor device, a width of semiconductor mesas between isolation trenches in the semiconductor device is varied in different regions. In particular, the width of the mesas is smaller in a termination region of the semiconductor device than in a cell or active region. When an oxide layer is subsequently grown, the semiconductor mesas between the trenches in the termination region are at least partially consumed so that the semiconductor mesas in the cell region and the termination region have different heights. Therefore, a contact photomask is not needed to isolate the semiconductor mesas in the termination region. Furthermore, after a planarization operation (such as chemical mechanical polishing), the semiconductor device may have a planar top surface than if contact holes are created. This may allow the metal layer deposited on top of the cell region and the termination region to be flat.
    Type: Grant
    Filed: July 11, 2012
    Date of Patent: December 16, 2014
    Assignee: Diodes Incorporated
    Inventors: Chiao-Shun Chuang, Kai-Yu Chen, Cheng-Chin Huang