Of Silicon (epo) Patents (Class 257/E21.288)
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Patent number: 10325994Abstract: According to an exemplary embodiment, a method of forming a vertical structure with at least two barrier layers is provided. The method includes the following operations: providing a substrate; providing a vertical structure over the substrate; providing a first barrier layer over a source, a channel, and a drain of the vertical structure; and providing a second barrier layer over a gate and the drain of the vertical structure.Type: GrantFiled: April 23, 2018Date of Patent: June 18, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Tang Peng, Tai-Chun Huang, Teng-Chun Tsai, Cheng-Tung Lin, De-Fang Chen, Li-Ting Wang, Chien-Hsun Wang, Huan-Just Lin, Yung-Cheng Lu, Tze-Liang Lee
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Patent number: 9472395Abstract: In accordance with a method of manufacturing a semiconductor arrangement, a first trench is formed into a semiconductor body from a first side. An anodic oxide structure is formed at a bottom side of the first trench by immersing the semiconductor body in an electrolyte and applying an anodizing voltage between the semiconductor body and an electrode in contact with the electrolyte.Type: GrantFiled: January 12, 2015Date of Patent: October 18, 2016Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Ingo Muri, Iris Moder
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Patent number: 9035384Abstract: A semiconductor device includes a first fin-shaped silicon layer on a substrate and a second fin-shaped silicon layer on the substrate, each corresponding to the dimensions of a sidewall pattern around a dummy pattern. A silicide in upper portions of n-type and p-type diffusion layers in the upper portions of the first and second fin-shaped silicon layers. A metal gate line is connected to first and second metal gate electrodes and extends in a direction perpendicular to the first fin-shaped silicon layer and the second fin-shaped silicon layer. A first contact is in direct contact with the n-type diffusion layer in the upper portion of the first pillar-shaped silicon layer, and a second contact is in direct contact with the p-type diffusion layer in the upper portion of the second pillar-shaped silicon layer.Type: GrantFiled: May 29, 2014Date of Patent: May 19, 2015Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.Inventors: Fujio Masuoka, Hiroki Nakamura
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Patent number: 8916478Abstract: A CMOS SGT manufacturing method includes a step of forming first and second fin-shaped silicon layers on a substrate, forming a first insulating film around the first and second fin-shaped silicon layers, and forming first and second pillar-shaped silicon layers; a step of forming n-type diffusion layers; a step of forming p-type diffusion layers; a step of forming a gate insulating film and first and second polysilicon gate electrodes; a step of forming a silicide in upper portions of the diffusion layers in upper portions of the first and second fin-shaped silicon layers; and a step of depositing an interlayer insulating film, exposing the first and second polysilicon gate electrodes, etching the first and second polysilicon gate electrodes, and then depositing a metal to form first and second metal gate electrodes.Type: GrantFiled: October 29, 2013Date of Patent: December 23, 2014Assignee: Unisantis Electronics Singapore Pte. Ltd.Inventors: Fujio Masuoka, Hiroki Nakamura
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Patent number: 8772175Abstract: A CMOS SGT manufacturing method includes a step of forming first and second fin-shaped silicon layers on a substrate, forming a first insulating film around the first and second fin-shaped silicon layers, and forming first and second pillar-shaped silicon layers; a step of forming n-type diffusion layers; a step of forming p-type diffusion layers; a step of forming a gate insulating film and first and second polysilicon gate electrodes; a step of forming a silicide in upper portions of the diffusion layers in upper portions of the first and second fin-shaped silicon layers; and a step of depositing an interlayer insulating film, exposing the first and second polysilicon gate electrodes, etching the first and second polysilicon gate electrodes, and then depositing a metal to form first and second metal gate electrodes.Type: GrantFiled: December 4, 2012Date of Patent: July 8, 2014Assignee: Unisantis Electronics Singapore Pte. Ltd.Inventors: Fujio Masuoka, Hiroki Nakamura
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Patent number: 8753983Abstract: A method includes providing a silicon-containing die and providing a heat sink having a palladium layer over a first surface of the heat sink. A first gold layer is located over one of a first surface of the die or the palladium layer. The silicon-containing die is bonded to the heat sink, where bonding includes joining the silicon-containing die and the heat sink such that the first gold layer and the palladium layer are between the first surface of the silicon-containing die and the first surface of the heat sink, and heating the first gold layer and the palladium layer to form a die attach layer between the first surface of the silicon-containing die and the first surface of the heat sink, the die attach layer comprising a gold interface layer having a plurality of intermetallic precipitates, each of the plurality of intermetallic precipitates comprising palladium, gold, and silicon.Type: GrantFiled: January 7, 2010Date of Patent: June 17, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Jin-Wook Jang, Lalgudi M. Mahalingam, Audel A. Sanchez, Lakshminarayan Viswanathan
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Patent number: 8753947Abstract: The present invention provides a method of manufacturing an electronic apparatus, such as a lighting device having light emitting diodes (LEDs) or a power generating device having photovoltaic diodes. The exemplary method includes depositing a first conductive medium within a plurality of channels of a base to form a plurality of first conductors; depositing within the plurality of channels a plurality of semiconductor substrate particles suspended in a carrier medium; forming an ohmic contact between each semiconductor substrate particle and a first conductor; converting the semiconductor substrate particles into a plurality of semiconductor diodes; depositing a second conductive medium to form a plurality of second conductors coupled to the plurality of semiconductor diodes; and depositing or attaching a plurality of lenses suspended in a first polymer over the plurality of diodes. In various embodiments, the depositing, forming, coupling and converting steps are performed by or through a printing process.Type: GrantFiled: February 4, 2012Date of Patent: June 17, 2014Assignees: NthDegree Technologies Worldwide Inc, NASAInventors: William Johnstone Ray, Mark David Lowenthal, Neil O. Shotton, Richard A. Blanchard, Mark Allan Lewandowski, Kirk A. Fuller, Donald Odell Frazier
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Patent number: 8723340Abstract: The present invention relates to a process for the production of solar cells comprising a selective emitter using an improved etching-paste composition which has significantly improved selectivity for silicon layers.Type: GrantFiled: October 1, 2010Date of Patent: May 13, 2014Assignee: Merck Patent GmbHInventors: Werner Stockum, Oliver Doll, Ingo Koehler
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Patent number: 8685860Abstract: A semiconductor structure and a manufacturing method thereof are provided. The method includes the following steps. Firstly, a semiconductor substrate having an active surface and a back surface is provided. The active surface is opposite to the back surface, and the semiconductor substrate includes at least one grounding pad disposed on the active surface. Secondly, at least one through silicon via is formed through the semiconductor substrate from the back surface to the active surface thus exposing the grounding pad. Then, a conductive layer is formed on the back surface of the semiconductor substrate and filled into the through silicon via to electrically connect to the grounding pad and the semiconductor substrate.Type: GrantFiled: October 18, 2012Date of Patent: April 1, 2014Assignee: Ineffable Cellular Limited Liability CompanyInventor: Wen-Hsiung Chang
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Patent number: 8669187Abstract: A porous lift off layer facilitates removal of films from surfaces, such as semiconductors. A layer, with porosities typically larger than the film thickness is provided where no film is desired. The film is applied over the porous layer and also where it is desired. The porous material and the film are then removed from areas where film is not intended. The porous layer can be provided as a slurry, dried to open porosities, or fugitive particles within a field, which disassociate upon the application of heat or solvent. The film can be removed by etchant that enters through porosities that have arisen due to the film not bridging the spaces between solid portions. Etchant attacks both film surfaces. Particles may have diameters of four to ten times the film thickness. Particles may be silica, alumina and ceramics. Porous layers can be used in depressions or on flat surfaces.Type: GrantFiled: May 7, 2010Date of Patent: March 11, 2014Assignee: 1366 Technologies, Inc.Inventors: Emanuel M. Sachs, Andrew M. Gabor
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Patent number: 8551889Abstract: In a manufacture method for a photovoltaic module, a plurality of strips of resin adhesive film having a desired width and unwound from a single feeding reel is simultaneously pasted on a solar cell. In particular, the manufacture method is implemented by performing the steps of: unwinding a resin adhesive film sheet from a reel on which the resin adhesive film sheet is wound; splitting the unwound resin adhesive film into two or more film strips in correspondence to lengths of wiring material to bond; pasting the strips of resin adhesive film on an electrode of the solar cell; and placing the individual lengths of wiring material on the electrode of the solar cell having the plural strips of resin adhesive film pasted thereon and thermally setting the resin adhesive film by heating so as to fix together the electrode of the solar cell and the wiring material.Type: GrantFiled: April 25, 2012Date of Patent: October 8, 2013Assignee: Sanyo Electric Co., Ltd.Inventors: Yousuke Ishii, Shingo Okamoto
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Patent number: 8525289Abstract: Sophisticated gate electrode structures may be formed by providing a cap layer including a desired species that may diffuse into the gate dielectric material prior to performing a treatment for stabilizing the sensitive gate dielectric material. In this manner, complex high-k metal gate electrode structures may be formed on the basis of reduced temperatures and doses for a threshold adjusting species compared to conventional strategies. Moreover, a single metal-containing electrode material may be deposited for both types of transistors.Type: GrantFiled: April 12, 2012Date of Patent: September 3, 2013Assignee: GLOBALFOUNDRIES Inc.Inventors: Richard Carter, Martin Trentzsch, Sven Beyer, Rohit Pal
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Patent number: 8293640Abstract: A semiconductor structure and a manufacturing method thereof are provided. The method includes the following steps. Firstly, a semiconductor substrate having an active surface and a back surface is provided. The active surface is opposite to the back surface, and the semiconductor substrate includes at least one grounding pad disposed on the active surface. Secondly, at least one through silicon via is formed through the semiconductor substrate from the back surface to the active surface thus exposing the grounding pad. Then, a conductive layer is formed on the back surface of the semiconductor substrate and filled into the through silicon via to electrically connect to the grounding pad and the semiconductor substrate.Type: GrantFiled: May 6, 2010Date of Patent: October 23, 2012Assignee: Victory Gain Group CorporationInventor: Wen-Hsiung Chang
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Patent number: 8198192Abstract: Sophisticated gate electrode structures may be formed by providing a cap layer including a desired species that may diffuse into the gate dielectric material prior to performing a treatment for stabilizing the sensitive gate dielectric material. In this manner, complex high-k metal gate electrode structures may be formed on the basis of reduced temperatures and doses for a threshold adjusting species compared to conventional strategies. Moreover, a single metal-containing electrode material may be deposited for both types of transistors.Type: GrantFiled: May 7, 2010Date of Patent: June 12, 2012Assignee: GlobalFoundries Inc.Inventors: Richard Carter, Martin Trentzsch, Sven Beyer, Rohit Pal
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Patent number: 8187982Abstract: The invention permits a plurality of strips of resin adhesive film having a desired width and unwound from a single feeding reel to be simultaneously pasted on a solar cell. For this purpose, the invention comprises the steps of: unwinding a resin adhesive film sheet from a reel on which the resin adhesive film sheet is wound; splitting the unwound resin adhesive film into two or more film strips in correspondence to lengths of wiring material to bond; pasting the strips of resin adhesive film on an electrode of the solar cell; and placing the individual lengths of wiring material on the electrode of the solar cell having the plural strips of resin adhesive film pasted thereon and thermally setting the resin adhesive film by heating so as to fix together the electrode of the solar cell and the wiring material.Type: GrantFiled: March 22, 2010Date of Patent: May 29, 2012Assignee: Sanyo Electric Co., Ltd.Inventors: Yousuke Ishii, Shingo Okamoto
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Patent number: 8158531Abstract: This method of manufacturing a solar cell includes a step of forming a photoelectric conversion layer on a substrate with a plasma treatment apparatus including a first electrode provided in a treatment chamber, a second electrode and a gas supply source supplying gas into the treatment chamber. A recess portion having a bottom portion in the form of a curved surface is provided on another surface of the first electrode, while a plurality of through-holes are provided on the bottom portion of the recess portion.Type: GrantFiled: March 19, 2010Date of Patent: April 17, 2012Assignee: Sanyo Electric Co., Ltd.Inventor: Akinao Kitahara
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Patent number: 8133768Abstract: The present invention provides a method of manufacturing an electronic apparatus, such as a lighting device having light emitting diodes (LEDs) or a power generating device having photovoltaic diodes. The exemplary method includes depositing a first conductive medium within a plurality of channels of a base to form a plurality of first conductors; depositing within the plurality of channels a plurality of semiconductor substrate particles suspended in a carrier medium; forming an ohmic contact between each semiconductor substrate particle and a first conductor; converting the semiconductor substrate particles into a plurality of semiconductor diodes; depositing a second conductive medium to form a plurality of second conductors coupled to the plurality of semiconductor diodes; and depositing or attaching a plurality of lenses suspended in a first polymer over the plurality of diodes. In various embodiments, the depositing, forming, coupling and converting steps are performed by or through a printing process.Type: GrantFiled: September 15, 2009Date of Patent: March 13, 2012Assignees: NthDegree Technologies Worldwide Inc, The United States of America as represented by the Unites States National Aeronautics and Space AdministrationInventors: William Johnstone Ray, Mark D. Lowenthal, Neil O. Shotton, Richard A. Blanchard, Mark Allan Lewandowski, Kirk A. Fuller, Donald Odell Frazier
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Patent number: 7951725Abstract: A translucent solar cell and a manufacturing method thereof are provided. The translucent solar cell at least includes a substrate, a front electrode layer, a photoconductive layer, and a back electrode layer stacked in order. Therein, a plurality of apertures are formed on the front electrode layer. In addition, a plurality of light-transmissive regions are formed on the back electrode layer and further extended in a depth direction so as to reach the plurality of apertures on the front electrode layer. Thus, the projected area of each light-transmissive region is within and smaller than that of the corresponding aperture.Type: GrantFiled: September 14, 2009Date of Patent: May 31, 2011Assignee: Nexpower Technology Corp.Inventors: Chun-Hsiung Lu, Chien-Chung Bi
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Patent number: 7897471Abstract: A structure to diminish high voltage instability in a high voltage device when under stress includes an amorphous silicon layer over a field oxide on the high voltage device.Type: GrantFiled: June 19, 2008Date of Patent: March 1, 2011Assignee: Fairchild Semiconductor CorporationInventor: Jifa Hao
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Patent number: 7749868Abstract: A semiconductor substrate shaped to have a curved surface profile by anodization. Prior to being anodized, the substrate is finished with an anode pattern on its bottom surface so as to be consolidated into a unitary structure in which the anode pattern is precisely reproduced on the substrate. The anodization utilizes an electrolytic solution which etches out an oxidized portion as soon as it is formed as a result of the anodization, to thereby develop a porous layer in a pattern in match with the anode pattern. The anode pattern brings about an in-plane distribution of varying electric field intensity by which the porous layer develops into a shape complementary to a desired surface profile. Upon completion of the anodization, the curves surface is revealed on the surface of the substrate by etching out the porous layer and the anode pattern from the substrate.Type: GrantFiled: May 16, 2006Date of Patent: July 6, 2010Assignee: Panasonic Electric Works Co., Ltd.Inventors: Yoshiaki Honda, Takayuki Nishikawa