Inorganic Layer (epo) Patents (Class 257/E21.266)
- With perovskite structure (EPO) (Class 257/E21.272)
- Deposition of porous oxide or porous glassy oxide or oxide based porous glass (EPO) (Class 257/E21.273)
- Deposition from gas or vapor (EPO) (Class 257/E21.274)
- Deposition of boron or phosphorus doped silicon oxide, e.g., BSG, PSG, BPSG (EPO) (Class 257/E21.275)
- Deposition of halogen doped silicon oxide, e.g., fluorine doped silicon oxide (EPO) (Class 257/E21.276)
- Deposition of carbon doped silicon oxide, e.g., SiOC (EPO) (Class 257/E21.277)
- Deposition of silicon oxide (EPO) (Class 257/E21.278)
- Deposition of aluminum oxide (EPO) (Class 257/E21.28)
- Formed by oxidation (EPO) (Class 257/E21.282)