Abstract: In one embodiment of the invention, a semiconductor optical amplifier (SOA) in a laser ring is chosen to provide low polarization-dependent gain (PDG) and a booster semiconductor optical amplifier, outside of the ring, is chosen to provide high polarization-dependent gain. The use of a semiconductor optical amplifier with low polarization-dependent gain nearly eliminates variations in the polarization state of the light at the output of the laser, but does not eliminate the intra-sweep variations in the polarization state at the output of the laser, which can degrade the performance of the SS-OCT system.

Abstract: The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.

Abstract: A MEMS ultrasonic device has an array of PZT transducer elements and a cMUT structure bonded to the array of PZT transducer elements. The MEMS ultrasonic device can be adapted for ultrasonic imaging. The cMUT structure may serve as an active MEMS acoustic filter having at least two acoustic I/O ports to alter an input acoustic signal to an output acoustic signal. The first I/O port is adapted for interfacing with a medium, and the second I/O port for passing an acoustic signal to an acoustic transducer. An array of MEMS acoustic filters may be designed to function as an acoustic lens. Fabrication methods to make the same are also disclosed.

Abstract: Each one of resonators arranged in an N×M MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections and is mechanically coupled to at least one adjacent resonator of the array via a coupling section, each elongated beam section connected to another elongated beam section at a distal end via the curved/rounded sections forming a geometric shape (e.g., a rounded square), and the coupling sections disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at substantially the same frequency, in combined elongating/breathing and bending modes, i.e., beam sections exhibiting elongating/breathing-like and bending-like motions. One or more of the array structure's resonators may include one or more nodal points (i.e.

Abstract: A residual stress gradient in a structural layer is employed to form a resonator deflected out of plane when at rest and the resulting strain gradient is utilized in out-of-plane transduction. Use of the strain gradient enables out-of-plane (e.g., vertical) transduction without yield and reliability problems due to stiction (e.g., the sticking of the resonator to the substrate) when the resonator is driven by an electrode to dynamically deflect out-of-plane. In particular embodiments, out-of-plane transduction is utilized to achieve better transduction efficiency as compared to lateral resonator designs of similar linear dimensions (i.e. footprint) results in a lower motional resistance.

Abstract: An elastic wave filter device in which elastic wave filters and parallel resonators are provided on a piezoelectric substrate includes a plurality of ground ports. The elastic wave filters include input-side resonators and output-side resonators. The input-side resonators are connected between a reception input port and a first one of the ground ports. The output-side resonators are connected between reception output ports and the first ground port. The parallel resonators are connected in parallel to output lines and are connected to second and third ground ports.

Abstract: An acoustic wave device includes an interdigital transducer (IDT) electrode and a separate electrode facing the IDT electrode. The IDT electrode includes first and second comb-shaped electrode facing each other. The first comb-shaped electrode includes a first bus bar, first interdigitated electrode fingers, and first dummy electrode fingers. The second comb-shaped electrode includes a second bus bar second interdigitated electrode fingers interdigitated with the first interdigitated electrode fingers, second dummy electrode fingers facing the first interdigitated electrode fingers, weighted parts, and a non-weighted part. The weighted parts have electrodes at spaces between the second interdigitated electrode fingers and the second dummy electrode fingers. In the non-weighted part, there is no electrode at a space out of the spaces which is closest to the separate electrode in the non-interdigitated region.

Abstract: Micro-Electro-Mechanical Systems (MEMS) resonator designs having support structures that minimize or substantially reduce anchor losses, thereby improving a quality factor (Q) of the MEMS resonators, are provided. In general, a MEMS resonator includes a resonator body connected to anchors via support structures. The anchors are connected to or are part of a substrate on which the MEMS resonator is formed. The support structures operate to support the resonator body in free space to enable vibration. The support structures are designed to minimize or substantially reduce energy loss through the anchors into the substrate.

Abstract: A MEMS resonator includes a main movable beam, at least one sub movable beam, and at least one exciting electrode. The main movable beam is electrically insulated from a substrate and fixed to at least one fixed end, the sub movable beam is formed to extend from the main movable beam, and the exciting electrode is provided to be close to the sub movable beam. The sub movable beam is excited by an electrostatic force to oscillate by exciting the exciting electrode using an alternating-current signal, such that the MEMS resonator resonates with at least one of a fundamental resonant frequency and harmonic frequencies thereof. The resonant frequency is changed by changing at least one of number of the at least one exciting electrode and a position of the exciting electrode relative to the sub movable beam.

Abstract: Compensation of a signal using resonators as well as related methods and devices are described. Some embodiments include methods and devices for performing frequency compensation on a signal.

Abstract: Method of manufacturing a MEMS device integrated in a silicon substrate. In parallel to the manufacturing of the MEMS device passive components as trench capacitors with a high capacitance density can be processed. The method is especially suited for MEMS resonators with resonance frequencies in the range of 10 MHz.

Abstract: Under one aspect, a resonator 400 includes a nanotube element 410 including a non-woven fabric of unaligned nanotubes and having a thickness, and a support structure 404 defining a gap 406 over which the nanotube element 410 is suspended, the thickness of the nanotube element 410 and the length of the gap 406 being selected to provide a pre-specified resonance frequency for the resonator 400 The resonator 400 also includes a conductive element 412 in electrical contact with the nanotube element 410, a drive electrode 408 in spaced relation to the nanotube element 410, and power logic in electrical contact with die at least one drive electrode 408 The power logic provides a series of electrical pulses at a frequency selected to be about the same as the pre-specified resonance frequency of the resonator 400 to the drive electrode 408 during operation of the resonator 400, such that the nanotube element 410 responds to the series of electrical pulses applied to the drive electrode 408 by making a series of mecha

Abstract: A resonator, an elastic wave transmission element and a method for fabricating the transmission element are provided. The elastic wave transmission element has a first side and a second side. The elastic wave transmission element includes a plurality of structures sequentially arranged along a direction from the first side toward the second side. Each of the structures has a different defect which is different to each other. The impedance of the structures decreases gradually along the direction. As such, the elastic wave transmission element has an impedance match function.

Abstract: A resonant filter including a matrix of n×m resonators of N/MEMS type, each resonator including an actuating mechanism and a detection mechanism. An input of the filter, configured to receive an electrical input signal, is electrically connected to the resonator actuating mechanism. The outputs of the resonator detecting mechanism are electrically connected together and to an output of the filter, such that the signal to be obtained as an output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.

Abstract: A resonator includes a resonating body and at least one periodic structure having one end connected to the resonating body. The periodic structure includes at least two basic structure units with duplicated configuration. The periodic structure blocks wave propagation caused by the vibration of the resonating body. The resonating body has a resonance frequency f0. The periodic structure has a band gap characteristic or a deaf band characteristic within a particular frequency range, and the resonance frequency f0 falls within the particular frequency range of the periodic structure.

Abstract: A microelectromechanical system (MEMS) resonator or filter including a first conductive layer, one or more electrodes patterned in the first conductive layer which serve the function of signal input, signal output, or DC biasing, or some combination of these functions, an evacuated cavity, a resonating member comprised of a lower conductive layer and an upper structural layer, a first air gap between the resonating member and one or more of the electrodes, an upper membrane covering the cavity, and a second air gap between the resonating member and the upper membrane.

Abstract: To provide a branching filter enabling sharing of the same mounting substrate between the normal arrangement and the mirror arrangement that is symmetric to the normal arrangement of an electrode group formed on a main surface of a piezoelectric substrate and a method for manufacturing the same. The branching filter 1 has the piezoelectric substrate 20 having the main surface on which there are formed a transmission filter 26, which includes an input electrode 22 and an antenna electrode 23, and a reception filter 27, which includes an output electrodes 24, 25 and the antenna electrode 23.

Abstract: A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.

Abstract: There is provided a magnonic-crystal spin wave device capable of controlling a frequency of a spin wave. The magnonic-crystal spin wave device according to the invention includes a spin wave waveguide made of magnetic material, and the spin wave waveguide guides the spin wave so as to propagate in one direction, and includes a magnonic crystal part which has a cross-section orthogonal to the direction, and at least one of a shape, area size, and center line of the cross-section periodically changes in the direction. In accordance with the invention, it is possible to easily control the frequency of the spin wave using the spin wave waveguide made of single magnetic material.

Abstract: A device comprising a nanotube configured as a resonator, a source electrode, a gate electrode, a drain electrode and at least one impeding element, wherein the at least one impeding element is configured to minimize energy loss due to a contact resistance between at least the source electrode and the nanotube.

Abstract: A micromechanical resonator operable in a bulk acoustic mode includes a resonator apparatus suspended over a substrate by a plurality of pairs of anchors. The resonator apparatus includes a conductive metal layer, a piezoelectric layer on the conductive metal layer and a plurality of interdigitated electrodes on the piezoelectric layer. The interdigitated electrodes are configured so that a total number of electrode fingers in the plurality of interdigitated electrodes is greater than a total number of the plurality of pairs of anchors.

Abstract: A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.

Abstract: A tunable nanoscale resonator has potential applications in precise mass, force, position, and frequency measurement. One embodiment of this device consists of a specially prepared multiwalled carbon nanotube (MWNT) suspended between a metal electrode and a mobile, piezoelectrically controlled contact. By harnessing a unique telescoping ability of MWNTs, one may controllably slide an inner nanotube core from its outer nanotube casing, effectively changing its length and thereby changing the tuning of its resonance frequency. Resonant energy transfer may be used with a nanoresonator to detect molecules at a specific target oscillation frequency, without the use of a chemical label, to provide label-free chemical species detection.

Abstract: A resonator system such as a microresonator system and a method of making same are provided. In at least one embodiment, a mechanical circuit-based approach for boosting the Q of a vibrating micromechanical resonator is disclosed. A low Q resonator is embedded into a mechanically-coupled array of much higher Q resonators to raise the functional Q of the composite resonator by a factor approximately equal to the number of resonators in the array. The availability of such a circuit-based Q-enhancement technique has far reaching implications, especially considering the possibility of raising the functional Q of a piezoelectric resonator by merely mechanically coupling it to an array of much higher Q capacitively-transduced ones to simultaneously obtain the most attractive characteristics of both technologies: low impedance from the piezo-device and high-Q from the capacitive ones. Furthermore, the manufacturing repeatability of such micromechanical resonator-based products is enhanced.

Abstract: A MEMS array structure including a plurality of bulk mode resonators may include at least one resonator coupling section disposed between the plurality of bulk mode resonators. The plurality of resonators may oscillate by expansion and/or contraction in at least one direction/dimension. The MEMS array structure may include a plurality of sense electrodes and drive electrodes spaced apart from the plurality of bulk mode resonators by a gap. The MEMS array structure may further include at least one anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.

Abstract: A resonator and a filter that can be miniaturized and highly integrated are provided. In the invention, a resonator wherein parts of resonators, support sections, and joint sections are mutually shared is formed. The mutual configuration is selectively switched as required and a large number of frequencies can be selected in the same filter unit. The resonators, the support sections, and the joint sections different in size and shape are used in combination, whereby a filter unit having a large number of selective frequencies is provided.

Abstract: An embodiment provides electrical energy from a source on one side of a medium to a load on the other side of the medium, the embodiment including a first piezoelectric to generate acoustic energy in response to electrical energy from the source, and a second piezoelectric to convert the received acoustic energy to electrical energy used by the load. Other embodiments are described and claimed.

Abstract: A method and apparatus for recovering at least one signal of interest are provided. The method includes receiving an overall signal, the overall signal including the at least one signal of interest and a plurality of other signals, identifying at least one of the strongest components of the plurality of other signals, attenuating, using at least one MEMS resonator, any of the components identified by the identifying, wherein the overall signal will be modified to include the at least one signal of interest, attenuated versions of the components identified by the identifying, and the remaining portions of the plurality of other signals that were not subject to the attenuating, and recovering, after the attenuating, the at least one signal of interest.

Abstract: An electronic device for generating an electric oscillating signal is described based on a micro-electromechanical system (MEMS). The electronic device typically comprises a substrate a moveable element which is moveable with respect to the substrate and an actuating means and a sensor. The actuating means is used to induce vibration of the moveable element and comprises two inductive elements, a first one provided fixed to the substrate and a second one provided fixed to the moveable element. The induced vibration of the moveable element is sensed using the sensor and converted into an electric oscillating signal.

Abstract: The invention concerns a method for adjusting the operating gap of two mechanical elements of a substantially planar mechanical structure obtained by micro-etching. The method consists in attributing (A) to one of the elements (E) a fixed reference position (RF) in the direction of the residual gap separating said elements; connecting (C) the other element (OE) to the fixed reference position (RF) by an elastic link (S) and installing (D) between the fixed reference position (RF) and the other element (OE) at least a stop block defining an abutting gap, maximum displacement amplitude of the other element; subjecting (DE) the other element (OE) to a displacement antagonistic to the elastic link (S) up to the abutting position constituting the operating position, the residual gap being reduced to the difference between residual gap and abutting gap and less than the resolution of the micro-etching process. The invention is applicable to electromechanical resonators.

Abstract: A high frequency device including an electrostatic type vibrator, a pad, and a circuit. The electrostatic type vibrator is operable via a DC bias voltage. The pad is configured to supply the DC bias voltage. The circuit is positioned electrically between the pad and the vibrator. The circuit is configured to stabilize the DC bias voltage. The circuit and the high frequency signal device are on a common substrate.

Abstract: The invention relates to a thermocompensated mechanical resonator including a strip whose core, which is of polygonal section, includes single crystal silicon. According to the invention, one or a number of faces of the core has a coating for making the resonator less sensitive to temperature variations. The invention concerns the field of timepieces.

Abstract: The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element comprising a semiconducting material, and at least one trench formed in the resonator element and filled with a material comprising oxide. Further embodiments comprise additional devices, systems and methods.

Abstract: A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base, a spring layer placed over the base, and a mass layer connected to the spring layer through a spring-mass connector. The base includes a first electrode. The spring layer or the mass layer includes a second electrode. The base and the spring layer form a gap therebetween and are connected through a spring anchor. The mass layer provides a substantially independent spring mass contribution to the spring model without affecting the equivalent spring constant. The mass layer also functions as a surface plate interfacing with the medium to improve transducing performance. Fabrication methods to make the same are also disclosed.

Abstract: A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the density of each of the second plurality of regions differing from the density of each of the first plurality of regions. The second plurality of regions may be disposed in a non-uniform arrangement. The oscillation may include a first state in which the resonator mass is contracted, at least in part, in a first and/or a second direction, and expanded, at least in part, in a third and/or a fourth direction, the second direction being opposite the first direction, the fourth direction being opposite the third direction.

Abstract: A resonator that can alleviate restrictions in usage and design due to the bias voltage dependency and for which usage and design conditions can be easily determined, includes a movable electrode opposite and sandwiching the fixed electrode, and an extension of the fixed electrode or the movable electrode that extends along a plane crossing the opposite surfaces of the fixed electrode and the movable electrode. With being displaced vertically relative to the fixed electrode, the movable electrode is vibrated.

Abstract: [Subject] An object of the present invention is to provide a resonator readily achieving a high resonance frequency without extreme downsizing and allowing for a high Q factor. [Solving Means] A resonator includes: a substrate serving as a base; a first beam having opposite ends fixed to the substrate via fixed connection portions, and having a vibration receiving location for providing linear reciprocating motion in a direction perpendicular to the longitudinal direction thereof; and second beams, branching toward one side from a plurality of branching locations different from the vibration receiving location in the first beam, for generating torsional vibration in accordance with the linear reciprocating motion. The resonator further includes a plurality of third beam, extending from the plurality of branching locations to a side opposite to the plurality of second beams, for generating torsional vibration.

Abstract: A method for forming a resonator including a resonant element, the resonant element being at least partly formed of a body at least partly formed of a first conductive material, the body including open cavities, this method including the steps of measuring the resonator frequency; and at least partially filling said cavities.

Abstract: A MEMS resonator is provided a main movable beam, at least one sub movable beam, and at least one exciting electrode. The main movable beam is electrically insulated from a substrate and fixed to at least one fixed end, the sub movable beam is formed to extend from the main movable beam. The exciting electrode is provided to be close to the sub movable beam. The sub movable beam is excited by an electrostatic force to oscillate by exciting the exciting electrode using an alternating-current signal, such that the MEMS resonator resonates with at least one of a fundamental resonant frequency and harmonic frequencies thereof. The resonant frequency is changed by changing at least one of number of the at least one exciting electrode and a position of the exciting electrode relative to the sub movable beam.

Abstract: An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. An electrical filter comprises an acoustic resonator.

Abstract: A micro mechanical resonator includes a high dielectric substrate, and a torsional vibrator having one end that is a fixed end fixed to high dielectric substrate, and having the other end that is a free end. The torsional vibrator has a substantially circular plate-like shape, has a lower surface serving as the fixed end fixed to the substrate, and has an upper surface serving as the free end that is not fixed. The torsional vibrator torsionally vibrates relative to an axis (torsional vibration axis) connecting the center of the circle of the end surface of the fixed end to the center of the circle of the end surface of the free end. In this way, a micro mechanical resonator can be implemented which can be manufactured readily and achieves a high Q factor.

Abstract: Disclosed are micromechanical resonators having features that compensate for process variations and provide improved inherent temperature stability. Exemplary resonators may comprise comb drive resonators or parallel-plate drive resonators. The resonators comprise a (silicon-on-insulator) substrate with resonator apparatus formed therein. The resonator apparatus has one or more anchors connected to the substrate, at least one excitation/sense port that is electrically insulated from the substrate, and a resonator. The resonator comprises one or more flexural members connected to the one or more anchors that are separated from the substrate and separated from the excitation/sense port by gaps. A mass is coupled to flexural members, is separated from the substrate, and comprises a grid. Process compensation is achieved using a resonator mass in the form of a grid of lines that form holes or lines through the mass, wherein widths of lines of the grid are approximately ? the width of the flexural members.

Abstract: Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable plate located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

Abstract: Methods and apparatus for temperature control of devices and mechanical resonating structures are described. A mechanical resonating structure may include a heating element and a temperature sensor. The temperature sensor may sense the temperature of the mechanical resonating structure, and the heating element may be adjusted to provide a desired level of heating. Optionally, additional heating elements and/or temperature sensors may be included.

Abstract: System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.

Abstract: Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on the same substrate to operate at different operating frequencies. Exemplary micromechanical resonator apparatus includes a support substrate and suspended micromechanical resonator apparatus having a resonance frequency. In one embodiment, the suspended micromechanical resonator apparatus comprises a device substrate that is suspended from and attached to the support substrate, a piezoelectric layer formed on the suspended device substrate, and a plurality of interdigitated upper electrodes formed on the piezoelectric layer. In another embodiment, the suspended micromechanical resonator apparatus comprises a device substrate that is suspended from and attached to the support substrate, a lower electrode formed on the suspended device substrate, a piezoelectric layer formed on the lower electrode, and a plurality of interdigitated upper electrodes formed on the piezoelectric layer.

Abstract: An array of micromechanical oscillators have different resonant frequencies based on their geometries. In one embodiment, a micromechanical oscillator has a resonant frequency defined by an effective spring constant that is modified by application of heat. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated to modify the resonant frequency (or equivalently the spring constant or stiffness) of the disc. Continuous control of the output phase and frequency may be achieved when the oscillator becomes synchronized with an imposed sinusoidal force of close frequency. The oscillator frequency can be detuned to produce an easily controlled phase differential between the injected signal and the oscillator feedback. A phased array radar may be produced using independent phase controllable oscillators.

Abstract: A resonator includes a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a plurality of resonant modes by symmetrically deforming about the plurality of axes of symmetry.

Abstract: The invention relates to a MEMS resonator having at least one mode shape comprising: a substrate (2) having a surface (12), and a resonator structure (1), wherein the resonator structure (1) is part of the substrate (2), characterized in that the resonator structure (1) is defined by a first closed trench (3) and a second closed trench (3), the first trench (3) being located inside the second trench (3) so as to form a tube structure (1) inside the substrate (2), and the resonator structure (1) being released from the substrate (2) only in directions parallel to the surface (12). The invention further relates to a method of manufacturing such a MEMS resonator.

Abstract: Disclosed herein are devices and methods for generating a modulated signal with a MEMS resonator, or microresonator. A bias, or polarization, voltage for activating the MEMS resonator is determined by a control signal, or input voltage, indicative of information to be carried by the modulated signal. In some cases, the MEMS resonator may be driven by an oscillator circuit to facilitate operation of the MEMS resonator. The control signal may include an amplitude modulated voltage or a digital data stream such that output signals of the MEMS resonator or oscillator circuit may carry information via frequency modulation, such as frequency shift keying modulation.