Abstract: A LiDAR-based 3-D point cloud measuring system includes a base, a housing, a plurality of photon transmitters and photon detectors contained within the housing, a rotary motor that rotates the housing about the base, and a communication component that allows transmission of signals generated by the photon detectors to external components. In several versions of the invention, the system includes a vertically oriented motherboard, thin circuit boards such as ceramic hybrids for selectively mounting emitters and detectors, a conjoined D-shaped lens array, and preferred firing sequences.

Abstract: The subject matter disclosed herein relates to determining a distance from a mobile device to a remote object or a size of the remote object.

Abstract: An optical system is presented for use in measuring in patterned structures having vias. The optical system comprises an illumination channel for propagating illuminated light onto the structure being measured; a detection channel for collecting light returned from the illuminated structure to a detection unit; and an attenuation assembly accommodated in the illumination and detection channels and being configured and operable for selectively attenuating light propagating along the detection channel, the attenuation creating a predetermined condition for the selectively attenuated light, said predetermined condition being defined by a predetermined ratio between a first light portion corresponding to a dark field condition and a second light portion corresponding to a bright field condition in said selectively attenuated light, detected selectively attenuated light being therefore indicative of at least one parameter of the via being illuminated.

Abstract: A method of inspecting a substrate is disclosed. The method of inspecting a substrate, comprises: obtaining phase data per projecting part with regard to a substrate, by projecting pattern beam onto the substrate having a target object formed thereon through a plurality of projecting parts in sequence; obtaining height data per projecting part with regard to the substrate by using the phase data per the projecting part; compensating tilt of the height data by using the height data per projecting part; modifying the tilt-compensated height data per projecting part; and obtaining integrated height data by using the modified height data.

Abstract: A method of measuring a surface structure of a display device is provided. The display device includes first and second substrates, first and second patterned light-shielding layers, and first and second pixel units. The first patterned light-shielding layer disposed on a surface of the first substrate includes first openings. The second patterned light-shielding layer disposed on the surface of the first substrate includes second openings. The first pixel unit includes first and second protrusions. The first protrusion correspondingly covers the first openings and a portion of the first patterned light-shielding layer. The second protrusion is disposed on and directly contacted with the first and second patterned light-shielding layers. The second pixel unit includes a third protrusion correspondingly covering the second openings and a portion of the second patterned light-shielding layer, wherein sizes of the second openings are smaller than sizes of the first openings.

Abstract: A size inspection device includes an inspection frame, a transferring belt, a positioning assembly, a positioning assembly, an inspection assembly, a suction assembly, and a controller. The transferring belt is slidably mounted on the inspection frame. The positioning assembly, the inspection assembly, the suction assembly, and the controller are mounted on the inspection frame. The controller is electrically connected to the inspection assembly and the suction assembly. When the positioning assembly positions the workpiece on the transferring belt below the inspection assembly, the inspection assembly obtains size value of the workpiece and transfers it to the controller, the controller compares the size value to a preset standard range to determine whether or not the workpiece has passed quality inspection, and controls the suction assembly to handle the workpiece which is not of passing quality away from the transferring belt.

Abstract: A display panel includes a plurality of pixel areas and at least one inspection area. An incident light is irradiated onto an inspection pattern disposed in the inspection area and a reflection light reflected by the inspection pattern is detected. An optical critical dimension of the inspection pattern is calculated from the reflection light, and a dimension of a pixel pattern disposed in each pixel area is calculated from the optical critical dimension of the inspection pattern. Accordingly, the dimension of the pixel pattern may be indirectly measured from the inspection pattern.

Abstract: A measuring apparatus for automatically measuring the height, the dimensions of the inner and outer surfaces, and the shape of a cylindrically-shaped object. The measuring apparatus includes a measuring head vertically moving along a positioning guide supported by a support post integral with a measuring table, a height displacement measuring device, which comprises a laser distance meter provided on the measuring table, and an arithmetic processing unit. The measurement starts as the measuring head is raised by a weight from a measuring start position of the measuring table. The inner and outer surfaces of a tire are measured based on the measurements by an inner surface measuring device provided with three laser distance meters mounted to the measuring head and an outer surface measuring device having a laser distance meter and the displacement change measurement of the measuring head by the height displacement measuring device.

Abstract: The attenuation and other optical properties of a medium are exploited to measure a thickness of the medium between a sensor and a target surface. Disclosed herein are various mediums, arrangements of hardware, and processing techniques that can be used to capture these thickness measurements and obtain dynamic three-dimensional images of the target surface in a variety of imaging contexts. This includes general techniques for imaging interior/concave surfaces as well as exterior/convex surfaces, as well as specific adaptations of these techniques to imaging ear canals, human dentition, and so forth.

Abstract: The present invention provides an inexpensive range image sensor and etc. A range image sensor comprises diffractive optical elements and on which are formed diffractive gratings that change a traveling direction of incident parallel light so that in a coordinate space defined by a xyz-axis, the incident parallel light is split into split beams, and angles formed by the x-axis and line segments determined by projected light spots formed by the split beams on a predetermined projection plane intersecting the z-axis become predetermined angles. Furthermore, the range image sensor is provided with a distance determining unit for determining distances to the projected light spots on the basis of the tilting with respect to the x-axis of the line segments determined by the projected light spots formed on the object by the split beams.

Abstract: Disclosed is apparatus for distinguishing between ground and an obstacle for autonomous mobile vehicle, comprising an upper 2D laser radar 1, a lower 2D laser radar 2, and a processing unit 10, the processing unit 10 comprising a distance data receiving part 11, an inclination calculating part 12, a ground and obstacle determining part 13, and a transmitting part. Also disclosed is a method for distinguishing between ground and an obstacle for autonomous mobile vehicle by using the apparatus for distinguishing between ground and an obstacle for autonomous mobile vehicle of claim 1, in which the detected object is determined as an obstacle when the actual inclination (g) of the detected object is larger than the reference inclination, and as ground when the actual inclination (g) of the detected object is smaller than the reference inclination.

Abstract: Methods and systems for achieving a small measurement box size specification across a set of metrology system parameters are presented. The small measurement box size specification is achieved by selectively constraining one or more of the sets of system parameters during measurement. A subset of measurement system parameters such as illumination wavelength, polarization state, polar angle of incidence, and azimuth angle of incidence is selected for measurement to maintain a smaller measurement box size than would otherwise be achievable if the full, available range of measurement system parameters were utilized in the measurement. In this manner, control of one or more factors that affect measurement box size is realized by constraining the measurement system parameter space. In addition, a subset of measurement signals may be selected to maintain a smaller measurement box size than would otherwise be achievable if all available measurement signals were utilized in the measurement.

Abstract: The present invention relates to a method for measuring cracks remotely and the device thereof. First, multiple laser spots with known a shape are projected onto a remote wall and beside a crack. Then, by using geometric calculations, the relative coordinates of the laser spots on the wail and the real distance can be given and used as the reference length of the crack. Next, a camera is used for taking a picture of the remote crack along with the laser spots; the image identification technology is used for calculating the relevant parameters of the crack. Thereby, to acquire the parameters of the crack, a user needs not to be present at the site for measuring at a short distance or placing a reference object, and thus providing safety and convenience.

Abstract: A division line depicted on a road is detected. A beam-formed electromagnetic wave is repetitively at intervals transmitted toward the road viewed from a vehicle to scan in the vehicle width direction. Each beam-formed electromagnetic wave is radiated to a radiation area on the road, and the radiation areas made by transmitting the beam-formed electromagnetic wave a plurality of times virtually produces a scan area on the road. Every beam-formed electromagnetic wave, distance data indicative of a distance between a division line on the road and the vehicle is measured based on information about a reflected electromagnetic wave. The distance data measured is received to detect the division line based on characteristics of changes in a sequence of the distance data produced by mapping the received distance data in a scanning order of the beam-formed electromagnetic wave.

Abstract: An optical signal transmission structure of a laser distance measuring device, comprising: a laser pipe, suspended right above a center of a rotation disk, to emit laser beam downward; a light projector module, provided with at least two reflection plates, to reflect laser beam of said laser pipe onto a target; a lens, disposed on said rotation disk, to receive laser beam reflected from said target; and a circuit board, disposed on a lower side of said rotation disk, so laser beam received by said lens is transmitted onto a light sensor element on said circuit board, to produce at least a photoelectric signal, so that circuits on said circuit board determine distance to said target based on said photoelectric signal.

Abstract: An apparatus and method for recognizing presence of an object is provided, the apparatus and method are mounted on or implemented a vehicle. In the apparatus and method, by scanning a beam-shaped electromagnetic wave, data showing reflection intensities of reflected waves and distances between the vehicle and objects outside the vehicle are obtained. Based on the detected data, characteristics presented by frequency distributions of the distances and intensity frequency distributions of the refection intensities obtained in multiple rows in a field of view in the height direction of the vehicle. The characteristics depend on an angle of the electromagnetic wave to a road on which the vehicle travels. It is determined that the characteristics are obtained from the road when the characteristics meet predetermined requirements.

Abstract: A method of decoding hierarchically orthogonal structured light and a 3-D depth measurement system using the same include a step of detecting boundary lines encoded at an identical position between layers and a boundary line inheritance step of converting the detected boundary lines into identical boundary lines. The present invention relates to a method of precisely searching for the boundary line of a pattern of radiated structured light based on the real coordinate system of an image plane, and an object thereof is to search for a boundary line irrespective of the reflection of a surface of an object, clearly classify a true boundary line and a false boundary line in a poor radiance environment, and increase the accuracy of a boundary line placed in another layer through inheritance.

Abstract: Methods, apparatuses, systems and computer program products for measuring spatial characteristics of an inkjet printer are disclosed. Group of marks of a first predetermined pattern are printed on a print medium using a first group of nozzles. Groups of marks of a second predetermined pattern are printed using a second group of nozzles. A region of overlap of the printed groups of marks is formed. At least a portion of the print medium having printed groups of marks is imaged. From the region of overlap, first and second groups of marks from the first and second printed patterns are selected. For each group of marks, a position representative of that group is determined. An offset for measuring spatial characteristics of the printer between the first and second printed patterns is determined dependent upon the representative position of each of the first and second groups of marks.

Abstract: A portable distance measuring device that works by spanning separately targeted endpoints is described. The device contains a laser distance measuring component and sensing components that track changes in position and orientation of the device, such as accelerometers and gyroscopes. Distance is measured by pointing the laser at an endpoint and measuring the distance to it. Once this measurement is confirmed, the device can be moved to a different vantage location to measure a second endpoint with the laser. The orientation and position of the device for the second distance measurement relative to the first measurement are calculated by the position and orientation sensors. Together these values are sufficient to calculate the distance spanning the endpoints. This calculation is performed by a computer contained in the device and the distance displayed to the user.

Abstract: The present invention provides a small diffractive optical element that emits twisted beam, a small distance measuring apparatus and a distance measuring method using a small diffractive optical element. A diffractive optical element includes a first diffractive grating that twists, in a coordinate space defined by an x-axis, a y-axis and a z-axis, parallel light forming a flat plane parallel to the x-axis and going advance in the z-axis direction so that an angle of the flat plane relative to the x-axis becomes a predetermined angle at a location where the parallel light traveling in the z-axis by a predetermined distance reaches.

Abstract: Containerized systems are provided. In one embodiment, a containerized system includes a moveable three-dimensional container, a first generator, a second generator, and a scanner. The first generator is located within the container, and the second generator is located outside of the container. The scanner is mechanically supported by the container and transmits waves received from the first and the second generators. The containerized system optionally includes one or more rails connected to the outside of the container, and the scanner moves along the one or more rails. The containerized system may also include a multi-axes arm that positions the scanner and that is mechanically supported by the container. Furthermore, the containerized system may include an interferometer, an electronics rack, and/or an air conditioning unit.

Abstract: The invention provides a measuring instrument, comprising a telescope, a distance measuring unit, an image pickup unit, angle detecting units for detecting a vertical and horizontal angle in the sighting direction, an automatic sighting unit, an arithmetic unit, and a storage unit. The arithmetic unit makes the telescope rotate in horizontal and vertical direction and perform scanning over a predetermined range so that a plurality of objects to be measured are included and makes the image pickup unit acquire digital images during the scanning process. The arithmetic unit detects the objects in the digital images, calculates a vertical and horizontal angle of the objects based on the angle detector and a deviation of each of the objects from sighting axis, associates the calculated angles with each of the objects, and makes the storage unit store the vertical and horizontal angles of the objects as target values for automatic sighting.

Abstract: A method of dynamically adjusting an angular speed of a light beam emitted by a scanner in measuring three-dimensional (3D) coordinates of a surface or of dynamically adjusting an acquisition rate of 3D coordinates of a surface.

Abstract: High-speed method and system for optically measuring a geometric dimension of manufactured parts such as cartridge cases are provided. The parts are consecutively transferred so that the parts travel along a first path which extends to a vision station at which each part has a predetermined position and orientation for optical measuring. An annular, interior side surface of a part which at least partially defines a pocket such as a primer pocket is illuminated when the part is located at the vision station to generate corresponding reflected radiation signals. An optical image of the illuminated interior side surface is formed from the reflected radiation signals at a single image plane. The optical image is detected at the image plane and the detected optical image is processed to determine the geometric dimension which may be primer product diameter.

Abstract: In one aspect, a computerized method to automatically determine thresholds includes receiving data generated from a Geiger-mode avalanche photodiode (GmAPD) laser detecting and ranging (LADAR) sensor of a scene, determining an overall threshold value for the scene using a binomial distribution and determining post threshold values for each x-y position in the scene. The computerized method also includes, for each x-y position, using a maximum value of the post threshold values and the overall threshold value to filter the data from the scene.

Abstract: A method of measuring a surface structure of a display device is provided. The display device includes first and second substrates, first and second patterned light-shielding layers, and first and second pixel units. The first patterned light-shielding layer disposed on a surface of the first substrate includes first openings. The second patterned light-shielding layer disposed on the surface of the first substrate includes second openings. The first pixel unit includes first and second protrusions. The first protrusion correspondingly covers the first openings and a portion of the first patterned light-shielding layer. The second protrusion is disposed on and directly contacted with the first and second patterned light-shielding layers. The second pixel unit includes a third protrusion correspondingly covering the second openings and a portion of the second patterned light-shielding layer, wherein sizes of the second openings are smaller than sizes of the first openings.

Abstract: A laser scanner optically scans and measures an environment, the laser scanner having a base resting in the stationary reference system of the laser scanner, a measuring head rotatable about a vertical axis relative to the base, a measuring head rotatable relative to the base about a vertical axis, a motor supported in the measuring head, the motor having a motor shaft and a gear which, when driven by the motor by the motor shaft, turns the measuring head relative to the base, the gear being configured as a planetary gear.

Abstract: The system includes a rotary turret platform for aiming of a high power laser beam. The system further includes a turret payload device coupled to the rotary turret platform. The system further includes an off-axis telescope coupled to the turret payload, having an articulated secondary mirror for correcting optical aberrations, and configured to reflect the high power laser beam to a target through a first of at least two conformal windows. The system further includes an illuminator beam device configured to actively illuminating the target to generate a return aberrated wavefront through the first of the at least two conformal windows. The system further includes a coarse tracker coupled to the turret payload, positioned parallel to and on an axis of revolution of the off-axis telescope, and configured to detect, acquire, and track the target through the second of the at least two conformal windows.

Abstract: This concerns in part the invention disclosed by co-pending application, particularly to robust determination of features in projection patterns. Disclosed are novel methods and apparatus for obtaining range frame coordinates in moving scenes, where optical radiation is projected onto a scene in the form of dots and strips, where reflected radiation is picked up by a camera and range coordinates calculated thereof.

Abstract: The present invention relates to an apparatus and a method for measuring the dimensions of 1-dimensional and 0-dimensional nanostructures on semiconductor substrates in real-time during epitaxial growth. The method includes either assigning a pre-calculated 3D-model from a data base to the sample or calculating a 3D-model of the sample using the measured optical reflectances of the plurality of different measuring positions of the sample, where calculation or pre-calculation of the 3D-model includes calculation of the interference effects of light reflected from the front and back interfaces of the nano-structure and calculation of the interference effects due to superposition of neighbouring wave-fronts reflected from the nano-structure area and wave-fronts reflected from the substrate area between the nano-structures.

Abstract: A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.

Abstract: An optical system for measuring an irregularly shaped object includes a dimensioning station having a base, a first wall extending from the base, and a second wall extending from the base. A collimated light is passed from each of first and second collimated light sources arranged generally parallel to the base, illuminating the first and second walls and defining first and second shadows, respectively. A camera is arranged to obtain image data representing each of the first and second shadows. The system is configured to collect the image data for determining at least one dimension of an object from each of the first and second shadows. Each of the first and second collimated light sources may be a light with a collimating lens arranged between the light and the respective wall. The light source may be an LED and the collimating lens may be a collimating Fresnel lens.

Abstract: The present invention relates to a scanning device for determining at least partial cross-sectional profiles of food products to be sliced in accordance with the light cutting process, having at least one illumination device for generating a light line on the surface of a product and having at least one detection device for taking images of the product surface including the light line, wherein the illumination device includes at least one light source which is configured to generate a light beam propagating in the direction of a scanning region for the product in a scanning plane and widening in so doing and includes an optically effective device which is arranged in the propagation path of the widening light beam and which is configured to counter the divergence of at least some of the incident light.

Abstract: A method of detecting a defect, including the steps of: illuminating step for illuminating a sample with a light; detecting step for detecting light from the specimen which is illuminated by the light and forming an image by processing the detected light; processing step for extracting a defect candidate by processing the image of the sample formed in the detecting step and determining an inspection condition by using images including the image of the sample acquired in the detecting step, a partial image including the extracted defect candidate and a reference image which corresponds to the partial image including the defect candidate.

Abstract: A measurement system comprising an elongated member, a distal member connected to an end of the elongated member, the distal member having one or more register members to define a reference point(s), and a beam measurement device mounted to the distal member and configured to generate a beam at least a portion of the beam having a first axis essentially perpendicular to the reference point(s), the beam measurement device determining distance data based on the reflection of at least a portion of the beam.

Abstract: A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.

Abstract: A handheld device and method using the device, the device comprising a sensor receiving light from within a field of view (FOV) to generate a plurality of consecutive images of the FOV, a structured light source that is controllable to generate a plurality of light patterns, the source arranged to project at least one light patterns into the FOV where at least a portion of a pattern reflects from an object and is captured by the sensor and a processor to receive images, the processor programmed to control the source to project a pattern into the FOV, locate the pattern in at least one of the generated images, locate discontinuities in the pattern and use the discontinuities to measure at least one dimension.

Abstract: An attraction state inspection device includes a diffusion member that is disposed inside a nozzle group in which a plurality of nozzles that attract parts are disposed, and transmits incident light while diffusing the light, an image pickup is disposed on a side of the nozzle group apart from the diffusion member in a first direction, picks up an image of a part attracted by one nozzle positioned in the first direction with respect to the diffusion member, from among the plurality of nozzles, against a background of the diffusion member, and obtains an image of the part, an irradiation unit that is disposed opposite the image pickup unit with the diffusion member interposed therebetween, and radiates light toward the nozzle group, and an inspection unit that inspects an attraction state of the part on the basis of the image of the picked up part.

Abstract: An original document size detection device of the present invention is characterized by comprising a document reading table, a light source which irradiates an original document placed on the document reading table, a cover body which covers the original document, a light detection unit which detects a reflected light that a light from the light source is reflected by the original document and an external light that enters the surface of the document reading table when the cover body is lifted, a masking unit which masks an output signal based on the external light in the output signal of the light detection unit based on the reflected light and the external light, and a determination unit which determines a size of the original document in a main scanning direction based on the output signal of the light detection unit that is masked by the masking unit.

Abstract: High resolution distributed temperature sensors using fiber optic distributed temperature sensing systems deployed on various carriers to significantly improve spatial resolution and provide high resolution temperature profile and detection of fluid or fluid interface levels.

Abstract: A system for and methods of performing lateral measurements of a work fixed to an XY translation stage of a CNC machine comprises coupling a range-detecting laser scanner to a tool mount of the CNC machine that is translatable along the X, Y, and Z axes. The work is surrounded by reflectors that are coupled to the XY translation stage, preferably parallel to the X and Y axes. The laser scanner is initially positioned at a predetermined coordinate, and its laser output is directed toward one of the reflectors. The distance from the laser scanner to the work is measured and is correlated with the laser scanner position to determine a coordinate of the work. The scanner is then incremented along one of the X and Y axes and another coordinate of the work is determined. The periphery of the work is similarly scanned, and the lateral measurements are determined therefrom.

Abstract: An apparatus and a method for determining an overlap distance of an optical head is disclosed. Positions and light amount distributions of each light spot can be measured, which may be provided from an optical head to a substrate. Gaussian distribution may be applied to the positions and the light amount distributions to calculate a compensation model of each of the light spots. A first accumulated light amount corresponding to each first area of the substrate may be calculated if the optical head is scanning along a first direction of the substrate using the compensation model. A second accumulated light amount corresponding to each second area overlapped with the each first area is calculated if the optical head is scanning along the first direction, which is moved in a second direction by a first distance using the compensation model. An overlap distance may be determined based on a uniformity of summations of the first and second accumulated light amount.

Abstract: An optical film thickness meter capable of measuring an optical film thickness and spectroscopic characteristics highly accurately, and a thin film forming apparatus with the optical film thickness meter are provided. The optical film thickness meter includes a light projector, a light receiver, a monochromator, and a reflection mirror having a reflection surface substantially perpendicularly to the optical axis of measurement light on the side opposite to an actual substrate. The actual substrate is disposed having a predetermined angle to the optical axis. The measurement light passes through the actual substrate twice, whereby a change in transmissivity can be increased, and control accuracy of thickness measurement is improved. Measurement errors caused by a difference in transmission positions is prevented.

Abstract: A thickness measuring system for measuring a thickness of a planar plate-shaped member on a conveyer belt includes a processor, a first distance measurer and a second distance measurer. The first distance measurer on one side of the conveyor belt can emit and receive a first light beam parallel to the conveyer belt for reflection off the planar plate-shaped member, and calculate a first distance between the first distance measurer and the plate-shaped member. The second distance measurer on the other side of the conveyor belt can emit and receive a second light beam and a third light beam for reflection off the planar plate-shaped member, and calculate a second distance between the first distance measurer and the plate-shaped member and a third distance between the second distance measurer and the plate-shaped member.

Abstract: In an immersion lithographic apparatus, bubble formation in immersion liquid is reduced or prevented by reducing a gap size or area on a substrate table. The gap size is reduced using an edge member which may be, for example, a ring known as a BES (Bubble Extraction System) ring. Information regarding the shape and/or cross-sectional dimension (e.g., diameter) of the substrate, or information regarding the size of the gap, is transmitted to a controller that controls the edge member in order for the edge member, for example, to be reduced to an appropriate size to reduce the gap as much as possible, desirably without compressing the edge of the substrate. Alternatively or additionally, the gap may be reduced by moving the substrate and/or edge member adjacent the edge of a surface of the substrate table.

Abstract: The spatial information detection device emits, to a space including an intended area, signal light defined as light modulated with a modulation signal defined as a square wave signal having high and low level periods appearing alternately, each of the periods having its length randomly selected from integral multiples of a unit time period. The device generates signal electric charges by accumulating electric charges generated in response to light from the space in a collection time period determined by a demodulation signal defined as a signal having the same waveform as that of the modulation signal or that of the inverted modulation signal. The device corrects, using correction information regarding an effect caused by light from an unintended area, the amount of signal electric charges as an amount of intended electric charges produced in response to light from the intended area, thereby generating spatial information.

Abstract: An automated method for co-optimizing a scatterometry mark and a process monitoring mark is provided. Embodiments include generating a series of pattern profiles on a photoresist on a wafer; providing the series of pattern profiles, resist process parameters, and scatterometry critical dimension parameters as inputs for a scatterometry measurement; performing scatterometry measurement to generate spectra from the series of pattern profiles; and optimizing a sensitivity precision correlation for the resist process parameter.

Abstract: An optical system is presented for use in measuring in patterned structures having vias. The system is configured and operable to enable measurement of a via profile parameters. The system comprises an illumination channel for propagating illuminated light onto the structure being measured, a detection channel for collecting light returned from the illuminated structure to a detection unit, and a modulating assembly configured and operable for implementing a dark-field detection mode by carrying out at least one of the following: affecting at least one parameter of light propagating along at least one of the illumination and detection channels, and affecting propagation of light along at least the detection channel.

Abstract: A method of determining a structural parameter related to process-induced asymmetry, the method including: illuminating a structure, having an asymmetry property and a sub-structure susceptible to process-induced asymmetry, with radiation with a plurality of illumination conditions, at a first location of a substrate, determining a difference between measured asymmetry properties of the structure obtained with each of the plurality of illumination conditions, calculating a differential dependence of a difference between modeled asymmetry properties simulated for illumination by each of the plurality of illumination conditions on a structural parameter representing process-induced asymmetry of the sub-structure, and determining a value of the structural parameter using the determined difference and the calculated differential dependence.

Abstract: Inspecting a turbine includes positioning respective ends of a plurality of optical fibers within a high temperature region of the turbine wherein the respective first ends are aligned as a one-dimensional array. Energy emitted from an image area on a component of the turbine, is received at the ends of the optical fiber. The optical fibers convey the received energy to the other ends of the fibers that are located outside of the turbine. Outside the turbine an image of the respective other ends is captured, wherein the other ends are also aligned in a one-dimensional area. Additionally, for imaging a rotating component, a plurality of one-dimensional images of the other ends can be respectively captured at corresponding rotational positions of the component and used to create a two-dimensional image of the rotating component.