Dimension Patents (Class 356/625)
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Patent number: 8570536Abstract: A crimp tool for crimping contacts onto wire cable ends includes an indentor mechanism having a plurality of moveable indentors for deforming a portion of a contact inserted into the mechanism. One of the indentors has a pressure responsive element for providing a signal indicative of the pressure exerted on the contact by the indentor. A device coupled to the pressure responsive element records pressure data and transfers data to an electronic control unit for determining operation of the mechanism. An automated inspection system uses light projection and a light sensor adapted for detecting light projected through a crimping die to measure dimensions and configurations of the crimping die. The system stores data representative of desired measurements of the crimping die and compares actual measurements to desired measurements. A set of fixtures are used for positioning the crimping die in the inspection system.Type: GrantFiled: June 5, 2012Date of Patent: October 29, 2013Assignee: Daniels Manufacturing CorporationInventor: William D. Kelly
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Patent number: 8570537Abstract: A method for bore chamfer measurement includes providing a wheel with a surface having a bore and chamfer surrounding the bore. A light emitting device is aimed at the bore, the chamfer and a portion of the surface of the wheel adjacent to the chamfer. A light from the light emitting device is emitted to the surface of the wheel at the bore and the chamfer such that at least a portion of the light is emitted in a direction that is aligned with a center of the bore. Reflected light is detected from the surface adjacent to the chamfer and the bore. A two dimensional image of the surface and the chamfer is produced and is used to determine a dimension of the chamfer.Type: GrantFiled: October 26, 2012Date of Patent: October 29, 2013Assignee: Nissan North America, Inc.Inventor: Seunghun Ryan Choe
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Patent number: 8559022Abstract: The sensor apparatus is intended to detect the level of a liquid, gel or powder substance contained in a receptacle and includes an emitter able to emit radiation and a receiver able to receive and convert into an electric signal radiation which is emitted by the emitter and the intensity of which is variable depending on the quantity or level of substance present in the receptacle. The emitter is designed to emit visible radiation and the apparatus also includes a visible optical indicator and an optical element able to couple optically the emitter to the optical indicator so that, when the quantity or level of the substance in the receptacle is lower than a predetermined threshold, a fraction of the radiation generated by the emitter is able to light up the optical indicator.Type: GrantFiled: March 24, 2010Date of Patent: October 15, 2013Assignee: Elbi International S.p.A.Inventors: Giuseppe Marone, Marco Musso
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Publication number: 20130265590Abstract: A sensor unit for detecting reference and measurement radiation for a distance measurement device has a sensor element and an optical shielding device. The sensor element has a first detection region for detecting measurement radiation and a second detection region for detecting reference radiation. The optical shielding device is positioned in relation to the sensor element and fastened, and the optical shielding device optically separates the first and second detection regions from each other. The optical shielding device further comprises a first recess and a second recess which are permeable to optical radiation of a first wavelength range.Type: ApplicationFiled: August 8, 2011Publication date: October 10, 2013Applicant: ROBERT BOSCH GmbHInventors: Andreas Eisele, Oliver Wolst, Uwe Skultety-Betz, Bernd Schmidtke
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Patent number: 8553237Abstract: The sensor comprises a beam of electromagnetic radiation projecting across a gap between the stationary member and the translating member, a reference detector having a reference FOV and a signal detector having a signal FOV. The sensor is to be mounted on the stationary member. The electromagnetic radiation beam, the reference FOV and the signal FOV intersect in a volume including the gap, and the gap is calculated from the reflected electromagnetic radiation received by the reference and signal detectors. The gap can be determined from a ratio between a rise time in the signal pulse and a rise time in the reference pulse, or a ratio between a fall time in the signal pulse and a fall time in the reference pulse, or a ratio between a delay time in the signal pulse and a delay time in the reference pulse, among other features.Type: GrantFiled: January 10, 2012Date of Patent: October 8, 2013Assignee: Prime Photonics, LCInventor: Daniel Kominsky
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Publication number: 20130258354Abstract: Pattern lights A and B of which patterns respectively having bright and dark sections have been in an inverted relation are projected on a subject to calculate luminance distributions L1 and L2 of the subject and average values Ave(L1) and Ave(L2) of the distributions. A luminance distribution obtained by multiplying a luminance distribution LO of the subject of only a natural light component by a coefficient n is subtracted from the luminance distribution L2 obtained by projecting the pattern light B on the subject and a correction value L2? thereof is calculated so that a difference e of the average values become zero. Then, an intersection point of the luminance distribution L1 obtained by projecting the pattern light A on the subject and the correction value L2? of the luminance distribution L2 obtained by projecting the pattern light B on the subject is derived.Type: ApplicationFiled: March 13, 2013Publication date: October 3, 2013Applicant: CANON KABUSHIKI KAISHAInventor: Toshinori Ando
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Publication number: 20130235391Abstract: Inspecting a turbine includes positioning respective ends of a plurality of optical fibers within a high temperature region of the turbine wherein the respective first ends are aligned as a one-dimensional array. Energy emitted from an image area on a component of the turbine, is received at the ends of the optical fiber. The optical fibers convey the received energy to the other ends of the fibers that are located outside of the turbine. Outside the turbine an image of the respective other ends is captured, wherein the other ends are also aligned in a one-dimensional area. Additionally, for imaging a rotating component, a plurality of one-dimensional images of the other ends can be respectively captured at corresponding rotational positions of the component and used to create a two-dimensional image of the rotating component.Type: ApplicationFiled: March 6, 2012Publication date: September 12, 2013Inventors: Erwan Baleine, Clifford Hatcher
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Publication number: 20130229670Abstract: The present application relates to a method and apparatus for determining the dimensions and external properties of three-dimensional objects such as sawn timber, in which method objects like timber are moved in a transverse position over a target area in conveying direction, the target area is illuminated, and the target area is scanned upwards by a camera. In accordance with the invention each object like timber is scanned or exposed at least twice in the target area, and the timber is conveyed in the target area over support bars, which are in an angle (?) in relation to the conveying direction.Type: ApplicationFiled: March 1, 2013Publication date: September 5, 2013Applicant: FIN SCAN OYInventor: Urpo MESKANEN
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Patent number: 8514411Abstract: Methods of optimizing the diameters of nanowire photodiode light sensors. The method includes comparing the response of nanowire photodiode pixels having predetermined diameters with standard spectral response curves and determining the difference between the spectral response of the photodiode pixels and the standard spectral response curves. Also included are nanowire photodiode light sensors with optimized nanowire diameters and methods of scene reconstruction.Type: GrantFiled: September 17, 2012Date of Patent: August 20, 2013Assignee: Zena Technologies, Inc.Inventor: Munib Wober
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Patent number: 8508719Abstract: Provided is a method for measuring the heights of components based on laser ranging, including the following steps of: 1) a laser ranger uniformly moving along a test route and measuring the distance from each test point to the laser ranger; 2) the laser ranger transmitting the measurement result and the measurement time to a storage unit; 3) the storage unit sending the received measurement result and the received measurement time to an analysis unit; and 4) according to the data sent by the storage unit and referring to the test route and the position of each test point, the analysis unit calculating the height of each test point and outputting it. The method of the present invention omits the time of determining the position of each point and the start-stop time of the laser ranger at each test point so that saving the large amount of the measurement time.Type: GrantFiled: November 9, 2011Date of Patent: August 13, 2013Assignee: Cheng Uei Precision Industry Co., Ltd.Inventors: Han-Wei Wang, Tsai-sheng Shen
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Publication number: 20130201493Abstract: A coating dimension measuring apparatus may include: a camera that is positioned at a prescribed position distanced from a sheet to capture an image of a coating dimension of the sheet; a roller configured to transport the sheet; a scale that is disposed along a lengthwise direction of the roller to perform numerical calibration of the coating dimension; a scale holding unit configured to hold the scale over the roller, the scale holding unit being disposed so as to enable free insertion and removal of the scale.Type: ApplicationFiled: January 31, 2013Publication date: August 8, 2013Applicant: YOKOGAWA ELECTRIC CORPORATIONInventor: YOKOGAWA ELECTRIC CORPORATION
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Patent number: 8502979Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including: but not limited to, critical dimension and overlay misregistration; defects and thin film characteristics; critical dimension and defects; critical dimension and thin film characteristics; critical dimension, thin film characteristics and defects; macro defects and micro defects; flatness, thin film characteristics and defects; overlay misregistration and flatness; an implant characteristic and defects; and adhesion and thickness.Type: GrantFiled: May 9, 2012Date of Patent: August 6, 2013Assignee: KLA-Tencor Technologies Corp.Inventors: Ady Levy, Kyle A. Brown, Rodney Smedt, Gary Bultman, Mehrdad Nikoonahad, Dan Wack, John Fielden, Ibrahim Abdul-Halim
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Patent number: 8493574Abstract: The attenuation and other optical properties of a medium are exploited to measure a thickness of the medium between a sensor and a target surface. Disclosed herein are various mediums, arrangements of hardware, and processing techniques that can be used to capture these thickness measurements and obtain dynamic three-dimensional images of the target surface in a variety of imaging contexts. This includes general techniques for imaging interior/concave surfaces as well as exterior/convex surfaces, as well as specific adaptations of these techniques to imaging ear canals, human dentition, and so forth.Type: GrantFiled: February 6, 2013Date of Patent: July 23, 2013Assignee: Massachusetts Institute of TechnologyInventors: Douglas P. Hart, Federico Frigerio, Douglas M. Johnston, Manas C. Menon, Daniel Vlasic
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Patent number: 8488128Abstract: A test structure is presented test structure on a substrate for monitoring a LER and/or LWR effect, said test structure comprising an array of features manufactured with amplified LER and/or LWR effect.Type: GrantFiled: March 1, 2009Date of Patent: July 16, 2013Assignee: Nova Measuring Instruments Ltd.Inventor: Boaz Brill
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Patent number: 8482743Abstract: Edge data for an object are obtained by placing the object in front of a medium that has greater reflectance than the object, and both are illuminated by a light source. The contrast in image intensity obtained between the object and background enables the edges of the object to be determined.Type: GrantFiled: June 20, 2005Date of Patent: July 9, 2013Assignee: Cognitens Ltd.Inventor: Avner Segev
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Patent number: 8477319Abstract: A measuring apparatus for measuring a three-dimensional shape includes a light source, a contact tip that is brought into contact with an object to be measured and scans the object to be measured, a holding portion that is movable along the object to be measured, a coupling portion for coupling the contact tip to the holding portion via a flexible support member, and an objective lens supported by the holding portion. In addition, an optical system condenses light provided by the light source on the contact tip via the objective lens, a photodetector receives backscattered light from the contact tip and detects a position of the contact tip that is brought into contact with the object to be measured, a moving unit moves the holding portion, and a position measuring instrument measures a position of the holding portion.Type: GrantFiled: September 2, 2010Date of Patent: July 2, 2013Assignee: Canon Kabushiki KaishaInventor: Ryusuke Nakajima
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Patent number: 8451459Abstract: A method for use in inspecting a blade tip clearance is provided. The method includes providing a plurality of rotor blades including tips, wherein the plurality of rotor blades are rotatably mounted within a casing such that a blade tip clearance is defined between the rotor blade tips and the casing. The method also includes providing a system for use in inspecting the blade tip clearance by emitting electromagnetic energy toward the tips and detecting electromagnetic energy reflected by the tips. The method further includes positioning the system to facilitate inspection of the blade tip clearance, rotating the plurality of rotor blades within the casing, and simultaneously blending the tips using a blending apparatus and inspecting the blade tip clearance using the system.Type: GrantFiled: March 28, 2011Date of Patent: May 28, 2013Assignee: General Electric CompanyInventor: Andrew Thomas Hynous
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Publication number: 20130128247Abstract: The invention provides a level sensor configured to determine a height level of a surface of a substrate, comprising a detection unit arranged to receive a measurement beam after reflection on the substrate, wherein the detection unit comprises an array of detection elements, wherein each detection element is arranged to receive a part of the measurement beam reflected on a measurement subarea of the measurement area, and is configured to provide a measurement signal based on the part of the measurement beam received by the respective detection element, and wherein the processing unit is configured to calculate, in dependence of a selected resolution at the measurement subarea, a height level of the measurement subarea, or to calculate a height level of a combination of multiple measurement subareas.Type: ApplicationFiled: November 16, 2012Publication date: May 23, 2013Applicant: ASML Netherlands B.V.Inventor: ASML Netherlands B.V.
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Patent number: 8446247Abstract: A safety system for detecting the presence of an undesired object in a safety area may include a first pair of distance measuring sensors disposed on opposed sides of the conveying path, the pair of distance measuring sensors defining a sensor field between said pair of distance measuring sensors, and an electronic control device operatively coupled to the sensors. The electronic control device may be configured to initiate a machine-stopping sequence based at least in part on signals received from the distance measuring sensors.Type: GrantFiled: October 21, 2009Date of Patent: May 21, 2013Assignee: J&L Group International, LLCInventors: Robert M. Allen, Michael Harrington, Lynn E. Vershum
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Patent number: 8441639Abstract: Various metrology systems and methods are provided.Type: GrantFiled: August 31, 2010Date of Patent: May 14, 2013Assignee: KLA-Tencor Corp.Inventors: Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Andrew Hill, Ohad Bachar, Amnon Manassen, Yung-Ho Alex Chuang, Ilan Sela, Moshe Markowitz, Daria Negri, Efraim Rotem
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Patent number: 8437009Abstract: A system and method reconstruct an anatomical impression. The system contains a light signal generating device for generating a light signal directed toward a synthetic test body having the anatomical impression. The light signal is directed toward the synthetic test body such that the light signal is attenuated upon passing through the synthetic test body. A sensor captures the attenuated light signal through the synthetic test body and converts the captured attenuated light signal into digitized image information. The system further includes a digital reconstruction device for reconstructing the digitized image information based on measurement of light attenuation to generate a three-dimensional volume of the anatomical impression.Type: GrantFiled: June 22, 2010Date of Patent: May 7, 2013Assignee: Siemens Medical Instruments Pte. Ltd.Inventors: Robert Kagermeier, Volker Pritsching
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Patent number: 8427655Abstract: An optical measurement apparatus includes a fixed headstock and an opposed, movable tailstock mounted on a reference support. The movable tailstock is movable along a linear axis to maintain a piece to be measured between the headstock and tailstock. A mobile carriage is movable along the linear axis. The carriage carries a light source directing a beam of collimated light across the linear axis to be interrupted by a piece under measurement. An optical detector aligned with the light source is arranged to receive residual light of the beam that has not been interrupted by the piece under measurement. The measuring apparatus has a rectilinear guide, fastened on the reference support, on which are slideably engaged the optical carriage and the tailstock, whereas the headstock is placed on a headstock carrier that is fastened on the reference support and hangs at least in part over the rectilinear guide.Type: GrantFiled: August 9, 2012Date of Patent: April 23, 2013Assignee: Tesa SAInventor: Fabrice Calame
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Patent number: 8415613Abstract: The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.Type: GrantFiled: May 30, 2008Date of Patent: April 9, 2013Assignee: JPK Instruments AGInventors: Sven-Peter Heyn, Jacob Kerssemakers, Detlef Knebel, Helge Eggert, Torsten Jaehnke, Joern Kamps
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Publication number: 20130083306Abstract: An inspection apparatus includes an illumination system that receives a first beam and produces second and third beams from the first beam and a catadioptric objective that directs the second beam to reflect from a wafer. A first sensor detects a first image created by the reflected second beam. A refractive objective directs the third beam to reflect from the wafer, and a second sensor detects a second image created by the reflected third beam. The first and second images can be used for CD measurements. The second beam can have a spectral range from about 200 nm to about 425 nm, and the third beam can have a spectral range from about 425 nm to about 850 nm. A third sensor may be provide that detects a third image created by the third beam reflected from the wafer. The third image can be used for OV measurements.Type: ApplicationFiled: September 10, 2012Publication date: April 4, 2013Applicant: ASML Holding N. V.Inventors: Stanislav Y. Smirnov, Lev Ryzhikov, Eric Brian Catey, Adel Joobeur, David Heald, Yevgeniy Konstantinovich Shmarev, Richard Jacobs
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Publication number: 20130077101Abstract: A contribution to a wafer level critical dimension distribution from a scanner of a lithography system can be determined based on measured wafer level critical dimension uniformity distribution and a contribution to the wafer level critical dimension distribution from a photo mask. Light transmission (104) across the photo mask (162) can be measured, a transmittance variation distribution of the photo mask can be determined, and the contribution to the wafer level critical dimension distribution from the photo mask (162) can be determined (132) based on the transmittance variation distribution of the photo mask.Type: ApplicationFiled: February 23, 2011Publication date: March 28, 2013Inventors: Ofir Sharoni, Vladimir Dmitriev, Eran Chason, Guy Ben-Zvi, Igor Varvaruk
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Patent number: 8405837Abstract: A system and method for daylight inspection of a surface, such as a railroad track, is disclosed. The disclosed system includes lasers, cameras, and a processor. The lasers are positioned adjacent the surface. The laser emits a beam of light across the surface at a combined intensity of at least 0.15 watts of intensity per inch of width of the surface, and the camera captures images of the surface having the beam of light emitted thereon. The camera includes a bandpass filter which passes only a band of light corresponding to a dip in solar radiation. The laser is selected to provide an emitted light beam which is more intense than the solar radiation at the dip. The processor formats the images so that they can be analyzed to determine various measurable aspects of the surface. The system and method includes one or more algorithms for determining these measurable aspects of the surface.Type: GrantFiled: May 13, 2009Date of Patent: March 26, 2013Assignee: Georgetown Rail Equipment CompanyInventors: John Anthony Nagle, II, Christopher M. Villar, Steven C. Orrell, Charles Wayne Aaron
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Patent number: 8400644Abstract: A device and a method for measuring an elevator hoistway, includes at least one or more laser aligners and a measuring element. The measuring element is provided with an essentially long handle for extending the measuring element into the laser beams transmitted by the laser aligners.Type: GrantFiled: December 22, 2010Date of Patent: March 19, 2013Assignee: Kone CorporationInventors: Harri Juvonen, Risto Laine
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Patent number: 8390825Abstract: A system for measurement of a can seam of a can comprising a an end panel, the end panel comprising the seam, the seam comprising a circumference, a seam top, a seam bottom, a seam chuck wall part and an opposite seam wall essentially opposite the seam chuck wall part, the system comprising: a table comprising a table top; a rocker comprising an inner pin and an outer pin essentially parallel to each other, the rocker configured to allow, when the end panel of the can is facing the table top, slight pressure of the outer pin on the opposite wall forcing the chuck wall part on the inner pin, and/or slight pressure of the inner pin on the chuck wall part forcing the opposite wall on the outer pin, causing rocking movement of the pins, that settles the inner pin flush with the chuck wall part, and/or the outer pin flush with the opposite wall, respectively, such that the inner pin and outer pin are disposed at chuck wall angle; means for rotating the can, allowing the inner pin to settle flush with the chuck walType: GrantFiled: April 15, 2011Date of Patent: March 5, 2013Inventors: Benny Laor, Nadav Leshem
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Patent number: 8390826Abstract: A method and apparatus that linearly scans at least one plane of radiation having a width wider than the diameter of the part onto an exterior side surface of the supported part so that the part occludes the at least one plane of radiation at a plurality of spaced apart locations. The invention includes forming a virtual representation of an outer profile of the part in a reference frame based on the input data and providing a virtual representation of an inner bore of a physical gauge in the reference frame. Then determining an interference position between the part and the gauge using the virtual representations wherein the interference position is a position along the axis where the bore diameter is substantially equal to the part diameter. Finally calculating a distance along the axis based on the interference position and storing the distance.Type: GrantFiled: April 20, 2011Date of Patent: March 5, 2013Assignee: GII Acquisition, LLCInventor: Eric M. Walstra
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Patent number: 8384916Abstract: The attenuation and other optical properties of a medium are exploited to measure a thickness of the medium between a sensor and a target surface. Disclosed herein are various mediums, arrangements of hardware, and processing techniques that can be used to capture these thickness measurements and obtain dynamic three-dimensional images of the target surface in a variety of imaging contexts. This includes general techniques for imaging interior/concave surfaces as well as exterior/convex surfaces, as well as specific adaptations of these techniques to imaging ear canals, human dentition, and so forth.Type: GrantFiled: June 27, 2011Date of Patent: February 26, 2013Assignee: Massachusetts Institute of TechnologyInventors: Douglas P. Hart, Federico Frigerio, Douglas M. Johnston, Manas C. Menon, Daniel Vlasic
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Patent number: 8384911Abstract: A measurement device includes a pattern light characteristic setting unit configured to set illumination light having a pattern light characteristic to be projected onto a measurement object, a reflected light measurement unit configured to measure reflected light when the measurement object is irradiated with the illumination light on, an image feature extraction unit configured to extract from the measured reflected light an image feature based on a physical characteristic of the measurement object, a feature distribution calculation unit configured to calculate a distribution characteristic for each local region of the image feature, and a pattern light control unit configured to control the pattern light characteristic of the illumination light, which includes a pattern light characteristic for distance measurement and a pattern light characteristic for image feature extraction, based on the calculated distribution characteristic for each local region.Type: GrantFiled: October 26, 2011Date of Patent: February 26, 2013Assignee: Canon Kabushiki KaishaInventors: Osamu Nomura, Masakazu Matsugu
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Patent number: 8384915Abstract: A method and test block for controlling weld penetration depth in a work piece are disclosed. The test block simulates a work piece relative to a welding process of the work piece. The test block includes a test welding path. The test welding path replicates a production welding path on a weld surface of the work piece. The test block includes a melt-thru surface that underlies the test welding path. The melt-thru surface is spaced apart from the test welding path by a spacing that decreases along a length of the test welding path. The spacing varies from more than a standard weld penetration depth to less than the standard weld penetration depth.Type: GrantFiled: October 1, 2010Date of Patent: February 26, 2013Assignee: Rosemount Inc.Inventors: Eric P. Petersen, Daniel S. Sampson
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Publication number: 20130044334Abstract: An original document size detection device of the present invention is characterized by comprising a document reading table, a light source which irradiates an original document placed on the document reading table, a cover body which covers the original document, a light detection unit which detects a reflected light that a light from the light source is reflected by the original document and an external light that enters the surface of the document reading table when the cover body is lifted, a masking unit which masks an output signal based on the external light in the output signal of the light detection unit based on the reflected light and the external light, and a determination unit which determines a size of the original document in a main scanning direction based on the output signal of the light detection unit that is masked by the masking unit.Type: ApplicationFiled: August 15, 2012Publication date: February 21, 2013Applicants: NEC ENGINEERING, LTD., NEC ACCESS TECHNICA, LTD.Inventors: MASAYA IGAWA, SATOSHI KOMATSU, HIROYUKI OKADA, KOUSHI TAKANO, TAKAO SAKURAI
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Patent number: 8358424Abstract: A distance measuring apparatus comprises: an edge specifying part 101 for specifying the edge of a probe 6 in a secondary portrait appearing on the surface of a work 9 and an image of the probe 6; a straight line inserting part 102 for inserting a straight line along the outer edge of the secondary portrait onto an image, and an overlap determining part 103 for determining an overlap of the edge and the straight line, wherein one or more LED lamps 7, and calculating part for calculating the distance wherein the imaging device and the probe 6 are movably held integrally for the surface of the work 9.Type: GrantFiled: April 7, 2011Date of Patent: January 22, 2013Assignees: Osaka University, MSI. Tokyo, Inc.Inventors: Michisato Toyoda, Toshio Tashima
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Patent number: 8355122Abstract: A non-contacting aligning method for planes in a three-dimensional environment is disclosed. The method includes: projecting a light beam in a predetermined incident angle onto a transparent first object and an opaque second object that are facing each other; and calculating a distance between the first and second objects basing on the tangent trigonometric function of the incident angle of the light beam.Type: GrantFiled: July 30, 2010Date of Patent: January 15, 2013Inventors: Chien-Chung Jeng, Chiu-Hsien Wu
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Publication number: 20130010311Abstract: A local purging tool for purging a portion of a surface of a wafer with purging gas is disclosed. The purging tool includes a purging chamber configured to contain purging gas within a cavity of the purging chamber, a permeable portion of a surface of the purging chamber configured to diffuse purging gas from the cavity of the chamber to a portion of a surface of a wafer, and an aperture configured to transmit illumination received from an illumination source to a measurement location of the portion of the surface of the wafer and further configured to transmit illumination reflected from the measurement location to a detector.Type: ApplicationFiled: June 28, 2012Publication date: January 10, 2013Applicant: KLA-TENCOR CORPORATIONInventors: Hidong Kwak, Ward Dixon, Torsten Kaack, Ning-Yi Neil Wang, Jagjit Sandhu
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Publication number: 20120327430Abstract: A method of decoding hierarchically orthogonal structured light and a 3-D depth measurement system using the same include a step of detecting boundary lines encoded at an identical position between layers and a boundary line inheritance step of converting the detected boundary lines into identical boundary lines. The present invention relates to a method of precisely searching for the boundary line of a pattern of radiated structured light based on the real coordinate system of an image plane, and an object thereof is to search for a boundary line irrespective of the reflection of a surface of an object, clearly classify a true boundary line and a false boundary line in a poor radiance environment, and increase the accuracy of a boundary line placed in another layer through inheritance.Type: ApplicationFiled: June 22, 2012Publication date: December 27, 2012Applicant: Reasearch & Business Foundation Sungkyunkwan UniversityInventors: Sukhan LEE, Quang Lam Bui
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Patent number: 8339616Abstract: A method and a system for optical three-dimensional (3-D) digitalization of physical objects, suitable for moving scenes, unattached to locating devices, utilizing structured light in the form of a plurality of overlapped patterns free of any intensity features, capable of obtaining frames of 3-D coordinates and textural color at video frame rates.Type: GrantFiled: March 27, 2010Date of Patent: December 25, 2012Assignee: Micrometric Vision TechnologiesInventor: Nicolae Paul Teodorescu
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Patent number: 8334985Abstract: A shape measuring apparatus that measures a three-dimensional shape of a measuring target has a lighting device that irradiates the measuring target placed on a stage with light, an imaging device that takes an image of the measuring target, a shape calculating device that calculates orientations of normals at a plurality of points on a surface of the measuring target from an image, the image being obtained by performing imaging with the imaging device while the lighting device irradiates the measuring target with the light, the shape calculating device calculating the three-dimensional shape of the surface of the measuring target from the calculation result of the orientations of the normals, a ranging device that measures a distance from a predetermined reference position with respect to at least one point on the surface of the measuring target, and a determination device that determines a spatial position of the three-dimensional shape of the surface of the measuring target, the three-dimensional shape beiType: GrantFiled: October 8, 2010Date of Patent: December 18, 2012Assignee: OMRON CorporationInventors: To Sho, Takashi Sakai, Daisuke Mitsumoto, Yasuhiro Ohnishi, Takeshi Kojima, Yasumoto Mori, Shree Nayar
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Publication number: 20120314226Abstract: A crimp tool for crimping contacts onto wire cable ends includes an indentor mechanism having a plurality of moveable indentors for deforming a portion of a contact inserted into the mechanism. One of the indentors has a pressure responsive element for providing a signal indicative of the pressure exerted on the contact by the indentor. A device coupled to the pressure responsive element records pressure data and transfers data to an electronic control unit for determining operation of the mechanism. An automated inspection system uses light projection and a light sensor adapted for detecting light projected through a crimping die to measure dimensions and configurations of the crimping die. The system stores data representative of desired measurements of the crimping die and compares actual measurements to desired measurements. A set of fixtures are used for positioning the crimping die in the inspection system.Type: ApplicationFiled: June 5, 2012Publication date: December 13, 2012Inventor: William D. Kelly
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Publication number: 20120300223Abstract: An apparatus which provides a multiplicity of test colors and neutral tones simultaneously within a microscope's optical system that may be used to align, and/or calibrate the microscope, and the light source and any associated recording devices, automatically or with input from an operator. The test colors and neutral tones may also be used as references against which to judge specimens being viewed in the microscope. Also disclosed is a method of operating a microscope using such a such pattern.Type: ApplicationFiled: May 29, 2012Publication date: November 29, 2012Inventor: Ferrand D.E. Corley
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Patent number: 8319979Abstract: A single laser beam measurement system employing retro-reflective striped targets is disclosed having an error correction mechanism which compensates for errors arising from the target not being square to a laser scanning beam.Type: GrantFiled: October 26, 2010Date of Patent: November 27, 2012Assignee: Advanced Measurement SystemsInventors: Mike Hanchett, James Hartl
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Publication number: 20120293812Abstract: A first metrology method includes the steps of projecting a first image and a second image, aligning the first image and the second image to form an aligned image of a known size, and determining a dimension of a target object by comparing the aligned image to the target object. A second metrology method includes the steps of projecting a first image and a second image, aligning the first image and the second image to form an aligned image of a known size by synchronously adjusting a zoom factor for projecting the first image and an angle for projecting the second image, and determining a dimension of a target object by comparing the aligned image to the target object.Type: ApplicationFiled: April 17, 2012Publication date: November 22, 2012Inventors: Alexey Sharonov, Candido Dionisio Pinto
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Patent number: 8310685Abstract: A system for segmented parametric optimization of emissions from a light source, including a light source emitting light rays at a plurality of angles and an optic for directing light rays from the light source, the optic including at least one annular segment, the at least one annular segment being configured to optimize a characteristic of the emitted light rays, and a method for using and manufacturing the system.Type: GrantFiled: August 14, 2008Date of Patent: November 13, 2012Inventors: Klaus-Peter Dimitrov-Kuhl, Valmore J. Forgett, III
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Publication number: 20120281202Abstract: A printing apparatus capable of detecting a number of different paper sizes includes a main body, an input device, a paper guide, a rack member, and a detector. The main body prints on paper; the input device contains the paper; the paper guide moves to fit two sides of the paper; the rack member moves simultaneously with the paper guide, and includes at least one identifier; each identifier corresponding to one of the different paper sizes. The detector detects the identifier to determine one of the different paper sizes and transmits the determined paper size to the main body, and the main body compares the determined paper size with a print setup. The main body reminds a user when the determined paper size does not conform to the print setup.Type: ApplicationFiled: August 23, 2011Publication date: November 8, 2012Applicant: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: WEN-CHUNG LO, YI-LONG LEE, SHU-YA CHIANG
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Patent number: 8306306Abstract: An examination method of a unique object including: forming a coherent radiation beam using a coherent source, illuminating the object by the coherent radiation beam, focussed using a focussing mechanism positioned directly in contact with the object or in a very close position to the object, and forming, using a detection mechanism, the optical Fourier transform image of the light diffracted by the object.Type: GrantFiled: August 1, 2007Date of Patent: November 6, 2012Assignee: Commissariat a l'Energie AtomiqueInventor: Serge Gidon
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Publication number: 20120270342Abstract: Methods and systems are provided for fabricating a semiconductor device. An exemplary method involves forming a feature of a semiconductor device in a first region of a layer of material on a semiconductor substrate and forming a test structure in a second region of the layer of material. The test structure is formed concurrently to forming the feature, and a dimension of the feature is determined using the test structure.Type: ApplicationFiled: April 22, 2011Publication date: October 25, 2012Applicant: GLOBALFOUNDRIES INC.Inventor: Dmytro CHUMAKOV
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Patent number: 8294907Abstract: In a scatterometric method, different targets with different sensitivities to a parameter of interest are printed in a calibration matrix and different spectra obtained. Principal component analysis is applied to the different spectra to obtain a calibration function that is less sensitive to variation in the underlying structure than a calibration function obtained from spectra obtained from a single target.Type: GrantFiled: October 13, 2006Date of Patent: October 23, 2012Assignee: ASML Netherlands B.V.Inventors: Hugo Augustinus Joseph Cramer, Antoine Gaston Marie Kiers
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Publication number: 20120262734Abstract: A system for measurement of a can seam of a can comprising a an end panel, the end panel comprising the seam, the seam comprising a circumference, a seam top, a seam bottom, a seam chuck wall part and an opposite seam wall essentially opposite the seam chuck wall part, the system comprising: a table comprising a table top; a rocker comprising an inner pin and an outer pin essentially parallel to each other, the rocker configured to allow, when the end panel of the can is facing the table top, slight pressure of the outer pin on the opposite wall forcing the chuck wall part on the inner pin, and/or slight pressure of the inner pin on the chuck wall part forcing the opposite wall on the outer pin, causing rocking movement of the pins, that settles the inner pin flush with the chuck wall part, and/or the outer pin flush with the opposite wall, respectively, such that the inner pin and outer pin are disposed at chuck wall angle; means for rotating the can, allowing the inner pin to settle flush with the chuck walType: ApplicationFiled: April 15, 2011Publication date: October 18, 2012Applicant: QUALITY BY VISION LTD.Inventors: Benny LAOR, Nadav Leshem
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Publication number: 20120257219Abstract: A distance measuring apparatus comprises: an edge specifying part 101 for specifying the edge of a probe 6 in a secondary portrait appearing on the surface of a work 9 and an image of the probe 6; a straight line inserting part 102 for inserting a straight line along the outer edge of the secondary portrait onto an image, and an overlap determining part 103 for determining an overlap of the edge and the straight line, wherein one or more LED lamps 7, and calculating part for calculating the distance wherein the imaging device and the probe 6 are movably held integrally for the surface of the work 9.Type: ApplicationFiled: April 7, 2011Publication date: October 11, 2012Applicants: MSI. TOKYO, INC., Osaka UniversityInventors: Michisato TOYODA, Toshio Tashima