Abstract: A temperature meter for measuring temperature of a measurement target object to which a temperature sensor cannot be fixed directly is formed by a temperature sensor configured to measure an observed temperature in a vicinity of the measurement target object; a timer configured to measure a temperature observation time; and a calculation processor configured to calculate the temperature of the measurement target object according to the observed temperature and the temperature observation time by carrying out a prescribed calculation processing.

Abstract: Apparatus for measuring wafer support assembly temperature in a semiconductor wafer processing system. The apparatus is a modular plug that is mounted to the support assembly. The plug contains a photoluminescent material that exhibits a decay in luminescence after an excitement which is indicative of the temperature of the support assembly.

Abstract: A system and method is provided for determining the temperature to which a structure is subjected. An optical fiber having at least one pair of fiber sensors is attached to the structure. The fiber sensors comprise Bragg gratings and each is configured to have a particular coefficient of thermal expansion and be responsive to a particular wavelength. A broadband spectrum of light is launched into the optical fiber. The light returning from the fiber sensors is detected. The temperature to which the structure is subjected is then determined based on the difference in strain response of the fiber sensors as a result of the effects of temperature upon the fiber sensors. Coatings of different materials may be applied over the optical fiber to provide the fiber sensors with differing coefficients of thermal expansion.

Abstract: A temperature sensing apparatus including a sensor element made of a magnetically soft material operatively arranged within a first and second time-varying interrogation magnetic field, the first time-varying magnetic field being generated at a frequency higher than that for the second magnetic field. A receiver, remote from the sensor element, is engaged to measure intensity of electromagnetic emissions from the sensor element to identify a relative maximum amplitude value for each of a plurality of higher-order harmonic frequency amplitudes so measured. A unit then determines a value for temperature (or other parameter of interest) using the relative maximum harmonic amplitude values identified. In other aspects of the invention, the focus is on an apparatus and technique for determining a value for of stress condition of a solid analyte and for determining a value for corrosion, using the relative maximum harmonic amplitude values identified.

Abstract: Measurement of environment parameters beyond a barrier without having to make a hole in the barrier to connect a sensor to the other circuitry may be made using a primary inductor on one side of the barrier inductively coupled to a secondary inductor on the other side of the barrier. A thermistor or other sensor is connected to the secondary inductor and disposed with the secondary inductor on the other side of the barrier. A pulse generator causes a first current through the primary inductor that is modified by a mutually induced second current through the secondary inductor, that is further determined by the resistance or impedance of the thermistor or sensor. A measuring circuit converts the peak current value into a value representative of the temperature or other environment parameter surrounding the sensor.

Abstract: The present invention relates a water temperature sensor of indirect/direct contact types for measuring a water temperature by using a chamber cap formed don the one side of a water gauge chamber of an automatic washing machine. The water temperature sensor includes a temperature measuring part for measuring a temperature of water; and a hollow chamber cap located at the bottom edge of a water gauge chamber within a washing machine, having a scating portion on a predetermined place for installing the temperature measuring part.

Abstract: An apparatus and method for measuring thermophysical property value of a specimen. The apparatus includes a heating laser and probe laser for ? on the surface of the specimen. A detector detects the reflected probe laser beam, and a computer calculates the thermophysical property value of the specimen based on the reflected probe laser beam.

Abstract: A surface contact clinical thermometer having a flexible press member protruded from the outside wall of the body thereof, and an induction chip mounted in the flexible press member in flush with the surface of the flexible press member for contacting the body skin of a person to detect the body temperature of the person.

Abstract: A device for the non-contact temperature measurement on an object comprises a detector device with a detector and IR optics, which image the detector along a measuring beam path with an optical axis onto a measuring spot on the object, and a sighting device for the visualization of the measuring spot with a light source for the creation of marking light and ring optics, which form a marking beam path that surrounds the outer circumference of the measuring beam path. The marking light is aligned so that on each location of the marking beam path its cross section, vertical to the optical axis, forms a circular ring surface.

Abstract: A device for determining the temperature in the interior of a vehicle (12) comprises a temperature sensor (30) for arrangement behind a wall (18) adjacent the interior, and a processing unit (82) receiving the measuring signal from the temperature sensor (30) and outputting an output signal representing the temperature in the interior (10) of the vehicle (12). Further, it is provided with a thermal conductor element (36, 36′) for sensing the temperature of the air in the interior (10) in the region close to the wall, the thermal conductor element (36, 36′) being in thermally conductive contact with the temperature sensor (30) and being provided to extend up to or close to the wall (18) or through an opening (38) in the wall (18).

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract: Fiber optic temperature measurement, especially for electric power equipment is effected utilizing, as the sensor, a portion of an optical fiber from which the coating has been removed and to which a glass capillary has been bonded by an adhesive. The measurement is carried out polarimetrically and utilizes the change in birefrigence resulting from a temperature change because of the mechanical stressing of the sensor region of the optical fiber.

Abstract: Helical arrays comprising structurally different chiral non-racemic molecules or molecular entities that control the helical sense of the helical array provide a method for temperature measurement with a unique characteristic in that the temperature dependent chiral biases of the competing structurally different chiral non-racemic entities control the helical sense population since these biases differ in their temperature dependence. By varying the composition of the chiral non-racemic entities, the temperature at which the helical sense population is equal and how the helical sense population varies as a function of temperature can be controlled. In this way, competing structurally different non-racemic chiral groups can be varied in their composition so that a helical array can be formed under their effect and be sensitive to temperature over a wide temperature range. In this way a temperature may be preselected so that a chiral optical property can reach a minimum near to zero at this temperature.

Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit at least one laser beam against a surface whose temperature is to be measured and positioning said laser beam about the energy zone to visibly outline said energy zone. The apparatus comprises a laser sighting device adapted to emit at least one laser beam against the surface and means to position said laser beam about the energy zone to visibly outline said energy zone. The laser beam may be rotated about the periphery of the energy zone. In another embodiment, a pair of laser beams are projected on opposite sides of the energy zone. The laser beam may be further pulsed on and off in a synchronized manner so as to cause a series of intermittent lines to outline the energy zone. Such an embodiment improves the efficiency of the laser and results in a brighter laser beam being projected.

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract: A semiconductor device test apparatus according to the present invention includes a circuit board 103 and a film 105. A plurality of electrodes 103c are formed at the circuit board 103 at positions that face opposite a plurality of electrodes 201a at a device to be measured 201, whereas bumps 105b are formed at the surface of the film 105 located toward the device to be measured 201, at positions that face opposite the plurality of electrodes 201a at the device to be measured 201 and electrodes 105c are formed at the surface of the film 105 located toward the circuit board 103 at positions that face opposite the plurality of electrodes 103c at the circuit board 103. The bumps 105b formed at one surface of the film 105 and the electrode 105c formed at another surface of the film 105 are electrically connected with each other via through holes 105d to support semiconductor devices having electrodes provided at a fine pitch and to improve durability.

Abstract: A method and apparatus for measuring the surface temperatures of wire-bonded semiconductors and the like for preparing thermal maps include a conventional ultrasonic wire bonding machine adapted for mounting a fluorescence-decay temperature sensor in the capillary holder. A trigger box circuit is provided to trigger a temperature measurement based on initiation of an electrical voltage signal from the ultrasonic bonding controller. A computer is provided for coordinating the stage control and temperature measurements, and for collating and plotting the temperature, time and location indications as thermal maps and other displayed/printed correlations.

Abstract: A method and system for calibrating radiation sensing devices, such as pyrometers, in thermal processing chambers are disclosed. The system includes a reflective device positioned opposite the radiation sensing devices and a calibrating light source which emits light energy onto the reflective device. The system is designed so that each radiation sensing device is exposed to the same intensity of light being reflected off the reflective device, which has a preset value. The radiation sensing devices are then used to measure the amount of light energy being reflected which is then compared to the preset value for making any necessary adjustments.

Abstract: A fiber Bragg grating written into a glass fiber from which a coating has been removed, serves as a temperature sensor and is surrounded by a glass capillary. An epoxy resin fills the space between the capillary and the fiber containing the Bragg grating. Broad-band light launched into the fiber optical device is reflected depending upon the measured temperature and with amplification of the effect due to the fact that the strain resulting from the difference in thermal expansion coefficient of the adhesive and the capillary is superimposed upon the temperature variation of the Bragg grating.

Abstract: A method is provided for treating wafers on a low mass support. The method includes mounting a temperature sensor in proximity to the wafer, which is supported on the low mass support, such that the sensor is only loosely thermally coupled to the wafer. A temperature controller is programmed to critically tune the wafer temperature in a temperature ramp, though the controller directly controls the sensor temperature. A wafer treatment, such as epitaxial silicon deposition, is started before the sensor temperature has stabilized. Accordingly, significant time is saved for the treatment process, and wafer throughput improved.

Abstract: Device for contactless temperature measurement of an object with an optical system which images into the finite and a detector, wherein an image of the detector is imaged by the optical system along an optical axis onto a measurement spot on the object in such a way that the image of the detector reduces from the optical system to a sharp point measurement spot and then enlarges, and also with a sighting arrangement which identifies the outer limit of the measurement spot by means of visible sighting rays. Each sighting ray is aligned obliquely with respect to the optical axis in such a way that each sighting ray can be used both before and also after the sharp point measurement spot to identify the measurement spot.

Abstract: Several sensors are provided for determining one of a number of physical roperties including pressure, temperature, chemical species, and other physical conditions. In general, the sensors feature a resonant circuit with an inductor coil which is electromagnetically coupled to a transmitting antenna. When an excitation signal is applied to the antenna, a current is induced in the sensor circuit. This current oscillates at the resonant frequency of the sensor circuit. The resonant frequency and bandwidth of the sensor circuit is determined using an impedance analyzer, a transmitting and receiving antenna system, or a chirp interrogation system. The resonant frequency may further be determined using a simple analog circuit with a transmitter. The sensors are constructed so that either the resonant frequency or bandwidth of the sensor circuit, or both, are made to depend upon the physical properties such as pressure, temperature, presence of a chemical species, or other condition of a specific environment.

Abstract: An apparatus and method for sensing temperature within a broad temperature range, includes a fiber optic having an etalon at one end for reflecting light supplied at an opposite end by a pair of light sources operating at different wavelengths. The light sources are either applied to the optical fiber at different times for discriminating between the wavelengths and producing a temperature signal based on the two wavelengths, or the light is simultaneously applied to the optical fiber from both sources and thereafter divided into its component wavelengths before reflected and reference light detectors detect light signals at the different wavelengths. Known etalon/optical fiber based temperature sensors having a usual maximum temperature range of 500° C. are thus modified to increase their range to as much as double this range.

Abstract: An apparatus is provided for visibly outlining an energy zone to be measured by a radiometer. The apparatus includes a laser beam generator and an optical means. The optical means directs the laser beam to the energy zone to form a continuous ring for identifying the energy zone.

Abstract: A surface temperature sensor includes a thermally conductive surface contact means for contacting a surface to be thermally measured and a coil. The coil contains an insulated thermal sensing element in thermal contact with the surface contact means and provides support for the surface contact means.

Abstract: Expanding fluid thermometers are implanted in a body—for example in and adjacent to a cancerous tumor—and are read by x-ray imaging.

Abstract: A measuring technique and method are provided to simultaneously determine the molecular density of several molecular species and the temperature within a closed process room in a melting or combustion process. In such processes in the industry, e.g. in metallurgic process industry, it is important to determine the temperature and the contents within the gas or flame without physically connect to or disturb the process. This has shown to raise large problems especially at high temperatures. The radio signal over a frequency band is measured on the outside of the process room through a window in the mantel covering as a function of frequency and registered on a computer as a radio spectrum. The system is calibrated by using a known signal transmitted through the process room. The spectral lines are identified by their frequency from a database. The temperature is determined from several lines of the same molecular specie and the molecular densities are determined from the intensities of the lines.

Abstract: A clinical thermometer is described, based on the measurement of the infrared radiation emitted by the patient, in which the body temperature of the patient in obtained in a non-invasive way and (normally) without any contact between the thermometer and the patient. During measurement of the temperature, the thermometer (1) is put at a preset distance (d) from the body of the patient, a distance which is normally determined by an optical aiming system consisting of two converging rays of light (5). A thermometer according to the invention may be used to obtain the temperature of the patient also by contact.

Abstract: Methods for analyzing temperature characteristics of an integrated circuit. In one embodiment, a beam of laser light is directed at the back side of an integrated circuit. The intensity level of laser light reflected from the integrated circuit is measured and compared to a reference intensity level. The magnitude of the difference between the reference intensity level and the intensity level of the reflected laser light is indicative of a temperature characteristic of the integrated circuit.

Abstract: A process and cooking area for in-service measurement of temperature in at least one cooking zone of the cooking area with a glass ceramic plate is based on an empirically derived correlation between transmission of light through the glass ceramic plate in a wavelength range of a temperature that is typical of the respective glass ceramic material. The process includes irradiation of the glass ceramic plate in the cooking zone from the inside toward the outside with light in the wavelength range of 700-1500 nm, with the light being reflected at the outer surface of the glass ceramic plate and passing through the glass ceramic plate a second time. Detection of reflected light with a photocell, generates a photocurrent that corresponds to the transmission of the glass ceramic plate in the cooking zone. The temperature of the cooking zone is derived from the derived correlation between the transmission of light of the specified wavelength and the temperature of the glass ceramic plate.

Abstract: An optical method for measuring the temperature of a substrate material with a temperature dependent band edge. In this method both the position and the width of the knee of the band edge spectrum of the substrate are used to determine temperature. The width of the knee is used to correct for the spurious shifts in the position of the knee caused by: (i) thin film interference in a deposited layer on the substrate; (ii) anisotropic scattering at the back of the substrate; (iii) the spectral variation in the absorptance of deposited layers that absorb in the vicinity of the band edge of the substrate; and (iv) the spectral dependence in the optical response of the wavelength selective detection system used to obtain the band edge spectrum of the substrate. The adjusted position of the knee is used to calculate the substrate temperature from a predetermined calibration curve.

Abstract: A contact-type thermometer which is supported by fixing a contact plate having a supporting bar on both sides of an annular elastic member that is formed by connecting both sides of an elastic sheet. A temperature sensitive portion is arranged between the annular elastic member and the contact plate to hold a portion attached to the contact plate of the annular elastic member and the opposite side using the support. In addition, clearance fixing the supporting bar into a guide hole that is long from side to side in a holder such that the contact plate contacts an object to be temperature measured in parallel. The elastic force acting on the back of the contact plate under the condition of the elastically deforming annular elastic member becomes slightly flat, wherein the contact plate does not float more than a distance to the surface of the object to be temperature measured, so the temperature can be accurately measured.

Abstract: Several sensors are provided for determining one of a number of physical properties including pressure, temperature, and other physical conditions. In general, the sensors feature a resonant circuit with an inductor coil which is electromagnetically coupled to a transmitting antenna. When an excitation signal is applied to the antenna, a current is induced in the sensor circuit. This current oscillates at the resonant frequency of the sensor circuit. The resonant frequency and bandwidth of the sensor circuit is determined using an impedance analyzer, a transmitting and receiving antenna system, or a chirp interrogation system. The resonant frequency may further be determined using a simple analog circuit with a transmitter. The sensors are constructed so that either the resonant frequency or bandwidth of the sensor circuit, or both, are made to depend upon the physical properties such as pressure, temperature, presence of a chemical species, or other condition of a specific environment.

Abstract: A shutter 3 which can be momentarily held open and immediately closed, is disposed adjacent to an aperture stop 4 in an optical system, and a temperature sensor 5 is provided for measuring the temperature of the shutter 3. The blades of the shutter 3 can be utilized as a reference heat source. With the shutter 3 disposed adjacent to the aperture stop 4, the optical equivalence in the case when a reference heat source is inserted and in the other case, is not spoiled. A shutter 202 which can be readily momentarily held open and immediately closed under control of a shutter controller 203, is disposed at the optical pupil position of a combination lens 201. When the shutter 202 is closed, thermal image data is stored in a shading memory 208.

Abstract: A microprobe for thermoelectric microscopic measurements comprises a probe body (11), which consists of a doped or intrinsically conductive semiconductor material and has at least one thermoelectric contact surface (19). The probe body (11) can carry a metal or semiconductor layer (17), which is separated from the probe body (11) by an insulating layer (16) except in the area of the thermoelectric contact surface (19). A process for the production of a microprobe for thermoelectric microscopic measurements is also given.

Abstract: A sensor is provided for precisely measuring the composition of mixtures of hydrogen and oxygen gas. The sensor has an active surface, at which hydrogen and oxygen are catalytically converted into water. A transport inhibiting barrier is disposed on the active surface. The heat released during the conversion is measured, and is indicative of the mixture composition.

Abstract: A method for contactless continuous temperature measurement of the solidification of metal alloys is described, according to which the melt to be analysed is rotated about a vertical axis in a cylindrical and concentrically positioned test piece (2), and the temperature measurement is effected with the aid of an optical temperature meter (6). Upon rotation, a parabola-shaped inner surface forms, and the temperature measurement is performed on a part of the upper interface of the parabola.

Abstract: A high temperature sensing probe includes an optical fiber or rod having a distal end and a proximal end. The optical fiber or rod has a coating secured to the distal end thereof, wherein the coating is capable of producing a Raman spectrum when exposed to an exciting radiation source.

Abstract: Method and apparatus for the optical determination of the temperature of a gaseous mixture, the method comprising the stages consisting:of exciting in the infrared range the molecules of a gas of said mixture, from a first vibrational level towards a second vibrational level;of allowing the rotational relaxation of said molecules between the different rotational sub-levels of said second vibrational level;of measuring the ratio of the populations of molecules located at two of said rotational sub-levels; andof deducing from said ratio the temperature of the gaseous mixture.

Abstract: The invention relates to a method and apparatus for determining the internal temperature and the coefficient of internal thermal conductivity of a structure. In both cases, the surface temperature and ambient temperature of an object are measured from both sides of two structures whose thermal conductivities are known. On the basis of the measured temperature values, the internal temperature or the coefficient of internal thermal conductivity of the object is determined from the function of the heat flux. Thereafter the unknown thermal conductivity or the unknown internal temperature of the object is eliminated from the solutions, and the internal temperature or the coefficient of internal thermal conductivity of the object is determined on the basis of the combined solution.

Abstract: Methods and apparatus are disclosed for measuring the temperature distribution or profile of a specimen at high resolution. An apparatus comprises a thin-film membrane formed of a first thermo-electrically conductive material, the membrane having a first major surface for holding the specimen. The apparatus also comprises a probe having a tip radius operable to contact a second major surface of the membrane opposite the first major surface. The tip radius comprises a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force (TEMF) between the tip radius and the thin-film membrane. The probe can be scanned across the second major surface; the TEMF can be measured, processed, and displayed to produce a temperature profile of the specimen.

Abstract: A temperature sensor which contacts with a curved-surface body to be measured to sense a temperature thereof is provided with a support member having a bow-shaped surface; a thin film strung and laid between both ends in a direction of curvature (e.g., bow-shaped direction) of the bow-shaped surface; and a heat sensitive element disposed at a portion of the thin film. The portion being opposed to the bow-shaped surface. Also, the space portion side of the heat sensitive element may be coated with aluminum foil and a protect plate formed of aluminum, phosphorous bronze or copper is disposed on the body to be measured side of the heat sensitive element. Further, the temperature sensor may be incorporated in an apparatus that fixes the temperature sensors to the bow-shaped surface.

Abstract: Apparatus and methods for improved thermal proximity imaging are provided. A data storage medium surface is moved relative to a sensor, in one embodiment a magnetoresistive read/write element. Topographical variations on the storage medium induce temperature changes in the sensor. These temperature changes are monitored to detect the location and nature (e.g., height) of the topographical variations on the medium surface. A feedback circuit using an impedance bridge is disclosed for sensing instantaneous changes in the temperature of the sensor, correcting for the changes and, therefore, keeping the temperature of the sensor substantially constant. By keeping the temperature of the sensor constant, the topographical variations can be detected without any adverse impacts of the surrounding thermal environment on the detection response time.

Abstract: An apparatus and method for reading an information signal from a magnetic storage medium using a magnetoresistive (MR) element, modifying the signal such that a thermal component of the signal representing a thermal response of the MR element is degraded, and altering the modified signal to produce a restored thermal signal substantially representative of the thermal component of the signal read from the storage medium. The information signal induced in the MR element is communicated from the MR element to an arm electronics (AE) module having a highpass filtering behavior. The AE module passes content of the information signal other than the thermal component content, thereby degrading the thermal component of the information signal. An inverse filter, implemented using an infinite impulse response (IIR) filter, receives the highpass filtered signal from the AE module and produces a restored thermal signal substantially representative of the thermal component of the information signal.

Abstract: A sensor (100) for measuring semiconductor wafer (10) temperature in semiconductor processing equipment (30), comprising a first laser (104) to provide a first laser beam at a first wavelength and a second laser (106) to provide a second laser beam at a second wavelength. The sensor also includes a laser driver (108) and an oscillator (110) to modulate the wavelength of the first and second laser beams as the laser beams are directed to and reflected from the wafer (10), and a detector module (130) to measure the change in specular reflectance of the wafer (10) resulting from the modulation of the wavelength of the first and second laser beams.

Abstract: Device and method for testing an optical element (E) to determine ability to withstand heating by a high-energy luminous beam. The contact of a point (11) is applied to the optical element and is heated to a specific temperature to simulate radiation. The contact point includes a dog point having a sectional configuration similar to a track of a simulated radiation beam. The heat can be adjusted and the temperature sensed.

Abstract: A temperature-indicating device for use with a barrier having a first side and an opposite second side, the device including a temperature sensitive means located at the first side of the barrier, a thermal conductor for transferring heat from the second side of the barrier to the temperature sensitive means, and a temperature indicator disposed on the first side of the barrier, the temperature indicator for indicating on the first side of the barrier a change in temperature occurring on the second side of the barrier.

Abstract: A temperature sensing assembly for a heat exchanger flow tube comprises a housing having a thin heat transmitting wall section in heat conducting engagement with a flow tube, and a relatively thick, heat insulating structural support wall section; a thermally responsive signal producing assembly comprising an electrical signal producing element in heat transfer relationship with the heat transmitting wall section; a heat transfer element between the housing and heat exchanger flow tube tending to maintain the flow tube and heat insulating wall section temperatures the same; and an insulating jacket surrounding part of the heat transfer element.

Abstract: A method and apparatus for enabling the use of optical techniques for temperature measurement of a semiconducting substrate coated with an optically opaque overlayer. A reflective mirror structure is inserted between the semiconducting substrate and the optically opaque overlayer. The reflective structure prevents the overlayer from absorbing light transmitted through the semiconducting substrate and instead reflects the light, thereby restoring the substrate front-surface reflectivity required for temperature measurement analysis by optical techniques such as absorption edge reflectance spectroscopy.

Abstract: A method and apparatus for measuring the temperature profile of a surface exhibiting spatial and/or temporal variations in temperature, e.g., the surface of a machine or a biological system, is disclosed. The inventive method involves forming a layer of chemiluminescent material in thermal contact with the surface. The chemiluminescent activity is selected to be a function of temperature by suitable dye choices. The resulting luminescence is detected.