In Spaced Noncontact Relationship To Specimen Patents (Class 374/120)
  • Patent number: 5645351
    Abstract: A temperature measuring method and apparatus for measuring temperature of at least one measuring point of a sample. At least one measuring point on a surface of a sample at least with a first light. A displacement of the at least one measuring point on the surface of the sample occurs from thermal expansion of the sample in response to the first light impinging thereon and a signal indicative of the displacement is produced. The temperature of the at least one measuring point of the sample is determined from the signal.
    Type: Grant
    Filed: December 27, 1994
    Date of Patent: July 8, 1997
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Shigeki Hirasawa, Yoko Saito, Takanori Ninomiya, Mineo Nomoto
  • Patent number: 5645349
    Abstract: A noncontact active infrared sensor is provided with bifurcated sensing elements. A first element is uniquely exposed to the remote object, thereby establishing a radiative flux. A second element is configured in the same local environment as that of the first element but isolated from radiation from the remote object. The heat transfer of both elements is compared and that component of heat transfer corresponding to flux with the remote object is isolated and converted into a temperature signal. The sensor system advantageously incorporates individual thermal control units onto both sensor elements to accurately control salient thermal transfers while thermally decoupling the sensor elements. This provides for a more accurate reading of the temperature of the remote object.
    Type: Grant
    Filed: January 10, 1994
    Date of Patent: July 8, 1997
    Assignee: Thermoscan Inc.
    Inventor: Jacob Fraden
  • Patent number: 5639162
    Abstract: In a temperature distribution measuring apparatus which projects pulsed-light into an optical fiber, measures Raman spectrum of backscattered light occurred in the optical fiber, and obtains a temperature distribution along the optical fiber, to improve the positional resolution, it is necessary to narrow the width of the incident pulsed-light. A response of the backscattered light to a pulsed-light of a finite width is considered to be convolution and deconvolution of the measured value of the backscattered light is performed to obtain an impulse response. Deconvolution which is an inverse transform requires a waveform of the incident light and which is previously measured. When deconvolution is performed by using an inverse matrix of the incident light, it is necessary to calculate the inverse matrix by means of an iteration method.
    Type: Grant
    Filed: September 15, 1995
    Date of Patent: June 17, 1997
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yukio Sai
  • Patent number: 5624190
    Abstract: A method of measuring the surface temperature of an object. The method includes performing ellipsometric measurements on the object in order to determine at least first and second photon energies (E.sub.1, E.sub.2) for an electromagnetic beam at which measurements are respectively substantially independent of temperature and dependent on temperature. The method further includes creating and directing to the object, an electromagnetic incident beam including at least the first and second photon energies (E.sub.1, E.sub.2). The change in polarization at the first photon energy (E.sub.1) is measured and the thickness of the layer of material is determined on the basis of this measurement. The surface temperature of the object can then be determined on the basis of the measured change in polarization at the second photon energy (E.sub.2) of the beam, while taking account of the thickness of the layer of material.
    Type: Grant
    Filed: July 26, 1995
    Date of Patent: April 29, 1997
    Assignee: Ecole Centrale de Lyon
    Inventors: Jacques Joseph, Yao-Zhi Hu, Eugene Irene
  • Patent number: 5602820
    Abstract: The present invention discloses apparatus and method for decoding high density data encoded in a digital recording media as a series of tags comprising an information bit pattern including a tracking bit pattern. To this end, the invention preferably accesses the data by way of an interferometric near field microscope.
    Type: Grant
    Filed: August 24, 1995
    Date of Patent: February 11, 1997
    Assignee: International Business Machines Corporation
    Inventors: Hemantha K. Wickramasinghe, Frederic Zenhausern
  • Patent number: 5576224
    Abstract: A method and structure for sensing data such as temperature with respect to objects such as silicon wafers undergoing fabrication or other processes involve the use of a monitor element of material and configuration similar to that of the objects being processed. A structure such as a closed loop or segment of a spiral may be formed on the surface of the monitor element, and acts as a secondary coil when brought into operative relation with a transformer structure which includes a primary coil, a current source and a sensing device. The sensing device senses variations in the electrical characteristics in the primary coil, caused by the presence of the monitor element, and can thereby determine the temperature or other desired data relating to the monitor element, which is substantially the same as comparable data for the objects being processed.
    Type: Grant
    Filed: June 2, 1995
    Date of Patent: November 19, 1996
    Assignees: AT&T Global Information Solutions Company, Hyundai Electronics America, Symbios Logic Inc.
    Inventors: James P. Yakura, Richard K. Cole, Matthew S. Von Thun, Crystal J. Hass, Derryl D. J. Allman
  • Patent number: 5568978
    Abstract: An optical method for measuring the temperature of a substrate material with a temperature dependent bandgap. The substrate is illuminated with a broad spectrum lamp and the bandgap is determined from the spectrum of the diffusely scattered light. The spectrum of the light from the lamp is sufficiently broad that it covers the spectral range above and below the bandgap of the substrate. Wavelengths corresponding to photon energies less than the bandgap of the substrate are transmitted through the substrate and are reflected from the back surface of the substrate as well as from the front surface while the wavelengths corresponding to photon energies larger than the bandgap are reflected only from the front surface. If the front surface is polished the front surface reflection will be specular while if the back surface is rough the reflection from the back surface will be non-specular. The back surface reflection is detected with a detector in a non-specular location.
    Type: Grant
    Filed: November 21, 1994
    Date of Patent: October 29, 1996
    Inventors: Shane R. Johnson, Christian Lavoie, Mark K. Nissen, J. Thomas Tiedje
  • Patent number: 5564832
    Abstract: A birefringent active fiber laser sensor includes one or more fiber lasers 12, 14, 16, each having a pair of Bragg gratings 18, 20, embedded in a fiber 10 and excited by a common pump light 30. At least one of the lasers 12, 14, 16 has a laser cavity wit a predetermined birefrigence and a lasing light at a first lasing frequency along a first polarization axis, and at a second fusing frequency along a second polarization axis. A difference frequency between the first and the second lasing frequencies is related to the magnitude of the birefringence, and the birefringence varies in response to a perturbation. Output light 104 from each of the lasers 12,14,16 is fed to a defraction grating 106 which splits the beam 104 into different wavelength groups, each group having the two lasing frequencies and polarizations of a given laser.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: October 15, 1996
    Assignee: United Technologies Corporation
    Inventors: Gary A. Ball, Gerald Meltz
  • Patent number: 5549756
    Abstract: A temperature measurement system for use in a thin film deposition system is based on optical pyrometry on the backside of the deposition substrate. The backside of the deposition substrate is viewed through a channel formed in the susceptor of the deposition system. Radiation from the backside of the deposition substrate passes through an infrared window and to an infrared detector. The signal output by the infrared detector is coupled to electronics for calculating the temperature of the deposition substrate in accordance with blackbody radiation equations. A tube-like lightguide shields the infrared detector from background radiation produced by the heated susceptor.
    Type: Grant
    Filed: February 2, 1994
    Date of Patent: August 27, 1996
    Assignee: Applied Materials, Inc.
    Inventors: Carl A. Sorensen, Wendell T. Blonigan
  • Patent number: 5527110
    Abstract: A method and apparatus for mapping the character and location of small surface variations on a planar surface. Energy is supplied to an object in close proximity to the planar surface to thereby raise the temperature of the object. The object is moved with respect to the planer surface substantially constant. A decrease in temperature of the object is detected when it is in proximity to the variation to define the location and character of the variation. The energy supply may be thermal energy or optical energy but preferably is electrical energy which heats a resistive element. Preferably, the object is the magnetoresistive head of a disk drive assembly. The surface may be that of a magnetic recording material. The change in temperature is detected by monitoring the resistance of the magnetoresistive coil of the head. The energy may be supplied in pulses to obtain higher peek temperatures while avoiding mechanical distortion of the object.
    Type: Grant
    Filed: April 30, 1993
    Date of Patent: June 18, 1996
    Assignee: International Business Machines Corporation
    Inventors: David W. Abraham, Anthony P. Praino, Mark E. Re, Hemantha K. Wickramasinghe
  • Patent number: 5524984
    Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit at least one laser beam against a surface whose temperature is to be measured and positioning said laser beam about the energy zone to visibly outline said energy zone. The apparatus comprises a laser sighting device adapted to emit at least one laser beam against the surface and means to position said laser beam about the energy zone to visibly outline said energy zone.
    Type: Grant
    Filed: November 28, 1994
    Date of Patent: June 11, 1996
    Inventors: Milton B. Hollander, W. Earl McKinley
  • Patent number: 5513913
    Abstract: A remote active multipoint fiber laser sensor includes a plurality of fiber lasers 12,14,16, each having a pair of Bragg gratings 18,20, embedded in a fiber 10 and excited by a common pump light 30. The lasers 12,14,16 lase at different longitudinal modes (lasing wavelengths) and emit light 32,34,36, at their respective wavelengths .lambda.1,.lambda.2,.lambda.n. The lasing wavelength of each laser shifts due to perturbations, such as strain or temperature, applied thereto. The output light 32,34,36 is fed to a spectrum analyzer 50 where the wavelength shift is analyzed. A signal processor 54 reads the wavelength shift and provides a signal on lines 56 indicative of the perturbation at each of the lasers/sensors 12-16. Alternatively, a single laser may be used as a single sensor. Alternatively, birefringent fiber may be used as the fiber cavities 21 and the two polarizations are beat together to form a lower difference or "beat" frequency, thereby allowing lower frequency detection devices to be used.
    Type: Grant
    Filed: May 28, 1993
    Date of Patent: May 7, 1996
    Assignee: United Technologies Corporation
    Inventors: Gary A. Ball, Gerald Meltz, Leon A. Newman
  • Patent number: 5474381
    Abstract: A sensor (100) for measuring semiconductor wafer (10) temperature in semiconductor processing equipment (30), comprising a first laser (104) to provide a first laser beam at a first wavelength and a second laser (106) to provide a second laser beam at a second wavelength. The sensor also includes laser driver (108) and oscillator (110) to modulate the wavelength of the first and second laser beams as the laser beams are directed to and reflected from the wafer (10), and detector module (130) to measure the change in specular reflectance of the wafer (10) resulting from the modulation of the wavelength of the first and second laser beams.
    Type: Grant
    Filed: November 30, 1993
    Date of Patent: December 12, 1995
    Assignee: Texas Instruments Incorporated
    Inventor: Mehrdad M. Moslehi
  • Patent number: 5466614
    Abstract: A method and structure for sensing data such as temperature with respect to objects such as silicon wafers undergoing fabrication or other processes involve the use of a monitor element of material and configuration similar to that of the objects being processed. A structure such as a closed loop or segment of a spiral may be formed on the surface of the monitor element, and acts as a secondary coil when brought into operative relation with a transformer structure which includes a primary coil, a current source and a sensing device. The sensing device senses variations in the electrical characteristics in the primary coil, caused by the presence of the monitor element, and can thereby determine the temperature or other desired data relating to the monitor element, which is substantially the same as comparable data for the objects being processed.
    Type: Grant
    Filed: September 20, 1993
    Date of Patent: November 14, 1995
    Assignees: AT&T Global Information Solutions Company, Hyundai Electronics America
    Inventors: James P. Yakura, Richard K. Cole, Matthew S. Von Thun, Crystal J. Hass, Derryl D. J. Allman
  • Patent number: 5454641
    Abstract: A temperature sensing assembly for a heat exchanger flow tube comprises a housing having a thin heat transmitting wall section in heat conducting engagement with a flow tube, and a relatively thick, heat insulating structural support wall section; a thermally responsive signal producing assembly comprising an electrical signal producing element in heat transfer relationship with the heat transmitting wall section; an anchoring arrangement for positioning the signal producing element in heat exchange relationship with the heat transmitting wall section; a heat transfer element between the housing and heat exchanger flow tube tending to maintain the flow tube and heat insulating wall section temperatures the same; and an insulating jacket surrounding part of the heat transfer element.
    Type: Grant
    Filed: January 13, 1994
    Date of Patent: October 3, 1995
    Assignee: Ranco Incorporated of Delaware
    Inventors: Thomas W. Parker, Charles D. Grant
  • Patent number: 5388909
    Abstract: An optical method and apparatus for measuring the temperature of a substrate material with a temperature dependent bandgap. The substrate is illuminated with a broad spectrum lamp and the bandgap is determined from the spectrum of the diffusely scattered light. The spectrum of the light from the lamp is sufficiently broad that it covers the spectral range above and below the bandgap of the substrate. Wavelengths corresponding to photon energies less than the bandgap of the substrate are transmitted through the substrate and are reflected from the back surface of the substrate as well as from the front surface while the wavelengths corresponding to photon energies larger than the bandgap are reflected only from the front surface. If the front surface is polished the front surface reflection will be specular while if the back surface is rough the reflection from the back surface will be non-specular. The back surface reflection is detected with a detector in a non-specular location.
    Type: Grant
    Filed: September 16, 1993
    Date of Patent: February 14, 1995
    Inventors: Shane R. Johnson, Christian Lavoie, Mark K. Nissen, J. Thomas Tiedje
  • Patent number: 5388907
    Abstract: A radiation thermometer includes a temperature sensor for detecting an intensity of infrared radiation of light, a measuring optical system for introducing light from an object to the temperature sensor, a calculator for calculating a temperature of the object based on a detected infrared radiation intensity, a viewfinder for allowing the operator to visually recognize the object, a viewfinder optical system for introducing light from the object to the viewfinder, a focus detector for detecting focus condition of the measuring and viewfinder optical systems, and a controller responsive to the focus detector for controlling the measuring and viewfinder optical systems so as to come into a desired focus condition.
    Type: Grant
    Filed: October 28, 1992
    Date of Patent: February 14, 1995
    Assignee: Minolta Co., Ltd.
    Inventors: Satoshi Aoyama, Masayuki Yamada, Tatsuaki Kusatsugu, Seishiro Itoh, Hiroji Tsujimura
  • Patent number: 5377126
    Abstract: Apparatus and method for non-contact temperature measurement of a film growing on a substrate which accounts for the change in emissivity due to the change in film thickness. The system employs an adaptively calibrated pyrometer wherein the substrate emittance is continuously computed so that the temperature measurement is accurate regardless of the emittance variation. The new system is easily constructed by adding data processing system software and hardware to conventional pyrometers.
    Type: Grant
    Filed: September 13, 1991
    Date of Patent: December 27, 1994
    Assignee: Massachusetts Institute of Technology
    Inventors: Markus I. Flik, Alfredo Anderson, Byungin Choi
  • Patent number: 5368392
    Abstract: Method and apparatus are provided for visibly outlining the energy zone to be measured by a radiometer. The method comprises the steps of providing a laser sighting device on the radiometer adapted to emit at least one laser beam against a surface whose temperature is to be measured and positioning said laser beam about the energy zone to visibly outline said energy zone. The apparatus comprises a laser-sighting device adapted to emit at least one laser beam against the surface and means to position said laser beam about the energy zone to visibly outline said energy zone.
    Type: Grant
    Filed: September 17, 1993
    Date of Patent: November 29, 1994
    Assignee: Omega Engineering, Inc.
    Inventors: Milton B. Hollander, W. Earl McKinley
  • Patent number: 5350899
    Abstract: A method and apparatus are provided for measuring the temperature of articles such as semiconductor wafers in a sealed chamber of a processing apparatus such as a batch preheating module of a semiconductor wafer processing cluster tool. Wafers of generally known nominal diameter and coefficient of thermal expansion are placed at a known initial temperature into a processing chamber which is then sealed. A pair of beams of parallel light are passed by opposite edges of the wafer and the uninterrupted light from both beams are detected and summed. When the wafer is heated in processing, light from the beams is measured again. Expansion of the wafers changes the amount of uninterrupted light detected, and the changed amount of light is measured. From the measurement, the initial temperature, the nominal diameter and the known coefficient of expansion, processing temperature is calculated and displayed or used to control chamber heaters.
    Type: Grant
    Filed: April 15, 1992
    Date of Patent: September 27, 1994
    Inventors: Hiroichi Ishikawa, Michael S. Kolesa
  • Patent number: 5332316
    Abstract: The invention is drawn to methods and devices for measuring temperature with a simple probe, a single interrogating light source and a single photodetector in a manner that the same probe can be used for simultaneously sensing another physical parameter, using the same interrogating light source and the same photodetector. The invention also allows the use of a single probe for measuring temperature in two independent physical modes, using a single interrogating light source and a single photodetector. In a preferred embodiment the probe includes a photoluminescent material having a luminescence decay time which decreases substantially with increasing temperature over a temperature range within which its luminescence quantum efficiency remains approximately constant or varies only minimally.
    Type: Grant
    Filed: January 28, 1993
    Date of Patent: July 26, 1994
    Inventor: Marcos Y. Kleinerman
  • Patent number: 5326393
    Abstract: A moldable material, which either has dipoles or other charged particles therein, or is susceptible to their creation, is introduced into a mold or is passed through a die. The material is then subjected to a polarization medium until either at least some of the dipoles or other charged particles are oriented in the direction of the polarization medium, or until at least some dipoles or other charged particles are created thereby. Thereafter, the material is permitted to cool. Once cooled, the molded material is separated from the mold or die. The effect of polarizing the moldable material is then analyzed by permitting an at least partial relaxation of the dipoles or other charges therein which were polarized or created. This relaxation results in a measurable current which is related to the actual temperature of the material at the time the polarization medium was applied.
    Type: Grant
    Filed: March 5, 1993
    Date of Patent: July 5, 1994
    Assignee: Solomat Partners, L.P.
    Inventor: Jean-Pierre Ibar
  • Patent number: 5322361
    Abstract: A method and apparatus for measuring temperature by subjecting, to the temperature to be measured, a light-transmissive body of a material whose dimensions change in response to temperature, directing first rays of light from a light source through a first path including a predetermined distance of travel through the light-transmissive body, simultaneously directing second rays of light from the light source through a second path, parallel to the first path and of a linear length equal to that of the first path, but not including the predetermined distance of travel through the light transmissive body, and measuring the change in phases between the first and second light rays at the ends of the first and second paths, to thereby provide a measurement of the temperature to which the light-transmissive body was subjected.
    Type: Grant
    Filed: January 28, 1993
    Date of Patent: June 21, 1994
    Assignee: C.I. Systems (Israel) Ltd.
    Inventors: Dario Cabib, Michael E. Adel
  • Patent number: 5294200
    Abstract: A device for measuring the temperature of an external moving filament is disclosed. The device includes dual thermal sinks or reference bodies; each reference body has two heat flow sensors that are matched in sensitivity and are connected in series. By utilizing dual thermal reference bodies, which are maintained at different temperatures, the device yields the absolute temperature of the filament by measuring the temperatures of the referenced bodies and the heat flow rates between each of the reference bodies and the filament. The device automatically calculates the proportionality constant between the heat flow rates and the temperature differences between the filament and the reference bodies and thus calculates the filament temperature. Each heat flow sensor has a row of sensitive elements or active junction lines that is not parallel to the path of the filament.
    Type: Grant
    Filed: March 30, 1992
    Date of Patent: March 15, 1994
    Assignee: Luxtron Corporation
    Inventor: Dieter L. Rall
  • Patent number: 5263776
    Abstract: Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.
    Type: Grant
    Filed: September 25, 1992
    Date of Patent: November 23, 1993
    Assignee: International Business Machines Corporation
    Inventors: David W. Abraham, William M. Holber, Joseph S. Logan, Hemantha K. Wickramasinghe
  • Patent number: 5249865
    Abstract: An interferonmetric temperature measurement system is described for determining the temperature of a sample. The system comprises three detectors for measuring various intensities of a beam of electromagnetic radiation reflected off the sample and circuitry for determining the temperature from the intensities. The detectors measure the intensity of the beam and two orthogonally polarized components of the beam.
    Type: Grant
    Filed: April 27, 1992
    Date of Patent: October 5, 1993
    Assignee: Texas Instruments Incorporated
    Inventors: Ajit P. Paranjpe, Steven A. Henck, Walter M. Duncan
  • Patent number: 5221142
    Abstract: An apparatus and method for determining the temperature of an object, such as a semiconductor wafer by measuring the physical change in a dimension of the semiconductor wafer is disclosed. This physical change is then correlated to the temperature using the coefficient of thermal expansion for the wafer.
    Type: Grant
    Filed: May 20, 1991
    Date of Patent: June 22, 1993
    Assignee: Peak Systems, Inc.
    Inventor: Kenneth A. Snow
  • Patent number: 5219226
    Abstract: An imaging and temperature monitoring system (10) is disclosed for displaying an image of an environment (E), along with information regarding the temperature of select regions (R) within the environment. The system includes a sensor head (12) equipped with a video imager (26) for producing a video image of the environment. The sensor head also includes a pyrometer (22) mounted on a computer-controlled translation stage (24), which allows the pyrometer to directly collect temperature information from the various regions. The combined imaging and temperature monitoring functions are advantageously achieved without tradeoffs in the performance of either function.
    Type: Grant
    Filed: October 25, 1991
    Date of Patent: June 15, 1993
    Assignee: Quadtek, Inc.
    Inventor: Richard K. James
  • Patent number: 5201582
    Abstract: The instrument has a focal plane array of infrared sensors of the integrating type such as a multiplexed device in which a charge is built up on a capacitor which is proportional to the total number of photons which that sensor is exposed to between read-out cycles.The infrared sensors of the array are manufactured as part of an overall array which is part of a micro-electronic device. The sensor achieves greater sensitivity by applying a local offset to the output of each sensor before it is converted into a digital word. The offset which is applied to each sensor will typically be the sensor's average value so that the digital signal which is periodically read from each sensor of the array corresponds to the portion of the signal which is varying in time. With proper synchronization between the cyclical loading of the test object and the frame rate of the infrared array the output of the A/D converted signal will correspond to the stress field induced temperature variations.
    Type: Grant
    Filed: May 15, 1992
    Date of Patent: April 13, 1993
    Assignee: Stress Photonics, Inc.
    Inventor: Jon R. Lesniak
  • Patent number: 5181778
    Abstract: A method and apparatus for the in-process measurement of internal particulate temperature utilizing ultrasonic tomography techniques to determine the speed of sound through a specimen material. Ultrasonic pulses are transmitted through a material, which can be a multi-phase material, over known flight paths and the ultrasonic pulse transit times through all sectors of the specimen are measured to determine the speed of sound. The speed of sound being a function of temperature, it is possible to establish the correlation between speed of sound and temperature, throughout a cross-section of the material, which correlation is programmed into a computer to provide for a continuous in-process measurement of temperature throughout the specimen.
    Type: Grant
    Filed: September 30, 1991
    Date of Patent: January 26, 1993
    Assignee: EG&G Idaho, Inc.
    Inventor: Laurence S. Beller
  • Patent number: 5166080
    Abstract: The thickness of a thin film on a substrate surface is determined by measuring its emissivity and temperature with a non-contact optical technique and then calculating the film thickness from these measurements. The thickness of the film can be determined by this technique in situ, while it is being formed and substantially in real time, thus allowing the measurement to control the film forming process. This has application to controlling the formation of dielectric and other material layers on a semiconductor substrate in the course of manufacturing electornic integrate circuits, including automatically terminating the process at its endpoint when the layer has reached a desired thickness.
    Type: Grant
    Filed: April 29, 1991
    Date of Patent: November 24, 1992
    Assignee: Luxtron Corporation
    Inventors: Charles W. Schietinger, Bruce E. Adams
  • Patent number: 5161890
    Abstract: A method is disclosed for an optical remote measurement of the air temperature at a distance by laser excitation, in which, by means of a laser generator and by excitation of energy band transitions in the Schumann-Runge band of molecular oxygen, fluorescence of the oxygen is caused, the intensities of the fluorescence induced in two different bands are measured, the ratio of these intensities is determined and the temperature is derived therefrom wherein, on a section of appreciable depth, two absorption spectral lines are excited which at least overlap and which belong respectively to two different Schumann-Runge oxygen bands and the emission spectral line of the laser generator has a very small width with respect to that of the absorption spectral lines and its central frequency is adjusted to be substantially close to the maxima of the two absorption spectral lines.
    Type: Grant
    Filed: February 15, 1991
    Date of Patent: November 10, 1992
    Assignee: Sextant Avionique
    Inventor: Henri Fima
  • Patent number: 5132922
    Abstract: An apparatus and method for non-contact temperature measurement of an object, using least-squares-based multiwavelength pyrometry techniques. Radiances from an object are detected by a spectrograph/detector apparatus and are converted into electronic signals readable by a computer. The computer then operates on these signals as data to be curve-fit, using least squares analysis, to a predetermined theoretical function for the dependence of the radiance on the wavelength. When the computer has minimized the least-squares difference function, the computer identified a parameter representing the temperature and reports this value to the user, along with a collaterally calculated maximum error in the temperature estimate.
    Type: Grant
    Filed: March 20, 1991
    Date of Patent: July 21, 1992
    Assignee: Massachusetts Institute of Technology
    Inventors: Mansoor A. Khan, Charly Allemand, Thomas W. Eagar
  • Patent number: 5118200
    Abstract: Remote measurement of temperature of a process chamber provided with a substrate exhibiting a temperature dependent band gap which substrate is illuminated by a source of continuous spectrum light with a spectrum which overlaps the band gap edge of the substrate. The light which exits the substrate is focused by a lens and is picked up by a fiber optic which takes it to a spectrometer where the spectrum is analyzed to ascertain the intensity versus wavelength histograph for exit rays in the wavelength region of the equivalent band gap of the substrate. The wavelength at the point of infection in the region of band gap edge of the substrate in the histograph of the wavelength versus intensity characteristic of exit rays determines the real time substrate temperature from predetermined calibration data which correlates the wavelength at the point of inflection to actual temperature of the substrates.
    Type: Grant
    Filed: June 13, 1990
    Date of Patent: June 2, 1992
    Assignee: Varian Associates, Inc.
    Inventors: Dimitry M. Kirillov, Ronald A. Powell
  • Patent number: 5098197
    Abstract: Method and device for direct, non-contact temperature measure of a body. A laser beam is reflected from the surface of the body and detected along with the Planck radiation. The detected signal is analyzed using signal correlation technique to generate an output signal proportional to the Johnson noise introduced into the reflected laser beam as a direct measure of the absolute temperature of the body.
    Type: Grant
    Filed: January 30, 1989
    Date of Patent: March 24, 1992
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Robert L. Shepard, Theron V. Blalock, Michael J. Roberts, Lonnie C. Maxey
  • Patent number: 5028145
    Abstract: A temperature measuring arrangement for a revolving roll which includes a contactless temperature sensor by means of which the temperature of an annular peripheral zone of the roll situated outside the operating zone of the roll is measured contactlessly. Upon detection of a deviation from a given temperature or given time response of the temperature, a contact temperature sensor which is active only briefly is, by means of a control unit, brought into abutment, using a movement drive, at a point inside the operating zone of the roll.
    Type: Grant
    Filed: September 5, 1989
    Date of Patent: July 2, 1991
    Assignee: Eduard Kusters Maschinenfabrik GmbH
    Inventors: Werner Borkenhagen, Lambert Berends
  • Patent number: 5021980
    Abstract: A method for determination of the true temperature T and true radiative emissivity of a body at temperature T, using measurements of total energy radiated by the body in two or more adjacent wave length ranges .lambda..sub.1 .ltoreq..lambda..ltoreq..lambda..sub.2 and .lambda..sub.3 .ltoreq..lambda..ltoreq..lambda..sub.4 ; the wave length ranges may partially overlap or may be adjacent but non-overlapping.
    Type: Grant
    Filed: February 21, 1989
    Date of Patent: June 4, 1991
    Assignee: LSI Logic Corporation
    Inventors: Paul Poenisch, Keith Hansen
  • Patent number: 4989990
    Abstract: A method and arrangement for providing an indication of a temperature state of open container bodies during in-line handling. The container bodies are conveyed along a conveyance path, with the openings of the container bodies being freely accessible. A pyro-electric detector is positioned along the conveyance path of the openings facing the conveyance path of the openings. An opening of one of the containers is detected upon reaching a position opposite the pyro-electric detector, and the pyro-electric detector measures heat radiation from the opening detected as having reached the position opposite the pyro-electric detector. The heat radiation measured determines the overall thermal energy content of the open container body as the temperature state thereof.
    Type: Grant
    Filed: April 21, 1989
    Date of Patent: February 5, 1991
    Inventor: Martin Lehmann
  • Patent number: 4941753
    Abstract: High resolution absorption microscopy, spectroscopy and similar applications are implemented by providing for a measurement tip which is maintained spaced from a sample under investigation sufficiently close so as to equalize thermal levels in the tip and the sample; generally within about 10 Angstroms. Energy is applied to the sample being investigated and either a steady state or dynamic junction potential is measured. The junction potential is representative of local sample temperature. The close separation can be maintained by techniques employed in scanning tunneling microscopy, atomic force microscopy or capacitance microscopy. In the event the close separation is maintained using scanning tunneling microscopy techniques, then a switching arrangement is provided for connecting a conductive film (either of the sample or supported on a sample) to either a suitable potential or ground and simultaneously connecting the STM tip either in a feedback loop or to a device for measuring the junction potential.
    Type: Grant
    Filed: April 7, 1989
    Date of Patent: July 17, 1990
    Assignee: International Business Machines Corp.
    Inventor: Hemantha K. Wickramasinghe
  • Patent number: 4907894
    Abstract: An apparatus suitable for measuring the surface temperature of a moving strip at an elevated temperature comprises a sensing head connected to a pneumatic actuator through a ball joint. Air under pressure is supplied to a chamber in the head and flows through a ring of passages to form an air cushion between the sensing head and the surface S whose temperature is to be measured. Part of the air flows inward across the surface S to a central aperture in the bottom plate of the head and its temperature is measured by a thermocouple in the aperture. The aperture leads to a cavity above plate and the cavity is vented by passages. The temperature recorded by the thermocouple is a measure of the temperature of surface S.
    Type: Grant
    Filed: December 20, 1988
    Date of Patent: March 13, 1990
    Assignee: BNF Metals Technology Centre
    Inventor: David M. Guyoncourt
  • Patent number: 4901730
    Abstract: In a medical thermographic imaging system a patient is examined while standing in a thermo-stable enclosure erected within an examination room. The enclosure is constructed of black natural cloth which is attached to a frame formed of plastic tubular members. The enclosure has an outer vertical wall opposite its entrance to block air currents from blowing through its entrance. The enclosure provides privacy to the disrobed patients.
    Type: Grant
    Filed: January 9, 1989
    Date of Patent: February 20, 1990
    Assignee: New York Chiropractic College
    Inventors: Ronald J. Vitori, Edward M. Altchek
  • Patent number: 4826328
    Abstract: An apparatus for measuring the mass of a flowing medium and a method for producing the apparatus. The apparatus includes a carrier, to which at least one resistor layer is applied. To calibrate the resistance value of the resistor layer, material can be removed in a calibration zone on the end of the resistor layer remote from the incident direction of flow. To this end, the resistor layer is connected with a current source furnishing a constant current. The temperature of the resistor layer is measured by means of a temperature measuring device and compared in an electronic device with a predetermined temperature, and the electronic device, upon a deviation of the measured temperature from the predetermined temperature triggers a material removing device for the removal of resistor material in the calibration zone (trimming zone).
    Type: Grant
    Filed: March 1, 1984
    Date of Patent: May 2, 1989
    Assignee: Robert Bosch GmbH
    Inventor: Jaihind S. Sumal
  • Patent number: 4734553
    Abstract: A cooking apparatus determining a temperature of food to be cooked by detecting the changes in the intensity of the infrared rays from the food. The cooking apparatus includes an infrared ray detecting circuit having a detecting element which detects infrared rays from the food.When the actual temperature change in the vicinity of the detecting element is more than a predetermined value, the detecting element is prevented from receiving the infrared rays from the food. The detecting element detects the actual temperature, and the infrared ray detecting circuit outputs the corresponding detection value. The detection value from the infrared ray detecting circuit is stored in a control circuit. The output of the infrared ray detecting circuit is corrected by the stored detection value when the detecting element is exposed to the infrared rays from the food in order to carry out a precise temperature detection for the food.
    Type: Grant
    Filed: December 16, 1986
    Date of Patent: March 29, 1988
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Tomimitsu Noda
  • Patent number: 4693614
    Abstract: An apparatus for detecting slag outflow when a molten metal covered by molten slag is poured from one vessel to another by receiving the thermal radiation energy at the microwave frequencies emitted from the pouring stream of the molten metal from said one vessel to another to measure a change in thermal radiation energy caused by the difference in the emissivity of the molten metal and of the molten slag is disclosed. The apparatus comprises; a microwave-focusing mechanism which has a focal point at the measuring target point; a waveguide means one end of which is connected to said microwave-focusing mechanism and which receives the thermal radiation energy from said microwave-focusing mechanism; and a radiometer connected to the other end of said waveguide means to measure the thermal radiation energy at microwave frequencies received through said waveguide means.
    Type: Grant
    Filed: May 6, 1986
    Date of Patent: September 15, 1987
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Akio Hatono, Sumio Kobayashi
  • Patent number: 4608565
    Abstract: A thermometer includes a temperature transmitting unit and a temperature receiving unit which are disposed on opposite sides of an exterior wall or window. An outdoor temperature sensor is connected to the transmitting unit for modulating the transmitted radio waves. The transmitting unit and receiver unit communicate with each other via radio waves so that they are not in physical contact with each other.
    Type: Grant
    Filed: April 30, 1985
    Date of Patent: August 26, 1986
    Assignee: Omron Tateisi Electronics Co.
    Inventor: Tamaki Sakamoto
  • Patent number: 4568201
    Abstract: An infrared sensor made of LiTaO.sub.3 is provided on a ceiling of a heating chamber of a microwave oven, and a chopper is provided so as to intermittently block infrared radiation emitted from food in the heating chamber. The infrared sensor is brought to face the food and the chopper alternately and provides a corresponding AC output signal. The temperature of the chopper is detected from the output signal of a separately provided chopper temperature sensor consisting of a thermister. The detected chopper temperature output signal is corrected in a microcomputer to be substantially in accord with chopper temperature components in the output signal of the infrared sensor. The corrected chopper temperature data is applied to the infrared sensor output data for removing the chopper temperature components from the output signal of the infrared sensor to obtain a food temperature signal corresponding to the sole temperature of the food.
    Type: Grant
    Filed: June 9, 1983
    Date of Patent: February 4, 1986
    Assignee: Tokyo Shibaura Denki Kabushiki Kaisha
    Inventor: Tomimitsu Noda
  • Patent number: 4556327
    Abstract: A thermal probe (10) for averaging temperature fluctuations over a prolonged period is formed with a temperature sensor (22) embedded inside a solid object (12) of a thermally conducting material. The solid object is held in a position equidistantly spaced apart from the interior surfaces of a closed housing (16) by a mount (14) made of a thermally insulating material. The housing is sealed to trap a vacuum or mass of air inside and thereby prevent transfer of heat directly between the environment outside of the housing and the solid object. Electrical leads (24) couple the temperature sensor with a connector (26) on the outside of the housing. Other solid objects of different sizes and materials may be substituted for the cylindrically-shaped object to vary the time constant of the probe.
    Type: Grant
    Filed: January 31, 1983
    Date of Patent: December 3, 1985
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Lou F. Kalil, Victor Reinhardt
  • Patent number: 4531844
    Abstract: A thermal probe permitting detection of the values of the "resultant" ambient temperature comprises a rigid supporting element made of heat-conductive material, a transducer rigidly attached to the support, in thermal contact with it, and an electric cable connected electrically to the said transducer. The support element has external characteristics as close as possible to those of a blackbody; for example, its outer surface is painted black. The transducer is placed on the inner surface of the support element, opposite the surface having the characteristics of a blackbody.
    Type: Grant
    Filed: December 4, 1984
    Date of Patent: July 30, 1985
    Assignee: Societe Bourguignonne de Mercanique
    Inventor: Martin Juras
  • Patent number: 4501504
    Abstract: The purpose of the invention is to provide means for non-contacting sensing of the surface temperature of objects. A member, adapted to be brought in the vicinity of the object, has an opening leading to a protective enclosure in which a temperature sensing element is mounted. Pumping means are provided to suck the ambient fluid, usually air, from the surface of the object through the opening into the protective enclosure, whereby the temperature sensing element takes up the fluid temperature, providing a fluid temperature signal. A gap is formed between the object and the member and the fluid flows in this gap before entering the opening and takes up a temperature between the object temperature and the member temperature. A second temperature sensing element is adapted to take up the temperature of the member providing a member temperature signal.
    Type: Grant
    Filed: August 25, 1982
    Date of Patent: February 26, 1985
    Inventors: Laszlo Urmenyi, William R. Urmenyi
  • Patent number: 4469451
    Abstract: A method and apparatus for measuring the temperature in a subsurface earth formation that is being heated in situ by subjection to a radio frequency electromagnetic field. It includes lowering a maximum registering thermometer into the formation on a non-conductive flexible line, and holding it there long enough to reach the ambient temperature at that location. Then, the thermometer is raised to the surface fast enough to avoid any significant change on the way up to read that registered maximum.
    Type: Grant
    Filed: June 28, 1982
    Date of Patent: September 4, 1984
    Assignee: Texaco Inc.
    Inventors: Robert E. Kunetka, Donald J. Dowling