Including Bipolar Transistor (i.e., Bicmos) Patents (Class 438/202)
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Patent number: 8530299Abstract: An electronic device including an integrated circuit can include a buried conductive region and a semiconductor layer overlying the buried conductive region, and a vertical conductive structure extending through the semiconductor layer and electrically connected to the buried conductive region. The integrated circuit can further include a doped structure having an opposite conductivity type as compared to the buried conductive region, lying closer to an opposing surface than to a primary surface of the semiconductor layer, and being electrically connected to the buried conductive region. The integrated circuit can also include a well region that includes a portion of the semiconductor layer, wherein the portion overlies the doped structure and has a lower dopant concentration as compared to the doped structure. In other embodiment, the doped structure can be spaced apart from the buried conductive region.Type: GrantFiled: January 18, 2012Date of Patent: September 10, 2013Assignee: Semiconductor Components Industries, LLCInventors: Gary H. Loechelt, Gordon M. Grivna
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Patent number: 8507986Abstract: In one embodiment, the invention comprises a MOSFET comprising individual MOSFET cells. Each cell comprises a U-shaped well (P type) and two parallel sources (N type) formed within the well. A Number of source rungs (doped N) connect sources at multiple locations. Regions between two rungs comprise a body (P type). These features are formed on an N-type epitaxial layer, which is formed on an N-type substrate. A contact extends across and contacts a number of source rungs and bodies. Gate oxide and a gate contact overlie a leg of a first well and a leg of a second adjacent well, inverting the conductivity responsive to a gate voltage. A MOSFET comprises a plurality of these cells to attain a desired low channel resistance. The cell regions are formed using self-alignment techniques at several states of the fabrication process.Type: GrantFiled: January 14, 2013Date of Patent: August 13, 2013Assignee: General Electric CompanyInventors: Stephen Daley Arthur, Kevin Sean Matocha, Peter Micah Sandvik, Zachary Matthew Stum, Peter Almren Losee, James Jay McMahon
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Patent number: 8507339Abstract: In a BiCMOS device, a device isolation film separating the bipolar transistor region from the MOS region is taller than the substrate at least where it contacts the bipolar transistor region, and is preferably taller than the same layer where it contacts the MOS transistor region. This makes it possible to maintain the processing accuracy of a MOS transistor while stabilizing the diode current characteristics of the bipolar transistor.Type: GrantFiled: November 19, 2010Date of Patent: August 13, 2013Assignee: Renesas Electronics CorporationInventors: Shinichi Miyake, Kazuaki Tsunoda
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Patent number: 8497167Abstract: A high voltage ESD protection diode wherein the p-n junction is defined by a p-well and an n-well and includes a RESURF region, the diode including a field oxide layer formed on top of the p-well and n-well, wherein the parameters of the diode are adjustable by controlling one or more of the junction width, the length of the RESURF region, or the length of the field oxide layer.Type: GrantFiled: January 17, 2007Date of Patent: July 30, 2013Assignee: National Semiconductor CorporationInventors: Vladislav Vashchenko, Vladimir Kuznetsov, Peter J. Hopper
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Patent number: 8466019Abstract: A semiconductor device fabricating method is described. The semiconductor device fabricating method comprises forming an epitaxial layer on a substrate, wherein the epitaxial layer is the same conductive type as the substrate. A first doped region having the different conductive type from the epitaxial layer is formed in the epitaxial layer. An annealing process is performed to diffuse dopants in the first doped region. A second doped region and an adjacent third doped region are formed in the first doped region. The second doped region is a different conductive type from that of the first doped region, and the third doped region is the same conductive type as that of the first doped region. A gate structure is formed on the epitaxial layer covering a portion of the second and the third doped regions.Type: GrantFiled: October 6, 2011Date of Patent: June 18, 2013Assignee: Vanguard International Semiconductor CorporationInventors: Chu-Feng Chen, Chung-Ren Lao, Pai-Chun Kuo, Chien-Hsien Song, Hua-Chun Chiue, An-Hung Lin
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Patent number: 8426264Abstract: In a lateral bipolar transistor including an emitter, a base and a collector which are formed in a semiconductor thin film formed on an insulating substrate, the semiconductor thin film is a semiconductor thin film which is crystallized in a predetermined direction. In addition, in a MOS-bipolar hybrid transistor formed in a semiconductor thin film formed on an insulating substrate, the semiconductor thin film is a semiconductor thin film which is crystallized in a predetermined direction.Type: GrantFiled: May 31, 2011Date of Patent: April 23, 2013Assignee: Sharp Kabushiki KaishaInventor: Genshiro Kawachi
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Patent number: 8420475Abstract: This invention published a parasitic vertical PNP bipolar transistor in BiCMOS (Bipolar Complementary Metal Oxide Semiconductor) process; the bipolar transistor comprises a collector, a base and an emitter. Collector is formed by active region with p-type ion implanting layer. It connects a p-type buried layer which formed in the bottom region of STI (Shallow Trench Isolation). The collector terminal connection is through the p-type buried layer and the adjacent active region. The base is formed by active region with n type ion implanting which is on the collector. Its connection is through the original p-type epitaxy layer after converting to n-type. The emitter is formed by the p-type epitaxy layer on the base region with heavy p-type doped. This invention also comprises the fabrication method of this parasitic vertical PNP bipolar in BiCMOS (Bipolar Complementary Metal Oxide Semiconductor) process.Type: GrantFiled: December 22, 2010Date of Patent: April 16, 2013Assignee: Shanghai Hua Hong Nec Electronics Company, LimitedInventors: Tzuyin Chiu, TungYuan Chu, Wensheng Qian, YungChieh Fan, Donghua Liu, Jun Hu
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Patent number: 8415745Abstract: An ESD protection device is described, which includes a P-body region, a P-type doped region, an N-type doped region and an N-sinker region. The P-body region is configured in a substrate. The P-type doped region is configured in the middle of the P-body region. The N-type doped region is configured in the P-body region and surrounds the P-type doped region. The N-sinker region is configured in the substrate and surrounds the P-body region.Type: GrantFiled: April 26, 2011Date of Patent: April 9, 2013Assignee: United Microelectronics Corp.Inventor: Fang-Mei Chao
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Patent number: 8377756Abstract: In one embodiment, the invention comprises a MOSFET comprising individual MOSFET cells. Each cell comprises a U-shaped well (228) (P type) and two parallel sources (260) (N type) formed within the well. A plurality of source rungs (262) (doped N) connect sources (260) at multiple locations. Regions between two rungs (262) comprise a body (252) (P type). These features are formed on an N-type epitaxial layer (220), which is formed on an N-type substrate (216). A contact (290) extends across and contacts a plurality of source rungs (262) and bodies (252). Gate oxide and a gate contact overlie a leg of a first well and a leg of a second adjacent well, inverting the conductivity responsive to a gate voltage. A MOSFET comprises a plurality of these cells to attain a desired low channel resistance. The cell regions are formed using self-alignment techniques at several states of the fabrication process.Type: GrantFiled: July 26, 2011Date of Patent: February 19, 2013Assignee: General Electric CompanyInventors: Stephen Daley Arthur, Kevin Matocha, Peter Sandvik, Zachary Stum, Peter Losee, James McMahon
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Patent number: 8372748Abstract: A method for manufacturing semiconductor device includes forming an interlayer dielectric layer including a contact plug defined therein to electrically couple a semiconductor substrate on which a cell region and a dummy region are defined. A sacrificial layer is formed over the interlayer dielectric layer. An etch stop pattern is formed over the sacrificial layer, the etch stop pattern being vertically aligned to the dummy region. A storage electrode region through the sacrificial layer is defined to expose a first storage electrode contact of the cell region, the second storage electrode contact of the dummy region remaining covered by the sacrificial layer. A conductive layer is deposited within the storage electrode region to form a storage electrode contacting the first storage electrode contact of the cell region.Type: GrantFiled: July 9, 2010Date of Patent: February 12, 2013Assignee: Hynix Semiconductor Inc.Inventors: Dae Jin Park, Jong Won Jang
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Patent number: 8324713Abstract: A lateral-vertical bipolar junction transistor (LVBJT) includes a well region of a first conductivity type over a substrate; a first dielectric over the well region; and a first electrode over the first dielectric. A collector of a second conductivity type opposite the first conductivity type is in the well region and on a first side of the first electrode, and is adjacent the first electrode. An emitter of the second conductivity type is in the well region and on a second side of the first electrode, and is adjacent the first electrode, wherein the second side is opposite the first side. A collector extension region having a lower impurity concentration than the collector adjoins the collector and faces the emitter. The LVBJT does not have any emitter extension region facing the collector and adjoining the emitter.Type: GrantFiled: March 1, 2010Date of Patent: December 4, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shuo-Mao Chen, Chih-Ping Chao, Chih-Sheng Chang, Hua-Chou Tseng
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Patent number: 8293598Abstract: A bipolar selection transistor and a circuitry MOS transistor for a memory device are formed in a semiconductor body. The bipolar selection transistor is formed by implanting a buried collector, implanting a base region on the buried collector, forming a silicide protection mask on the semiconductor body, and implanting an emitter region and a control contact region. The circuitry MOS transistor is formed by defining a gate on the semiconductor body, forming lateral spacers on the sides of the gate and implanting source and drain regions on the sides of the lateral spacers. Then, a silicide region is formed on the emitter, base contact, source and drain regions and the gate, in a self-aligned way. The lateral spacers are multilayer structures including at least two different layers, one of which is used to form the silicide protection mask on the bipolar selection transistor. Thereby, the dimensions of the lateral spacers are decoupled from the thickness of the silicide protection mask.Type: GrantFiled: September 10, 2009Date of Patent: October 23, 2012Assignee: STMicroelectronics S.r.l.Inventors: Fabio Pellizzer, Cristina Casellato, Michele Magistretti, Roberto Colombo, Lucilla Brattico
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Patent number: 8269275Abstract: According to an exemplary embodiment, a method for fabricating a MOS transistor, such as an LDMOS transistor, includes forming a self-aligned lightly doped region in a first well underlying a first sidewall of a gate. The method further includes forming a self-aligned extension region under a second sidewall of the gate, where the self-aligned extension region extends into the first well from a second well. The method further includes forming a drain region spaced apart from the second sidewall of the gate. The method further includes forming a source region in the self-aligned lightly doped region and the first well. The self-aligned lightly doped region and the self-aligned extension region define a channel length of the MOS transistor, such as an LDMOS transistor.Type: GrantFiled: October 21, 2009Date of Patent: September 18, 2012Assignee: Broadcom CorporationInventors: Xiangdong Chen, Wei Xia, Henry Kuo-Shun Chen
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Patent number: 8232157Abstract: A semiconductor device includes a semiconductor substrate including a CMOS region and a bipolar region, a first N well and a first P well in the CMOS region, a PMOS device in the first N well and an NMOS device in the first P well, a deep P well in the bipolar region, a second N well in the deep P, a second isolation layer between the deep P well and the second N well, a third isolation in the second N well, a collector in the second N well between the second and third isolation layers, and a base formed in the second N well and having a bottom surface including first type impurities to contact the emitter.Type: GrantFiled: December 29, 2009Date of Patent: July 31, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Yeo-Cho Yoon
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Patent number: 8232156Abstract: Vertical heterojunction bipolar transistors with reduced base-collector junction capacitance, as well as fabrication methods for vertical heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The vertical heterojunction bipolar transistor includes a barrier layer between the intrinsic base and the extrinsic base that blocks or reduces diffusion of a dopant from the extrinsic base to the intrinsic base. The barrier layer has at least one opening that permits direct contact between the intrinsic base and a portion of the extrinsic base disposed in the opening.Type: GrantFiled: November 4, 2010Date of Patent: July 31, 2012Assignee: International Business Machines CorporationInventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Qizhi Liu
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Patent number: 8222703Abstract: A semiconductor device includes a semiconductor layer formed on an insulation layer and having an MOS (Metal Oxide Semiconductor) transistor area and a bi-polar transistor area; an MOS transistor formed in the MOS transistor area; and a bi-polar transistor formed in the bi-polar transistor area. The MOS transistor includes a source area of a second conductive type; a drain area of the second conductive type; and a channel area of a first conductive type. The MOS transistor further includes a gate electrode formed on the channel area with a first oxide layer inbetween. The bi-polar transistor includes a collector area of the second conductive type; an emitter area of the second conductive type; and a base area of the first conductive type. The bi-polar transistor further includes a dummy pattern formed on the base area with a second oxide layer inbetween.Type: GrantFiled: March 14, 2008Date of Patent: July 17, 2012Assignee: Oki Semiconductor Co., Ltd.Inventors: Koichi Kishiro, Koji Yuki
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Patent number: 8216895Abstract: A method of manufacturing a semiconductor device includes forming a first and a second isolation insulating film to define a first, a second, a third and a fourth region, forming a first insulating film, implanting a first impurity of a first conductivity type through the first insulating film into the first, the second and the fourth region at a first depth, forming a second insulating film thinner than the first insulating film, implanting a second impurity of a second conductivity type through the second insulating film into the third region at a second depth in the semiconductor substrate, implanting a third impurity of the second conductivity type into the third region at a third depth shallower than the second depth, forming a first transistor of the first conductivity type in the third region, and forming a second transistor of the second conductivity type in the fourth region.Type: GrantFiled: July 9, 2010Date of Patent: July 10, 2012Assignee: Fujitsu Semiconductor LimitedInventors: Akihiro Usujima, Shigeo Satoh
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Patent number: 8173500Abstract: A poly-emitter type bipolar transistor includes a buried layer formed over an upper portion of a semiconductor substrate, an epitaxial layer formed on the semiconductor substrate, a collector area formed on the epitaxial layer and connected to the buried layer, a base area formed at a part of an upper portion of the epitaxial layer, and a poly-emitter area formed on a surface of the semiconductor substrate in the base area and including a polysilicon material. A BCD device includes a poly-emitter type bipolar transistor having a poly-emitter area including a polysilicon material and at least one of a CMOS and a DMOS formed on a single wafer together with the poly-emitter type bipolar transistor.Type: GrantFiled: August 24, 2009Date of Patent: May 8, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Bon-Keun Jun
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Patent number: 8129234Abstract: A high-k gate dielectric layer and a metal gate layer are formed and patterned to expose semiconductor surfaces in a bipolar junction transistor region, while covering a CMOS region. A disposable material portion is formed on a portion of the exposed semiconductor surfaces in the bipolar junction transistor area. A semiconductor layer and a dielectric layer are deposited and patterned to form gate stacks including a semiconductor portion and a dielectric gate cap in the CMOS region and a cavity containing mesa over the disposable material portion in the bipolar junction transistor region. The disposable material portion is selectively removed and a base layer including an epitaxial portion and a polycrystalline portion fills the cavity formed by removal of the disposable material portion. The emitter formed by selective epitaxy fills the cavity in the mesa.Type: GrantFiled: September 9, 2009Date of Patent: March 6, 2012Assignee: International Business Machines CorporationInventors: Thomas A. Wallner, Ebenezer E. Eshun, Daniel J. Jaeger, Phung T. Nguyen
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Patent number: 8124468Abstract: An electronic device including an integrated circuit can include a buried conductive region and a semiconductor layer overlying the buried conductive region, and a vertical conductive structure extending through the semiconductor layer and electrically connected to the buried conductive region. The integrated circuit can further include a doped structure having an opposite conductivity type as compared to the buried conductive region, lying closer to an opposing surface than to a primary surface of the semiconductor layer, and being electrically connected to the buried conductive region. The integrated circuit can also include a well region that includes a portion of the semiconductor layer, wherein the portion overlies the doped structure and has a lower dopant concentration as compared to the doped structure. In other embodiment, the doped structure can be spaced apart from the buried conductive region.Type: GrantFiled: June 30, 2009Date of Patent: February 28, 2012Assignee: Semiconductor Components Industries, LLCInventors: Gary H. Loechelt, Gordon M. Grivna
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Patent number: 8114696Abstract: Provided is a CMOS image sensor with an asymmetric well structure of a source follower. The CMOS image sensor includes: a well disposed in an active region of a substrate; a drive transistor having one terminal connected to a power voltage and a first gate electrode disposed to cross the well; and a select transistor having a drain-source junction between another terminal of the drive transistor and an output node, and a second gate electrode disposed in parallel to the drive transistor. A drain region of the drive transistor and a source region of the select transistor are asymmetrically arranged.Type: GrantFiled: December 16, 2010Date of Patent: February 14, 2012Assignee: Intellectual Ventures II LLCInventor: Hee-Jeong Hong
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Patent number: 8115280Abstract: An integrated circuit structure includes a well region of a first conductivity type, an emitter of a second conductivity type opposite the first conductivity type over the well region, a collector of the second conductivity type over the well region and substantially encircling the emitter, and a base contact of the first conductivity type over the well region. The base contact is horizontally spaced apart from the emitter by the collector. At least one conductive strip horizontally spaces the emitter, the collector, and the base contact apart from each other. A dielectric layer is directly under, and contacting, the at least one conductive strip.Type: GrantFiled: March 1, 2010Date of Patent: February 14, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Shuo-Mao Chen, Chin-Wei Kuo, Sally Liu
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Patent number: 8115256Abstract: A semiconductor device includes an inverter having an NMOSFET and a PMOSFET having sources, drains and gate electrodes respectively, the drains being connected to each other and the gate electrodes being connected to each other, and a pnp bipolar transistor including a collector (C), a base (B) and an emitter (E), the base (B) receiving an output of the inverter.Type: GrantFiled: August 31, 2007Date of Patent: February 14, 2012Assignee: Sanyo Electric Co., Ltd.Inventors: Haruki Yoneda, Hideaki Fujiwara
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Patent number: 8105890Abstract: A method of forming a semiconductor structure comprises forming a first layer of silicon and then forming a second, silicon germanium, layer adjacent the silicon layer. A thin third layer of silicon is then formed adjacent the second layer. A gate structure is then formed upon the third layer of silicon using convention Complementary Metal Oxide Semiconductor processes. Trenches are then formed into the second layer and the structure is then exposed to a thermal gaseous chemical etchant, for example heated hydrochloric acid. The etchant removes the silicon germanium, thereby forming a Silicon-On-Nothing structure. Thereafter, conventional CMOS processing techniques are applied to complete the structure as a Metal Oxide Semiconductor Field Effect Transistor, including the formation of spacer walls from silicon nitride, the silicon nitride also filling a cavity formed beneath the third layer of silicon by removal of the silicon germanium.Type: GrantFiled: June 30, 2005Date of Patent: January 31, 2012Assignee: Freescale Semiconductor, Inc.Inventor: Terry Sparks
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Patent number: 8097517Abstract: The present invention relates to a semiconductor device which is capable of simultaneously improving a short channel effect of a PMOS and the current of an NMOS and a method for manufacturing the same. The semiconductor device includes first and second gates formed over first and second areas of a semiconductor substrate, respectively; and first and second junction areas formed in a portion of the semiconductor substrate corresponding to both sides of the first gate and a portion of the semiconductor substrate corresponding to both sides of the second gate, and including a projection, respectively, wherein the projection of the first junction area has a height higher than the height of the projection of the second junction area, and the second junction area is formed such that it has a depth from the surface of the semiconductor substrate deeper than the depth of the first junction area.Type: GrantFiled: June 1, 2010Date of Patent: January 17, 2012Assignee: Hynix Semiconductor Inc.Inventor: Min Jung Shin
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Patent number: 8063448Abstract: A memory device includes a multi gate field effect transistor (MuGFET) having a fin with a contact area. A programmable memory element abuts the fin contact area.Type: GrantFiled: March 16, 2007Date of Patent: November 22, 2011Assignee: Infineon Technologies AGInventors: Christian Pacha, Tim Schönauer, Michael Kund
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Patent number: 8058121Abstract: A semiconductor device fabricating method is described. The semiconductor device fabricating method comprises forming an epitaxial layer on a substrate, wherein the epitaxial layer is the same conductive type as the substrate. A first doped region having the different conductive type from the epitaxial layer is formed in the epitaxial layer. An annealing process is performed to diffuse dopants in the first doped region. A second doped region and an adjacent third doped region are formed in the first doped region. The second doped region is a different conductive type from that of the first doped region, and the third doped region is the same conductive type as that of the first doped region. A gate structure is formed on the epitaxial layer covering a portion of the second and the third doped regions.Type: GrantFiled: June 29, 2009Date of Patent: November 15, 2011Assignee: Vanguard International Semiconductor CorporationInventors: Chu-Feng Chen, Chung-Ren Lao, Pai-Chun Kuo, Chien-Hsien Song, Hua-Chun Chiue, An-Hung Lin
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Patent number: 8048732Abstract: An apparatus and method of manufacture for metal-oxide semiconductor (MOS) transistors is disclosed. Devices in accordance with the invention are operable at voltages below 2V. The devices are area efficient, have improved drive strength, and have reduced leakage current. A dynamic threshold voltage control scheme comprised of a forward biased diode in parallel with a capacitor is used, implemented without changing the existing MOS technology process. This scheme controls the threshold voltage of each transistor. In the OFF state, the magnitude of the threshold voltage of the transistor increases, keeping the transistor leakage to a minimum. In the ON state, the magnitude of the threshold voltage decreases, resulting in increased drive strength. The invention is particularly useful in MOS technology for both bulk and silicon on insulator (SOI) CMOS. The use of reverse biasing of the well, in conjunction with the above construct to further decrease leakage in a MOS transistor, is also shown.Type: GrantFiled: February 8, 2010Date of Patent: November 1, 2011Assignee: Semi Solutions, LLCInventors: Ashok Kumar Kapoor, Robert Strain, Reuven Marko
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Patent number: 8030151Abstract: A bipolar transistor (101) has a base (243) formed with an intrinsic base portion (2431), a base contact portion (245C), and a base link portion (243L) that extends between the intrinsic base portion and the base contact portion. An isolating dielectric layer (267-1 or 267-2) is provided above the base link portion. The length of the base link portion is determined, and thereby controlled, with a lateral spacing portion (269-1 or 269-2) of largely non-monocrystalline semiconductor material, preferably polycrystalline semiconductor material, provided on the dielectric layer above the base link portion. The lateral spacing portion is typically provided as part of a layer of non-monocrystalline semiconductor material used in the gate electrode of an insulated-gate field-effect transistor.Type: GrantFiled: March 27, 2009Date of Patent: October 4, 2011Assignee: National Semiconductor CorporationInventors: Jeng-Jiun Yang, Constantin Bulucea
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Patent number: 8003475Abstract: A method for fabricating a transistor structure with a first and a second bipolar transistor having different collector widths is presented. The method includes providing a semiconductor substrate, introducing a first buried layer of the first bipolar transistor and a second buried layer of the second bipolar transistor into the semiconductor substrate, and producing at least a first collector region having a first collector width on the first buried layer and a second collector region having a second collector width on the second buried layer. A first collector zone having a first thickness is produced on the second buried layer for production of the second collector width. A second collector zone having a second thickness is produced on the first collector zone. At least one insulation region is produced that isolates at least the collector regions from one another.Type: GrantFiled: March 20, 2008Date of Patent: August 23, 2011Assignee: Infineon Technologies AGInventors: Josef Böck, Rudolf Lachner, Thomas Meister, Reinhard Stengl, Herbert Schäfer, Martin Seck
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Publication number: 20110193174Abstract: A structure and method for providing a multiple silicide integration is provided. An embodiment comprises forming a first transistor and a second transistor on a substrate. The first transistor is masked and a first silicide region is formed on the second transistor. The second transistor is then masked and a second silicide region is formed on the first transistor, thereby allowing for device specific silicide regions to be formed on the separate devices.Type: ApplicationFiled: February 11, 2010Publication date: August 11, 2011Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Der-Chyang Yeh, Hsing-Kuo Hsia, Hao-Hsun Lin, Chih-Ping Chao, Chin-Hao Su, Hsi-Kuei Cheng
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Publication number: 20110180870Abstract: An integrated circuit having an SCRMOS transistor with a RESURF region around the drain region and SCR terminal. The RESURF region is the same conductivity type as the drift region and is more heavily doped than the drift region. An SCRMOS transistor with a RESURF region around the drain region and SCR terminal. A process of forming an integrated circuit having an SCRMOS transistor with a RESURF region around the drain region and SCR terminal.Type: ApplicationFiled: January 27, 2010Publication date: July 28, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Sameer P. PENDHARKAR
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Patent number: 7972919Abstract: The present invention relates to a device structure located in a semiconductor substrate and containing high performance vertical NPN and PNP transistors. Specifically, the vertical PNP transistor has an emitter region, and the vertical NPN transistor has an intrinsic base region. The emitter region of the vertical PNP transistor and the intrinsic base region of the vertical NPN transistor are located in a single silicon germanium-containing layer, and they both contain single crystal silicon germanium. The present invention also relates to a method for fabricating such a device structure based on collateral modification of conventional fabrication processes for CMOS and bipolar devices, with few or no additional processing steps.Type: GrantFiled: July 18, 2005Date of Patent: July 5, 2011Assignee: International Business Machines CorporationInventors: Peter B. Gray, Benjamin T. Voegeli
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Patent number: 7960758Abstract: A bipolar transistor and a radio frequency amplifier circuit capable of preventing thermal runaway in the bipolar transistor without affecting the radio frequency amplifier circuit, which includes: a direct-current (DC) bias terminal to which a DC bias is supplied; a DC base electrode connected to the DC terminal; a radio frequency (RF) power terminal to which a radio frequency signal is supplied; an RF base electrode connected to the RF terminal; and a base layer connected to the DC base electrode and the RF base electrode.Type: GrantFiled: April 3, 2006Date of Patent: June 14, 2011Assignee: Panasonic CorporationInventor: Masahiro Maeda
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Publication number: 20110133289Abstract: A process for forming bipolar junction transistors having a plurality of different collector doping densities on a semiconductor substrate and an integrated circuit comprising bipolar junction transistors having a plurality of different collector doping densities. A first group of the transistors are formed during formation of a triple well for use in providing triple well isolation for complementary metal oxide semiconductor field effect transistors also formed on the semiconductor substrate. Additional bipolar junction transistors with different collector doping densities are formed during a second doping step after forming a gate stack for the field effect transistors. Implant doping through bipolar transistor emitter windows forms bipolar transistors having different doping densities than the previously formed bipolar transistors.Type: ApplicationFiled: February 14, 2011Publication date: June 9, 2011Inventors: Daniel Charles Kerr, Michael Scott Carroll, Amal Ma Hamad, Thiet The Lai, Roger W. Key
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Patent number: 7943458Abstract: Methods of forming complementary metal oxide semiconductor (CMOS) structures with tunable threshold voltages are provided. The methods disclose a technique of obtaining selective placement of threshold voltage adjusting materials on a semiconductor substrate by using a block mask prior to deposition of the threshold voltage adjusting materials. The block mask is subsequently removed to obtain a patterned threshold voltage adjusting material on the semiconductor substrate. The methods are material independent and can be used in sequence for both nFET threshold voltage adjusting materials and pFET threshold voltage adjusting materials.Type: GrantFiled: October 6, 2009Date of Patent: May 17, 2011Assignee: International Business Machines CorporationInventors: Hemanth Jagannathan, Sivananda K. Kanakasabapathy, Matthew W. Copel
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Patent number: 7939417Abstract: A structure is disclosed including a substrate including an insulator layer on a bulk layer, and a bipolar transistor in a first region of the substrate, the bipolar transistor including at least a portion of an emitter region in the insulator layer. Another disclosed structure includes an inverted bipolar transistor in a first region of a substrate including an insulator layer on a bulk layer, the inverted bipolar transistor including an emitter region, and a back-gated transistor in a second region of the substrate, wherein a back-gate conductor of the back-gated transistor and at least a portion of the emitter region are in the same layer of material. A method of forming the structures including a bipolar transistor and back-gated transistor together is also disclosed.Type: GrantFiled: August 6, 2009Date of Patent: May 10, 2011Assignee: International Business Machines CorporationInventors: Andres Bryant, William F. Clark, Jr., Edward J. Nowak
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Patent number: 7939402Abstract: A method for manufacturing a semiconductor apparatus is disclosed. The apparatus comprises double poly bipolar transistors and double poly metal oxide semiconductor (MOS) transistors. The bipolar transistors and the MOS transistors are manufactured in a unified process in which a first polysilicon layer (Poly1) is doped to form the extrinsic bases in the bipolar transistors and to form the gates in the MOS transistors. A second polysilicon layer (Poly2) is doped to form emitters in the bipolar transistors and to form the sources and drains in the MOS transistors. The method of the invention minimizes the number of manufacturing process steps.Type: GrantFiled: December 17, 2009Date of Patent: May 10, 2011Assignee: National Semiconductor CorporationInventors: Richard W. Foote, Robert Oliver
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Patent number: 7932541Abstract: Disclosed are embodiments of a hetero-junction bipolar transistor (HBT) structure and method of forming the structure that provides substantially lower collector-to-base parasitic capacitance and collector resistance, while also lowering or maintaining base-to-emitter capacitance, emitter resistance and base resistance in order to achieve frequency capabilities in the THz range. The HBT is a collector-up HBT in which a dielectric layer and optional sidewall spacers separate the raised extrinsic base and the collector so as to reduce collector-to-base capacitance. A lower portion of the collector is single crystalline semiconductor so as to reduce collector resistance. The raised extrinsic base and the intrinsic base are stacked single crystalline epitaxial layers, where link-up is automatic and self-aligned, so as to reduce base resistance. The emitter is a heavily doped region below the top surface of a single crystalline semiconductor substrate so as to reduce emitter resistance.Type: GrantFiled: January 14, 2008Date of Patent: April 26, 2011Assignee: International Business Machines CorporationInventors: Alvin J. Joseph, Andreas D. Stricker
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Patent number: 7923327Abstract: Provided are a non-volatile memory device and a method of fabricating the same. The non-volatile memory device comprises: a control gate region formed by doping a semiconductor substrate with second impurities; an electron injection region formed by doping the semiconductor substrate with first impurities, where a top surface of the electron injection region includes a tip portion at an edge; a floating gate electrode covering at least a portion of the control gate region and the tip portion of the electron injection region; a first tunnel oxide layer interposed between the floating gate electrode and the control gate region; a second tunnel oxide layer interposed between the floating gate electrode and the electron injection region; a trench surrounding the electron injection region in the semiconductor substrate; and a device isolation layer pattern filled in the trench.Type: GrantFiled: June 24, 2008Date of Patent: April 12, 2011Assignee: Dongbu HiTek Co., Ltd.Inventor: Sung Kun Park
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Patent number: 7910441Abstract: A semiconductor device includes a substrate (20), a source region (58) formed over the substrate, a drain region (62) formed over the substrate, a first gate electrode (36) over the substrate adjacent to the source region and between the source and drain regions, and a second gate electrode (38) over the substrate adjacent to the drain region and between the source and drain regions.Type: GrantFiled: July 19, 2006Date of Patent: March 22, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Hongning Yang, Xin Lin, Jiang-Kai Zuo
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Patent number: 7906842Abstract: There is provided a system-in-package (SiP), which includes a substrate obtained by cutting a wafer for each unit system; one or more first electronic devices mounted on the substrate by a heat radiation plate; a plurality of interlayer dielectrics sequentially formed on the substrate; and one or more second electronic devices buried between or in the interlayer dielectrics on the substrate. A heat sink may be additionally attached to the bottom surface of the substrate. In this case, a thermal conduction path including heat pipes connecting the heat radiation plate on the substrate and the heat sink is formed. In the SiP, various types of devices are buried at a wafer level, so that a more integrated semiconductor device is implemented corresponding to demand for a fine pitch. Further, the heat radiation of a device required in high-speed operation and high heat generation is maximized due to the multi-stepped heat radiation structure, and thus the operation of the device is more stabilized.Type: GrantFiled: July 26, 2007Date of Patent: March 15, 2011Assignee: NEPES CorporationInventor: Yun Mook Park
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Patent number: 7892910Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.Type: GrantFiled: February 28, 2007Date of Patent: February 22, 2011Assignee: International Business Machines CorporationInventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
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Patent number: 7892915Abstract: A base structure for high performance Silicon Germanium:Carbon (SiGe:C) based heterojunction bipolar transistors (HBTs) with phosophorus atomic layer doping (ALD) is disclosed. The ALD process subjects the base substrate to nitrogen gas (in ambient temperature approximately equal to 500 degrees Celsius) and provides an additional SiGe:C spacer layer. During the ALD process, the percent concentrations of Germanium (Ge) and carbon (C) are substantially matched and phosphorus is a preferred dopant. The improved SiGe:C HBT is less sensitive to process temperature and exposure times, and exhibits lower dopant segregation and sharper base profiles.Type: GrantFiled: March 2, 2006Date of Patent: February 22, 2011Assignee: National Semiconductor CorporationInventors: Jamal Ramdani, Craig Richard Printy, Thanas Budri
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Patent number: 7892907Abstract: Latch-up of CMOS devices (20, 20?) is improved by using a structure (40, 40?, 80) having electrically coupled but floating doped regions (64, 64?; 65, 65?) between the N-channel (44) and P-channel (45) devices. The doped regions (64, 64?; 65, 65?) desirably lie substantially parallel to the source-drain regions (422, 423; 432, 433) of the devices (44, 45) between the Pwell (42) and Nwell (43) regions in which the source-drain regions (422, 423; 432, 433) are located. A first (“N BAR”) doped region (64, 64?) forms a PN junction (512) with the Pwell (42), spaced apart from a source/drain region (423) in the Pwell (42), and a second (“P BAR”) doped region (55, 55?) forms a PN junction (513) with the Nwell (43), spaced apart from a source/drain region (433) in the Nwell (43). A further NP junction (511) lies between the N BAR (64) and P BAR (65) regions.Type: GrantFiled: October 31, 2008Date of Patent: February 22, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Moaniss Zitouni, Patrice M. Parris
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Patent number: 7888227Abstract: Integrated circuit inductors (5) are formed by interconnecting various metal layers (10) in an integrated circuit with continuous vias (200). Using continuous vias (200) improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should be greater than three percent of the length of the inductor (5).Type: GrantFiled: June 12, 2008Date of Patent: February 15, 2011Assignee: Texas Instruments IncorporatedInventors: Robert L. Pitts, Greg C. Baldwin
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Patent number: 7883954Abstract: The illumination system has a light source (1) with a plurality of light emitters (R, G, B). The light emitters comprise at least a first light-emitting diode of a first primary color and at least a second light-emitting diode of a second primary color, the first and the second primary colors being distinct from each other. The illumination system has a facetted light-collimator (2) for collimating light emitted by the light emitters. The facetted lightcollimator is arranged along a longitudinal axis (25) of the illumination system. Light propagation in the facetted light-collimator is based on total internal reflection or on reflection at a reflective coating provided on the facets of the facetted light-collimator. The facetted light-collimator merges into a facetted light-reflector (3) at a side facing away from the light source. The illumination system further comprises a light-shaping diffuser (17). The illumination system emits light with a uniform spatial and spatio-angular color distribution.Type: GrantFiled: August 19, 2005Date of Patent: February 8, 2011Assignee: NXP B.V.Inventors: Peter Magnee, Wibo Van Noort, Johannes Donkers
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Patent number: 7875513Abstract: A plurality of bipolar transistors are formed by forming a common conduction region, a plurality of control regions extending each in an own active areas on the common conduction region, a plurality of silicide protection strips, and at least one control contact region. Silicide regions are formed on the second conduction regions and the control contact region. The second conduction regions may be formed by selectively implanting a first conductivity type dopant areas on a first side of selected silicide protection strips. The control contact region is formed by selectively implanting an opposite conductivity type dopant on a second side of the selected silicide protection strips.Type: GrantFiled: April 26, 2006Date of Patent: January 25, 2011Inventors: Fabio Pellizzer, Roberto Bez, Paola Zuliani, Augusto Benvenuti
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Patent number: 7863173Abstract: Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. An integrated circuit memory cell can be fabricated by forming a cup-shaped electrode on sidewalls of an opening in an insulation layer and through the opening on an ohmic layer that is stacked on a conductive structure. An insulation filling member is formed that at least partially fills an interior of the electrode. The insulation filling member is formed within a range of temperatures that is sufficiently low to not substantially change resistance of the ohmic layer. A variable resistivity material is formed on the insulation filling member and is electrically connected to the electrode.Type: GrantFiled: July 10, 2007Date of Patent: January 4, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Shin-Jae Kang, Gyuhwan Oh, Insun Park, Hyunseok Lim, Nak-Hyun Lim
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Patent number: 7851376Abstract: Embodiments of the invention provide a method of forming a compressive stress nitride film overlying a plurality of p-type field effect transistor gate structures produced on a substrate through a high-density plasma deposition process. Embodiments include generating an environment filled with high-density plasma using source gases of at least silane, argon and nitrogen; biasing the substrate to a high frequency power of varying density, in a range between 0.8 W/cm2 and 5.0 W/cm2; and depositing the high-density plasma to the plurality of gate structures to form the compressive stress nitride film.Type: GrantFiled: February 2, 2009Date of Patent: December 14, 2010Assignee: International Business Machines CorporationInventors: Daewon Yang, Woo-Hyeong Lee, Tai-chi Su, Yun-Yu Wang