Furnace for substrate processing apparatus
Description
The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.
Claims
The ornamental design for a furnace for substrate processing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
D406113 | February 23, 1999 | Hanagata |
6225602 | May 1, 2001 | Buijze |
D594488 | June 16, 2009 | Toiya |
D610559 | February 23, 2010 | Okada |
D611013 | March 2, 2010 | Takahashi |
D711843 | August 26, 2014 | Yamazaki |
D719114 | December 9, 2014 | Yamazaki |
D720309 | December 30, 2014 | Kaneko |
D720707 | January 6, 2015 | Yamazaki |
D725053 | March 24, 2015 | Kaneko |
D725055 | March 24, 2015 | Yamazaki |
D739832 | September 29, 2015 | Yamazaki |
D770993 | November 8, 2016 | Yoshida |
D772824 | November 29, 2016 | Yoshida |
D790490 | June 27, 2017 | Osaka |
D791090 | July 4, 2017 | Yoshida |
D800080 | October 17, 2017 | Nagata |
D823363 | July 17, 2018 | Takewaki et al. |
D824440 | July 31, 2018 | Takewaki |
D825502 | August 14, 2018 | Kosugi |
D842823 | March 12, 2019 | Okajima |
D843958 | March 26, 2019 | Okajima |
D853979 | July 16, 2019 | Kagaya |
D860419 | September 17, 2019 | Kosugi |
D860420 | September 17, 2019 | Kosugi |
D901406 | November 10, 2020 | Kagaya |
D1053156 | December 3, 2024 | Tateno |
20230089509 | March 23, 2023 | Morita |
Patent History
Patent number: D1070797
Type: Grant
Filed: Aug 8, 2022
Date of Patent: Apr 15, 2025
Assignee: Kokusai Electric Corporation (Tokyo)
Inventors: Hideto Tateno (Toyama), Takatomo Yamaguchi (Toyama), Daiki Kimoto (Toyama)
Primary Examiner: Rhea Shields
Assistant Examiner: Bryan N. Melvin
Application Number: 29/849,023
Type: Grant
Filed: Aug 8, 2022
Date of Patent: Apr 15, 2025
Assignee: Kokusai Electric Corporation (Tokyo)
Inventors: Hideto Tateno (Toyama), Takatomo Yamaguchi (Toyama), Daiki Kimoto (Toyama)
Primary Examiner: Rhea Shields
Assistant Examiner: Bryan N. Melvin
Application Number: 29/849,023
Classifications