Target profile for a physical vapor deposition chamber target
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Description
The broken lines in
Claims
The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
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Patent History
Patent number: D801942
Type: Grant
Filed: Apr 16, 2015
Date of Patent: Nov 7, 2017
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (Cupertino, CA), Yu Liu (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/524,109
Type: Grant
Filed: Apr 16, 2015
Date of Patent: Nov 7, 2017
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (Cupertino, CA), Yu Liu (Campbell, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/524,109
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)