Retainer of ceiling heater for semiconductor fabrication apparatus
Latest KOKUSAI ELECTRIC CORPORATION Patents:
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- HEATER ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
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Description
Claims
The ornamental design for a retainer of ceiling heater for semiconductor fabrication apparatus, as shown and described.
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Patent History
Patent number: D918848
Type: Grant
Filed: Dec 27, 2019
Date of Patent: May 11, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,687
Type: Grant
Filed: Dec 27, 2019
Date of Patent: May 11, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,687
Classifications