With Floating Gate Electrode Patents (Class 257/315)
  • Patent number: 9455329
    Abstract: A junctionless semiconductor device having a buried gate, a module and system each having the same, and a method for forming the semiconductor device are disclosed. A source, a drain, and a body of a semiconductor device having a buried gate are doped with the same type of impurities, so that the junctionless semiconductor device does not include a PN junction between the source and the body or between the body and the drain. As a result, a leakage current caused by GIDL is reduced so that operation characteristics of the semiconductor device are improved and the size of a current-flowing region is increased, resulting in an increased operation current.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: September 27, 2016
    Assignee: SK HYNIX INC.
    Inventors: Kyung Kyu Min, Min Soo Yoo, Il Woong Kwon
  • Patent number: 9450179
    Abstract: A technique relates magnetoresistive random access memory (MRAM). A dielectric layer is disposed on a transistor, and the transistor is formed in a uniform crystalline substrate. A hole is formed through the dielectric layer to reach the transistor. A polycrystalline material is disposed in the hole by using selective epitaxial growth (SEG), and the polycrystalline material is annealed to create an epitaxial stud. A magnetic tunnel junction (MTJ) is disposed on the epitaxial stud.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: September 20, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: John K. DeBrosse, Janusz J. Nowak
  • Patent number: 9424129
    Abstract: Methods and systems that include receiving data to be written to a NAND array in a controller; and writing the data to the NAND array, the NAND array including both type A NAND cells and type B NAND cells, wherein the type A NAND cells and the type B NAND cells have at least one structural difference.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: August 23, 2016
    Assignee: Seagate Technology LLC
    Inventors: Young Pil Kim, Antoine Khoueir, Rodney Virgil Bowman
  • Patent number: 9424909
    Abstract: Aspects disclosed include static random access memory (SRAM) arrays having substantially constant operational yields across multiple modes of operation. In one aspect, a method of designing SRAM arrays with multiple modes operation is provided. The method includes determining performance characteristics associated with each mode of operation. SRAM bit cells configured to operate in each mode of operation are provided to the SRAM array. SRAM bit cells are biased to operate in a mode of operation using dynamic adaptive assist techniques, wherein the SRAM bit cells achieve a substantially constant operational yield across the modes. The SRAM bit cells have a corresponding type, wherein the number of SRAM bit cell types in the method is less than the number of modes of operation. Thus, each SRAM array may achieve a particular mode of operation without requiring a separate SRAM bit cell type for each mode, thereby reducing costs.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: August 23, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Niladri Narayan Mojumder, Ping Liu, Stanley Seungchul Song, Zhongze Wang, Choh Fei Yeap
  • Patent number: 9425190
    Abstract: Techniques for providing a direct injection semiconductor memory device are disclosed. In one particular exemplary embodiment, the techniques may be realized as a method for biasing a direct injection semiconductor memory device. The method may comprise applying a first voltage potential to a first N-doped region via a bit line and applying a second voltage potential to a second N-doped region via a source line. The method may also comprise applying a third voltage potential to a word line, wherein the word line is spaced apart from and capacitively coupled to a body region that is electrically floating and disposed between the first N-doped region and the second N-doped region. The method may further comprise applying a fourth voltage potential to a P-type substrate via a carrier injection line.
    Type: Grant
    Filed: October 1, 2014
    Date of Patent: August 23, 2016
    Assignee: MICRON TECHNOLOGY, INC.
    Inventors: Yogesh Luthra, Serguei Okhonin, Mikhail Nagoga
  • Patent number: 9412878
    Abstract: A semiconductor device having improved reliability is disclosed. In a semiconductor device according to one embodiment, an element isolation region extending in an X direction has a crossing region that crosses, in plan view, a memory gate electrode extending in a Y direction that intersects with the X direction at right angles. In this case, in the crossing region, a width in the Y direction of one edge side, the one edge side being near to a source region, is larger than a width in the Y direction of the other edge side, the other edge side being near to a control gate electrode.
    Type: Grant
    Filed: June 13, 2015
    Date of Patent: August 9, 2016
    Assignee: Renesas Electronics Corporation
    Inventors: Koji Ogata, Yoshiyuki Kawashima, Hiraku Chakihara, Tomohiro Hayashi
  • Patent number: 9412750
    Abstract: A non-volatile semiconductor memory device with good write/erase characteristics is provided. A selection gate is formed on a p-type well of a semiconductor substrate via a gate insulator, and a memory gate is formed on the p-type well via a laminated film composed of a silicon oxide film, a silicon nitride film, and a silicon oxide film. The memory gate is adjacent to the selection gate via the laminated film. In the regions on both sides of the selection gate and the memory gate in the p-type well, n-type impurity diffusion layers serving as the source and drain are formed. The region controlled by the selection gate and the region controlled by the memory gate located in the channel region between said impurity diffusion layers have the different charge densities of the impurity from each other.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: August 9, 2016
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Digh Hisamoto, Shinichiro Kimura, Kan Yasui, Nozomu Matsuzaki
  • Patent number: 9412755
    Abstract: In a manufacturing method for a semiconductor device provided with a MONOS-type FET for a non-volatile memory and high-voltage and low-voltage MOSFETs, a groove having a predetermined depth is formed in a region in which the high-voltage MOSFET on a semiconductor substrate is formed, and an oxide film serving as a gate insulating film of the high-voltage MOSFET is formed within the formed groove by thermal oxidation. Thereafter, a gate electrode film of the low-voltage MOSFET is formed on the entire surface of the semiconductor substrate. Thereafter, a region for the MONOS-type FET is opened, the semiconductor surface of the semiconductor substrate is exposed, and a first potential barrier film, a charge storage film, and a second potential barrier film are sequentially deposited, to thereby form a charge storage three-layer film. Agate electrode film of the MONOS-type FET is formed on the formed charge storage three-layer film.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: August 9, 2016
    Assignee: Synaptics Display Devices GK
    Inventors: Hiroshi Ishida, Kazuhiko Sato
  • Patent number: 9406685
    Abstract: A flash memory unit, a memory array and operation methods thereof are provided. The flash memory unit includes a semiconductor substrate, a first and a second bit line structures, a word line structure, a first and a second float gates, and a first and a second control gates. The semiconductor substrate has doping wells formed therein, constituting a source and a drain. The first and second bit line structures are respectively connected with the source and the drain. The word line structure is disposed between the first and second bit line structures. The first float gate is disposed between the first bit line structure and the word line, and the second float gate is disposed between the second bit line structure and the word line. The first control gate is disposed on the first float gate, and the second control gate is disposed on the second float gate.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: August 2, 2016
    Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
    Inventors: Guangjun Yang, Jian Hu, Jun Xiao, Binghan Li, Hong Jiang, Weiran Kong
  • Patent number: 9401434
    Abstract: The present disclosure relates to a structure and method for forming a flash memory cell with an improved erase speed and erase current. Si dots are used for charge trapping and an ONO sandwich structure is formed over the Si dots. Erase operation includes direct tunneling as well as FN tunneling which helps increase erase speed without compensating data retention.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: July 26, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Ming Chen, Tsu-Hui Su, Szu-Yu Wang, Chung-Yi Yu
  • Patent number: 9401368
    Abstract: Various embodiments provide memory devices and methods for forming the same. A substrate is provided, the substrate having one or more adjacent memory cells formed thereon. Each memory cell includes a gate structure, a control gate layer, and a first mask layer. A portion of the control gate layer is removed, to reduce a size of an exposed portion of the control gate layer in a direction parallel to a surface of the substrate. An electrical contact layer is formed on an exposed sidewall of the control gate layer and an exposed surface of the substrate. A barrier layer is formed on a sidewall of the memory cell. A conductive structure is formed on the substrate. The conductive structure has a significantly larger distance from control gate layer than from the gate structure, and the barrier layer forms an isolation layer between the conductive structure and the control gate layer.
    Type: Grant
    Filed: October 8, 2014
    Date of Patent: July 26, 2016
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Zhongshan Hong, Yun Yang
  • Patent number: 9401209
    Abstract: A semiconductor memory device is provided including first and second cell strings formed on a substrate, the first and second cell strings jointly connected to a bit line, wherein each of the first and second cell strings includes a ground selection unit, a memory cell, and first and second string selection units sequentially formed on the substrate to be connected to each other, wherein the ground selection unit is connected to a ground selection line, the memory cell is connected to a word line, the first string selection unit is connected to a first string selection line, and the second string selection unit is connected to a second string selection line, and wherein the second string selection unit of the first cell string has a channel dopant region.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: July 26, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sunil Shim, Jang-Gn Yun, Jeonghyuk Choi, Kwang Soo Seol, Jaehoon Jang, Jungdal Choi
  • Patent number: 9397176
    Abstract: A first doped region extends from a top surface of a substrate to a first depth. Implanting into the first doped region forms a second doped region of a second conductivity type. The second doped region extends from the top surface to a second depth that is less than the first depth. A split gate NVM structure has select and control gates over the second doped region. A drain region of the second conductivity type is formed adjacent to the select gate. A source region of the second conductivity type is formed adjacent to the control gate. Angled implants into the second doped region form a third doped region of the first conductivity type under a portion of the select gate and a fourth doped region of the first conductivity type under a portion of the control gate. The drain and source regions adjoin the third and fourth regions.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: July 19, 2016
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Cheong Min Hong, Konstantin V. Loiko, Jane A. Yater
  • Patent number: 9397209
    Abstract: A semiconductor structure has a second portion with an appendage on one side of the second portion and extruding along the longitudinal direction of the second portion. Moreover the semiconductor structure also has a gate line longitudinally parallel to the second portion, wherein the length of the gate line equals to the longitudinal length of the second portion.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: July 19, 2016
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Teng-Hao Yeh, Yen-Hao Shih
  • Patent number: 9397046
    Abstract: Fluorine-induced formation of voids and electrical shorts can be avoided by forming fluorine-free metal lines. Specifically, control gate electrodes of a three-dimensional memory device can be formed employing fluorine-free deposition processes. Fluorine-free tungsten nitride can be deposited as a metallic barrier liner employing atomic layer deposition. Fluorine-free tungsten nucleation layer can be subsequently deposited. Fluorine-free tungsten fill process can be employed to form the control gate electrodes. The fluorine-free control gate electrodes do not include fluorine therein, and thus, circumvents yield and reliability issues associated with residual fluorine that are present in fluorine-containing metal lines.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: July 19, 2016
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Rahul Sharangpani, Raghuveer S. Makala, Sateesh Koka, George Matamis
  • Patent number: 9397201
    Abstract: A method of forming a flash memory cell includes forming a first hard mask and a second hard mask on a substrate. A select gate is formed as a spacer around the first hard mask. A charge storage layer is formed over the first and second hard masks and the select gate. A control gate is formed as a spacer around the second hard mask. A recess in the control gate is filled with a dielectric material. The recess is formed between a curved sidewall of the control gate and a sidewall of the charge storage layer directly adjacent the curved sidewall of the control gate.
    Type: Grant
    Filed: November 17, 2015
    Date of Patent: July 19, 2016
    Assignee: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Jacob T. Williams, Cheong Min Hong, Sung-Taeg Kang, David G. Kolar, Jane A. Yater
  • Patent number: 9397111
    Abstract: A fabrication process for a 3D memory structure provides a single crystal silicon channel for a drain-side select gate (SGD) transistor using a laser thermal anneal (LTA). The 3D memory structure includes a stack formed from an array of alternating conductive and dielectric layers. A NAND string is formed by filling a memory hole with memory films, including a charge trapping material, a tunnel oxide and a polysilicon channel. In one case, a separate oxide and polysilicon forms the SGD transistor gate oxide and channel respectively, where LTA is performed on the polysilicon. In another case, the same oxide and polysilicon are used for the SGD transistor and the memory cells. A portion of the polysilicon is converted to single crystal silicon. A back side of the single crystal silicon is subject to epitaxial growth and thermal oxidation via a void in a control gate layer.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: July 19, 2016
    Assignee: SanDisk Technologies LLC
    Inventors: Murshed Chowdhury, Yanli Zhang, Jin Liu, Raghuveer S Makala, Johann Alsmeier
  • Patent number: 9397144
    Abstract: According to one embodiment, a non-volatile semiconductor memory device includes: a semiconductor substrate; a plurality of first lines; a plurality of second lines; and a plurality of non-volatile memory cells arranged at positions where the plurality of first lines intersect with the plurality of second lines, wherein each of the plurality of non-volatile memory cells includes a resistance change element and a rectifying element connected in series to the resistance change element, and a resistance change film continuously extending over the plurality of second lines is arranged between the plurality of first lines and the plurality of second lines, and the resistance change element includes a portion where the first line intersect with the second line in the resistance change film.
    Type: Grant
    Filed: September 11, 2014
    Date of Patent: July 19, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hiroyuki Nansei
  • Patent number: 9391085
    Abstract: Some embodiments of the present disclosure relate to a split gate memory cell which includes a select gate and a memory gate. The select gate has a planar upper surface disposed over a semiconductor substrate and is separated from the substrate by a gate dielectric layer. The memory gate has a planar upper surface arranged at one side of the select gate and is separated from the substrate by a charge trapping layer. The charge trapping layer extends under the memory gate. A first spacer is disposed above the memory gate and is separated from the memory gate by a first dielectric liner. The first dielectric liner extends upwardly along an upper sidewall of the charge trapping layer; and source/drain regions are disposed in the semiconductor substrate at opposite sides of the select gate and the memory gate.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: July 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Hang Huang, Chang-Ming Wu, Shih-Chang Liu
  • Patent number: 9379320
    Abstract: According to one embodiment, a nonvolatile memory device includes a memory section. The memory section includes a first insulating layer, a second insulating layer and a pair of electrodes. The second insulating layer is formed on and in contact with the first insulating layer. The second insulating layer has at least one of a composition different from a composition of the first insulating layer and a phase state different from a phase state of the first insulating layer. The pair of electrodes is capable of passing a current through a current path along a boundary portion between the first insulating layer and the second insulating layer. An electrical resistance of the current path is changed by a voltage applied between the pair of electrodes.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: June 28, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masao Shingu, Akira Takashima, Koichi Muraoka
  • Patent number: 9379255
    Abstract: A non-volatile memory cell having a split gate, wherein the floating gate and the coupling/control gate have complimentary non-planar shapes. The shape may be a step shape. An array of such cells and a method of manufacturing the cells are also disclosed.
    Type: Grant
    Filed: July 16, 2012
    Date of Patent: June 28, 2016
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Baowei Qiao, Zufa Zhang, Yi Zhang, Shiuh Luen Wang, Wen-Juei Lu
  • Patent number: 9373387
    Abstract: Aspects disclosed include static random access memory (SRAM) arrays having substantially constant operational yields across multiple modes of operation. In one aspect, a method of designing SRAM arrays with multiple modes operation is provided. The method includes determining performance characteristics associated with each mode of operation. SRAM bit cells configured to operate in each mode of operation are provided to the SRAM array. SRAM bit cells are biased to operate in a mode of operation using dynamic adaptive assist techniques, wherein the SRAM bit cells achieve a substantially constant operational yield across the modes. The SRAM bit cells have a corresponding type, wherein the number of SRAM bit cell types in the method is less than the number of modes of operation. Thus, each SRAM array may achieve a particular mode of operation without requiring a separate SRAM bit cell type for each mode, thereby reducing costs.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: June 21, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Niladri Narayan Mojumder, Ping Liu, Stanley Seungchul Song, Zhongze Wang, Choh Fei Yeap
  • Patent number: 9373627
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions to separate a first active region and a second active region of a semiconductor substrate from each other, etching a portion of the STI regions that contacts a sidewall of the second active region to form a recess, and implanting a top surface layer and a side surface layer of the second active region to form an implantation region. The side surface layer of the second active region extends from the sidewall of the second active region into the second active region. An upper portion of the top surface layer and an upper portion of the side surface layer are oxidized to form a capacitor insulator. A floating gate is formed to extend over the first active region and the second active region. The floating gate includes a portion extending into the recess.
    Type: Grant
    Filed: January 19, 2015
    Date of Patent: June 21, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Hung Fu, Chun-Yao Ko, Tuo-Hsin Chien, Ting-Chen Hsu
  • Patent number: 9368508
    Abstract: There is provided a peripheral circuit region including a plurality of circuit elements disposed on a first substrate; and a cell region including at least one channel region extending from an upper surface of a second substrate disposed on the first substrate in a direction perpendicular to the upper surface of the second substrate, and a plurality of gate electrode layers and a plurality of insulating layers stacked on the second substrate to be adjacent to the at least one channel region, wherein at least a portion of the first substrate contacts the second substrate, and the first substrate and the second substrate provide a single substrate.
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: June 14, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jung Geun Jee, Dong Kyum Kim, Jin Gyun Kim, Ki Hyun Hwang
  • Patent number: 9368506
    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided. In an exemplary embodiment, an integrated circuit includes a semiconductor substrate doped with a first conductivity-determining impurity. The semiconductor substrate has formed therein a first well doped with a second conductivity-determining impurity that is different from the first conductivity-determining impurity, a second well, formed within the first well, and doped with the first conductivity-determining impurity, and a third well spaced apart from the first and second wells and doped with the first conductivity-determining impurity. The integrated circuit further includes a floating gate structure formed over the semiconductor substrate.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: June 14, 2016
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Ricardo Pablo Mikalo, Stefan Flachowsky
  • Patent number: 9361986
    Abstract: A non-volatile storage system is disclosed that includes non-volatile memory cells designed for high endurance and lower retention than other non-volatile memory cells.
    Type: Grant
    Filed: September 18, 2012
    Date of Patent: June 7, 2016
    Assignee: SanDisk Technologies Inc.
    Inventors: Jian Chen, Sergei Gorobets, Steven Sprouse, Tien-Chien Kuo, Yan Li, Seungpil Lee, Alex Mak, Deepanshu Dutta, Masaaki Higashitani
  • Patent number: 9355725
    Abstract: A memory structure including a memory array of a plurality of memory cells arranged in rows and columns, the plurality of memory cells including a pair of adjacent memory cells in a row of the memory array, wherein the pair of adjacent memory cells include a single, shared source-line through which each of the memory cells in the pair of adjacent memory cells is coupled to a voltage source. Methods of operating a memory including the memory structure are also described.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: May 31, 2016
    Assignee: Cypress Semiconductor Corporation
    Inventors: Bo Jin, Krishnaswamy Ramkumar, Xiaojun Yu, Igor Kouznetsov, Venkatraman Prabhakar
  • Patent number: 9356042
    Abstract: A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers function as gate electrodes of the memory cells.
    Type: Grant
    Filed: March 25, 2015
    Date of Patent: May 31, 2016
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yoshiaki Fukuzumi, Ryota Katsumata, Masaru Kidoh, Masaru Kito, Hiroyasu Tanaka, Yosuke Komori, Megumi Ishiduki, Hideaki Aochi
  • Patent number: 9356020
    Abstract: A semiconductor arrangement includes a first semiconductor device including a first type region having a first conductivity type and a second type region having a second conductivity type. The semiconductor arrangement includes a second semiconductor device adjacent the first semiconductor device. The second semiconductor device includes a third type region having a third conductivity type and a fourth type region having a fourth conductivity type. The semiconductor arrangement includes a first insulator layer including a first insulator portion around at least some of the first semiconductor device and a second insulator portion around at least some of the second semiconductor device. The first insulator portion has a first insulator height, and the second insulator portion has a second insulator height. The first insulator height is different than the second insulator height. A method of forming a semiconductor arrangement is provided.
    Type: Grant
    Filed: May 29, 2014
    Date of Patent: May 31, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jean-Pierre Colinge, Sang Hoo Dhong, Ta-Pen Guo, Chung-Cheng Wu
  • Patent number: 9355729
    Abstract: A non-volatile memory device includes: a floating gate having a plurality of fingers; a first coupling unit including an active control gate which overlaps with the floating gate in a vertical direction; a second coupling unit including a plurality of control plugs which overlap with the floating gate in a horizontal direction; and a control unit which electrically connects the active control gate to the control plugs and controls a bias to be applied to the active control gate.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: May 31, 2016
    Assignee: SK Hynix Inc.
    Inventor: Sung-Kun Park
  • Patent number: 9356033
    Abstract: Nonvolatile memory devices include a string of nonvolatile memory cells on a substrate. This string of nonvolatile memory cells includes a first vertical stack of nonvolatile memory cells on the substrate and a string selection transistor on the first vertical stack of nonvolatile memory cells. A second vertical stack of nonvolatile memory cells is also provided on the substrate and a ground selection transistor is provided on the second vertical stack of nonvolatile memory cells. This second vertical stack of nonvolatile memory cells is provided adjacent the first vertical stack of nonvolatile memory cells. A conjunction doped semiconductor region is provided in the substrate. This conjunction doped region electrically connects the first vertical stack of nonvolatile memory cells in series with the second vertical stack of nonvolatile memory cells so that these stacks can operate as a single NAND-type string of memory cells.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: May 31, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-Hoon Son, Jung Ho Kim, Seungjae Baik, Myoungbum Lee, Kihyun Hwang
  • Patent number: 9355913
    Abstract: A three dimensional (3D) semiconductor device includes; a vertical channel extending from a lower end proximate a substrate to an upper end and connecting a plurality of memory cells, and a cell array comprising the plurality of cells, wherein the cell array is arranged in a gate stack of layers having a stair-stepped structure disposed on the substrate. The gate stack includes a lower layer including a lower select line coupled to a lower non-memory transistor proximate the lower end, upper layers including conductive lines respectively coupled to an upper non-memory transistor proximate the upper end and connected as a single conductive piece to form an upper select line, and intermediate layers respectively including a word line and coupled to a cell transistor, wherein the intermediate layers are disposed between the lower select line and the upper select line.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: May 31, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-Yong Park, Jintaek Park, Hansoo Kim, Juhyuck Chung, Wonseok Cho
  • Patent number: 9356105
    Abstract: A memory device includes a semiconductor body having a first conductivity type, a first terminal in the semiconductor body having a second conductivity type, a channel region having the first conductivity type surrounding the first terminal, and a second terminal having the second conductivity type surrounding the channel region. A connector is in contact with the first terminal, and can be connected to a bit line in an overlying patterned conductor layer. Memory material is disposed over the channel region, and can include a dielectric charge storage structure. A control gate surrounds the first terminal and is disposed over the memory material. A conductive line surrounds the control gate and is in contact with the second terminal. The control gate and the conductive line can be ring shaped.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: May 31, 2016
    Assignee: Macronix International Co., Ltd.
    Inventor: Hang-Ting Lue
  • Patent number: 9349743
    Abstract: To provide a semiconductor device having improved reliability. A semiconductor device is provided forming a control gate electrode for memory cell on a semiconductor substrate via a first insulating film; forming a memory gate electrode for memory cell, which is adjacent to the control gate electrode, on the semiconductor substrate via a second insulating film having a charge storage portion; forming n? type semiconductor regions for source or drain in the semiconductor substrate by ion implantation; forming sidewall spacers on the side wall of the control gate electrode and the memory gate electrode; forming n+ type semiconductor regions for source or drain in the semiconductor substrate by ion implantation; and removing an upper portion of the second insulating film present between the control gate electrode and the memory gate electrode. A removal length of the second insulating film is larger than the depth of the n+ type semiconductor regions.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: May 24, 2016
    Assignee: Renesas Electronics Corporation
    Inventors: Nobuto Nakanishi, Yoshiyuki Kawashima, Akio Nishida
  • Patent number: 9349726
    Abstract: A semiconductor device, and a method of fabrication, is introduced. In an embodiment, a dummy gate stack is formed on a substrate. Lightly-doped source/drain regions and highly-doped source/drain regions are formed in the substrate on either sides of the dummy gate stack. An inter-layer dielectric (ILD) layer is formed over the substrate. Subsequently, the dummy gate stack is removed and a gate stack is formed in an opening in the ILD layer. The gate stack is formed by forming an interfacial layer in the opening of the ILD layer, forming a gate dielectric layer over the interfacial layer, forming a work function metal layer over the gate dielectric layer, and forming one or more gate electrode layers over the work function metal layer. Contacts are formed in the ILD layer and one or more metallization layers are formed over the ILD layer.
    Type: Grant
    Filed: March 26, 2014
    Date of Patent: May 24, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Ching Lee, Hsueh Wen Tsau, Mrunal A. Khaderbad, Da-Yuan Lee
  • Patent number: 9349879
    Abstract: A non-volatile memory device may include a semiconductor substrate and an isolation layer on the semiconductor substrate wherein the isolation layer defines an active region of the semiconductor substrate. A tunnel insulation layer may be provided on the active region of the semiconductor substrate, and a charge storage pattern may be provided on the tunnel insulation layer. An interface layer pattern may be provided on the charge storage pattern, and a blocking insulation pattern may be provided on the interface layer pattern. Moreover, the block insulation pattern may include a high-k dielectric material, and the interface layer pattern and the blocking insulation pattern may include different materials. A control gate electrode may be provided on the blocking insulating layer so that the blocking insulation pattern is between the interface layer pattern and the control gate electrode. Related methods are also discussed.
    Type: Grant
    Filed: November 26, 2014
    Date of Patent: May 24, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ju-Hyung Kim, Chang-Seok Kang, Sung-Il Chang, Jung-Dal Choi
  • Patent number: 9343152
    Abstract: A three-dimensional integrated circuit non-volatile memory array includes a memory array with first and second NAND memory cell string stacks having opposite orientations, where each NAND memory cell string includes a plurality of transistors and a source line contact connected in series between a bit line and string extension region which extends from the source line contact and past a first self-aligned SSL gate electrode located on a peripheral end of the NAND memory cell string, and also includes a string select transistor formed with a second self-aligned SSL connected in series between the bit line and the plurality of transistors, where the first and second self-aligned SSL gate electrodes are shared between adjacent NAND memory cell strings having opposite orientations.
    Type: Grant
    Filed: August 15, 2014
    Date of Patent: May 17, 2016
    Assignee: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
    Inventor: Hyoung Seub Rhie
  • Patent number: 9337287
    Abstract: A non-volatile memory device includes an isolation layer formed over a substrate to define an active region, a floating gate formed over the substrate, a selection gate formed over the substrate on one side of the floating gate and formed to be adjacent to the floating gate with a first gap from the floating gate, a control plug formed over the isolation layer on the other side of the floating gate and formed to be adjacent to the floating gate with a second gap from the floating gate, and a charge blocking layer formed to gap-fill the first gap and the second gap.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: May 10, 2016
    Assignee: SK Hynix Inc.
    Inventor: Sung-Kun Park
  • Patent number: 9331085
    Abstract: A semiconductor device may include: a substrate. First and second gate electrode patterns are disposed on first and second fin type active patterns. The first and second fin type active patterns include a first channel region disposed between a first impurity region and a second impurity region. The second gate electrode pattern crosses a first gate-separating region included in the second fin type active region. The first gate-separating region includes a trench and an embedded insulator filling at least a portion of the trench.
    Type: Grant
    Filed: April 7, 2015
    Date of Patent: May 3, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyun Min Choi, Shin Cheol Min, Ji Hoon Yoon
  • Patent number: 9330766
    Abstract: A semiconductor device according to an embodiment may include cell strings including a plurality of memory cells coupled between bit lines and a source line and coupled to word lines, a peripheral circuit suitable for programming selected memory cells coupled to a selected word line among the word lines by applying a program voltage to the selected word line, and applying one or more pass voltages to unselected word lines, and a control circuit suitable for controlling the peripheral circuit to temporarily float the unselected word lines while the selected memory cells are programmed.
    Type: Grant
    Filed: August 3, 2015
    Date of Patent: May 3, 2016
    Assignee: SK Hynix Inc.
    Inventors: Sung Wook Jung, Hye Eun Heo, Ji Hui Baek, Dong Hun Lee, Tae Hwa Lee
  • Patent number: 9330924
    Abstract: A method for forming a semiconductor device includes forming a conductive structure of a silicon material on a substrate and forming a planarized dielectric layer adjacent the conductive structure. The method also includes removing a portion of the dielectric layer to expose a top portion of the conductive structure and removing an outer portion of the exposed top portion of the conductive structure such that the top portion of the gate structure has a narrower width than the unexposed portion. The method further includes forming a metal layer over the exposed portion of the gate structure and a top surface of the dielectric layer, and forming a silicide layer over the top portion of the conductive structure. The width of the silicided top portion of the conductive structure is substantially the same as the width of the bottom portion of the conductive structure.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: May 3, 2016
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Huanxin Liu
  • Patent number: 9331086
    Abstract: An integrated circuit is provided, which comprises at least one first group each having at least one analog unit; and at least one second group each having at least one electronically settable semi-permanent switching unit coupled to the at least analog unit of the first group for trimming the first group and having at least one many-times-programmable and non-volatile cell (MTP). Each many-times-programmable cell (MTP) comprises at least one MOS transistor having a floating gate (FG) with a tunnel oxide (TO) and a first capacitor coupled to the floating gate (FG). The capacitance of the first capacitor is substantially larger than a gate-channel capacitance of the MOS transistor.
    Type: Grant
    Filed: July 14, 2009
    Date of Patent: May 3, 2016
    Assignee: NXP B.V.
    Inventors: Wibo D. Van Noort, Theodore J. Letavic, Francis Zaato
  • Patent number: 9331183
    Abstract: A semiconductor device including a first gate structure and a second gate structure immediately adjacent to each other with a spacer therebetween. Line width of the top of the second gate structure is not less than that of the bottom thereof. A fabrication method thereof is also disclosed. A transient first gate structure and a temporary gate structure are formed by etching through a first hard mask. A second gate structure is formed between a first spacer and a second spacer opposite to each other and disposed respectively on the transient first gate structure and temporary gate structure. The second gate structure is covered with a second hard mask. An etch process is performed through a patterned photoresist layer to remove exposed first hard mask and temporary gate structure and to partially remove exposed portion of first hard mask and transient first gate structure to form the first gate structure.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: May 3, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hsiang-Chen Lee, Ping-Chia Shih, Chi-Cheng Huang, Wan-Fang Chung, Yu-Chun Chang, Je-Yi Su
  • Patent number: 9324730
    Abstract: A vertical memory device including a substrate including first regions and a second region; a plurality of channels in the first regions, the plurality of channels extending in a first direction substantially perpendicular to a top surface of the substrate; a charge storage structure on a sidewall of each channel in a second direction substantially parallel to the top surface of the substrate; a plurality of gate electrodes in the first regions, the plurality of gate electrodes arranged on a sidewall of the charge storage structure and spaced apart from each other in the first direction; and a plurality of supporters in the second region, the plurality of supporters spaced apart from each other in a third direction substantially perpendicular to the first direction and the second direction, the plurality of supporters contacting a sidewall of at least one gate electrode.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: April 26, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Phil-Ouk Nam, Dong-Chul Yoo, Bi-O Kim, Jae-Young Ahn, Byong-Hyun Jang, Ki-Hyun Hwang
  • Patent number: 9318495
    Abstract: Disclosed are a semiconductor device comprising a capacitor and a double-layer metal contact and a method fabricating the same. The method comprising: forming a gate of a peripheral transistor for a peripheral circuit; forming a first contact and a first peripheral circuit wiring layer pattern on a first interlayer insulating layer; forming a second contact and a second peripheral circuit wiring layer pattern; selectively removing a portion of the second interlayer insulating layer in a cell region; forming a mold layer covering the second peripheral circuit wiring layer pattern; forming storage nodes passing through the mold layer; removing the mold layer; forming a dielectric layer and a plate node, which cover the storage nodes; forming a third interlayer insulating layer; and forming third contacts passing through the third interlayer insulating layer.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: April 19, 2016
    Assignee: SK Hynix Inc.
    Inventor: Chun Soo Kang
  • Patent number: 9318497
    Abstract: A nonvolatile memory device includes a plurality of twin cells arrayed on a substrate. Each of the plurality of twin cells includes a drain mesa protruding from a surface of a substrate. A first source and a second source are disposed in the substrate and spaced apart from the drain mesa. A first floating gate overlaps with a first sidewall surface of the drain mesa and extends onto the first source, and a second floating gate overlaps with a second sidewall surface of the drain mesa and extends onto the second source. Related methods are also provided.
    Type: Grant
    Filed: August 27, 2014
    Date of Patent: April 19, 2016
    Assignee: SK Hynix Inc.
    Inventor: Tae Ho Lee
  • Patent number: 9318478
    Abstract: A semiconductor device includes a first dummy gate having a first width, a second dummy gate adjacent to the first dummy gate in a lengthwise direction and having a second width, and a first bridge connecting the first dummy gate and the second dummy gate to each other. The first width and the second width are smaller than a minimum processing line width.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: April 19, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Deok-Han Bae, Dong-Kwon Kim, Jong-Hyuk Kim, Yoon-Moon Park
  • Patent number: 9312264
    Abstract: The present invention provides a non-volatile memory device using a memory transistor including an oxide semiconductor, capable of writing with low power consumption, without receiving an influence of deterioration of a selection transistor connected in series to the memory transistor. A memory cell 1 includes a memory transistor Qm, and first and second selection transistors Q1 and Q2. During a writing operation, the memory transistor Qm and the first selection transistor Q1 are set to the ON state, and the second selection transistor Q2 is set to the OFF state. A writing current is flown to a series circuit of the memory transistor Qm and the first selection transistor Q1. The memory transistor Qm is transited from a first state that indicates a transistor characteristic to a second state that indicates an ohmic resistance characteristic.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: April 12, 2016
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Naoki Ueda, Sumio Katoh
  • Patent number: 9312363
    Abstract: A multiple-fin device includes a substrate and a plurality of fins formed on the substrate. Source and drain regions are formed in the respective fins. A dielectric layer is formed on the substrate. The dielectric layer has a first thickness adjacent one side of a first fin and having a second thickness, different from the first thickness, adjacent an opposite side of the fin. A continuous gate structure is formed overlying the plurality of fins, the continuous gate structure being adjacent a top surface of each fin and at least one sidewall surface of at least one fin. By adjusting the dielectric layer thickness, channel width of the resulting device can be fine-tuned.
    Type: Grant
    Filed: June 10, 2013
    Date of Patent: April 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Patent number: 9306052
    Abstract: A compound semiconductor device includes: an electron transit layer; an electron supply layer over the electron transit layer; a gate electrode, a source electrode and a drain electrode at a level above the electron supply layer; and a porous electrical insulating film that covers the gate electrode, the source electrode and the drain electrode, the porous electrical insulating film containing an organic constituent, and a cavity being formed around the gate electrode in the porous electrical insulating film. A cross-linking layer is on a surface of the porous electrical insulating film at the cavity side.
    Type: Grant
    Filed: March 27, 2015
    Date of Patent: April 5, 2016
    Assignee: FUJITSU LIMITED
    Inventors: Shirou Ozaki, Naoya Okamoto