Complementary Insulated Gate Field Effect Transistors Patents (Class 257/369)
  • Patent number: 11735593
    Abstract: A semiconductor structure includes a semiconductor substrate, with first, second, and third field effect transistors (FETs) formed on the substrate. A gate of the first FET includes a gate electrode, a first work function metal (WFM) layered with a first interfacial layer (IL) and a first high-k dielectric (HK); a gate of the second FET includes the first WFM layered with a second IL, a second HK, and a first dipole material; and a gate of the third FET includes the first WFM layered with a third IL, a third HK, the first dipole material, and a second dipole material. The first FET does not include the first dipole material and does not include the second dipole material, and the second FET does not include the second dipole material.
    Type: Grant
    Filed: November 4, 2021
    Date of Patent: August 22, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Jingyun Zhang, Koji Watanabe, Jing Guo
  • Patent number: 11735590
    Abstract: A fin stack including compressively strained and tensile-strained semiconductor fin regions allows CMOS fabrication to form vertically stacked p-type FinFETs and n-type FinFETs. Aspect ratio trapping within a semiconductor base region within the fin stack provides a relaxed semiconductor base region on which uniaxially strained regions are grown. A dielectric layer may be formed to electrically isolate the compressively strained semiconductor fin region from the tensile-strained semiconductor fin region.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: August 22, 2023
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Julien Frougier, Ruilong Xie, Chanro Park
  • Patent number: 11728431
    Abstract: Semiconductor devices and methods are provided. A semiconductor device according to the present disclosure includes a first gate-all-around (GAA) transistor that includes a first plurality of channel members, and a second GAA transistor that includes a second plurality of channel members. The first plurality of channel members has a first pitch (P1) and the second plurality of channel members has a second pitch (P2) smaller than the first pitch (P1).
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11728401
    Abstract: A structure has stacks of semiconductor layers over a substrate and adjacent a dielectric feature. A gate dielectric is formed wrapping around each layer and the dielectric feature. A first layer of first gate electrode material is deposited over the gate dielectric and the dielectric feature. The first layer on the dielectric feature is recessed to a first height below a top surface of the dielectric feature. A second layer of the first gate electrode material is deposited over the first layer. The first gate electrode material in a first region of the substrate is removed to expose a portion of the gate dielectric in the first region, while the first gate electrode material in a second region of the substrate is preserved. A second gate electrode material is deposited over the exposed portion of the gate dielectric and over a remaining portion of the first gate electrode material.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11721694
    Abstract: A semiconductor device including fin field-effect transistors, includes a first gate structure extending in a first direction, a second gate structure extending the first direction and aligned with the first gate structure in the first direction, a third gate structure extending in the first direction and arranged in parallel with the first gate structure in a second direction crossing the first direction, a fourth gate structure extending the first direction, aligned with the third gate structure and arranged in parallel with the second gate structure, an interlayer dielectric layer disposed between the first to fourth gate electrodes, and a separation wall made of different material than the interlayer dielectric layer and disposed between the first and third gate structures and the second and fourth gate structures.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Chen Ho, Hung Chih Hu, Hung Cheng Yu, Ju Ru Hsieh
  • Patent number: 11705453
    Abstract: Self-aligned gate endcap (SAGE) architectures having local interconnects, and methods of fabricating SAGE architectures having local interconnects, are described. In an example, an integrated circuit structure includes a first gate structure over a first semiconductor fin, and a second gate structure over a second semiconductor fin. A gate endcap isolation structure is between the first and second semiconductor fins and laterally between and in contact with the first and second gate structures. A gate plug is over the gate endcap isolation structure and laterally between and in contact with the first and second gate structures. A local gate interconnect is between the gate plug and the gate endcap isolation structure, the local gate interconnect in contact with the first and second gate structures.
    Type: Grant
    Filed: March 6, 2019
    Date of Patent: July 18, 2023
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Kiran Chikkadi
  • Patent number: 11694013
    Abstract: An integrated circuit includes a first and a set of conductive traces, and a first conductive feature. The second set of conductive traces includes a first conductive trace of the second set of conductive traces corresponding to a gate terminal of a first p-type transistor, and a second conductive trace of the second set of conductive traces corresponding to a gate terminal of a first n-type transistor. The first conductive feature corresponds to at least a first contact of a first dummy transistor. The first conductive trace of the second set of conductive traces is electrically coupled to the second conductive trace of the second set of conductive traces by at least the first conductive feature. The first n-type transistor being part of a first transmission gate. The first p-type transistor being part of a second transmission gate.
    Type: Grant
    Filed: July 8, 2022
    Date of Patent: July 4, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ting-Wei Chiang, Hui-Zhong Zhuang, Li-Chun Tien
  • Patent number: 11688791
    Abstract: A semiconductor structure includes a first active region over a substrate and extending along a first direction, a gate structure over the first active region and extending along a second direction substantially perpendicular to the first direction, a gate-cut feature abutting an end of the gate structure, and a channel isolation feature extending along the second direction and between the first active region and a second active region. The gate structure includes a metal electrode in direct contact with the gate-cut feature. The channel isolation feature includes a liner on sidewalls extending along the second direction and a dielectric fill layer between the sidewalls. The gate-cut feature abuts an end of the channel isolation feature and the dielectric fill layer is in direct contact with the gate-cut feature.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ta-Chun Lin, Jhon Jhy Liaw, Kuo-Hua Pan
  • Patent number: 11688742
    Abstract: A multi-stack semiconductor device formed to cover a plurality of gate pitches includes: a 1st transistor; a 2nd transistor formed at a right side of the 1st transistor, and isolated from the transistor by a 1st portion of a diffusion break structure; a 3rd transistor formed vertically above or below the 1st transistor; and a 4th transistor formed at a right side of the 3rd transistor, and isolated from the 3rd transistor by a 2nd portion of the diffusion break structure, wherein the 1st portion and the 2nd portion of the diffusion break structure are formed of different material compositions or have different physical dimensions.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: June 27, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Byounghak Hong, Seunghyun Song, Kang-ill Seo
  • Patent number: 11688637
    Abstract: Wrap-around contact structures for semiconductor fins, and methods of fabricating wrap-around contact structures for semiconductor fins, are described. In an example, an integrated circuit structure includes a semiconductor fin having a first portion protruding through a trench isolation region. A gate structure is over a top and along sidewalls of the first portion of the semiconductor fin. A source or drain region is at a first side of the gate structure, the source or drain region including an epitaxial structure on a second portion of the semiconductor fin. The epitaxial structure has substantially vertical sidewalls in alignment with the second portion of the semiconductor fin. A conductive contact structure is along sidewalls of the second portion of the semiconductor fin and along the substantially vertical sidewalls of the epitaxial structure.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: June 27, 2023
    Assignee: Intel Corporation
    Inventor: Rishabh Mehandru
  • Patent number: 11682589
    Abstract: A method includes forming a first transistor, which includes forming a first gate dielectric layer over a first channel region in a substrate and forming a first work-function layer over the first gate dielectric layer, wherein forming the first work-function layer includes depositing a work-function material using first process conditions to form the work-function material having a first proportion of different crystalline orientations and forming a second transistor, which includes forming a second gate dielectric layer over a second channel region in the substrate and forming a second work-function layer over the second gate dielectric layer, wherein forming the second work-function layer includes depositing the work-function material using second process conditions to form the work-function material having a second proportion of different crystalline orientations.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: June 20, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ya-Wen Chiu, Da-Yuan Lee, Hsien-Ming Lee, Kai-Cyuan Yang, Yu-Sheng Wang, Chih-Hsiang Fan, Kun-Wa Kuok
  • Patent number: 11676967
    Abstract: Disclosed is a semiconductor device comprising a substrate, a plurality of active patterns that protrude from the substrate, a device isolation layer between the active patterns, and a passivation layer that covers a top surface of the device isolation layer and exposes upper portions of the active patterns. The device isolation layer includes a plurality of first isolation parts adjacent to facing sidewalls of the active patterns, and a second isolation part between the first isolation parts. A top surface of the second isolation part is located at a lower level than that of top surfaces of the first isolation parts.
    Type: Grant
    Filed: May 20, 2022
    Date of Patent: June 13, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Guyoung Cho, Subin Shin, Donghyun Roh, Byung-Suk Jung, Sangjin Hyun
  • Patent number: 11664379
    Abstract: An integrated circuit semiconductor device includes a first region including a first transistor and a second region in contact with the first region in a second direction. The first transistor includes a first active fin extending in a first direction, a first gate dielectric layer extending from the first active fin onto a first isolation layer in the second direction, and a first gate electrode on the first gate dielectric layer. The second region includes a second transistor including a second active fin extending in the first direction, a second gate dielectric layer extending from the second active fin onto a second isolation layer in the second direction, and a second gate electrode on the second gate dielectric layer. The integrated circuit semiconductor device includes a gate dielectric layer removal region proximate a boundary between the first region and the second region.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: May 30, 2023
    Inventors: Jaehyun Lee, Jonghan Lee, Seonghwa Park, Jongha Park, Jaehoon Woo, Dabok Jeong
  • Patent number: 11658228
    Abstract: A method for manufacturing semiconductor devices is provided. The method includes: providing a substrate structure comprising a semiconductor substrate and a trench insulator portion in the semiconductor substrate; forming a dummy gate on the semiconductor substrate; performing a first ion implantation into the semiconductor substrate to form a first doped region between the trench insulator portion and the dummy gate; and forming a first connecting member connecting the dummy gate with the first doped region.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: May 23, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Gang Qian, Yiming Miao, Yanlin Sun, Xubo Chen
  • Patent number: 11646200
    Abstract: A method for forming a III-V construction over a group IV substrate comprises providing an assembly comprising the group IV substrate and a dielectric thereon. The dielectric layer comprises a trench exposing the group IV substrate. The method further comprises initiating growth of a first III-V structure in the trench, continuing growth out of the trench on top of the bottom part, growing epitaxially a sacrificial second III-V structure on the top part of the first III-V structure, and growing epitaxially a third III-V structure on the sacrificial second III-V structure. The third III-V structure comprises a top III-V layer. The method further comprises physically disconnecting a first part of the top layer from a second part thereof, and contacting the sacrificial second III-V structure with the liquid etching medium.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: May 9, 2023
    Assignee: IMEC VZW
    Inventors: Liesbeth Witters, Niamh Waldron, Amey Mahadev Walke, Bernardette Kunert, Yves Mols
  • Patent number: 11640962
    Abstract: Semiconductor structures are provided. A first logic cell includes a plurality of first transistors over a substrate. The first transistor includes a first gate electrode across a first channel region. The first gate electrode is electrically connected to a first conductive line in a first dielectric layer through a first contact in a second dielectric layer and a first via in the first dielectric layer. A second logic cell includes a plurality of second transistors over the substrate. The second transistor includes a second gate electrode across a second channel region, wherein the second gate electrode is electrically connected to a second conductive line in the first dielectric layer through a second via. The first dielectric layer is formed over the second dielectric layer, and the second via extends from the second conductive line to the second gate electrode and penetrates the first and second dielectric layers.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: May 2, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jhon-Jhy Liaw
  • Patent number: 11640973
    Abstract: A semiconductor device and a fabricating method thereof are provided. The semiconductor device includes a substrate, a first nanowire spaced apart from a first region of the substrate, a first gate electrode surrounding a periphery of the first nanowire, a second nanowire spaced apart from a second region of the substrate and extending in a first direction and having a first width in a second direction intersecting the first direction, a supporting pattern contacting the second nanowire and positioned under the second nanowire, and a second gate electrode extending in the second direction and surrounding the second nanowire and the supporting pattern.
    Type: Grant
    Filed: October 22, 2021
    Date of Patent: May 2, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jung Gil Yang, Dong Il Bae, Chang Woo Sohn, Seung Min Song, Dong Hun Lee
  • Patent number: 11641200
    Abstract: A method for the delivery of power to subthreshold (sub-Vt) circuits uses unused current during idle-mode operation of super-threshold (super-Vt) circuits is used to supply sub-Vt circuits. Algorithmic and circuit techniques use dynamic management of idle cores when reusing the leakage current of the idle cores. A scheduling algorithm, longest idle time-leakage reuse (LIT-LR) enables energy efficient reuse of leakage current, which generates a supply voltage of 340 mV with less than ±3% variation across the tt, ff, and ss process corners. The LIT-LR algorithm reduces the energy consumption of the switch and the peak power consumption by, respectively, 25% and 7.4% as compared to random assignment of idle cores for leakage reuse. Second, a usage ranking based algorithm, longest idle time-simultaneous leakage reuse and power gating (LIT-LRPG) enables simultaneous implementation of power gating (PG) and leakage reuse in a multiprocessor system-on-chip (MPSoC) platform.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: May 2, 2023
    Assignee: Drexel University
    Inventors: Md Shazzad Hossain, Ioannis Savidis
  • Patent number: 11626386
    Abstract: A semiconductor integrated circuit device includes first and second semiconductor chips stacked one on top of the other. First power supply lines in the first semiconductor chip are connected with second power supply lines in the second semiconductor chip through a plurality of first vias. The directions in which the first power supply lines and the second power supply lines extend are orthogonal to each other.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: April 11, 2023
    Assignee: SOCIONEXT INC.
    Inventors: Atsushi Okamoto, Hirotaka Takeno, Wenzhen Wang
  • Patent number: 11626394
    Abstract: A semiconductor storage device includes a first semiconductor chip having a first bonding surface; and a second semiconductor chip having a second bonding surface, the second bonding surface being bonded to the first bonding surface. The first semiconductor chip includes a control circuit, a first power line connected to the control circuit and extending in a first direction, and a first pad electrode disposed on the first bonding surface. The second semiconductor chip includes a second power line extending in a second direction, a third power line connected to the second power line and extending in the first direction, a second pad electrode connected to the third power line, and a third pad electrode disposed on the second bonding surface.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: April 11, 2023
    Assignee: KIOXIA CORPORATION
    Inventors: Akihiko Chiba, Takahiro Tsurudo, Kenichi Matoba, Yoshifumi Shimamura, Hiroaki Nakasa, Hiroyuki Takenaka
  • Patent number: 11626509
    Abstract: A semiconductor device includes a substrate, a first dielectric fin, a semiconductor fin, a metal gate structure, an epitaxy structure, and a contact etch stop layer. The first dielectric fin is disposed over the substrate. The semiconductor fin is disposed over the substrate, in which along a lengthwise direction of the first dielectric fin and the semiconductor fin, the first dielectric fin is in contact with a first sidewall of the semiconductor fin. The metal gate structure crosses the first dielectric fin and the semiconductor fin. The epitaxy structure is over and in contact with the semiconductor fin. The contact etch stop layer is over and in contact with first dielectric fin.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Shi-Ning Ju, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11626327
    Abstract: A semiconductor device is provided. The semiconductor device includes a plurality of first semiconductor nanosheets spaced apart from each other and in a p-type device region, and a plurality of second semiconductor nanosheets spaced apart from each other and in an n-type device region. The semiconductor device includes an isolation structure formed at a boundary between the p-type and n-type device regions, and a first hard mask layer formed over the first semiconductor nanosheets. The semiconductor device also includes a second hard mask layer formed over the second semiconductor nanosheets, and a p-type work function layer surrounding each of the first semiconductor nanosheets and the first hard mask layer.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Chiang, Chung-Wei Hsu, Lung-Kun Chu, Jia-Ni Yu, Chih-Hao Wang, Mao-Lin Huang
  • Patent number: 11621199
    Abstract: A method for manufacturing a semiconductor device includes forming a first vertical transistor structure in a first device region on a substrate, and forming a second vertical transistor structure in a second device region on the substrate. The first vertical transistor structure includes a first plurality of fins, and the second vertical transistor structure includes a second plurality of fins. A plurality of first source/drain regions are grown from upper portions of the first plurality of fins, and a contact liner layer is formed on the first source/drain regions. The method further includes forming a plurality of first silicide portions from the contact liner layer on the first source/drain regions, and forming a plurality of second silicide portions on a plurality of second source/drain regions extending from upper portions of the second plurality of fins. The second silicide portions have a different composition than the first silicide portions.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: April 4, 2023
    Assignee: International Business Machines Corporation
    Inventors: Heng Wu, Su Chen Fan, Ruilong Xie, Huai Huang
  • Patent number: 11616131
    Abstract: A semiconductor device includes an active region spanning along a first direction. The semiconductor device includes a first elongated gate spanning along a second direction substantially perpendicular to the first direction. The first elongated gate includes a first portion that is disposed over the active region and a second portion that is not disposed over the active region. The first portion and the second portion include different materials. The semiconductor device includes a second elongated gate spanning along the second direction and separated from the first elongated gate in the first direction. The second elongated gate includes a third portion that is disposed over the active region and a fourth portion that is not disposed over the active region. The third portion and the fourth portion include different materials.
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: March 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sheng-Jier Yang, Tai-Hsin Chiu
  • Patent number: 11610975
    Abstract: Semiconductor devices are provided. A semiconductor device includes a first active pattern on a first region of a substrate, a pair of first source/drain patterns on the first active pattern, a first channel pattern between the pair of first source/drain patterns, and a gate electrode that extends across the first channel pattern. The gate electrode is on an uppermost surface and at least one sidewall of the first channel pattern. The gate electrode includes a first metal pattern including a p-type work function metal, a second metal pattern on the first metal pattern and including an n-type work function metal, a first barrier pattern on the second metal pattern and including an amorphous metal layer that includes tungsten (W), carbon (C), and nitrogen (N), and a second barrier pattern on the first barrier pattern. The second barrier pattern includes the p-type work function metal.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: March 21, 2023
    Inventors: Jongho Park, Byounghoon Lee, Seungkeun Cha, Wandon Kim
  • Patent number: 11610887
    Abstract: Disclosed herein are IC structures, packages, and devices that include thin-film transistors (TFTs) integrated on the same substrate/die/chip as III-N transistors. An example IC structure includes an III-N semiconductor material provided over a support structure, a III-N transistor provided over a first portion of the III-N material, and a TFT provided over a second portion of the III-N material. Because the III-N transistor and the TFT are both provided over a single support structure, they may be referred to as “integrated” transistors. Because the III-N transistor and the TFT are provided over different portions of the III-N semiconductor material, and, therefore, over different portion of the support structure, their integration may be referred to as “side-by-side” integration. Integrating TFTs with III-N transistors may reduce costs and improve performance, e.g., by reducing losses incurred when power is routed off chip in a multi-chip package.
    Type: Grant
    Filed: January 9, 2019
    Date of Patent: March 21, 2023
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Marko Radosavljevic, Sansaptak Dasgupta, Paul B. Fischer, Walid M. Hafez
  • Patent number: 11610822
    Abstract: A semiconductor device includes a first gate structure that includes a first interfacial layer, a first gate dielectric layer disposed over the first interfacial layer, and a first gate electrode disposed over the first gate dielectric layer. The semiconductor device also includes a second gate structure that includes a second interfacial layer, a second gate dielectric layer disposed over the second interfacial layer, and a second gate electrode disposed over the second gate dielectric layer. The first interfacial layer contains a different amount of a dipole material than the second interfacial layer.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: March 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Yu Chen, Chung-Liang Cheng
  • Patent number: 11588038
    Abstract: The present disclosure provides a semiconductor structure in accordance with some embodiment. The semiconductor structure includes a semiconductor substrate having a first circuit region and a second circuit region; active regions extended from the semiconductor substrate and surrounded by isolation features; first transistors that include first gate stacks formed on the active regions and disposed in the first circuit region, the first gate stacks having a first gate pitch less than a reference pitch; and second transistors that include second gate stacks formed on the active regions and disposed in the second circuit region, the second gate stacks having a second pitch greater than the reference pitch. The second transistors are high-frequency transistors and the first transistors are logic transistors.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: February 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ru-Shang Hsiao, Ying Hsin Lu, Ching-Hwanq Su, Pin Chia Su, Ling-Sung Wang
  • Patent number: 11581313
    Abstract: Disclosed herein are IC structures, packages, and devices that include III-N transistors integrated on the same support structure as non-III-N transistors (e.g., Si-based transistors), using semiconductor regrowth. In one aspect, a non-III-N transistor may be integrated with an III-N transistor by depositing a III-N material, forming an opening in the III-N material, and epitaxially growing within the opening a semiconductor material other than the III-N material. Since the III-N material may serve as a foundation for forming III-N transistors, while the non-III-N material may serve as a foundation for forming non-III-N transistors, such an approach advantageously enables implementation of both types of transistors on a single support structure. Proposed integration may reduce costs and improve performance by enabling integrated digital logic solutions for III-N transistors and by reducing losses incurred when power is routed off chip in a multi-chip package.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: February 14, 2023
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Johann Christian Rode, Han Wui Then, Marko Radosavljevic, Paul B. Fischer, Nidhi Nidhi, Rahul Ramaswamy, Sandrine Charue-Bakker, Walid M. Hafez
  • Patent number: 11575018
    Abstract: A semiconductor memory device includes a substrate having a first region and a second region. A first gate electrode layer is on the first region and includes a first conductive layer including a first plurality of layers, and includes a first upper conductive layer on the first conductive layer. A second gate electrode layer is on the second region and includes a second conductive layer including a second plurality of layers, and includes a second upper conductive layer on the second conductive layer. At least one of the first plurality of layers includes titanium oxynitride (TiON). A first transistor including the first gate electrode layer and a second transistor including the second gate electrode layer are metal oxide semiconductor field effect transistors (MOSFETs) having the same channel conductivity type, and a threshold voltage of the first transistor is smaller than a threshold voltage of the second transistor.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: February 7, 2023
    Inventors: Juyoun Kim, Sangjung Kang, Jinwoo Kim, Junmo Park, Seulgi Yun
  • Patent number: 11575015
    Abstract: A field effect transistor includes a source region and a drain region formed within and/or above openings in a dielectric capping mask layer overlying a semiconductor substrate and a gate electrode. A source-side silicide portion and a drain-side silicide portion are self-aligned to the source region and to the drain region, respectively.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: February 7, 2023
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Mitsuhiro Togo, Jun Akaiwa, Hiroshi Nakatsuji, Masashi Ishida
  • Patent number: 11569246
    Abstract: A memory device including: active regions; gate electrodes which are substantially aligned relative to four corresponding track lines such that the memory device has a width of four contacted poly pitch (4 CPP) and are electrically coupled to the active regions; contact-to-transistor-component structures (MD structures) which are electrically coupled to the active regions, and are interspersed among corresponding ones of the gate electrodes; via-to-gate/MD (VGD) structures which are electrically coupled to the gate electrodes and the MD structures; conductive segments which are in a first layer of metallization (M_1st layer), and are electrically coupled to the VGD structures; buried contact-to-transistor-component structures (BVD structures) which are electrically coupled to the active regions; and buried conductive segments which are in a first buried layer of metallization (BM_1st layer), and are electrically coupled to the BVD structures, and correspondingly provide a first reference voltage or a second r
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: January 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hidehiro Fujiwara, Chih-Yu Lin, Yen-Huei Chen, Wei-Chang Zhao, Yi-Hsin Nien
  • Patent number: 11563087
    Abstract: Fin-based well straps are disclosed herein for improving performance of memory arrays, such as static random access memory arrays. An exemplary integrated circuit (IC) device includes a FinFET disposed over a doped region of a first type dopant. The FinFET includes a first fin structure doped with a first dopant concentration of the first type dopant and first source/drain features of a second type dopant. The IC device further includes a fin-based well strap disposed over the doped region of the first type dopant. The fin-based well strap connects the doped region to a voltage. The fin-based well strap includes a second fin structure doped with a second dopant concentration of the first type dopant and second source/drain features of the first type dopant. The second dopant concentration is greater than (for example, at least three times greater than) the first dopant concentration.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: January 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventor: Jhon Jhy Liaw
  • Patent number: 11563000
    Abstract: Gate endcap architectures having relatively short vertical stack, and methods of fabricating gate endcap architectures having relatively short vertical stack, are described. In an example, an integrated circuit structure includes a first semiconductor fin along a first direction. A second semiconductor fin is along the first direction. A trench isolation material is between the first semiconductor fin and the second semiconductor fin. The trench isolation material has an uppermost surface below a top of the first and second semiconductor fins. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin and is along the first direction. The gate endcap isolation structure is on the uppermost surface of the trench isolation material.
    Type: Grant
    Filed: March 25, 2020
    Date of Patent: January 24, 2023
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Walid M. Hafez, Hsu-Yu Chang, Chia-Hong Jan
  • Patent number: 11557582
    Abstract: A semiconductor device comprising first and second unit cells, the first unit cell comprising a first fin pattern extending in a first direction, a first gate pattern extending in a second direction, and a first contact disposed on a side of the first gate pattern contacting the first fin pattern, the second unit cell comprising a second fin pattern extending in the first direction, a second gate pattern extending in the second direction, and a second contact disposed on a side of the second gate pattern contacting the second fin pattern, wherein the first and second gate patterns are spaced apart and lie on a first straight line extending in the second direction, the first and second contacts are spaced apart and lie on a second straight line extending in the second direction, and a first middle contact is disposed on and connects the first and second contacts.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: January 17, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jeong-Lim Kim, Myung Soo Noh, No Young Chung, Seok Yun Jeong, Young Han Kim
  • Patent number: 11545491
    Abstract: A semiconductor device includes a semiconductor substrate. The semiconductor device includes a first fin protruding from the semiconductor substrate and extending along a first direction. The semiconductor device includes a second fin protruding from the semiconductor substrate and extending along the first direction. A first epitaxial source/drain region coupled to the first fin and a second epitaxial source/drain region coupled to the second fin are laterally spaced apart from each other by an air void.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: January 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Te-Hsin Chiu, Kam-Tou Sio, Jiann-Tyng Tzeng
  • Patent number: 11545483
    Abstract: Certain aspects of the present disclosure are directed to a semiconductor device. The semiconductor device generally includes a substrate, at least one silicon-on-insulator (SOI) transistor disposed above the substrate, a gate-all-around (GAA) transistor disposed above the substrate, and a fin field-effect transistor (FinFET) disposed above the substrate.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: January 3, 2023
    Assignee: QUALCOMM INCORPORATED
    Inventors: Xia Li, Haining Yang, Bin Yang
  • Patent number: 11545400
    Abstract: A method includes forming a gate stack, which includes a gate dielectric and a metal gate electrode over the gate dielectric. An inter-layer dielectric is formed on opposite sides of the gate stack. The gate stack and the inter-layer dielectric are planarized. The method further includes forming an inhibitor film on the gate stack, with at least a portion of the inter-layer dielectric exposed, selectively depositing a dielectric hard mask on the inter-layer dielectric, with the inhibitor film preventing the dielectric hard mask from being formed thereon, and etching to remove a portion of the gate stack, with the dielectric hard mask acting as a portion of a corresponding etching mask.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: January 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsu-Hsiu Perng, Kai-Chieh Yang, Zhi-Chang Lin, Teng-Chun Tsai, Wei-Hao Wu
  • Patent number: 11538814
    Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a static random access memory (SRAM) including a plurality of transistors disposed in a first layer and a second layer. The first layer includes a first shared gate of a first transistor and a second shared gate of a second transistor, among the plurality of transistors. The second layer is disposed above the first layer and includes a third shared gate of a third transistor and a fourth shared gate of a fourth transistor, among the plurality of transistors. The third shared gate is disposed above the first shared gate, and the fourth shared gate is disposed above the second shared gate. The SRAM further includes a first shared contact, a second shared contact, a first cross-couple contact connecting the fourth shared gate and the first shared contact, and a second cross-couple contact connecting the third shared gate and the second shared contact.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: December 27, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Inchan Hwang, Hwichan Jun
  • Patent number: 11538807
    Abstract: A semiconductor device and a method for fabricating the same, the device including an active pattern extending in a first direction on a substrate; a field insulating film surrounding a part of the active pattern; a first gate structure extending in a second direction on the active pattern and the field insulating film, a second gate structure spaced apart from the first gate structure and extending in the second direction on the active pattern and the field insulating film; and a first device isolation film between the first and second gate structure, wherein a side wall of the first gate structure facing the first device isolation film includes an inclined surface having an acute angle with respect to an upper surface of the active pattern, and a lowermost surface of the first device isolation film is lower than or substantially coplanar with an uppermost surface of the field insulating film.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: December 27, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Eui Chul Hwang, Ju Youn Kim, Hyung Joo Na, Bong Seok Suh, Sang Min Yoo, Joo Ho Jung, Sung Moon Lee
  • Patent number: 11532743
    Abstract: A semiconductor device with a U-shaped channel and a manufacturing method thereof and an electronic apparatus including the semiconductor device are disclosed. According to embodiments, the semiconductor device may include: a channel portion extending vertically on a substrate and having a U-shape in a plan view; source/drain portions located at upper and lower ends of the channel portion and along the U-shaped channel portion; and a gate stack overlapping the channel portion on an inner side of the U shape.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: December 20, 2022
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 11522083
    Abstract: A method of forming a semiconductor device includes surrounding a dummy gate disposed over a fin with a dielectric material; forming a gate trench in the dielectric material by removing the dummy gate and by removing upper portions of a first gate spacer disposed along sidewalls of the dummy gate, the gate trench comprising a lower trench between remaining lower portions of the first gate spacer and comprising an upper trench above the lower trench; forming a gate dielectric layer, a work function layer and a glue layer successively in the gate trench; removing the glue layer and the work function layer from the upper trench; filling the gate trench with a gate electrode material after the removing; and removing the gate electrode material from the upper trench, remaining portions of the gate electrode material forming a gate electrode.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: December 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Chieh-Wei Chen, Tzu-Ang Chiang, Ming-Hsi Yeh
  • Patent number: 11508761
    Abstract: Provided are an inverter circuit structure, a gate driving circuit and a display panel. The inverter circuit structure includes a PMOS transistor and an NMOS transistor, and further includes a first active layer, a gate layer, a second active layer, a first insulating layer between the gate layer and the first active layer, and a second insulating layer between the gate layer and the second active layer. An orthographic projection of the gate on the first active layer is a first region, and a portion of the first active layer in the first region has substantially a same thickness. An orthographic projection of the gate on the second active layer is a second region, and a portion of the second active layer in the second region has substantially a same thickness.
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: November 22, 2022
    Assignee: Xiamen Tianma Micro-Electronics Co., Ltd.
    Inventors: Jieliang Li, Yuping Xu
  • Patent number: 11508625
    Abstract: A semiconductor device includes a first n-type transistor and a first p-type transistor that are positioned side by side over a substrate. The first n-type transistor includes a first n-type source/drain (S/D) region, a first n-type channel region, and a second n-type S/D region that are formed based on a first continuous channel structure extending along a horizontal direction parallel to the substrate. The first n-type channel region is positioned between the first n-type S/D region and the second n-type S/D region. The first p-type transistor includes a first p-type S/D region, a first p-type channel region, and a second p-type S/D region that are formed based on the first continuous channel structure. The first p-type channel region is positioned between the first p-type S/D region and the second p-type S/D region. The second n-type S/D region is in contact with the first p-type S/D region.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: November 22, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: H. Jim Fulford, Mark I. Gardner
  • Patent number: 11508737
    Abstract: An embodiment is an integrated circuit structure including a static random access memory (SRAM) cell having a first number of semiconductor fins, the SRAM cell having a first boundary and a second boundary parallel to each other, and a third boundary and a fourth boundary parallel to each other, the SRAM cell having a first cell height as measured from the third boundary to the fourth boundary, and a logic cell having the first number of semiconductor fins and the first cell height.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: November 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fang Chen, Kuo-Chiang Ting, Jhon Jhy Liaw, Min-Chang Liang
  • Patent number: 11508738
    Abstract: An N-type metal oxide semiconductor (NMOS) transistor includes a first gate and a first spacer structure disposed on a first sidewall of the first gate in a first direction. The first spacer structure has a first thickness in the first direction and measured from an outermost point of an outer surface of the first spacer structure to the first sidewall. A P-type metal oxide semiconductor (PMOS) transistor includes a second gate and a second spacer structure disposed on a second sidewall of the second gate in the first direction and measured from an outermost point of an outer surface of the second spacer structure to the second sidewall. The second spacer structure has a second thickness that is greater than the first thickness. The NMOS transistor is a pass-gate of a static random access memory (SRAM) cell, and the PMOS transistor is a pull-up of the SRAM cell.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: November 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Hao Lin, Chih-Chuan Yang, Hsin-Wen Su, Kian-Long Lim, Chien-Chih Lin
  • Patent number: 11502078
    Abstract: In an integrated circuit supporting complementary metal oxide semiconductor (CMOS) integrated circuits, latch-up immunity is supported by surrounding a hot n-well with an n-well strap spaced from the hot n-well by a specified distance in accordance with design rules. The n-well strap is positioned between the hot n-well and other n-well or n-type diffusion structures.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: November 15, 2022
    Assignee: STMicroelectronics International N.V.
    Inventor: Vishal Kumar Sharma
  • Patent number: 11495633
    Abstract: A CMOS image sensor includes a substrate and at least one device isolation region in the substrate and defining first and second pixel regions and first and second active portions in each of the first and second pixel regions. A reset and select transistor gates are disposed in the first pixel region, while a source follower transistor gate is disposed in the second pixel region, such that pixels in the first and second pixel regions share the reset, select and source follower transistors. A length of the source follower transistor gate may be greater than lengths of the reset and selection transistor gates.
    Type: Grant
    Filed: September 24, 2020
    Date of Patent: November 8, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Hisanori Ihara
  • Patent number: 11495676
    Abstract: Stress is introduced into the channel of an SOI FinFET device by transfer directly from a metal gate. In SOI devices in particular, stress transfer efficiency from the metal gate to the channel is nearly 100%. Either tensile or compressive stress can be applied to the fin channel by choosing different materials to be used in the gate stack as the bulk gate material, a gate liner, or a work function material, or by varying processing parameters during deposition of the gate or work function materials. P-gates and N-gates are therefore formed separately. Gate materials suitable for use as stressors include tungsten (W) for NFETs and titanium nitride (TiN) for PFETs. An optical planarization material assists in patterning the stress-inducing metal gates. A simplified process flow is disclosed in which isolation regions are formed without need for a separate mask layer, and gate sidewall spacers are not used.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: November 8, 2022
    Assignee: STMICROELECTRONICS, INC.
    Inventor: John H. Zhang
  • Patent number: 11488651
    Abstract: A memory device may include a phase driver circuit that may output a first voltage for refreshing a plurality of memory cells. The memory device may also include a plurality of word line driver circuits that may receive the first voltage via the phase driver circuit, such that each word line driver circuit of the plurality of word line driver circuits may provide the first voltage to a respective word line associated with a respective portion of the plurality of memory cells. In addition, each word line driver circuit may refresh the respective portion of the plurality of memory cells based on a respective word line enable signal provided to a first switch of the respective word line driver circuit.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: November 1, 2022
    Assignee: Micron Technology, Inc.
    Inventors: James S. Rehmeyer, Debra M. Bell, George B. Raad, Brian P. Callaway, Joshua E. Alzheimer