Abstract: A finFET device having a substrate and a fin disposed on the substrate. The fin includes a passive region, a stem region overlying the passive region, and an active region overlying the stem region. The stem region has a first width and the active region has a second width. The first width is less than the second width. The stem region and the active region also have different compositions. A gate structure is disposed on the active region.

Abstract: A radio frequency module is provided. The module includes a core member, a front-end integrated circuit (FEIC), a first connection member, a second connection member disposed on an upper surface of the core member, a radio frequency integrated circuit (RFIC) disposed on an upper surface of the second connection member, and configured to input or output a base signal and a first radio frequency (RF) signal having a frequency higher than a frequency of the base signal, through a wiring layer, a substrate disposed on a lower surface of the first connection member; and an electrical connection structure configured to electrically connect the first connection member and the substrate. The FEIC is configured to input or output the first RF signal and a second RF signal which has a power different from a power of the first RF signal.

Abstract: A system and method for laying out power grid connections for standard cells are described. In various embodiments, a standard cell includes power post and ground posts in metal zero. The metal zero posts include no vias to any upper metal layers. Some variations of the standard cell have the power and ground posts routed in metal zero to a boundary edge of the standard cell. Layout rules are changed to allow this type of routing. The power and ground posts in metal zero are connected to power and ground posts in metal zero of a neighboring cell by abutment. The place-and-route tool doesn't need to perform a further routing step after placing the cells. For other variations, the power and ground posts are not routed to the boundary edge and the place-and-route tool routes power and ground connections in metal zero between the standard cell and the neighbor cell.

Abstract: A semiconductor device includes a first transistor having a first gate structure and a first source/drain feature adjacent to the first gate structure. The semiconductor device further includes a second transistor having a second gate structure and a second source/drain feature adjacent to the second gate structure. In some examples, the semiconductor device further includes a hybrid poly layer disposed between the first transistor and the second transistor. The hybrid poly layer is adjacent to and in contact with each of the first source/drain feature and the second source/drain feature, and the hybrid poly layer provides isolation between the first transistor and the second transistor.

Abstract: Disclosed are semiconductor devices and methods of manufacturing the same. The semiconductor device comprises a first transistor on a substrate, and a second transistor on the substrate. Each of the first and second transistors includes a plurality of semiconductor patterns vertically stacked on the substrate and vertically spaced apart from each other, and a gate dielectric pattern and a work function pattern filling a space between the semiconductor patterns. The work function pattern of the first transistor includes a first work function metal layer, the work function pattern of the second transistor includes the first work function metal layer and a second work function metal layer, the first work function metal layer of each of the first and second transistors has a work function greater than that of the second work function metal layer, and the first transistor has a threshold voltage less than that of the second transistor.

Abstract: A semiconductor structure and a formation method thereof are disclosed. The formation method includes: providing a base; forming a dielectric layer on the base; forming a conductive via running through the dielectric layer; forming a conductive plug in the conductive via; forming a protective layer on the dielectric layer, wherein the protective layer covers the conductive plug; forming an aligner trench in the protective layer and the dielectric layer, wherein the aligner trench is isolated from the conductive plug; after forming the aligner trench, removing the protective layer to expose a top portion of the conductive plug; and after removing the protective layer, forming a magnetic tunnel junction (MTJ) laminated structure on the conductive plug.

Abstract: A dielectric structure is loaded with energy (e.g., charge), which is retained therein until a trigger causes rapid discharge of the loaded energy and generation of an accompanying electromagnetic pulse (EMP). By appropriate design of the dielectric structure and/or trigger, the waveform of the EMP resulting from the rapid discharge can be tailored. Features of the dielectric structure can be modified and/or other devices can be coupled to the dielectric structure to also tailor the EMP, for example, to provide directionality. A modeling unit can predict the discharge in the dielectric structure and/or resulting EMP. The modeling unit can be used to determine charge density spatial distribution within the dielectric structure, shape of the dielectric structure, and/or actuation timing/location necessary to yield a desired waveform for the EMP emanating from the dielectric structure upon discharge.

Abstract: A semiconductor device includes a substrate, a first fin, a second fin, a dummy fin, a first metal gate, a second metal gate, and an isolation structure. The first, the second and the dummy fins are on the substrate, and the dummy fin is disposed between the first fin and the second fin. The first metal gate and the second metal gate are over the first fin and the second fin, respectively. The isolation structure is on the dummy fin, and the dummy fin and the isolation structure separate the first metal gate and the second metal gate.

Abstract: A method for manufacturing a semiconductor device includes doping a substrate with a dopant to form a first well region of a first circuit and a second well region of a second circuit; forming a semiconductor fin extending over the first and second well regions, wherein a first section of the semiconductor fin on the first well region has a width different from a second section of the semiconductor fin on the second well region; forming a first gate electrode across first section of the first semiconductor fin and a second gate electrode across the second section of the semiconductor fin; and forming a first source/drain region adjoining the first section of the semiconductor fin and a second source/drain region adjoining the second section of the semiconductor fin.

Abstract: A method of forming a fin field effect transistor complementary metal oxide semiconductor (CMOS) device is provided. The method includes forming a plurality of multilayer fin templates and vertical fins on a substrate, wherein one multilayer fin template is on each of the plurality of vertical fins. The method further includes forming a dummy gate layer on the substrate, the plurality of vertical fins, and the multilayer fin templates, and removing a portion of the dummy gate layer from the substrate from between adjacent pairs of the vertical fins. The method further includes forming a fill layer between adjacent pairs of the vertical fins. The method further includes removing a portion of the dummy gate layer from between the fill layer and the vertical fins, and forming a sidewall spacer layer on the fill layer and between the fill layer and the vertical fins.

Abstract: Integrated chips include vertically stacked channel layers, with a first stack in a first device region and a second stack in a second device region. A first dielectric layer is formed conformally on the vertically stacked channel layers in the first device region. A second dielectric layer is formed conformally on the vertically stacked channel layers in the second device region. Gate conductors are formed around the vertically stacked channel layers in both the first device region and the second device region, filling a space between surfaces of the respective first dielectric layer and second dielectric layer.

Abstract: Provided is an integrated circuit including: at least one active region extending in a first row in a first direction; at least one active region extending in a second row in the first direction; and a multiple height cell including the at least one active region in the first row, the at least one active region in the second row, at least one gate line extending in a second direction crossing the first direction, wherein each of the at least one active region in the first row and the at least one active region in the second row is terminated by a diffusion break.

Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, including a first region and a second region; a first doped region in the first region of the substrate, the first doped region having first doping ions; a second doped region in the second region of the substrate, the second doped region having second dopant ions with a conductivity type opposite to the first doping ions; a first metallide on a surface of the first doped region having the first doping ions; and a second metallide on a surface of the second doped region having the second doping ions, the second metallide and the first metallide being made of different materials.

Abstract: A method forming a gate dielectric over a substrate, and forming a metal gate structure over the semiconductor substrate and the gate dielectric. The metal gate structure includes a first metal material. The method further includes forming a seal on sidewalls of the metal gate structure. The method further includes forming a dielectric film on the metal gate structure, the dielectric film including a first metal oxynitride comprising the first metal material and directly on the metal gate structure without extending over the seal formed on sidewalls of the metal gate structure.

Abstract: A semiconductor device including a contact structure is provided. The semiconductor device includes an isolation region defining a lower active region. First and second source/drain regions and first and second gate electrodes are on the lower active region. The first and second source/drain regions are adjacent to each other. First and second gate capping patterns are on the first and second gate electrodes, respectively. First and second contact structures are on the first and second source/drain regions, respectively. A lower insulating pattern is between the first and second source/drain regions. An upper insulating pattern is between the first and second contact structures. Silicon oxide has etching selectivity with respect to an insulating material which the upper insulating pattern, the first gate capping pattern, and the second gate capping pattern are formed of.

Abstract: A device having co-integrated wimpy and nominal transistors includes first source/drain regions formed with a semiconductor alloy imparting strain into a first channel region. The device also has wimpy transistors including second source/drain regions formed with the semiconductor alloy that has been decomposed to include a larger amount of an electrically active atomic element than contained in the semiconductor alloy of the first source/drain region.

Abstract: In accordance with an embodiment, a method for producing a graphene-based sensor includes providing a carrier substrate; forming a carrier structure on the carrier substrate, wherein one or more separating structures are formed on an upper side of the carrier structure; and performing a wet chemical transfer of a graphene layer onto the upper side of the carrier structure that comprises the separating structures, where the separating structures and a tear strength of the graphene layer are matched to one another such that the graphene layer respectively tears at the separating structures during the wet chemical transfer.

Abstract: An additive core subtractive liner method is described for forming electrically conductive contacts. The method can include forming a first trench in a first dielectric layer to expose a first portion of a metal liner, and filling said first trench with a second dielectric layer. A metal cut trench is formed in the second dielectric layer. A portion of the metal liner exposed by the metal cut trench is removed with a subtractive method. The method continues with filling the metal cut trench with a dielectric fill, and replacing the remaining portions of the second dielectric layer with an additive core conductor to provide contacts to remaining portions of the metal liner.

Abstract: A method includes forming a dummy gate structure over a substrate, forming a plurality of gate spacers respectively on opposite sidewalls of the dummy gate structure and having a first dielectric constant, removing the dummy gate structure to form a gate trench between the gate spacers, forming a dopant source layer to line the gate trench, annealing the dopant source layer to diffuse k-value reduction impurities from the dopant source layer into the gate spacers to lower the first dielectric constant of the gate spacers to a second dielectric constant, and forming a replacement gate stack in the gate trench.

Abstract: In a method of manufacturing a semiconductor device, a gate dielectric layer is formed over a channel region, a first conductive layer is formed over the gate dielectric layer, a protective layer is formed at a surface region of the first conductive layer, a metallic layer is formed by applying a metal containing gas on the protective layer, and the metallic layer is removed by a wet etching operation using a solution. The protective layer is resistant to the solution of the wet etching operation.

Abstract: A method provides a gate structure for a plurality of components of a semiconductor device. The method provides a first dipole combination on a first portion of the components. The first dipole combination includes a first dipole layer and a first high dielectric constant layer on the first dipole layer. A second dipole combination is provided on a second portion of the components. The second dipole combination includes a second dipole layer and a second high dielectric constant layer on the second dipole layer. The first dipole combination is different from the second dipole combination. At least one work function metal layer is provided on the first dipole combination and the second dipole combination. A low temperature anneal is performed after the step of providing the work function metal layer(s). A contact metal layer is formed on the work function metal layer.

Abstract: According to one example, a device includes a semiconductor substrate. The device further includes a plurality of color filters disposed above the semiconductor substrate. The device further includes a plurality of micro-lenses disposed above the set of color filters. The device further includes a structure that is configured to block light radiation that is traveling towards a region between adjacent micro-lenses. The structure and the color filters are level at respective top surfaces and bottom surfaces thereof.

Abstract: The present disclosure relates to a method of forming an integrated chip. The method includes forming an isolation structure within a substrate. The isolation structure surrounds a device region of the substrate. A sacrificial gate material is formed over the isolation structure and the device region of the substrate. A part of the sacrificial gate material is removed and a second metal is deposited where the part of the sacrificial gate material was removed. A remainder of the sacrificial gate material is subsequently removed and a first metal is deposited where the remainder of the sacrificial gate material was removed. The first metal is different than the second metal.

Abstract: A method of forming a semiconductor device is provided, which includes providing gate structures over an active region and forming a hard mask segment on the active region positioned between a first gate structure and a second gate structure. Cavities are formed in the active region using the gate structures and the hard mask segment as masking features, wherein each cavity has a width substantially equal to a minimum gate-to-gate spacing of the semiconductor device. Epitaxial material is grown in the cavities to form substantially uniform epitaxial structures in the active region.

Abstract: A semiconductor device includes a substrate, a counter-doping region, and a Schottky barrier diode (SBD) in which a breakdown voltage is improved by using counter doping, and a manufacturing method thereof. A breakdown voltage may be improved by lowering a concentration of impurity on the region and enhancing the characteristics of the semiconductor device including the SBD.

Abstract: In a semiconductor device, a first active area, a second active area, and a third active area are formed on a substrate. A first gate electrode is formed on the first active area, a second gate electrode is formed on the second active area, and a third gate electrode is formed on the third active area. The first gate electrode has a first P-work-function metal layer, a first capping layer, a first N-work-function metal layer, a first barrier metal layer, and a first conductive layer. The second gate electrode has a second capping layer, a second N-work-function metal layer, a second barrier metal layer, and a second conductive layer. The third gate electrode has a second P-work-function metal layer, a third capping layer, a third N-work-function metal layer, and a third barrier metal layer. The third gate electrode does not have the first and second conductive layers.

Abstract: The disclosure discloses a common-gate transistor, a pixel circuit, a driving method and a display, including: a first doped region, a second doped region, a third doped region, a fourth doped region and a fifth doped region; the second doped region, the third doped region, the fourth doped region, and the fifth doped region are indirectly communicated through the first doped region, and the second doped region, the third doped region, and the fourth doped region, the fifth doped region and the first doped region are hetero-doped respectively. The two transistors in the common-gate transistor share one gate doped region, i.e., the first doped region, which can not only save one gate doped region, but also can make the gates of the two transistors have the same electrical parameters, and then the cascode effect of the two transistors is more ideal.

Abstract: Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes an active fin protruding upwardly from a substrate and extending in a first direction and a gate structure extending in a second direction intersecting to cross the active fin, where a first width of a lower portion of the gate structure that contacts the active fin is greater than a second width of the lower portion of the gate structure that is spaced apart from the active fin.

Abstract: A nanowire transistor structure includes a substrate. A first nanowire is suspended on the substrate. A first gate line crosses and surrounds the first nanowire. The first gate line includes a first end and a second end. A second gate line crosses and surrounds the first nanowire. The second gate line includes a third end and a fourth end. An interlayer dielectric encapsulates the first end, the second end, the third end and the fourth end. A first distance between the first end and the first nanowire is smaller than a third distance between the third end and the first nanowire.

Abstract: A method of forming a semiconductor device includes providing a semiconductor structure that includes a first semiconductor material extending from a first region to a second region. The method further includes removing a portion of the first semiconductor material in the second region to form a recess, where the recess exposes a sidewall of the first semiconductor material disposed in the first region; forming a dielectric material covering the sidewall; while the dielectric material covers the sidewall, epitaxially growing a second semiconductor material in the second region adjacent the dielectric material; and forming a first fin including the first semiconductor material and a second fin including the second semiconductor material.

Abstract: A high electron mobility transistor, including an active area, a buffer layer on the active area, a channel layer on the buffer layer, a barrier layer on the channel layer, and gate, source and drain on the barrier layer, and a trench isolation structure adjacent and surrounding the channel layer and the barrier layer to apply stress and modify two-dimension electron gas (2DEG) or two-dimension hole gas (2DHG) of the high electron mobility transistor.

Abstract: In some embodiments, a method for forming an integrated chip (IC) is provided. The method incudes forming an interlayer dielectric (ILD) layer over a substrate. A first opening is formed in the ILD layer and in a first region of the IC. A second opening is formed in the ILD layer and in a second region of the IC. A first high-k dielectric layer is formed lining both the first and second openings. A second dielectric layer is formed on the first high-k dielectric layer and lining the first high-k dielectric layer in both the first and second regions. The second high-k dielectric layer is removed from the first region. A conductive layer is formed over both the first and second high-k dielectric layers, where the conductive layer contacts the first high-k dielectric layer in the first region and contacts the second high-k dielectric in the second region.

Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.

Abstract: A semiconductor device is provided that includes an insulated gate field effect transistor series connected with a FET having several parallel conductive layers, a substrate of first conductivity type extending under both transistors, and a first layer of a second conductivity type overlies the substrate. Above this first layer are several conductive layers with channels formed by several of the first conductivity type doped epitaxial layers with layers of a first conductivity type on both sides. The uppermost layer of the device may be substantially thicker than the directly underlying parallel conductive layers. The JFET is isolated with deep poly trenches of second conductivity type on the source side. The insulated gate field effect transistor is isolated with deep poly trenches of the first conductivity type on both sides. A further isolated region is isolated with deep poly trenches of the first conductivity type on both sides.

Abstract: A semiconductor device includes a substrate; an isolation structure over the substrate; two first fins in an N-type region of the semiconductor device; and two second fins in a P-type region of the semiconductor device. Each of the two first fins has a channel region and two source/drain (S/D) regions sandwiching the channel region. The semiconductor device further includes a gate stack engaging the channel regions of the two first fins; and four S/D features over the S/D regions of the two first fins. Each of the four S/D features includes a lower portion and an upper portion over the lower portion. Each of the lower portions of the four S/D features has a cross-sectional profile that is wider at its bottom than at its top. The upper portions of the four S/D features merge into two merged S/D features with one on each side of the gate stack.

Abstract: An integrated circuit device includes a first fin-type active area and a second fin-type active area protruding from a substrate and extending in a first direction, an element isolation layer between the first and second fin-type active areas on the substrate, first semiconductor patterns being on a top surface of the first fin-type active area and having channel areas, second semiconductor patterns being on a top surface of the second fin-type active area and having channel areas, a first gate structure extending on the first fin-type active area in a second direction and including a first work function control layer surrounding the first semiconductor patterns and comprising a step portion on the element isolation layer, and a second gate structure extending on the second fin-type active area in the second direction and including a second work function control layer surrounding the second semiconductor patterns.

Abstract: A semiconductor device includes an active fin disposed on a substrate, a gate structure, and a pair of gate spacers disposed on sidewalls of the gate structure, in which the gate structure and the gate spacers extend across a first portion of the active fin, and a bottom surface of the gate structure is higher than a bottom surface of the gate spacers.

Abstract: Described is apparatus comprising a first circuitry, a second circuitry, and a third circuitry. The first circuitry may have an output coupled to a shared-read-data signal path, and the first circuitry either driving its output to a value based on a sensed memory bit, or not driving its output. The second circuitry may have a first clocked inverter and a second clocked inverter cross-coupled with the first clocked inverter, an input of the first clocked inverter being coupled to the shared-read-data signal path, and an output of the first clocked inverter being coupled to an inverse-data signal path. The third circuitry may have an inverter with an input coupled to the inverse-data signal path and an output coupled to a data signal path.

Abstract: Embodiments of the present invention are directed to reducing the effective capacitance between active devices at the contact level. In a non-limiting embodiment of the invention, an interlayer dielectric is replaced with a low-k material without damaging a self-aligned contact (SAC) cap. A gate can be formed over a channel region of a fin. The gate can include a gate spacer and a SAC cap. Source and drain regions can be formed adjacent to the channel region. A contact is formed on the SAC cap and on surfaces of the source and drain regions. A first dielectric layer can be recessed to expose a sidewall of the contact and a sidewall of the gate spacer. A second dielectric layer can be formed on the recessed surface of the first dielectric layer. The second dielectric layer can include a dielectric material having a dielectric constant less than the first dielectric layer.

Abstract: VTFET devices having a differential top spacer are provided. In one aspect, a method of forming a VTFET device includes: patterning fins in a wafer including NFET and PFET fins; forming bottom source and drains at a base of the NFET/PFET fins; forming bottom spacers on the bottom source and drains; forming gate stacks alongside the NFET/PFET fins that include a same workfunction metal on top of a gate dielectric; annealing the gate stacks which generates oxygen vacancies in the gate dielectric; forming top spacers that include an oxide spacer layer in contact with only the gate stacks alongside the PFET fins, wherein the oxide spacer layer supplies oxygen filling the oxygen vacancies in the gate dielectric only in the gate stacks alongside the PFET fins; and forming top source and drains above the gate stacks at the tops of the NFET/PFET fins. A VTFET device is also provided.

Abstract: Techniques regarding non-SAC semiconductor devices are provided. For example, one or more embodiments described herein can comprise an apparatus, which can further comprise a gate positioned adjacent a channel region of a semiconductor body for a field effect transistor. The gate can comprise a metal liner, and wherein the metal liner is an interface between a first metal layer of the gate and a second metal layer of the gate.

Abstract: An embodiment is a device including a first fin extending from a substrate, a first gate stack over and along sidewalls of the first fin, a first gate spacer disposed along a sidewall of the first gate stack, a first epitaxial source/drain region in the first fin and adjacent the first gate spacer, the first epitaxial source/drain region, and a protection layer between the first epitaxial source/drain region and the first gate spacer and between the first gate spacer and the first gate stack.

Abstract: Some embodiments include an integrated device having a first transistor gate over a first region of a semiconductor base, and having a second transistor gate over a second region of the semiconductor base. First sidewall spacers are along sidewalls of the first transistor gate. The first sidewall spacers include SiBNO, where the chemical formula lists primary constituents rather than a specific stoichiometry. The first sidewall spacers have a first thickness. Second sidewall spacers are along sidewalls of the second transistor gate. The second sidewall spacers have a second thickness which is less than the first thickness. First source/drain regions are within the semiconductor base and are operatively proximate the first transistor gate. Second source/drain regions are within the semiconductor base and are operatively proximate the second transistor gate. Some embodiments include methods of forming integrated devices.

Abstract: A method for forming a semiconductor device structure is provided. The method includes depositing a gate dielectric layer over a substrate. The substrate has a base portion and a first fin portion over the base portion, and the gate dielectric layer is over the first fin portion. The method includes forming a gate electrode layer over the gate dielectric layer. The gate electrode layer includes fluorine. The method includes annealing the gate electrode layer and the gate dielectric layer so that fluorine from the gate electrode layer diffuses into the gate dielectric layer.

Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate having a conductive region made of silicon, germanium or a combination thereof. The semiconductor device structure also includes an insulating layer over the semiconductor substrate and a fill metal material layer in the insulating layer. In addition, the semiconductor device structure includes a nitrogen-containing metal silicide or germanide layer between the conductive region and the fill metal material layers.

Abstract: A semiconductor device includes a semiconductor substrate, an n-type fin field effect transistor. The n-type fin field effect transistor includes a fin structure, a gate stack, and a source/drain region. The gate stack includes a gate dielectric and a gate electrode. The gate dielectric is disposed in between the fin structure and the gate electrode. The source/drain region includes an epitaxial structure and an epitaxy coat covering the epitaxial structure. The epitaxial structure is made of a material having a lattice constant larger than a channel region. The epitaxy coat is made of a material having a lattice constant lower than the channel region.

Abstract: Semiconductor device, static random access memory (SRAM), and their fabrication methods are provided. The semiconductor device includes a base substrate with first fins formed in adjacent device regions. An isolation structure is formed on the base substrate having a top lower than the first fins. The isolation structure includes a first region and a second region, on opposite sidewalls of a corresponding first fin. The first region is between the adjacent first fins. The isolation structure has a top in the first region higher than that in the second region. A first doped layer is formed in the first fin having a portion in the second region. A dielectric layer is formed over the base substrate and a first contact hole is formed in the dielectric layer to expose a top of the first doped layer and a sidewall surface of the first doped layer, in the second region.

Abstract: A semiconductor device includes a substrate, a first dielectric fin, a second dielectric fin, a semiconductor fin, an epitaxy structure, and a metal gate structure. The first dielectric fin and the second dielectric fin disposed over the substrate. The semiconductor fin is disposed over the substrate, in which the semiconductor fin is between the first dielectric fin and the second dielectric fin. The epitaxy structure covers at least two surfaces of the semiconductor fin, in which the epitaxy structure is in contact with the first dielectric fin and is separated from the second dielectric fin. The metal gate structure crosses the first dielectric fin, the second dielectric fin, and the semiconductor fin.

Abstract: Semiconductor structures are provided. A semiconductor structure includes a first P-type transistor including a first SiGe channel region, and a second P-type transistor including a second SiGe channel region. The first SiGe channel region has higher Ge atomic concentration than the second SiGe channel region. The first and second P-type transistors are formed in the same N-type well region.

Abstract: A semiconductor structure includes a silicon-on-insulator (SOI) substrate, the SOI substrate comprising a bottom silicon layer, a buried oxide (BOX) layer, and a top silicon layer; a plurality of active devices formed on the top silicon layer; and an isolation region located between two of the active devices, wherein at least two of the plurality of active devices are electrically isolated from each other by the isolation region, and wherein the isolation region extends through the top silicon layer to the BOX layer.