With Permanent Threshold Adjustment (e.g., Depletion Mode) Patents (Class 257/402)
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Patent number: 7795691Abstract: The invention is a device for controlling conduction across a semiconductor body with a P type channel layer between active semiconductor regions of the device and the controlling gate contact. The device, often a MOSFET or an IGBT, includes at least one source, well, and drift region. The P type channel layer may be divided into sections, or divided regions, that have been doped to exhibit N type conductivity. By dividing the channel layer into regions of different conductivity, the channel layer allows better control over the threshold voltage that regulates current through the device. Accordingly, one of the divided regions in the channel layer is a threshold voltage regulating region. The threshold-voltage regulating region maintains its original P type conductivity and is available in the transistor for a gate voltage to invert a conductive zone therein. The conductive zone becomes the voltage regulated conductive channel within the device.Type: GrantFiled: January 25, 2008Date of Patent: September 14, 2010Assignee: Cree, Inc.Inventors: Qingchun Zhang, Sarah Haney, Anant Agarwal
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Patent number: 7785971Abstract: Fabrication of complementary first and second insulated-gate field-effect transistors (110 or 112 and 120 or 122) from a semiconductor body entails separately introducing (i) three body-material dopants into the body material (50) for the first transistor so as to reach respective maximum dopant concentrations at three different locations in the first transistor's body material and (ii) two body-material dopants into the body material (130) for the second transistor so as to reach respective maximum dopant concentrations at two different locations in the second transistor's body material. Gate electrodes (74 or 94 and 154 or 194) are subsequently defined after which source/drain zones (60, 62 or 80, 82 and 140, 142 or 160, 162) are formed in the semiconductor body. The vertical dopant profiles resulting from the body-material dopants alleviate punchthrough and reduce current leakage.Type: GrantFiled: February 6, 2007Date of Patent: August 31, 2010Assignee: National Semiconductor CorporationInventors: Constantin Bulucea, Fu-Cheng Wang, Prasad Chaparala
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Patent number: 7781814Abstract: The semiconductor integrated circuit device employs on the same silicon substrate a plurality of kinds of MOS transistors with different magnitudes of tunnel current flowing either between the source and gate or between the drain and gate thereof. These MOS transistors include tunnel-current increased MOS transistors at least one of which is for use in constituting a main circuit of the device. The plurality of kinds of MOS transistors also include tunnel-current reduced or depleted MOS transistors at least one of which is for use with a control circuit. This control circuit is inserted between the main circuit and at least one of the two power supply units.Type: GrantFiled: May 19, 2008Date of Patent: August 24, 2010Assignee: Renesas Technology Corp.Inventors: Nozomu Matsuzaki, Hiroyuki Mizuno, Masashi Horiguchi
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Publication number: 20100200934Abstract: A field effect structure and a method for fabricating the field effect structure include a germanium containing channel interposed between a plurality of source and drain regions. The germanium containing channel is coplanar with the plurality of source and drain regions, and the germanium containing channel includes a germanium containing material having a germanium content greater than the germanium content of the plurality of source and drain regions.Type: ApplicationFiled: February 9, 2010Publication date: August 12, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Xiangdong Chen, Brian J. Greene, Haining S. Yang
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Patent number: 7772646Abstract: There is a method of manufacturing a semiconductor device with a semiconductor body comprising a semiconductor substrate and a semiconductor region which are separated from each other with an electrically insulating layer which includes a first and a second sub-layer which, viewed in projection, are adjacent to one another, wherein the first sub-layer has a smaller thickness than the second sub-layer, and wherein, in a first sub-region of the semiconductor region lying above the first sub-layer, at least one digital semiconductor element is formed and, in a second sub-region of the semiconductor region lying above the second sub-layer, at least one analog semiconductor element is formed. According to an example embodiment, the second sub-layer is formed in that the lower border thereof is recessed in the semiconductor body in relation to the lower border of the first sub-layer Fully depleted SOI devices are thus formed.Type: GrantFiled: August 10, 2005Date of Patent: August 10, 2010Assignee: NXP B.V.Inventors: Josine Johanna Gerarda Petra Loo, Vincent Charles Venezia, Youri Ponomarev
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Publication number: 20100193881Abstract: The growth rate in a selective epitaxial growth process for depositing a threshold adjusting semiconductor alloy, such as a silicon/germanium alloy, may be enhanced by performing a plasma-assisted etch process prior to performing the selective epitaxial growth process. For example, a mask layer may be patterned on the basis of the plasma-assisted etch process, thereby simultaneously providing superior device topography during the subsequent growth process. Hence, the threshold adjusting material may be deposited with enhanced thickness uniformity, thereby reducing overall threshold variability.Type: ApplicationFiled: January 25, 2010Publication date: August 5, 2010Inventors: Stephan Kronholz, Andreas Naumann, Gunda Beernink
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Patent number: 7768041Abstract: A field effect transistor (“FET”) is provided which includes an active semiconductor region including a channel region, a first source-drain region and a second source-drain region. A major surface of the active semiconductor region is divided into a mutually exclusive first portion and a second portion. A first liner applies a first stress to the first portion of the major surface, and a second liner applies a second stress to the second portion of the major surface. The first and second stresses are each selected from high tensile stress, high compressive stress and neutral stress, with the first stress being different from the second stress. The liners can help to differentiate a first operating current conducted by the first portion of the FET under one operating condition and a second operating current that is conducted by the second portion of the FET under a different operating condition.Type: GrantFiled: June 21, 2006Date of Patent: August 3, 2010Assignee: International Business Machines CorporationInventors: Dureseti Chidambarrao, David M. Onsongo
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Patent number: 7768077Abstract: A semiconductor device includes: an n-channel MIS transistor and a p-channel MIS transistor. An n-channel MIS transistor includes: a first gate insulating film having an amorphous layer or an epitaxial layer formed on a p-type semiconductor region between a first source/drain regions; and a first gate electrode having a stack structure formed with a first metal layer and a first compound layer. The first metal layer is formed on the first gate insulating film and made of a first metal having a work function of 4.3 eV or smaller, and the first compound layer is formed on the first metal layer and contains a compound of a second metal and a IV-group semiconductor. The second metal is different from the first metal. A p-channel MIS transistor includes a second gate electrode having a second compound layer containing a compound of the same composition as the first compound layer.Type: GrantFiled: December 7, 2009Date of Patent: August 3, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Yoshinori Tsuchiya, Masato Koyama, Masahiko Yoshiki
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Publication number: 20100181629Abstract: A method includes forming a source, a drain, and a disposable gate (38) of the first transistor; forming a source, a drain, and a disposable gate of the second transistor; removing the disposable gates of the first transistor and the second transistor; forming a photoresist layer over the first transistor and the second transistor; patterning the photoresist layer to expose a gate region of the first transistor and a gate region of the second transistor; and implanting the substrate under the gate region of the first transistor and under the gate region of the second transistor, wherein implanting the substrate under the gate region of the first transistor provides a permanent shorting region between the source and the drain of the first transistor, and wherein implanting the substrate under the gate region of the second transistor adjusts a threshold voltage of the second transistor.Type: ApplicationFiled: January 21, 2009Publication date: July 22, 2010Inventors: Alexander Hoefler, James D. Burnett, Lawrence N. Herr
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Patent number: 7750405Abstract: A method of fabricating a high-performance planar back-gate CMOS structure having superior short-channel characteristics and reduced capacitance using processing steps that are not too lengthy or costly is provided. Also provided is a high-performance planar back-gate CMOS structure that is formed utilizing the method of the present invention. The method includes forming an opening in an upper surface of a substrate. Thereafter, a dopant region is formed in the substrate through the opening. In accordance with the inventive method, the dopant region defines a back-gate conductor of the inventive structure. Next, a front gate conductor having at least a portion thereof is formed within the opening.Type: GrantFiled: October 24, 2007Date of Patent: July 6, 2010Assignee: International Business Machines CorporationInventor: Edward J. Nowak
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Patent number: 7749880Abstract: In a method of manufacturing a semiconductor integrated circuit device, a gate electrode is formed over a semiconductor substrate. An insulating film is then formed on the gate electrode and on regions corresponding to a source and a drain of the semiconductor integrated circuit device. The source and the drain are then formed. A nitride film is then selectively formed over the source and the gate electrode via the insulating film so that the nitride film extends over the gate electrode to a position short of a center of the gate electrode in a length direction thereof and so that a width of the nitride film is shorter than a channel width of the semiconductor integrated circuit device.Type: GrantFiled: August 3, 2005Date of Patent: July 6, 2010Assignee: Seiko Instruments Inc.Inventor: Jun Osanai
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Publication number: 20100164016Abstract: The threshold voltage of a sophisticated transistor may be adjusted by providing a specifically designed semiconductor alloy in the channel region of the transistor, wherein a negative effect of this semiconductor material with respect to inducing a strain component in the channel region may be reduced or over-compensated for by additionally incorporating a strain-adjusting species. For example, a carbon species may be incorporated in the channel region, the threshold voltage of which may be adjusted on the basis of a silicon/germanium alloy of a P-channel transistor. Consequently, sophisticated metal gate electrodes may be formed in an early manufacturing stage.Type: ApplicationFiled: December 29, 2009Publication date: July 1, 2010Inventors: Stephan Kronholz, Thorsten Kammler, Gunda Beernink, Carsten Reichel
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Publication number: 20100164017Abstract: The semiconductor device of the present invention includes: a gate insulating film formed on a semiconductor region of a first conductivity type; a gate electrode formed on the gate insulating film; and a channel doped layer of the first conductivity type formed in the semiconductor region beneath the gate electrode. The channel doped layer contains carbon as an impurity.Type: ApplicationFiled: March 3, 2010Publication date: July 1, 2010Applicant: PANASONIC CORPORATIONInventor: Taiji NODA
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Publication number: 20100155858Abstract: The present invention discloses a semiconductor device with an asymmetric channel extension structure capable of storing charges, improving gate oxide reliability, reducing parasitic capacitance and adjusting its channel extension current or turn-on resistance. A gate dielectric is formed on the semiconductor substrate. A gate is formed on the gate dielectric. A first isolation layer is formed over the sidewall of the gate. Dielectric spacers are formed on the sidewall of the first isolation layer. And at least one of the p-n junctions of source and drain regions is formed under the dielectric spacers. A fringing field induced extension region formed adjacent to asymmetric channel under gate dielectric and close to at least one of said doped regions. A threshold voltage adjustment implantation region formed under gate dielectric An anti-punch-through implantation region formed under threshold voltage adjustment implantation region.Type: ApplicationFiled: March 2, 2010Publication date: June 24, 2010Inventor: Yuan-Feng CHEN
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Publication number: 20100140617Abstract: A semiconductor device manufacturing method includes the steps of: forming a transistor on a surface side of a silicon layer of a silicon-on-insulator substrate, the silicon-on-insulator substrate being formed by laminating a substrate, an insulating layer, and the silicon layer; forming a first insulating film covering the transistor and a wiring section including a part electrically connected to the transistor on the silicon-on-insulator substrate; measuring a threshold voltage of the transistor through the wiring section; forming a supporting substrate on a surface of the first insulating film with a second insulating film interposed between the supporting substrate and the first insulating film; removing at least a part of the substrate and the insulating layer on a back side of the silicon-on-insulator substrate; and adjusting the threshold voltage of the transistor on a basis of the measured threshold voltage.Type: ApplicationFiled: December 2, 2009Publication date: June 10, 2010Applicant: Sony CorporationInventor: Hideaki Kuroda
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Patent number: 7732874Abstract: A semiconductor structure includes a first finFET and a second finFET. The first finFET and the second finFET may comprise an n-finFET and a p-finFET to provide a CMOS finFET structure. Within the semiconductor structure, at least one of: (1) a first gate dielectric within the first finFET and a second gate dielectric within the second finFET comprise different gate dielectric materials; and/or (2) a first gate electrode within the first finFET and a second gate electrode within the second finFET comprise different gate electrode materials.Type: GrantFiled: August 30, 2007Date of Patent: June 8, 2010Assignee: International Business Machines CorporationInventors: Huilong Zhu, Bruce B. Doris, Ying Zhang
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Patent number: 7727831Abstract: The leakage current generated due to the extension of the depleted layer to the end of the chip is reduced. In MOSFET 100, the depths of the trenches 112 in the gate pad portion 50 and the circumference portion 70 are larger than the depths of the trenches 111 in the cell region 60. Therefore, the depleted layer extending from the cell region 60 along the direction toward the gate pad portion 50 or the direction toward the circumference portion 70 is blocked by the presence of the trench 112. In other words, an extending of the depleted layer can be terminated by disposing the trench 112, so as to avoid reaching the depleted layer to the end of the semiconductor chip. Accordingly, a leakage current generated from the cell region 60 along the direction toward the end of the semiconductor chip can be reduced.Type: GrantFiled: September 20, 2005Date of Patent: June 1, 2010Assignee: NEC Electronics CorporationInventor: Kinya Ohtani
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Publication number: 20100123203Abstract: A semiconductor device includes a channel region; a gate dielectric over the channel region; and a gate electrode over the gate dielectric. A first source/drain region is adjacent the gate dielectric, wherein the first source/drain region is a semiconductor region and of a first conductivity type. A second source/drain region is on an opposite side of the channel region than the first source/drain region, wherein the second source/drain region is a metal region. A pocket region of a second conductivity type opposite the first conductivity type is horizontally between the channel region and the second source/drain region.Type: ApplicationFiled: November 18, 2008Publication date: May 20, 2010Inventors: Krishna Kumar Bhuwalka, Yi-Ming Sheu, Carlos H. Diaz
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Patent number: 7714352Abstract: A semiconductor device, includes: a first conductivity-semiconductor substrate; a hetero semiconductor region for forming a hetero junction with the first conductivity-semiconductor substrate; a gate electrode adjacent to a part of the hetero junction by way of a gate insulating film; a drain electrode connecting to the first conductivity-semiconductor substrate; a source electrode connecting to the hetero semiconductor region; and a second conductivity-semiconductor region formed on a part of a first face of the first conductivity-semiconductor substrate in such a configuration as to oppose the gate electrode via the gate insulating film, the gate insulating film, the hetero semiconductor region and the first conductivity-semiconductor substrate contacting each other to thereby form a triple contact point.Type: GrantFiled: February 2, 2007Date of Patent: May 11, 2010Assignee: Nissan Motor Co., Ltd.Inventors: Yoshio Shimoida, Masakatsu Hoshi, Tetsuya Hayashi, Hideaki Tanaka, Shigeharu Yamagami
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Publication number: 20100102399Abstract: Methods of forming field effect transistors include forming a first gate electrode on a semiconductor substrate and forming insulating spacers on sidewalls of the first gate electrode. At least a portion of the first gate electrode is then removed from between the insulating spacers to thereby expose inner sidewalls of the insulating spacers. Threshold-voltage adjusting impurities are then implanted into the semiconductor substrate, using the insulating spacers as an implant mask. These threshold-voltage adjusting impurities are selected from a group consisting of alkali metals from Group 1 of the periodic chart and halogens from Group 17 of the periodic chart. A second gate electrode is then formed between the inner sidewalls of the insulating spacers.Type: ApplicationFiled: October 27, 2009Publication date: April 29, 2010Inventors: Sangjin Hyun, Yugyun Shin, Hongbae Park, Hagju Cho, Sughun Hong
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Patent number: 7705409Abstract: Some embodiments of the present invention provide high voltage transistors including a semiconductor substrate and a device isolation film defining an active region in the semiconductor substrate. A gate electrode extends along a central portion of the active region while maintaining a predetermined width on the semiconductor substrate. A second well is formed on both sides of the gate electrode in the semiconductor substrate, and partially extends to a bottom surface of the device isolation film. The active region in the semiconductor substrate comprises a first active region disposed under the gate electrode, and separating the device isolation film and a second active region defined by the first active region and the device isolation film. Methods of manufacturing high voltage transistors are also provided.Type: GrantFiled: January 15, 2008Date of Patent: April 27, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Oh-kyum Kwon, Yong-chan Kim, Joon-suk Oh, Myung-hee Kim, Hye-young Park
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Patent number: 7701009Abstract: In the case of using an analog buffer circuit, an input voltage is required to be added a voltage equal to a voltage between the gate and source of a polycrystalline silicon TFT; therefore, a power supply voltage is increased, thus a power consumption is increased with heat. In view of the foregoing problem, the invention provides a depletion mode polycrystalline silicon TFT as a polycrystalline silicon TFT used in an analog buffer circuit such as a source follower circuit. The depletion mode polycrystalline silicon TFT has a threshold voltage on its negative voltage side; therefore, an input voltage does not have to be increased as described above. As a result, a power supply voltage requires no increase, thus a low power consumption of a liquid crystal display device in particular can be realized.Type: GrantFiled: February 9, 2007Date of Patent: April 20, 2010Assignee: Semiconductor Energy Laboratory Co., LtdInventor: Jun Koyama
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Patent number: 7683439Abstract: A semiconductor device structure is formed over a semiconductor substrate and has a gate dielectric over the semiconductor substrate and a gate over the gate dielectric. The gate, at an interface with the gate dielectric, comprises a transition metal, carbon, and an electropositive element. The transition metal comprises one of group consisting of tantalum, titanium, hafnium, zirconium, molybdenum, and tungsten. The electropositive element comprises one of a group consisting of a Group IIA element, a Group IIIB element, and lanthanide series element.Type: GrantFiled: March 12, 2007Date of Patent: March 23, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Srikanth B. Samavedam, David C. Gilmer, Mark V. Raymond, James K. Schaeffer
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Publication number: 20100065923Abstract: A III-Nitride device has a back-gate disposed in a trench and under and in close proximity to the 2 DEG layer and in lateral alignment with the main gate of the device. A laterally disposed trench is also disposed in a trench and under and in close proximity to the drift region between the gate and drain electrodes of the device. The back-gate is connected to the main gate and the field plate is connected to the source electrode. The back-gate can consist of a highly conductive silicon substrate.Type: ApplicationFiled: September 16, 2008Publication date: March 18, 2010Inventors: Alain Charles, Hamid Tony Bahramian
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Publication number: 20100032765Abstract: A semiconductor device includes a semiconductor substrate having a semiconductor layer, a gate electrode, a source region, a drain region, an element separation insulating film layer and a wiring. The gate electrode include a laminated structure having a gate insulating film formed on the semiconductor layer, a metal or a metallic compound formed on the gate insulating film and a polycrystalline silicon layer formed on the metal or metallic compound. The source region and drain region are formed on a surface portion of the semiconductor substrate and sandwich the gate electrode therebetween. The element separation insulating film layer surrounds the semiconductor layer. The wiring is in contact with the metal or metallic compound of the gate electrode.Type: ApplicationFiled: August 27, 2009Publication date: February 11, 2010Applicant: Kabushiki Kaisha ToshibaInventors: Yoshinori TSUCHIYA, Masato Koyama
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Publication number: 20100025777Abstract: A method for suppressing the formation of leakage-promoting defects in a crystal lattice following dopant implantation in the lattice. The process provides a compressive layer of atoms, these atoms having a size greater than that of the lattice member atoms. The lattice is then annealed for a time sufficient for interstitial defect atoms to be emitted from the compressive layer, and in that manner energetically stable defects are formed in the lattice at a distance from the compressive layer.Type: ApplicationFiled: October 9, 2009Publication date: February 4, 2010Applicant: SYNOPSYS, INC.Inventors: Victor Moroz, Dipankar Pramanik
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Patent number: 7655990Abstract: The present invention proposes a voltage-clipping device utilizing a pinch-off mechanism formed by two depletion boundaries. A clipping voltage of the voltage-clipping device can be adjusted in response to a gate voltage; a gap of a quasi-linked well; and a doping concentration and a depth of the quasi-linked well and a well with complementary doping polarity to the quasi-linked well. The voltage-clipping device can be integrated within a semiconductor device as a voltage stepping down device in a tiny size, compared to traditional transformers.Type: GrantFiled: June 15, 2006Date of Patent: February 2, 2010Assignee: System General Corp.Inventors: Chiu-Chih Chiang, Chih-Feng Huang, You-Kuo Wu, Long Shih Lin
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Publication number: 20100019330Abstract: Device structures with a self-aligned damage layer and methods of forming such device structures. The device structure first and second doped regions of a first conductivity type defined in the semiconductor material of a substrate. A third doped region of opposite conductivity type laterally separates the first doped region from the second doped region. A gate structure is disposed on a top surface of the substrate and has a vertically stacked relationship with the third doped region. A first crystalline damage layer is defined within the semiconductor material of the substrate. The first crystalline damage layer has a first plurality of voids surrounded by the semiconductor material of the substrate. The first doped region is disposed vertically between the first crystalline damage layer and the top surface of the substrate. The first crystalline damage layer does not extend laterally into the third doped region.Type: ApplicationFiled: July 24, 2008Publication date: January 28, 2010Inventors: Ethan H. Cannon, Fen Chen
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Patent number: 7645662Abstract: A transistor includes a channel region with a first portion and a second portion. A length of the first portion is smaller than a length of the second portion. The first portion has a higher threshold voltage than the second portion. The lower threshold voltage of the second portion allows for an increased ON current. Despite the increase attained in the ON current, the higher threshold voltage of the first portion maintains or lowers a relatively low OFF current for the transistor.Type: GrantFiled: May 3, 2007Date of Patent: January 12, 2010Assignee: DSM Solutions, Inc.Inventor: Sung-Ki Min
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Patent number: 7635619Abstract: A thin film transistor according to an embodiment of the present invention includes: a semiconductor layer formed on a substrate and having a first diffusion region, a channel region, and a second diffusion region; a gate electrode opposite to the semiconductor layer across a gate insulating film formed on the semiconductor layer; and a connecting conductive film formed on the semiconductor layer opposite to the gate insulating film and extending from the first diffusion region up to a predetermined position in the channel region to electrically connect between the first diffusion region and the channel region. The transistor further includes a laying conductive layer formed on the semiconductor layer opposite to the gate insulating film and electrically connected with the second diffusion region.Type: GrantFiled: April 11, 2007Date of Patent: December 22, 2009Assignee: Mitsubishi Electric CorporationInventor: Hitoshi Nagata
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Patent number: 7619288Abstract: A method for manufacturing a thin film transistor substrate includes a step of forming a plurality of island-like semiconductor films above an insulating transparent substrate; a step of forming a gate insulating film on each of the island-like semiconductor films; a step of forming first conductivity type LDD regions on both sides in the first island-like semiconductor film by leaving a channel region and forming a first conductivity type normally-on channel region having an impurity density equivalent to that of the LDD region in the second island-like semiconductor film; a step of forming a first gate electrode partially covering the LDD region and forming a second gate electrode above the normally-on channel region, and a step of forming a first conductivity type source/drain region having an impurity density higher than that of the LDD region in regions on the both sides of the gate electrode.Type: GrantFiled: May 16, 2006Date of Patent: November 17, 2009Assignee: Sharp Kabushiki KaishaInventor: Kazushige Hotta
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Patent number: 7615827Abstract: Dual thickness devices and circuits using dual gate thickness devices. The devices include: one or more FETs of a first polarity and one or more FETs of a second and opposite polarity, the one or more FETs of the first polarity electrically connected to the one or more FETs of the second polarity in a same circuit, at least one of the one or more FETs of the first polarity having a gate dielectric consisting of a single layer of thermal silicon oxide and having a thickness different from a thickness of a gate dielectric consisting of a single layer of thermal silicon oxide of at least one of the one or more FETs of the second polarity.Type: GrantFiled: May 2, 2006Date of Patent: November 10, 2009Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Terence B. Hook
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Publication number: 20090273040Abstract: The present invention, in one embodiment, provides a semiconductor device including a semiconducting body including a schottky barrier region at a first end of the semiconducting body, a drain dopant region at the second end of the semiconducting body, and a channel positioned between the schottky barrier region and the drain dopant region. The semiconducting device may further include a gate structure overlying the channel of the semiconducting body. Further, a drain contact may be present to the drain dopant region of the semiconducting body, the drain contact being composed of a conductive material and in direct physical contact with a portion of a sidewall of the semiconducting body having a dimension that is less than a thickness of the semiconducting body in which the drain dopant region is positioned.Type: ApplicationFiled: May 1, 2008Publication date: November 5, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Qingqing Liang, Huilong Zhu, Gregory G. Freeman
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Publication number: 20090267161Abstract: Techniques and structures for increasing body dopant uniformity in multi-gate transistor devices are generally described. In one example, an electronic device includes a semiconductor substrate, a multi-gate fin coupled with the semiconductor substrate, the multi-gate fin comprising a source region, a drain region, and a gate region wherein the gate region is disposed between the source region and the drain region, the gate region being body-doped after a sacrificial gate structure is removed from the multi-gate fin and before a subsequent gate structure is formed, a dielectric material coupled with the source region and the drain region of the multi-gate fin, and the subsequent gate structure coupled to the gate region of the multi-gate fin.Type: ApplicationFiled: April 29, 2008Publication date: October 29, 2009Inventors: Ravi Pillarisetty, Jack T. Kavalieros, Titash Rakshit, Gilbert Dewey, Willy Rachmady
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Patent number: 7602029Abstract: This invention discloses an one time programmable (OTP) memory. The OTP memory includes a first and a second metal oxide semiconductor (MOS) transistors connected in parallel and controlled by a single polysilicon stripe functioning as a gate wherein the OTP memory further includes a drift region for counter doping a lightly dope drain (LDD) encompassing and surrounding a drain and a source of the first MOS transistor having a different threshold voltage than the second MOS transistor not reached by the drift region. In a preferred embodiment, the first and second MOS transistors are N-MOS transistors disposed in a common P-well and the drift region of the first MOS transistor further comprising a P-drift region.Type: GrantFiled: September 7, 2006Date of Patent: October 13, 2009Assignee: Alpha & Omega Semiconductor, Ltd.Inventor: Shekar Mallikararjunaswamy
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Publication number: 20090250771Abstract: To provide a MOSFET which is increased in substrate bias effect ? without increasing parasitic capacitance and junction leak current, the MOSFET includes: a gate electrode (104) formed on a semiconductor substrate (101) and an insulating film (103); a sidewall insulating film (106) covering the side surface of the gate electrode (104); and source/drain regions surrounded by the sidewall insulating film (106) and a shallow trench isolation (102) in a self-alignment manner, in which an impurity concentration of a first conductivity type which is the same type as a well-forming impurity has a profile becoming, in a lower direction of the gate electrode (104), lower in a channel formation region, then higher and again lower, and a high-concentration first conductivity type impurity region (110) is provided, in which the impurity concentration of the first conductivity type is formed to be low in the source/drain regions and to be high below the gate electrode (104) sandwiched between the source/drain regions.Type: ApplicationFiled: August 22, 2006Publication date: October 8, 2009Applicant: NEC CORPORATONInventor: Makoto Miyamura
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Patent number: 7595532Abstract: A semiconductor memory device includes a semiconductor substrate including an insulating layer, a charge storage region of a first conductivity type on the insulating layer, and an insulating film on the insulating layer and surrounding the charge storage region. A body region of the first conductivity type is on an upper surface of the charge storage region, and a gate stack including a gate electrode and a gate insulating film is on the body region. A source region and a drain region of a second conductivity type are on opposite sides of the body region. The charge storage region extends further towards the semiconductor substrate than the source region and/or the drain region. Methods of forming semiconductor memory devices are also disclosed.Type: GrantFiled: January 3, 2007Date of Patent: September 29, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Ki-Whan Song, Chang-Hyun Kim
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Publication number: 20090236673Abstract: A method for smoothing variations in threshold voltage in an integrated circuit layout. The method begins by identifying recombination surfaces associated with transistors in the layout.Type: ApplicationFiled: May 12, 2009Publication date: September 24, 2009Applicant: SYNOPSYS, INC.Inventors: Victor Moroz, Dipankar Pramanik
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Patent number: 7592241Abstract: The semiconductor device comprises a well 58 formed in a semiconductor substrate 10 and having a channel region; a gate electrode 34n formed over the channel region with an insulating film 32 interposed therebetween; source/drain regions 60 formed in the well 58 on both sides of the gate electrode 34n, sandwiching the channel region; and a pocket region 40 formed between the source/drain region and the channel region. The well 58 has a first peak of an impurity concentration at a depth deeper than the pocket region 40 and shallower than the bottom of the source/drain regions 60, and a second peak of the impurity concentration at a depth near the bottom of the source/drain regions 60.Type: GrantFiled: December 22, 2004Date of Patent: September 22, 2009Assignee: Fujitsu Microelectronics LimitedInventor: Yoshihiro Takao
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Publication number: 20090218637Abstract: A peripheral circuit includes at least a first transistor. The first transistor comprises a gate electrode formed on a surface of a semiconductor layer via a gate insulating film. A channel region of a first conductivity type having a first impurity concentration is formed on a surface of the semiconductor layer directly below and in the vicinity of the gate electrode. A source-drain diffusion region of the first conductivity type is formed on the surface of the semiconductor layer to sandwich the gate electrode and has a second impurity concentration greater than the first impurity concentration. An overlapping region of the first conductivity type is formed on the surface of the semiconductor layer directly below the gate electrode where the channel region and the source-drain diffusion region overlap. The overlapping region has a third impurity concentration greater than the second impurity concentration.Type: ApplicationFiled: January 26, 2009Publication date: September 3, 2009Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kenji GOMIKAWA, Mitsuhiro NOGUCHI
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Patent number: 7569901Abstract: A MOS gated device is resistant to both high radiation and SEE environments. Spaced, N-type body regions are formed in the surface of a P-type substrate of a semiconductor wafer. P-type dopants are introduced into the surface within each of the channel regions to form respective source regions therein. The periphery of each of the source regions is spaced from the periphery of its respective channel region at the surface to define N-type channel regions between the spaced peripheries. A layer of gate oxide is formed over the channel areas. A doped polysilicon gate electrode is formed atop the gate oxide. A source electrode is formed atop the source regions. The MOS gated device is optimized to maintain a threshold voltage of between ?2V to ?5V for a total irradiation dose of 300 Krad while maintaining SEE withstand capability.Type: GrantFiled: October 18, 2000Date of Patent: August 4, 2009Assignee: International Rectifier CorporationInventors: Milton J. Boden, Jr., Yuan Xu
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Patent number: 7569898Abstract: A semiconductor device according to an example of the present invention includes a first semiconductor region of a first conductivity type, a first MIS transistor of a second conductivity type formed in the first semiconductor region, a second semiconductor region of a second conductivity type, and a second MIS transistor of a first conductivity type formed in the second semiconductor region. A first gate insulating layer of the first MIS transistor is thicker than a second gate insulating layer of the second MIS transistor, and a profile of impurities of the first conductivity type in a channel region of the second MIS transistor has peaks.Type: GrantFiled: February 5, 2007Date of Patent: August 4, 2009Assignee: Kabushiki Kaisha ToshibaInventors: Yoshiko Kato, Shigeru Ishibashi, Mitsuhiro Noguchi
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Publication number: 20090189228Abstract: The invention is a device for controlling conduction across a semiconductor body with a P type channel layer between active semiconductor regions of the device and the controlling gate contact. The device, often a MOSFET or an IGBT, includes at least one source, well, and drift region. The P type channel layer may be divided into sections, or divided regions, that have been doped to exhibit N type conductivity. By dividing the channel layer into regions of different conductivity, the channel layer allows better control over the threshold voltage that regulates current through the device. Accordingly, one of the divided regions in the channel layer is a threshold voltage regulating region. The threshold-voltage regulating region maintains its original P type conductivity and is available in the transistor for a gate voltage to invert a conductive zone therein. The conductive zone becomes the voltage regulated conductive channel within the device.Type: ApplicationFiled: January 25, 2008Publication date: July 30, 2009Inventors: QINGCHUN ZHANG, SARAH HANEY, ANANT AGARWAL
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Publication number: 20090184380Abstract: A transistor comprises a substrate of a first conductivity type, a drain region and a source region of a second conductivity type, a gate, a gate oxide layer, an adjustment implant region of the first conductivity type and a planar junction. The drain region and the source region are disposed in the substrate. The gate is placed over the substrate between the source region and the drain region. The gate is separated from the substrate by the gate oxide layer. The adjustment implant region is disposed under the gate oxide layer and in the substrate. A second doping concentration of the adjustment implant region is higher than a first doping concentration of the substrate. The adjustment implant region and the drain region in a predetermined shape form the planar junction with a surface curvature pointing towards the drain region to relax electrical field intensity at a location of the planar junction.Type: ApplicationFiled: January 16, 2009Publication date: July 23, 2009Inventors: Marian Udrea Spenea, Serban Mihai Popescu, Laszlo Lipcsei
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Patent number: 7564106Abstract: A semiconductor device capable of reducing a threshold voltage is obtained. The semiconductor device includes a pair of source/drain regions formed on the main surface of a semiconductor region to hold a channel region therebetween, and a gate electrode formed on the channel region through a gate insulating film and including a metal-containing layer arranged in the vicinity of an interface between the gate insulating film and the gate electrode, wherein the metal-containing layer is so formed in the form of dots as to partially cover the surface of the gate insulating film, and the average distance between dots forming the metal-containing layer is set to not more than a diameter of the dot of the metal-containing layer.Type: GrantFiled: February 28, 2007Date of Patent: July 21, 2009Assignee: Sanyo Electric Co., Ltd.Inventor: Hideaki Fujiwara
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Publication number: 20090159987Abstract: A semiconductor device includes a semiconductor substrate having an active region having a plurality of recessed channel areas extending across the active region and a plurality of junction areas also extending across the active region. Gates are formed in and over the recessed channel areas of the active region. A device isolation structure is formed in the semiconductor substrate to delimit the active region, and the device isolation structure has recessed portions, each of which is formed near a junction area of the active region. Landing plugs are formed over each junction area in the active region and extend to fill the recessed portion of the device isolation structure outside the active region. The semiconductor device suppresses interference caused by an adjoining gate leading to a decrease in leakage current from a cell transistor.Type: ApplicationFiled: February 19, 2008Publication date: June 25, 2009Inventor: Tae Kyung OH
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Publication number: 20090134474Abstract: The present invention discloses a constant current source device with over current and over voltage protection function that can be directly applied to AC power and DC power, and a method for manufacturing the constant current source device is also disclosed. The device includes a silicon substrate (1), an oxide layer (6) formed in front of the silicon substrate (1), a drain metal (2), a source metal (3) and a gate metal (4) located in front of the oxide layer (6), a P+ guard ring (50), an N+ drain region (52) and an N+ source region (53) implanted in the silicon substrate (1), a P+ substrate region (51) located in the N+ source region (53), and an N? channel region (54) connecting the N+ drain region (52) with the N+ source region (53). The drain metal (2), and source metal (3) are separately connected with the N+ drain region (52), the N+ source region (53) and the P+ substrate region (51). The source metal (3) and the gate metal (4) are electrically connected through a connection metal (7).Type: ApplicationFiled: October 16, 2008Publication date: May 28, 2009Inventor: Wei-Kuo Wu
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Publication number: 20090134475Abstract: A transistor includes a channel region with a first portion and a second portion. A length of the first portion is smaller than a length of the second portion. The first portion has a higher threshold voltage than the second portion. The lower threshold voltage of the second portion allows for an increased ON current. Despite the increase attained in the ON current, the higher threshold voltage of the first portion maintains or lowers a relatively low OFF current for the transistor.Type: ApplicationFiled: February 2, 2009Publication date: May 28, 2009Applicant: DSM Solutions, Inc.Inventor: Sung-Ki Min
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Publication number: 20090127636Abstract: A transistor is defined to include a substrate portion and a diffusion region defined in the substrate portion so as to provide an operable transistor threshold voltage. An implant region is defined within a portion of the diffusion region so as to transform the operable transistor threshold voltage of the diffusion region portion into an inoperably high transistor threshold voltage. A gate electrode is defined to extend over both the diffusion region and the implant region. A first portion of the gate electrode defined over the diffusion region forms a first transistor segment having the operable transistor threshold voltage. A second portion of the gate electrode defined over the implant region forms a second transistor segment having the inoperably high transistor threshold voltage. Therefore, a boundary of the implant region defines a boundary of the operable first transistor segment.Type: ApplicationFiled: November 16, 2008Publication date: May 21, 2009Applicant: Tela Innovations, Inc.Inventors: Michael C. Smayling, Scott T. Becker
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Publication number: 20090114999Abstract: According to some embodiments of the invention, transistors of a semiconductor device have a channel region in a channel-portion hole. Methods include forming embodiments of the transistor having a channel-portion hole disposed in a semiconductor substrate. A channel-portion trench pad and a channel-portion layer are sequentially formed at a lower portion of the channel-portion hole. A word line insulating layer pattern and a word line pattern are sequentially stacked on the channel-portion layer and fill the channel-portion hole, disposed on the semiconductor substrate. The channel-portion layer is formed to contact the semiconductor substrate through a portion of sidewall of the channel-portion hole, and forms a channel region under the word line pattern. Punchthrough is prevented between electrode impurity regions corresponding to source and drain regions.Type: ApplicationFiled: January 8, 2009Publication date: May 7, 2009Applicant: Samsung Electroncs Co., Ltd.Inventors: Hyeoung-Won SEO, Du-Heon SONG, Sang-Hyun LEE