With Permanent Threshold Adjustment (e.g., Depletion Mode) Patents (Class 257/402)
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Patent number: 6969894Abstract: An n-channel metal-insulator-semiconductor field-effect transistor (MISFET) that exhibits a variable threshold voltage is disclosed. The resulting device can be incorporated into a number of useful applications, including as part of a memory device, a logic device, etc.Type: GrantFiled: January 14, 2004Date of Patent: November 29, 2005Assignee: Synopsys, Inc.Inventors: Tsu-Jae King, David K. Y. Liu
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Patent number: 6967380Abstract: A method of forming retrograde n-wells and p-wells. A first mask is formed on the substrate and the n-well implants are carried out. Then the mask is thinned, and a deep p implant is carried out with the thinned n-well mask in place. This prevents Vt shifts in FETs formed in the n-well adjacent the nwell-pwell interface. The thinned mask is then removed, a p-well mask is put in place, and the remainder of the p-well implants are carried out.Type: GrantFiled: November 26, 2003Date of Patent: November 22, 2005Assignee: International Business Machines CorporationInventors: Matthew J. Breitwisch, Chung H. Lam, James A. Slinkman
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Patent number: 6965151Abstract: Structures for providing devices that include resistive paths specifically designed to provide a predetermined resistance between the bulk material of the device and a well tie contact. By providing a resistive path, an equivalent RC circuit is introduced to the device that allows the bulk material potential to track the gate potential, thereby advantageously lowering the threshold voltage as the device turns on and raising the threshold voltage as the device turns off. In addition, the introduction of the resistive path also allows the bulk material potential to be controlled and stabilize at an equilibrium potential between switching events.Type: GrantFiled: March 20, 2003Date of Patent: November 15, 2005Assignee: Sun Microsystems, Inc.Inventor: James B. Burr
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Patent number: 6958519Abstract: Methods of forming field effect transistors and resultant field effect transistor circuitry are described. In one embodiment, a semiconductive substrate includes a field effect transistor having a body. A first resistive element is received by the substrate and connected between the transistor's gate and the body. A second resistive element is received by the substrate and connected between the body and a reference voltage node. The first and second resistive elements form a voltage divider which is configured to selectively change threshold voltages of the field effect transistor with state changes in the gate voltage. In a preferred embodiment, first and second diode assemblies are positioned over the substrate and connected between the gate and body, and the body and a reference voltage node to provide the voltage divider.Type: GrantFiled: September 18, 2001Date of Patent: October 25, 2005Assignee: Micron Technology, Inc.Inventors: Fernando Gonzalez, Chandra Mouli
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Patent number: 6940705Abstract: A decoupling capacitor is formed in a semiconductor substrate that includes a strained silicon layer. A substantially flat bottom electrode is formed in a portion of the strained silicon layer and a capacitor dielectric overlying the bottom electrode. A substantially flat top electrode overlies said capacitor dielectric. The top electrode is connected to a first reference voltage line and the bottom electrode is connected to a second reference voltage line.Type: GrantFiled: July 25, 2003Date of Patent: September 6, 2005Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Chenming Hu
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Patent number: 6919600Abstract: A permanently-ON MOS transistor comprises silicon source and drain regions of a first conductivity type in a silicon well region of a second conductivity type. A silicon contact region of the first conductivity types is buried in the well region, said contact region contacting said source region and said drain region. A first gate insulating layer is selectively placed over the silicon source and drain regions. A second gate insulating layer is selectively placed over the first gate insulating layer and over the silicon contact region. A polysilicon gate region is placed over the second gate insulating layer.Type: GrantFiled: February 26, 2004Date of Patent: July 19, 2005Assignee: HRL Laboratories, LLCInventors: James P. Baukus, Lap-Wai Chow, William M. Clark, Jr.
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Patent number: 6885054Abstract: The present invention provides a threshold voltage stabilizer for use with a MOS transistor having a body effect associated therewith. In one embodiment, the threshold voltage stabilizer, includes a body well located in a substrate, a source located in the body well, and a stabilization region positioned below the body well. The threshold voltage stabilizer is configured to provide a stabilization voltage to the stabilization region to increase a depletion region within the body well and thereby restrict the body effect to stabilize a threshold voltage of the MOS transistor.Type: GrantFiled: February 4, 2004Date of Patent: April 26, 2005Assignee: Texas Instruments IncorporatedInventors: Xiaoju Wu, Pinghai Hao, Imran M. Khan
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Patent number: 6878579Abstract: An aspect of the present invention includes a first conductive type semiconductor region; a gate electrode formed on the first conductive type semiconductor region; a channel region formed immediately below the gate electrode in the first conductive type semiconductor region; and a second conductive type first diffusion layer constituting source/drain regions formed at opposite sides of the channel region in the first conductive type semiconductor region, the gate electrode being formed of polycrystalline silicon-germanium, in which a germanium concentration is continuously increased from a drain region side to a source region side, and an impurity concentration immediately below the gate electrode in the first conductive type semiconductor region being continuously increased from the source region side to the drain region side in accordance with the germanium concentration in the gate electrode.Type: GrantFiled: August 13, 2004Date of Patent: April 12, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Kazuya Ohuchi, Hironobu Fukui
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Patent number: 6879006Abstract: A method for fabricating a CMOS transistor is disclosed. The present invention provides a method for producing a CMOS transistor having enhanced performance since a short channel characteristic and operation power can be controlled by the duplicate punch stop layer of the pMOS region and the operation power of the nMOS is also controlled by dopant concentration of the duplicated LDD region combined by the first LDD region and the second LDD region.Type: GrantFiled: March 26, 2004Date of Patent: April 12, 2005Assignee: Hynix Semiconductor Inc.Inventors: Yong-Sun Sohn, Chang-Woo Ryoo, Jeong-Youb Lee
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Patent number: 6852995Abstract: A polymer-based or silicon-based accumulation type, depletion mode field effect transistor, suitable as a driver for load. Optionally, the load is another accumulation type, depletion mode field effect transistor. The transistor may be of the TFT type, either lateral or vertical. Optionally, it may have Schottky diode contacts to source and drain electrodes, possibly with a reverse biased Schottky junction, or it may have a negatively charged gate dielectric.Type: GrantFiled: November 9, 2000Date of Patent: February 8, 2005Assignee: The University of LiverpoolInventors: William Eccleston, Giles Christian Rome Lloyd
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Patent number: 6841836Abstract: An integrated device comprising a MOS transistor and a Schottky diode which are formed on a semiconductor substrate of a first conductivity type is shown. The device comprises a plurality of body region stripes of a second conductivity type which are adjacent and parallel to each other, a first metal layer placed over said substrate and a second metal layer placed under said substrate. The device comprises a plurality of elementary structures parallel to each other each one of which comprises first zones provided with a silicon oxide layer placed over a portion of the substrate which is comprised between two adjacent body region stripes, a polysilicon layer superimposed to the silicon oxide layer, a dielectric layer placed over and around the polysilicon layer. Some body region stripes comprise source regions of the first conductivity type which are placed adjacent to the first zones of the elementary structures to form elementary cells of said MOS transistor.Type: GrantFiled: December 16, 2003Date of Patent: January 11, 2005Assignee: STMicroelectronics, S.R.L.Inventors: Mario Saggio, Ferruccio Frisina
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Publication number: 20040266090Abstract: To provide a semiconductor device able to be made uniform in diffusion depth of the impurity in a diffusion layer by a single diffusion and to give the desired threshold voltage and improved in yield and a method of producing the same. The device has a channel layer 16 formed on a substrate 12, a diffusion stop layer 17 formed on the top surface of the channel layer 16, a diffusion layer 18 formed on the top surface of the diffusion stop layer, and a doping region 25 formed adjoining the diffusion stop layer 17 at least at part of the diffusion layer 18 and having an impurity diffused in it, the diffusion stop layer 17 having a slower diffusion rate of the impurity than the diffusion rate of the diffusion layer 18 and stopping diffusion of the impurity from the diffusion layer 18.Type: ApplicationFiled: May 4, 2004Publication date: December 30, 2004Inventor: Mitsuhiro Nakamura
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Patent number: 6828638Abstract: In some embodiments, the invention involves a die having a first conductor carrying a power supply voltage and a second conductor carrying a ground voltage. A semiconductor capacitor operating in depletion mode is coupled between the first and second conductors to provide decoupling capacitance between the first and second conductors, the semiconductor capacitor having a gate voltage. Various configurations may be used including: n+ gate poly and n+ source/drain regions in an n-body; p+ gate poly and n+ source/drain regions in an n-body; p+ gate poly and p+ source/drain regions in an n-body; p+ gate poly and p+ source/drain regions in a p-body; n+ gate poly and p+ source/drain regions in a p-body; n+ gate poly and n+ source/drain regions in a p-body. The power supply voltage may have a larger absolute value than does a flatband voltage.Type: GrantFiled: December 22, 1999Date of Patent: December 7, 2004Assignee: Intel CorporationInventors: Ali Keshavarzi, Vivek K. De, Tanay Karnik, Rajendran Nair
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Patent number: 6828620Abstract: A technique of fabricating a nonvolatile device includes forming a low doping region to aid in the reduction of substrate hot electrons. The nonvolatile device may be a floating gate device, such as a Flash, EEPROM, or EPROM memory cell. The low doping region has a lower doping concentration than that of the substrate. By reducing substrate hot electrons, this improves the reliability and longevity of the nonvolatile device.Type: GrantFiled: May 12, 2003Date of Patent: December 7, 2004Assignee: Altera CorporationInventors: Christopher J. Pass, James D. Sansbury, Raminda U. Madurawe, John E. Turner, Rakesh H. Patel, Peter J. Wright
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Patent number: 6812527Abstract: A method of forming a silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) device is provided in which an implanted back-gate is formed into a Si-containing layer of an SOI wafer. The implanted back-gate thus formed is capable of controlling the threshold voltage of a polysilicon-containing front-gate which is formed over a portion of the implanted back-gate region. The implanted back-gate functions as a dynamic threshold voltage control system in the SOI MOSFET device because it is suitable for use during circuit/system active periods and during circuit/system idle periods.Type: GrantFiled: September 5, 2002Date of Patent: November 2, 2004Assignee: International Business Machines CorporationInventors: Robert H. Dennard, Wilfried E. Haensch, Hussein I. Hanafi
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Patent number: 6800924Abstract: Structures for providing devices that include resistive paths specifically designed to provide a predetermined resistance between the bulk material of the device and a well tie contact. By providing a resistive path, an equivalent RC circuit is introduced to the device that allows the bulk material potential to track the gate potential, thereby advantageously lowering the threshold voltage as the device turns on and raising the threshold voltage as the device turns off. In addition, the introduction of the resistive path also allows the bulk material potential to be controlled and stabilize at an equilibrium potential between switching events.Type: GrantFiled: March 20, 2003Date of Patent: October 5, 2004Assignee: Sun Microsystems, Inc.Inventor: James B. Burr
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Publication number: 20040183141Abstract: Impurities for threshold voltage adjustment are implanted using a resist film and a protective dielectric as implantation masks from directions inclined at 10° through 30° with respect to the direction vertical to the principal surface of a semiconductor substrate 1 when viewed in cross section taken along the gate width direction. Thus, first low-concentration impurity implantation regions are formed to overlap each other in the central part of an active region for a memory cell MIS transistor Mtrs of an SRAM. Furthermore, after an isolation is formed, a second low-concentration impurity implantation region is formed in an active region for each of MIS transistors Ltr, Mtrs and Mtrl by implanting impurity ions without using implantation masks. The MIS transistors Ltr, Mtrs and Mtrl formed after the completion of the fabricating process have substantially the same threshold voltage.Type: ApplicationFiled: January 14, 2004Publication date: September 23, 2004Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.Inventors: Hiroaki Nakaoka, Akio Sebe, Takayuki Yamada
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Publication number: 20040178458Abstract: The invention includes methods of forming circuit devices. A metal-containing material comprising a thickness of no more than 20 Å (or alternatively comprising a thickness resulting from no more than 70 ALD cycles) is formed between conductively-doped silicon and a dielectric layer. The conductively-doped silicon can be n-type silicon and the dielectric layer can be a high-k dielectric material. The metal-containing material can be formed directly on the dielectric layer, and the conductively-doped silicon can be formed directly on the metal-containing material. The circuit device can be a capacitor construction or a transistor construction. If the circuit device is a transistor construction, such can be incorporated into a CMOS assembly. Various devices of the present invention can be incorporated into memory constructions, and can be incorporated into electronic systems.Type: ApplicationFiled: January 13, 2004Publication date: September 16, 2004Inventors: Denise M. Eppich, Ronald A. Weimer
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Patent number: 6791106Abstract: An aspect of the present invention includes a first conductive type semiconductor region; a gate electrode formed on the first conductive type semiconductor region; a channel region formed immediately below the gate electrode in the first conductive type semiconductor region; and a second conductive type first diffusion layer constituting source/drain regions formed at opposite sides of the channel region in the first conductive type semiconductor region, the gate electrode being formed of polycrystalline silicon-germanium, in which a germanium concentration is continuously increased from a drain region side to a source region side, and an impurity concentration immediately below the gate electrode in the first conductive type semiconductor region being continuously increased from the source region side to the drain region side in accordance with the germanium concentration in the gate electrode.Type: GrantFiled: April 23, 2003Date of Patent: September 14, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Kazuya Ohuchi, Hironobu Fukui
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Patent number: 6787850Abstract: The invention concerns a semi-conductor device comprising on a substrate: a first dynamic threshold voltage MOS transistor (10), with a gate (116), and a channel (111) of a first conductivity type, and a current limiter means (20) connected between the gate and the channel of said first transistor. In accordance with the invention, this first transistor is fitted with a first doped zone (160) of the first conductivity type, connected to the channel, and the current limiter means comprises a second doped zone (124) of a second conductivity type, placed against the first doped zone and electrically connected to the first zone by an ohmic connection. Application to the manufacture of CMOS circuits.Type: GrantFiled: July 27, 2001Date of Patent: September 7, 2004Assignee: Commissariat a l'Energie AtomiqueInventor: Jean-Luc Pelloie
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Patent number: 6784492Abstract: A semiconductor device comprises at least a semiconductor layer including source and drain areas of a first conductive type and of a high impurity concentration and a channel area positioned between the source and drain areas, an insulation layer covering at least the channel area, and a gate electrode positioned close to the insulation layer. The channel area at least comprises a first channel area of a low resistance, positioned close to the insulation layer and having a second conductive type opposite to the first conductive type, and a second channel area of a high resistance, having the first conductive type and positioned adjacent to the first channel area.Type: GrantFiled: May 31, 1994Date of Patent: August 31, 2004Assignee: Canon Kabushiki KaishaInventor: Masakazu Morishita
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Patent number: 6784059Abstract: This invention is characterized in that, a gate electrode 27F formed on a P-type well 3 via a gate oxide film 9, a high-concentration N-type source layer and a high-concentration N-type drain layer 15 respectively formed apart from the gate electrode and a low-concentration N-type source layer and a low-concentration H-type drain layer respectively formed so that they respectively surround the N-type source layer and the N-type drain layer 10 and respectively parted by a P-type body layer formed under the gate electrode 27F are provided.Type: GrantFiled: August 31, 2000Date of Patent: August 31, 2004Assignee: Sanyo Electric Co., Ltd.Inventors: Toshimitsu Taniguchi, Takashi Arai, Masashige Aoyama, Kazuhiro Yoshitake
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Publication number: 20040164361Abstract: A permanently-ON MOS transistor comprises silicon source and drain regions of a first conductivity type in a silicon well region of a second conductivity type. A silicon contact region of the first conductivity types is buried in the well region, said contact region contacting said source region and said drain region. A first gate insulating layer is selectively placed over the silicon source and drain regions. A second gate insulating layer is selectively placed over the first gate insulating layer and over the silicon contact region. A polysilicon gate region is placed over the second gate insulating layer.Type: ApplicationFiled: February 26, 2004Publication date: August 26, 2004Applicant: HRL Laboratories, LLCInventors: James P. Baukus, Lap-Wai Chow, William M. Clark
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Patent number: 6781213Abstract: Structures for providing devices that include resistive paths specifically designed to provide a predetermined resistance between the bulk material of the device and a well tie contact. By providing a resistive path, an equivalent RC circuit is introduced to the device that allows the bulk material potential to track the gate potential, thereby advantageously lowering the threshold voltage as the device turns on and raising the threshold voltage as the device turns off. In addition, the introduction of the resistive path also allows the bulk material potential to be controlled and stabilize at an equilibrium potential between switching events.Type: GrantFiled: March 20, 2003Date of Patent: August 24, 2004Assignee: Sun Microsystems, Inc.Inventor: James B. Burr
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Patent number: 6777779Abstract: Structures for providing devices that include resistive paths specifically designed to provide a predetermined resistance between the bulk material of the device and a well tie contact. By providing a resistive path, an equivalent RC circuit is introduced to the device that allows the bulk material potential to track the gate potential, thereby advantageously lowering the threshold voltage as the device turns on and raising the threshold voltage as the device turns off. In addition, the introduction of the resistive path also allows the bulk material potential to be controlled and stabilize at an equilibrium potential between switching events.Type: GrantFiled: March 20, 2003Date of Patent: August 17, 2004Assignee: Sun Microsystems, Inc.Inventor: James B. Burr
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Patent number: 6770944Abstract: A semiconductor device has a first semiconductor region formed in a semiconductor substrate and having a first conductivity type due to first-conductivity-type active impurities contained in the first semiconductor region, and a second semiconductor region formed between the first semiconductor region and the surface of the semiconductor substrate and having a second conductivity type due to second-conductivity-type active impurities contained in the second semiconductor region. The second semiconductor region contains first-conductivity-type active impurities whose concentration is zero or smaller than a quarter of a concentration of the second-conductivity-type active impurities contained in the second semiconductor region. An insulating film and a conductor are formed on the second semiconductor region. Third and fourth semiconductor regions of the second conductivity type are formed at the semiconductor surface in contact with the side faces of the second semiconductor region.Type: GrantFiled: November 26, 2002Date of Patent: August 3, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Kazumi Nishinohara, Yasushi Akasaka, Kyoichi Suguro
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Patent number: 6762469Abstract: High performance (surface channel) CMOS devices with a mid-gap work function metal gate are disclosed wherein an epitaxial layer is used for a threshold voltage Vt adjust/decrease for the PFET area, for large Vt reductions (˜500 mV), as are required by CMOS devices with a mid-gap metal gate. The present invention provides counter doping using an in situ B doped epitaxial layer or a B and C co-doped epitaxial layer, wherein the C co-doping provides an additional degree of freedom to reduce the diffusion of B (also during subsequent activation thermal cycles) to maintain a shallow B profile, which is critical to provide a surface channel CMOS device with a mid-gap metal gate while maintaining good short channel effects. The B diffusion profiles are satisfactorily shallow, sharp and have a high B concentration for devices with mid-gap metal gates, to provide and maintain a thin, highly doped B layer under the gate oxide.Type: GrantFiled: April 19, 2002Date of Patent: July 13, 2004Assignee: International Business Machines CorporationInventors: Anda C. Mocuta, Meikei Ieong, Ricky S. Amos, Diane C. Boyd, Dan M. Mocuta, Huajie Chen
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Publication number: 20040132254Abstract: Deterministically doped field-effect devices and methods of making same. One or more dopant atoms, also referred to as impurities or impurity atoms, are arranged in the channel region of a device in engineered arrays. Component atoms of an engineered array are substantially fixed by controlled placement in order to provide a barrier topology designed to control of source-drain carrier flow to realize an ultra-small device with appropriate, consistent performance characteristics. Devices can be made by placing atoms using proximity probe manipulation, ion implantation, by facilitating self-assembly of the atoms as necessary, or other techniques. These atomic placement techniques are combined in example embodiments with traditional methods of forming a substrate, insulators, gates, and any other structural elements needed in order to produce practical field-effect devices.Type: ApplicationFiled: August 14, 2003Publication date: July 8, 2004Applicant: SEMICONDUCTOR RESEARCH CORPORATIONInventors: Daniel Joseph Christian Herr, Victor Vladimirovich Zhirnov
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Publication number: 20040110346Abstract: A self-aligned contact, and a method for fabricating the same, are provided. A conductive element having an overlying hydrogen silsesquioxane (HSQ)-based dielectric cap is formed over a semiconductor substrate. Dielectric sidewall spacers are then formed adjacent to sidewalls of the conductive element and the HSQ-based dielectric cap. A HSQ-based dielectric layer is formed over the resulting structure, and an inter-layer dielectric layer, such as TEOS, is formed over the HSQ-based dielectric layer. The inter-layer dielectric layer is then etched through a mask having an opening located over a sidewall spacer, a portion of the HSQ-based dielectric cap and a portion of the substrate. The etch (which may be a C5F8 based etch) has a high selectivity (e.g., about 20:1) with respect to the HSQ-based dielectric layer, thereby enabling the etch to stop on the HSQ-based dielectric layer. Another etch removes the exposed HSQ-based dielectric layer to expose the substrate.Type: ApplicationFiled: December 9, 2002Publication date: June 10, 2004Applicant: Integrated Device Technology, Inc.Inventor: Wei Tao
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Patent number: 6744082Abstract: Systems and methods are provided for static pass transistor logic having transistors with multiple vertical gates. The multiple vertical gates are edge defined such that only a single transistor is required for multiple logic inputs. Thus a minimal surface area is required for each logic input. The novel static pass transistor of the present invention includes a transistor which has a horizontal depletion mode channel region between a single source and drain region. A number of vertical gates are located above different portions of the depletion mode channel region. At least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first thickness insulator material. At least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second thickness insulator material.Type: GrantFiled: May 30, 2000Date of Patent: June 1, 2004Assignee: Micron Technology, Inc.Inventors: Leonard Forbes, Kie Y. Ahn
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Patent number: 6740942Abstract: A permanently-ON MOS transistor comprises silicon source and drain regions of a first conductivity type in a silicon well region of a second conductivity type. A silicon contact region of the first conductivity types is buried in the well region, said contact region contacting said source region and said drain region. A first gate insulating layer is selectively placed over the silicon source and drain regions. A second gate insulating layer is selectively placed over the first gate insulating layer and over the silicon contact region. A polysilicon gate region is placed over the second gate insulating layer.Type: GrantFiled: June 15, 2001Date of Patent: May 25, 2004Assignee: HRL Laboratories, LLC.Inventors: James P. Baukus, Lap-Wai Chow, William M. Clark, Jr.
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Patent number: 6727559Abstract: A local oscillation FET has a source connecting pad, a drain connecting pad and a gate connecting pad. The source connecting pad occupies one corner of a substrate, and the drain and gate connecting pads are placed at the neighboring corners so that the three connecting pads form an L shape on the substrate. As a modification to this configuration, another source connecting pad is placed at the remaining corner of the substrate so that the drain and gate connecting pads are shielded from each other by the two source connecting pads. These device configurations contribute to size reduction of the local oscillation FET.Type: GrantFiled: June 24, 2002Date of Patent: April 27, 2004Assignee: Sanyo Electric Co., Ltd.Inventors: Tetsuro Asano, Masahiro Uekawa, Koichi Hirata, Mikito Sakakibara
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Publication number: 20040075151Abstract: A semiconductor device structure includes at least two field effect transistors formed on same substrate, the first field effect transistor includes a spacer having a first width, the second field effect transistor includes a spacer having a second width, the first width being different than said second width. Preferably, the first width is narrower than the second width.Type: ApplicationFiled: October 21, 2002Publication date: April 22, 2004Applicant: International Business Machines CorporationInventors: Ka Hing Fung, Percy V. Gilbert
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Patent number: 6724053Abstract: P-type metal-oxide semiconductor field effect transistor (PMOSFET) devices have a characteristic property known as threshold voltage. This threshold voltage may consist of separate threshold voltages associated with the main portion of the gate region of the device and with the sidewall corner of the device. Under some conditions, the threshold behavior in the sidewall corner region of the device may dominate the performance of the device, not necessarily in the manner intended by the designer of the device. A method of controlling threshold voltage behavior is described. In particular, ion implantation of nitrogen in the gate sidewall region of the device can provide such control. Devices made by this method are also described.Type: GrantFiled: February 23, 2000Date of Patent: April 20, 2004Assignee: International Business Machines CorporationInventors: Rama Divakaruni, Ryota Katsumata, Giuseppe La Rosa, Rajesh Rengarajan, Mary E. Weybright
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Patent number: 6717221Abstract: An apparatus including a MOSFET circuit having dual threshold voltage NMOS and PMOS transistors wherein the threshold voltage of a low threshold NMOS transistor is set with a first halo implant, a threshold voltage of a high threshold voltage PMOS transistor is set with a second halo implant, and, a threshold voltage of a high threshold voltage NMOS transistor is enhanced while, a threshold voltage of a low threshold voltage PMOS transistor is compensated with a third halo implant.Type: GrantFiled: April 30, 2003Date of Patent: April 6, 2004Assignee: Intel CorporationInventors: Ian R. Post, Kaizad Mistry
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Publication number: 20040046209Abstract: When n-channel thin film transistors(TFTs) and p-channel TFTs are formed on a polycrystalline silicon film formed on a glass substrate, a process is included in which P-dopant or N-dopant is introduced at the same time to the channel region of a part of the n-channel TFTs and a part of the p-channel TFTs. In one channel doping operation, a set of low-VT and high-VT p-channel TFTs and a set of low-VT and high-VT n-channel TFTs can be formed. This method is used for forming high-VT TFTs, which can reduce the off-current, in logics and switch circuits and for forming low-VT TFTs, which can enlarge the dynamic range, in analog circuits to improve the performance of a thin film semiconductor.Type: ApplicationFiled: September 9, 2003Publication date: March 11, 2004Applicant: NEC CORPORATIONInventors: Kenji Sera, Hiroshi Tsuchi
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Patent number: 6703671Abstract: Impurity regions 110 that can form an energy barrier are artificially and locally disposed in a channel formation region 111. The impurity regions 110 restrain a depletion layer that extends from a drift region 102 toward a channel formation region 111, and prevents a short channel effect caused by the depletion layer, with the result that an insulated gate semiconductor device high in withstand voltage can be manufactured without lowering the operation speed.Type: GrantFiled: July 28, 1999Date of Patent: March 9, 2004Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Takeshi Fukunaga
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Publication number: 20040038467Abstract: A trench MIS device is formed in a P-epitaxial layer that overlies an N-epitaxial layer and an N+ substrate. In one embodiment, the device includes a thick oxide layer at the bottom of the trench and an N-type drain-drift region that extends from the bottom of the trench to the N-epitaxial layer. The thick insulating layer reduces the capacitance between the gate and the drain and therefore improves the ability of the device to operate at high frequencies. Preferably, the drain-drift region is formed at least in part by fabricating spacers on the sidewalls of the trench and implanting an N-type dopant between the sidewall spacers and through the bottom of the trench. The thick bottom oxide layer is formed on the bottom of the trench while the sidewall spacers are still in place. The drain-drift region can be doped more heavily than the conventional “drift region” that is formed in an N-epitaxial layer. Thus, the device has a low on-resistance.Type: ApplicationFiled: June 4, 2003Publication date: February 26, 2004Applicant: Siliconix incorporatedInventors: Mohamed N. Darwish, Kyle W. Terrill, Jainhai Qi
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Patent number: 6693331Abstract: A method of forming an MOS integrated circuit having at least two types of NFET, each type having a different threshold voltage, and at least two types of PFET, each type having a different threshold voltage, includes forming at least four active regions in a substrate, each region having a different doping profile. A conventional two threshold voltage CMOS process is modified to produce four transistor threshold voltages with only one additional masked implant operation. This additional implant raises the threshold voltage of one type of MOSFET while lowering that of the other MOSFET type.Type: GrantFiled: November 18, 1999Date of Patent: February 17, 2004Assignee: Intel CorporationInventors: Kaizad R. Mistry, Ian R. Post
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Patent number: 6686631Abstract: An n-channel metal-insulator-semiconductor field-effect transistor (MISFET) that exhibits negative differential resistance in its output characteristic (drain current as a function of drain voltage) is disclosed. The MISFET includes a dynamically variable and reversible threshold voltage which is controlled by a source-drain bias. A channel region of the MISFET is doped so as to enhance an electric field associated with the source-drain bias, and thus cause charge carriers to tunnel out of the channel and into a trapping region. A net charge in the trapping region results from the source-drain bias which can be used as an additional control mechanism for conduction in the MISFET.Type: GrantFiled: December 10, 2002Date of Patent: February 3, 2004Assignee: Progressant Technologies, Inc.Inventors: Tsu-Jae King, David K. Y. Liu
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Patent number: 6664601Abstract: A process for operating a dual mode FET and a logic circuit to include a negative differential resistance (NDR) characteristic is disclosed. In a FET embodiment, an NDR characteristic is selectively enabled/disabled by biasing a body contact, thus permitting a dual behavior of the device. Larger collections of such FETs can be synthesized to form dual mode logic circuits as well, so that a single circuit can perform more than one logic operation depending on whether an NDR mode is enabled or not.Type: GrantFiled: November 18, 2002Date of Patent: December 16, 2003Assignee: Progressant Technologies, Inc.Inventor: Tsu-Jae King
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Patent number: 6661062Abstract: A capacitive element C1 having a small leakage current is formed by utilizing a gate oxide film 9B thicker than that of a MISFET of a logic section incorporated in a CMOS gate array, without increasing the number of steps of manufacturing the CMOS gate array. The capacitive element C1 has a gate electrode 10E. A part of the gate electrode 10E is made of a polycrystalline silicon film. The polycrystalline silicon film is doped with n-type impurities, so that the capacitive element may reliably operate even at a low power supply voltage.Type: GrantFiled: February 5, 2003Date of Patent: December 9, 2003Assignee: Hitachi, Ltd.Inventors: Kazuhisa Suzuki, Toshiro Takahashi, Yasunobu Yanagisawa, Yusuke Nonaka
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Patent number: 6638801Abstract: A semiconductor device including an IGFET (insulated gate field effect transistor) (30) is disclosed. IGFET (30) may include a source/drain area (15) having an impurity concentration distribution that may be formed shallower at a higher concentration than the impurity concentration distribution in another source/drain area (7). A gate oxide film may include a first gate oxide film (5) adjacent to source/drain area (7) and a second gate oxide film (12) adjacent to source drain area (15). Second gate oxide film (12) may be thinner than first gate oxide film (5). An impurity concentration distribution of a second channel impurity area (11) under second gate oxide film (12) may be at a higher concentration than an impurity concentration distribution of a first channel impurity area (9) under first gate oxide film (5). In this way, an electric field at a PN junction of source/drain area (7) may be reduced.Type: GrantFiled: March 26, 2002Date of Patent: October 28, 2003Assignees: NEC Corporation, NEC Electronics CorporationInventor: Kazutaka Manabe
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Patent number: 6627962Abstract: A semiconductor memory and its manufacturing method enable high-integrated memory cell to be realized easily. The semiconductor memory according to the present invention has an impurity diffusion region with a second conductive type that is opposite to a first conductive type on a surface of a semiconductor substrate with the first conductive type. Further, the semiconductor memory has structure in which there are provided a floating gate electrode formed on the semiconductor substrate via a gate insulator, and a control gate electrode formed on the floating gate electrode via an interelectrode insulating film. Furthermore, there are provided the gate insulator on the surface of the semiconductor substrate with the exception of an impurity diffusion region, and a third insulating film with film thickness thicker than that of the gate insulator on the surface of the impurity diffusion region.Type: GrantFiled: May 2, 2001Date of Patent: September 30, 2003Assignee: NEC Electronics CorporationInventor: Kazuhiro Tasaka
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Semiconductor device and method of manufacturing the same including drain pinned along channel width
Patent number: 6624455Abstract: In a semiconductor device, pining regions 105 are disposed along the junction portion of a drain region 102 and a channel forming region 106 locally in a channel width direction. With this structure, because the spread of a depletion layer from a drain side is restrained by the pining regions 105, a short-channel effect can be restrained effectively. Also, because a passage through which carriers move is ensured, high mobility can be maintained.Type: GrantFiled: October 22, 2002Date of Patent: September 23, 2003Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Akiharu Miyanaga, Nobuo Kubo -
Patent number: 6621116Abstract: An EPROM structure includes a NMOS transistor integrated with a capacitor. The terminal names of the NMOS transistor follow the conventional nomenclature: drain, source, body and gate. The gate of the NMOS transistor is connected directly and exclusively to one of the capacitor plates. In this configuration, the gate is now referred to as the “floating gate”. The remaining side of the capacitor is referred to as the “control gate”.Type: GrantFiled: December 20, 2001Date of Patent: September 16, 2003Inventor: Michael David Church
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Patent number: 6617647Abstract: Dot-pattern-like impurity regions 104 are artificially and locally formed on a channel forming region 103. The impurity regions 104 restrain the expansion of a drain side depletion layer toward the channel forming region 103 to prevent the short channel effect. The impurity regions 104 allow a channel width W to be substantially fined, and the resultant narrow channel effect releases the lowering of a threshold value voltage which is caused by the short channel effect.Type: GrantFiled: March 16, 2001Date of Patent: September 9, 2003Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Publication number: 20030139013Abstract: Disclosed are semiconductor devices and methods for fabricating the same. According to one embodiment, the method includes sequentially forming a gate insulation layer and a conductive layer on a semiconductor substrate. A buried impurity region is then formed in the semiconductor substrate. Thus, the gate insulation layer is formed before forming the buried impurity region, thereby substantially reducing impurity diffusion that can be caused by a thermal process for forming the gate insulation layer. In addition, the gate insulation layer is not exposed, thus protecting the gate insulation layer from being recessed.Type: ApplicationFiled: January 23, 2003Publication date: July 24, 2003Applicant: Samsung Electronics Co., Ltd.Inventors: Min-Kyu Kang, Won-Hyung Ryu
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Publication number: 20030122203Abstract: A semiconductor device has a first semiconductor region formed in a semiconductor substrate and having a first conductivity type due to first-conductivity-type active impurities contained in the first semiconductor region, and a second semiconductor region formed between the first semiconductor region and the surface of the semiconductor substrate and having a second conductivity type due to second-conductivity-type active impurities contained in the second semiconductor region. The second semiconductor region contains first-conductivity-type active impurities whose concentration is zero or smaller than a quarter of a concentration of the second-conductivity-type active impurities contained in the second semiconductor region. An insulating film and a conductor are formed on the second semiconductor region. Third and fourth semiconductor regions of the second conductivity type are formed at the semiconductor surface in contact with the side faces of the second semiconductor region.Type: ApplicationFiled: November 26, 2002Publication date: July 3, 2003Applicant: Kabushiki Kaisha ToshibaInventors: Kazumi Nishinohara, Yasushi Akasaka, Kyoichi Suguro
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Patent number: 6586817Abstract: Structures for providing devices that include resistive paths specifically designed to provide a predetermined resistance between the bulk material of the device and a well tie contact. By providing a resistive path, an equivalent RC circuit is introduced to the device that allows the bulk material potential to track the gate potential, thereby advantageously lowering the threshold voltage as the device turns on and raising the threshold voltage as the device turns off. In addition, the introduction of the resistive path also allows the bulk material potential to be controlled and stabilize at an equilibrium potential between switching events.Type: GrantFiled: May 18, 2001Date of Patent: July 1, 2003Assignee: Sun Microsystems, Inc.Inventor: James B. Burr