Lateral Single Gate Single Channel Transistor With Noninverted Structure, I.e., Channel Layer Is Formed Before Gate (epo) Patents (Class 257/E21.413)
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Patent number: 11563040Abstract: A manufacturing method of a display apparatus including preparing a substrate, forming an amorphous silicon layer on the substrate, cleaning the amorphous silicon layer with hydrofluoric acid, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, and forming a metal layer directly on the polycrystalline silicon layer.Type: GrantFiled: September 24, 2020Date of Patent: January 24, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jongoh Seo, Gyungmin Baek, Byungsoo So
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Patent number: 11322524Abstract: A display panel is disclosed, which includes: a substrate including a display region and a border region adjacent to the display region; a first transistor disposed on the border region and including an active layer and a first conducting electrode on the substrate, wherein the first conducting electrode electrically connects to the active layer, and the first conducting electrode extends along a first direction; and a conductive layer disposed on the border region and including an opening, wherein the conductive layer partially overlaps the first conducting electrode in a top view of the border region, wherein a minimum distance from an edge of the opening to the active layer along the first direction is different from a minimum distance from another edge of the opening to the active layer along a second direction, and the first direction is different from the second direction.Type: GrantFiled: November 4, 2019Date of Patent: May 3, 2022Assignee: INNOLUX CORPORATIONInventors: Yi-Ling Yu, Chun-Liang Lin
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Patent number: 11271016Abstract: An array substrate is disclosed. The array substrate may include a base substrate, gate lines and data lines intersecting the gate lines on the base substrate. The gate lines and the data lines may define a plurality of pixel regions. Each of at least some of the plurality of the pixel regions may be provided with an image sensor. The image sensor may include a sensitive element, a first electrode at one end of the sensitive element, and a second electrode at the other end of the sensitive element. The image sensor may be configured to sense light having image information.Type: GrantFiled: October 10, 2017Date of Patent: March 8, 2022Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.Inventors: Zhaokun Yang, Xiang Feng, Ruizhi Yang, Yonglian Qi
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Patent number: 11257956Abstract: A thin film transistor (TFT) device is provided, where the TFT may include a source and a drain, a gate stack, and a semiconductor body. The gate stack may include a gate dielectric structure and a gate electrode, and the gate stack may be between the source and the drain. A first section of the semiconductor body may be adjacent to at least a section of the gate stack. A spacer may be between the gate stack and the source, where the spacer may be on the semiconductor body, and where a second section of the semiconductor body underneath the spacer may comprise dopants.Type: GrantFiled: March 30, 2018Date of Patent: February 22, 2022Assignee: Intel CorporationInventors: Abhishek A. Sharma, Gilbert Dewey, Van Le, Jack Kavalieros, Tahir Ghani
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Patent number: 11239269Abstract: An image sensor including a semiconductor substrate having a first surface and a second surface; and a pixel isolation film extending from the first surface of the semiconductor substrate into the semiconductor substrate and defining active pixels in the semiconductor substrate, wherein the pixel isolation film includes a buried conductive layer including polysilicon containing a fining element at a first concentration; and an insulating liner between the buried conductive layer and the semiconductor substrate, and wherein the fining element includes oxygen, carbon, or fluorine.Type: GrantFiled: June 25, 2019Date of Patent: February 1, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kook-tae Kim, Jin-gyun Kim, Soo-jin Hong
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Patent number: 11227955Abstract: A semiconductor device includes a substrate, a first poly-material pattern, a first conductive element, a first semiconductor layer, and a first gate structure. The first poly-material pattern is over and protrudes outward from the substrate, wherein the first poly-material pattern includes a first active portion and a first poly-material portion joined to the first active portion. The first conductive element is over the substrate, wherein the first conductive element includes the first poly-material portion and a first metallic conductive portion covering at least one of a top surface and a sidewall of the first poly-material portion. The first semiconductor layer is over the substrate and covers the first active portion of the first poly-material pattern and the first conductive element. The first gate structure is over the first semiconductor layer located within the first active portion.Type: GrantFiled: September 22, 2019Date of Patent: January 18, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chao-Ching Cheng, Chun-Chieh Lu, Hung-Li Chiang, Tzu-Chiang Chen
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Patent number: 11189676Abstract: It is an object to provide a flexible light-emitting device with long lifetime in a simple way and to provide an inexpensive electronic device with long lifetime using the flexible light-emitting device. A flexible light-emitting device is provided, which includes a substrate having flexibility and a light-transmitting property with respect to visible light; a first adhesive layer over the substrate; an insulating film containing nitrogen and silicon over the first adhesive layer; a light-emitting element including a first electrode, a second electrode facing the first electrode, and an EL layer between the first electrode and the second electrode; a second adhesive layer over the second electrode; and a metal substrate over the second adhesive layer, wherein the thickness of the metal substrate is 10 ?m to 200 ?m inclusive. Further, an electronic device using the flexible light-emitting device is provided.Type: GrantFiled: April 1, 2019Date of Patent: November 30, 2021Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Kaoru Hatano, Satoshi Seo, Takaaki Nagata, Tatsuya Okano
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Patent number: 11128958Abstract: A method for manufacturing a semiconductor die, comprising the steps of: providing a MEMS device having a structural body, provided with a cavity, and a membrane structure suspended over the cavity; coupling the structural body to a filtering module via direct bonding or fusion bonding so that a first portion of the filtering module extends over the cavity and a second portion of the filtering module extends seamlessly as a prolongation of the structural body; and etching selective portions of the filtering module in an area corresponding to the first portion, to form filtering openings fluidically coupled to the cavity. The semiconductor die is, for example, a microphone.Type: GrantFiled: January 24, 2019Date of Patent: September 21, 2021Assignee: STMICROELECTRONICS S.R.L.Inventors: Giorgio Allegato, Federico Vercesi, Laura Maria Castoldi, Laura Oggioni, Matteo Perletti
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Patent number: 11101367Abstract: A method for forming a device structure provides for forming a fin of a semiconductor material. A first contact is formed on the fin. A second contact is formed on the fin and spaced along a length of the fin from the first contact. A self-aligned gate electrode is formed on the fin that is positioned along the length of the fin between the first contact and the second contact.Type: GrantFiled: October 31, 2019Date of Patent: August 24, 2021Assignee: International Business Machines CorporationInventors: Terence B. Hook, Myung-Hee Na, Balasubramanian Pranatharthiharan, Andreas Scholze
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Patent number: 10944008Abstract: A metal oxide semiconductor field effect transistor preferably fabricated with a silicon-on-insulator process has a first semiconductor region and a second semiconductor region in a spaced relationship thereto A body structure is defined by a channel segment between the first semiconductor region and the second semiconductor region, and a first extension segment structurally contiguous with the channel segment. A shallow trench isolation structure surrounds the first semiconductor region, the second semiconductor region, and the body structure, with a first extension interface being defined between the shallow trench isolation structure and the first extension segment of the body structure to reduce leakage current flowing from the second semiconductor region to the first semiconductor region through a parasitic path of the body structure.Type: GrantFiled: December 6, 2016Date of Patent: March 9, 2021Assignee: SKYWORKS SOLUTIONS, INC.Inventors: Oleksandr Gorbachov, Lisette L. Zhang, Lothar Musiol
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Patent number: 10910495Abstract: A method for manufacturing a semiconductor device includes forming a semiconductor layer on an insulating layer, epitaxially growing a first layer on the semiconductor layer, wherein the first layer has a first doping concentration, epitaxially growing a second layer on the semiconductor layer, wherein the second layer has a second doping concentration higher than the first doping concentration, forming a gate dielectric over an active region of the semiconductor layer, forming a gate electrode on the gate dielectric, and forming a plurality of source/drain contacts to the second layer, wherein the first and second layers comprise crystalline hydrogenated silicon (c-Si:H).Type: GrantFiled: September 3, 2019Date of Patent: February 2, 2021Assignee: International Business Machines CorporationInventors: Bahman Hekmatshoartabari, Ghavam G. Shahidi, Marinus P.J. Hopstaken
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Patent number: 10811444Abstract: The present application provides a method for fabricating a back channel etching oxide semiconductor TFT substrate, by depositing the first passivation layer on the source, the drain and the active layer, and treating the oxygen element containing plasma to a surface of the first passivation layer, infiltrating traces of oxygen element into the superficial layer of the channel region of the active layer through the first passivation layer, then using an oxygen element containing plasma to treat the surface of the first passivation layer, so that the traces of oxygen element infiltrates into the superficial layer of the channel region of the active layer via the first passivation layer, to supply the oxygen element to the superficial layer of the channel region, and ensure the oxygen element balance in the superficial layer, the first passivation layer acts as a barrier layer to ensure the stability of the TFT.Type: GrantFiled: December 14, 2017Date of Patent: October 20, 2020Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.Inventor: Chunsheng Jiang
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Patent number: 10811445Abstract: A semiconductor device includes a substrate. The semiconductor device further includes a first transistor. The first transistor includes a first semiconductor layer over the substrate, the first semiconductor layer including poly-silicon. The first transistor further includes a first gate electrode over the first semiconductor layer, the first gate electrode facing the first semiconductor layer. The semiconductor device further includes a second transistor. The second transistor includes a second semiconductor layer over the substrate, the second semiconductor layer including an oxide semiconductor. The second transistor further includes a second gate electrode over the second semiconductor layer, the second gate electrode facing the second semiconductor layer.Type: GrantFiled: December 4, 2017Date of Patent: October 20, 2020Assignee: JOLED INC.Inventor: Atsuhito Murai
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Patent number: 10714024Abstract: It is an object of the present invention to provide a display device in which problems such as an increase of power consumption and increase of a load of when light is emitted are reduced by using a method for realizing pseudo impulsive driving by inserting an dark image, and a driving method thereof. A display device which displays a gray scale by dividing one frame period into a plurality of subframe periods, where one frame period is divided into at least a first subframe period and a second subframe period; and when luminance in the first subframe period to display the maximum gray scale is Lmax1 and luminance in the second subframe period to display the maximum gray scale is Lmax2, (½)Lmax2<Lmax1<( 9/10)Lmax2 is satisfied in the one frame period, is provided.Type: GrantFiled: June 19, 2018Date of Patent: July 14, 2020Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yasunori Yoshida, Hajime Kimura
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Patent number: 10658516Abstract: Disclosed is a thin film transistor, an array substrate, a method for manufacturing the same, and a display device. The method includes: forming a source and drain on a base substrate and forming a semiconductor layer. Between the step of forming the source and drain and the step of forming the semiconductor layer, the method further includes: forming a diffusion barrier layer. Metal atoms diffused from the source and drain and passing through the diffusion barrier layer react with a part of the semiconductor layer near the source and drain, and a metal transition layer containing metal silicide is formed.Type: GrantFiled: May 31, 2016Date of Patent: May 19, 2020Assignees: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Co., Ltd.Inventors: Junhao Han, Bingkun Yin, Jun Ma, Min Zhang
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Patent number: 10657880Abstract: Disclosed herein is a display including: a pixel array part configured to include pixels that are arranged in a matrix and each have an electro-optical element, a write transistor for writing a video signal, a drive transistor for driving the electro-optical element based on the video signal written by the write transistor, and a holding capacitor connected between gate and source of the drive transistor, wherein the holding capacitor includes a first electrode, a second electrode disposed to face one surface of the first electrode for forming a first capacitor, and a third electrode disposed to face the other surface of the first electrode for forming a second capacitor, and the first capacitor and the second capacitor are connected in parallel to each other electrically.Type: GrantFiled: March 7, 2016Date of Patent: May 19, 2020Assignee: Sony CorporationInventors: Hiroshi Sagawa, Katsuhide Uchino, Tetsuro Yamamoto
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Patent number: 10615282Abstract: The present disclosure provides a method for manufacturing a thin-film transistor and a thin-film transistor manufactured thereby, an array substrate and a display apparatus. The method comprises: forming a first layer; forming at least one etch stopper over the first layer; forming a second layer over the first layer and the at least one etch stopper; forming at least one contact via in the second layer, such that a bottom opening of each contact via contacts with a top surface of one etch stopper; and forming at least one electrode in the at least one contact via, such that each electrode extends in one contact via respectively, and is in contact with, and electrically coupled with, the one etch stopper. The at least one etch stopper comprises a composition.Type: GrantFiled: November 25, 2016Date of Patent: April 7, 2020Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Huijuan Zhang, Chienhung Liu
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Patent number: 10573698Abstract: A transistor including a polysilicon layer on a base substrate and including a channel region, a first ion doping region, a second ion doping region, the channel region being between the first and second ion doping regions, an average size of the grains in the channel region being greater than that of the grains in the first and second ion doping regions, a first gate electrode insulated from and overlapping the channel region, a second gate electrode insulated from the first gate electrode and overlapping the channel region, an inter-insulating layer on the second gate electrode, a source electrode on the inter-insulating layer and connected to the first ion doping region, and a drain electrode on the inter-insulating layer and connected to the second ion doping region.Type: GrantFiled: October 21, 2015Date of Patent: February 25, 2020Assignee: Samsung Display Co., Ltd.Inventors: Kyoungwon Lee, Yoonho Khang, Myounggeun Cha, Youngki Shin, Woonghee Jeong
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Patent number: 10516058Abstract: The present invention discloses a preparation method of a low temperature polysilicon thin film transistor including: successively forming a polysilicon active layer and a gate insulating layer covering the active layer on a base substrate; implanting nitrogen ions on a surface of the polysilicon active layer facing the gate insulating layer by an ion implantation process to form an ion implantation layer; and recrystallizing the ion implantation layer by a high temperature annealing process to form a silicon nitride spacing layer between the polysilicon active layer and the gate insulating layer.Type: GrantFiled: August 21, 2017Date of Patent: December 24, 2019Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Donghui Xiao
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Patent number: 10490660Abstract: A thin film transistor (TFT), a method of manufacturing the TFT, and a display apparatus including the TFT, the TFT including a substrate; a semiconductor layer on the substrate, the semiconductor layer including a channel region, a lightly doped drain (LDD) region, a source region, and a drain region; a gate insulating layer covering the semiconductor layer; a gate electrode overlapping with the channel region such that the gate insulating layer is interposed between the gate electrode and the channel region; and an organic side wall layer on a side surface of the gate electrode, wherein the organic side wall layer includes a silsesquioxane resin.Type: GrantFiled: September 4, 2018Date of Patent: November 26, 2019Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Gwangmin Cha, Jungsoo Lee, Junhong Park, Hyuneok Shin
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Patent number: 10276428Abstract: A method of fabricating a semiconductor package includes providing a substrate having at least one contact and forming a redistribution layer on the substrate. The formation of the redistribution layer includes forming a dielectric material layer over the substrate and performing a double exposure process to the dielectric material layer. A development process is then performed and a dual damascene opening is formed in the dielectric material layer. A seed metallic layer is formed over the dual damascene opening and over the dielectric material layer. A metal layer is formed over the seed metallic layer. A redistribution pattern is formed in the first dual damascene opening and is electrically connected with the at least one contact.Type: GrantFiled: August 28, 2017Date of Patent: April 30, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Zi-Jheng Liu, Chen-Cheng Kuo, Hung-Jui Kuo
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Patent number: 10263059Abstract: A light emitting device is provided which can prevent a change in gate voltage due to leakage or other causes and at the same time can prevent the aperture ratio from lowering. A capacitor storage is formed from a connection wiring line, an insulating film, and a capacitance wiring line. The connection wiring line is formed over a gate electrode and an active layer of a TFT of a pixel, and is connected to the active layer. The insulating film is formed on the connection wiring line. The capacitance wiring line is formed on the insulating film This structure enables the capacitor storage to overlap the TFT, thereby increasing the capacity of the capacitor storage while keeping the aperture ratio from lowering. Accordingly, a change in gate voltage due to leakage or other causes can be avoided to prevent a change in luminance of an OLED and flickering of screen in analog driving.Type: GrantFiled: February 28, 2018Date of Patent: April 16, 2019Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Tatsuya Arao, Munehiro Azami
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Patent number: 10249734Abstract: A poly-silicon thin film transistor and its manufacturing method, an array substrate and its manufacturing method, and a display device are provided. The method for manufacturing a poly-silicon thin film transistor includes forming a poly-silicon layer on a base substrate so that the poly-silicon layer includes a first poly-silicon area, second poly-silicon areas located at the both sides of the first poly-silicon area and third poly-silicon areas located at a side of the second poly-silicon areas away from the first poly-silicon area; forming a barrier layer between a gate electrode and a gate insulation layer by a dry etching method so that the barrier layer corresponds to the first poly-silicon area; and with the barrier layer as a mask doping the second poly-silicon areas to form lightly doped areas. By this method, the lightly doped areas may have the same length, and thus the problem of excessive leakage current is avoided.Type: GrantFiled: August 21, 2014Date of Patent: April 2, 2019Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Xiaohui Jiang, Jiaxiang Zhang
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Patent number: 10181481Abstract: A display device includes a driver circuit including a logic circuit including a first transistor which is a depletion type transistor and a second transistor which is an enhancement type transistor; a signal line which is electrically connected to the driver circuit; a pixel portion including a pixel whose display state is controlled by input of a signal including image data from the driver circuit through the signal line; a reference voltage line to which reference voltage is applied; and a third transistor which is a depletion type transistor and controls electrical connection between the signal line and the reference voltage line. The first to the third transistors each include an oxide semiconductor layer including a channel formation region.Type: GrantFiled: April 1, 2016Date of Patent: January 15, 2019Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Jun Koyama, Shunpei Yamazaki
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Patent number: 10139667Abstract: Provided are a color filter substrate provided with an inorganic cover layer and a display panel including the same. The color filter (CF) substrate includes a base substrate; a black matrix and a pixel resin layer both formed on the base substrate; a planarization layer formed on the black matrix and the pixel resin layer; and an inorganic cover layer formed on the planarization layer.Type: GrantFiled: April 14, 2016Date of Patent: November 27, 2018Assignees: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Co., Ltd.Inventors: Haibin Yin, Sang Man Yuk, Bin Li, Wenhao Tang, Tao Zhu, Qun Fang, Huifang Yuan, Anxin Dong, Jian Chen, Guoqiang Zhong, Xinxin Fu
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Patent number: 10120256Abstract: Preparation method for a thin film transistor, preparation method for an array substrate, an array substrate, and a display apparatus are provided. The preparation method for a thin film transistor includes: forming, on a pattern of a semiconductor layer, a first photoresist pattern including a photoresist with two different thicknesses, and performing a heavily-doped ion implantation process on the pattern of the semiconductor layer by using the first photoresist pattern as a barrier mask; ashing the first photoresist pattern to remove the photoresist with a second thickness and to thin the photoresist with a first thickness, so as to form a second photoresist pattern; and performing a lightly-doped ion implantation process on the pattern of the semiconductor layer by using the second photoresist pattern as a barrier mask.Type: GrantFiled: December 31, 2015Date of Patent: November 6, 2018Assignees: BOE TECHNOLOGY GROUP CO., LTD., ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.Inventors: Lulu Ye, Huafeng Liu, Jingping Lv, Lei Yang, Meng Yang, Kai Zhang, Chao Wang, Chaochao Sun, Shengwei Zhao
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Patent number: 10114259Abstract: The disclosure discloses an array substrate, a liquid crystal display panel and a manufacturing method, the array substrate includes designing a data line layer and a light shield layer on a same layer, moreover, a source electrode layer, a drain electrode layer, an oxide semiconductor layer and a common electrode layer are designed on a same layer, the source electrode layer, the drain electrode layer and the common electrode layer are formed by doping the oxide semiconductor material, the source electrode layer, the drain electrode layer and the common electrode layer can be conductive by increasing conductivity thereof. By the method above, the disclosure can reduce the amount of masks in processes and costs in production significantly.Type: GrantFiled: November 4, 2016Date of Patent: October 30, 2018Assignee: Wuhan China Star Optoelectronics Technology Co., LtdInventor: Yingtao Xie
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Patent number: 10020328Abstract: The present disclosure provides a test element unit, an array substrate, a display panel, a display apparatus and a corresponding manufacturing method. The test element unit includes: a plurality of layers of test patterns, each layer of test pattern including at least one test block and at least one capacitor being formed between test blocks located in different layers, and, two electrodes of each of capacitors being two test blocks located in different layers, respectively, so that it can determined whether or not corresponding components and devices formed in the display region meet requirements by detecting the test patterns formed in the test region.Type: GrantFiled: October 19, 2016Date of Patent: July 10, 2018Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yu-Cheng Chan, Shuai Zhang, Qi Liu
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Patent number: 10013923Abstract: It is an object of the present invention to provide a display device in which problems such as an increase of power consumption and increase of a load of when light is emitted are reduced by using a method for realizing pseudo impulsive driving by inserting an dark image, and a driving method thereof. A display device which displays a gray scale by dividing one frame period into a plurality of subframe periods, where one frame period is divided into at least a first subframe period and a second subframe period; and when luminance in the first subframe period to display the maximum gray scale is Lmax1 and luminance in the second subframe period to display the maximum gray scale is Lmax2, (½) Lmax2<Lmax1<( 9/10) Lmax2 is satisfied in the one frame period, is provided.Type: GrantFiled: November 12, 2015Date of Patent: July 3, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yasunori Yoshida, Hajime Kimura
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Patent number: 9916793Abstract: To reduce the effect of external light and to improve the accuracy of detecting the location of a touch. In an image-capture period, light emission from a self-light-emitting element is controlled, and imaging data at the time of displaying white on a display screen and imaging data at the time of displaying black on the display screen are output from each sensor pixel. The location of a sensor pixel where a difference between the two pieces of imaging data output from the same sensor pixel is the greatest is detected. Thus, the location of a touch of the object on the display screen is detected with high accuracy. By utilizing a difference between imaging data at the time of reverse display, the effect of external light can be reduced.Type: GrantFiled: May 16, 2013Date of Patent: March 13, 2018Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Munehiro Kozuma, Takayuki Ikeda, Yoshiyuki Kurokawa, Hikaru Tamura, Takeshi Aoki
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Patent number: 9893165Abstract: Embodiments of the present invention disclose a manufacturing method for an array substrate and corresponding manufacturing device, which belong to the technical field of metal oxide semiconductor.Type: GrantFiled: August 24, 2015Date of Patent: February 13, 2018Assignee: Boe Technology Group Co., Ltd.Inventors: Jianbang Huang, Yucheng Chan, Chienhung Liu
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Patent number: 9893286Abstract: The present invention provides an organic single crystal field effect circuit and method for preparing the same.Type: GrantFiled: June 26, 2015Date of Patent: February 13, 2018Assignee: Northeast Normal UniversityInventors: Qingxin Tang, Yichun Liu, Yanhong Tong, Xiaoli Zhao
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Patent number: 9880431Abstract: According to one embodiment, a display device includes a stacked conductive layer. The stacked conductive layer includes a first conductive layer formed of material containing aluminum, and a second conductive layer provided on the first conductive layer, formed of material different from material of which the first conductive layer is formed, and having a higher visible-light absorptivity than that of the first conductive layer. The first conductive layer includes a side wall formed of an oxide film.Type: GrantFiled: December 15, 2016Date of Patent: January 30, 2018Assignee: Japan Display Inc.Inventors: Daisuke Sonoda, Tatsuya Ide, Rintaro Makino
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Patent number: 9876025Abstract: An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. Memory openings are formed through the alternating stack to the substrate. After formation of memory film layers, a sacrificial cover material layer can be employed to protect the tunneling dielectric layer during formation of a bottom opening in the memory film layers. An amorphous semiconductor material layer can be deposited and optionally annealed in an ambient including argon and/or deuterium to form a semiconductor channel layer having a thickness less than 5 nm and surface roughness less than 10% of the thickness. Alternately or additionally, at least one interfacial layer can be employed on either side of the amorphous semiconductor material layer to reduce surface roughness of the semiconductor channel. The ultrathin channel can have enhanced mobility due to quantum confinement effects.Type: GrantFiled: October 19, 2015Date of Patent: January 23, 2018Assignee: SANDISK TECHNOLOGIES LLCInventors: Peter Rabkin, Jayavel Pachamuthu, Masaaki Higashitani, Johann Alsmeier
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Patent number: 9842935Abstract: The present disclosure discloses a LTPS TFT and the manufacturing method thereof. The method includes: forming a semiconductor layer and a LTPS layer on the same surface on a base layer; forming an oxide layer is formed on one side of the semiconductor layer facing away the base layer, and forming the oxide layer on one side of the LTPS layer facing away the base layer; forming a first photoresist layer of a first predetermined thickness on the oxide layer; arranging a corresponding first cobalt layer on each of the photoresist layers, a vertical projection of the first cobalt layer overlaps with the vertical projection of the corresponding first photoresist layer; doping high-concentration doping ions into a first specific area of the semiconductor layer. With such configuration, the number of the masking process is decreased and the manufacturing time is reduced.Type: GrantFiled: August 28, 2015Date of Patent: December 12, 2017Assignees: Shenzhen China Star Optoelectronics Technology Co., Ltd, WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTDInventor: Changming Lu
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Patent number: 9837551Abstract: Provided is a semiconductor device that can be miniaturized in a simple process and that can prevent deterioration of electrical characteristics due to miniaturization. The semiconductor device includes an oxide semiconductor layer, a first conductor in contact with the oxide semiconductor layer, and an insulator in contact with the first conductor. Further, an opening portion is provided in the oxide semiconductor layer, the first conductor, and the insulator. In the opening portion, side surfaces of the oxide semiconductor layer, the first conductor, and the insulator are aligned, and the oxide semiconductor layer and the first conductor are electrically connected to a second conductor by side contact.Type: GrantFiled: April 22, 2014Date of Patent: December 5, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Suguru Hondo, Kazuya Hanaoka, Shinya Sasagawa, Naoto Kusumoto
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Patent number: 9832559Abstract: An apparatus includes a first interface for connecting to a personal computer, a second interface for connecting to a communications device, a third interface for connecting to a headset, a fourth interface for connecting to a speaker, and a processor in control of each of the interfaces. The processor is configured to route audio associated with a communications session on one of the personal computer or the communications device to the speaker, and in response to a user putting on the headset, re-route the audio to the headset.Type: GrantFiled: June 28, 2016Date of Patent: November 28, 2017Assignee: Bose CorporationInventors: Joseph M. Geiger, Muhammad Masood, Daniel M. Gauger, Jr.
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Patent number: 9812577Abstract: A semiconductor structure and a method of fabricating the semiconductor structure are provided. The semiconductor structure includes a substrate; a metal gate structure on the substrate; and a spacer next to the metal gate structure having a skirting part extending into the metal gate structure and contacting the substrate. The metal gate structure includes a high-k dielectric layer and a metal gate electrode on the high-k dielectric layer.Type: GrantFiled: September 5, 2014Date of Patent: November 7, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Che-Cheng Chang, Tung-Wen Cheng, Chang-Yin Chen, Mu-Tsang Lin
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Patent number: 9773892Abstract: A representative fin field effect transistor (FinFET) includes a substrate having a major surface; a fin structure protruding from the major surface having a lower portion comprising a first semiconductor material having a first lattice constant; an upper portion comprising the first semiconductor material. A bottom portion of the upper portion comprises a dopant with a first peak concentration. A middle portion is disposed between the lower portion and upper portion, where the middle portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant. An isolation structure surrounds the fin structure, where a portion of the isolation structure adjacent to the bottom portion of the upper portion comprises the dopant with a second peak concentration equal to or greater than the first peak concentration.Type: GrantFiled: February 5, 2016Date of Patent: September 26, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Cheng Ching, Guan-Lin Chen, Chao-Hsiung Wang, Chi-Wen Liu
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Patent number: 9768309Abstract: A thin film transistor according to an exemplary embodiment of the present invention includes an oxide semiconductor. A source electrode and a drain electrode face each other. The source electrode and the drain electrode are positioned at two opposite sides, respectively, of the oxide semiconductor. A low conductive region is positioned between the source electrode or the drain electrode and the oxide semiconductor. An insulating layer is positioned on the oxide semiconductor and the low conductive region. A gate electrode is positioned on the insulating layer. The insulating layer covers the oxide semiconductor and the low conductive region. A carrier concentration of the low conductive region is lower than a carrier concentration of the source electrode or the drain electrode.Type: GrantFiled: June 28, 2016Date of Patent: September 19, 2017Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Yong Su Lee, Yoon Ho Khang, Dong Jo Kim, Hyun Jae Na, Sang Ho Park, Se Hwan Yu, Chong Sup Chang, Dae Ho Kim, Jae Neung Kim, Myoung Geun Cha, Sang Gab Kim, Yu-Gwang Jeong
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Patent number: 9768244Abstract: A semiconductor device includes a first electrode layer and a second electrode layer. The first electrode layer extends in a first direction. The second electrode layer extends in the first direction for a different length from the first electrode layer, and is symmetric with respect to a center line of the first electrode layer in a second direction. The second electrode layer defines a capacitor with the first electrode layer.Type: GrantFiled: March 17, 2016Date of Patent: September 19, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventor: Ming Chyi Liu
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Patent number: 9768203Abstract: The present invention provides a TFT arrangement structure, comprising a first thin film transistor (T1) and a second thin film transistor (T2) controlled by the same control signal line; the first active layer (SC1) of the first thin film transistor (T1) and the second active layer (SC2) of the second thin film transistor (T2) are at different layers, and positioned to stack up in space, and the first source (S1) and the first drain (D1) of the first thin film transistor (T1) contact the first active layer (SC1), and the second source (S2) and the second drain (D2) of the second thin film transistor (T2) contact the second active layer (SC2); the bottom gate layer (Bottom Gate) of the first thin film transistor (T1) is positioned under the first active layer (SC1), and the top gate layer (Top Gate) of the second thin film transistor (T2) is above the second active layer (SC2).Type: GrantFiled: May 22, 2015Date of Patent: September 19, 2017Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Baixiang Han, Longqiang Shi
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Patent number: 9747408Abstract: The present disclosure provides an integrated circuit (IC) method in accordance with some embodiments. The method includes receiving an IC design layout; and performing an inverse beam technology (IBT) process to the IC design layout, thereby generating a final mask pattern, wherein the IBT process uses a single IBT model to simulate both a mask making process and a wafer making process.Type: GrantFiled: August 21, 2015Date of Patent: August 29, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsu-Ting Huang, Ru-Gun Liu, Shuo-Yen Chou, Tsai-Sheng Gau
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Patent number: 9704976Abstract: An object is to provide a thin film transistor using an oxide semiconductor layer, in which contact resistance between the oxide semiconductor layer and source and drain electrode layers is reduced and electric characteristics are stabilized. The thin film transistor is formed in such a manner that a buffer layer including a high-resistance region and low-resistance regions is formed over an oxide semiconductor layer, and the oxide semiconductor layer and source and drain electrode layers are in contact with each other with the low-resistance region of the buffer layer interposed therebetween.Type: GrantFiled: October 19, 2015Date of Patent: July 11, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yuji Asano, Junichi Koezuka
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Patent number: 9680026Abstract: A semiconductor device that can operate at high speed or having high strength against stress is provided. One embodiment of the present invention is a semiconductor device including a semiconductor film including a channel formation region and a pair of impurity regions between which the channel formation region is positioned; a gate electrode overlapping side and top portions of the channel formation region with an insulating film positioned between the gate electrode and the side and top portions; and a source electrode and a drain electrode in contact with side and top portions of the pair of impurity regions.Type: GrantFiled: September 5, 2014Date of Patent: June 13, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 9646999Abstract: The present disclosure proposes a TFT. The source and the drain of the TFT are disposed on the same side as the gate. The gate includes a first buffer layer, a first copper layer, a second copper layer and a second buffer layer that are stacked from bottom to top, and the second buffer layer is disposed on the side that is close to the source and drain. The source and drain include a first buffer layer, a first copper layer, a second copper layer and a second buffer layer that are stacked, and the first buffer layer is disposed on the side that is close to the gate. The first copper layer is deposited by a first power, the second copper layer is deposited by a second power lower than the first power. Through the above method, it is prevents photoresist from shedding when etching.Type: GrantFiled: December 18, 2015Date of Patent: May 9, 2017Assignee: Shenzhen China Star Optoelectronics Technology Co., LtdInventors: Zhichao Zhou, Yue Wu
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Patent number: 9633844Abstract: Embodiments of the present invention provide a method for forming a low temperature polysilicon thin film. The method for forming the low temperature polysilicon thin film can include: depositing a buffer layer and an amorphous silicon layer on a substrate in this order; heating the amorphous silicon layer; performing an excimer laser annealing process on the amorphous silicon layer to form a polysilicon layer; oxidizing partially the polysilicon layer so as to form an oxidation portion at an upper portion of the polysilicon layer; and removing the oxidation portion of the polysilicon layer to form a polysilicon thin film.Type: GrantFiled: October 22, 2012Date of Patent: April 25, 2017Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Xueyan Tian, Chunping Long, Jiangfeng Yao
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Patent number: 9627543Abstract: The present disclosure provides a TFT, a method for manufacturing the same, an array substrate and a display device, so as to effectively reduce a TFT edge leakage current IOFF (edge). The TFT includes an active layer and a silicon oxide layer arranged at a lateral side of the active layer.Type: GrantFiled: October 30, 2014Date of Patent: April 18, 2017Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Zhenyu Xie
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Patent number: 9620579Abstract: An organic light-emitting display apparatus includes a substrate; an active layer; a gate electrode, source and drain electrodes; a first insulating layer disposed between the active layer and the gate electrode; a second insulating layer disposed between the gate electrode and the source and drain electrodes; a third insulating layer disposed over the source and drain electrodes; conductive layers disposed over the third insulating layer and electrically connected to the source and drain electrodes through the third insulating layer; a first line disposed over the second insulating layer and formed of the same material as the source and drain electrodes; a second line overlapping the first line, disposed over the third insulating layer, and formed of the same material as the conductive layer; a fourth insulating layer disposed over the third insulating layer to cover the conductive layer; and an organic light-emitting diode disposed over the fourth insulating layer.Type: GrantFiled: August 25, 2015Date of Patent: April 11, 2017Assignee: Samsung Display Co., Ltd.Inventors: Nayoung Kim, Jungbae Kim
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Patent number: 9614115Abstract: Provided is a semiconductor device that can suppress a leakage current more than has been achieved before. A semiconductor device 22 includes a first carrier holding layer 48, which is arranged on a lower electrode 47, is in contact with a lower electrode 47 via a first interface 49, and includes majority carriers of one type, and a second carrier holding layer 57, which is arranged on the first carrier holding layer 48, defines a second interface 58 constituting a conduction path to the first carrier holding layer 48, and includes majority carriers of the other type. The first interface 49 has its outline within the outline of the first carrier holding layer 48 when seen in a plan view in a direction that is orthogonal to a surface of the substrate, and the second interface 58 has its outline within the outline of the first carrier holding layer 48 when seen in the plan view.Type: GrantFiled: October 1, 2014Date of Patent: April 4, 2017Assignee: Seiko Epson CorporationInventor: Manabu Kudo