Lateral Single Gate Single Channel Transistor With Noninverted Structure, I.e., Channel Layer Is Formed Before Gate (epo) Patents (Class 257/E21.413)
  • Patent number: 7989808
    Abstract: A display device according to the present invention includes: a planarization layer for insulating between a gate electrode etc. and a data wiring, a drain electrode, or the like of the transistor; and a barrier layer that is formed on an upper surface or lower surface of the planarization layer and at the same time, adapted to suppress diffusion of moisture or degassing components from the planarization layer. The display device adopts a device structure effective in reducing the plasma damage on the planarization layer by devising a positional relationship between the planarization layer and the barrier layer. Also, in combination with a novel structure as a structure for a pixel electrode, effects such as an increase in luminance can be provided as well.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: August 2, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Murakami, Mitsuaki Osame
  • Patent number: 7985636
    Abstract: An exemplary method for fabricating an LTPS-TFT substrate is as follows. In step S1, a p-Si pattern including a source electrode contact region and a drain electrode contact region of a first type TFT, a source electrode contact region and a drain electrode contact region of a second type TFT is formed. In step S2, the source electrode contact region and the drain electrode contact region of the first type TFT are heavily doped with a first dopant. In step S3, gate electrodes of the first and the second type TFT are formed. In step S4, the source electrode contact regions and drain electrode contact regions of the first and second type TFTs are heavily doped with a second dopant. The first dopant and the second dopant are compensative, and the number ratio of the first dopant to the second dopant is approximately 2 to 1.
    Type: Grant
    Filed: August 21, 2009
    Date of Patent: July 26, 2011
    Assignee: Chimel Innolux Corporation
    Inventors: Guan-Hua Yeh, Tsai-Lai Cheng, Hong-Gi Wu
  • Patent number: 7985969
    Abstract: A field-effect transistor including an electrically conductive substrate; a first insulating film coating the electrically conductive substrate; a gate electrode disposed on the electrically conductive substrate with the first insulating film interposed therebetween; a source electrode; a drain electrode opposing the source electrode with the channel therebetween; a second insulating film covering the gate electrode; and a semiconductor layer having a width larger than a width of the gate electrode in the channel width direction and being partly provided on the gate electrode with the second insulating film interposed therebetween so that the gate electrode, the second insulating film, and the semiconductor layer are laminated in the channel.
    Type: Grant
    Filed: February 4, 2009
    Date of Patent: July 26, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideki Yoshinaga, Hideo Mori, Nobutaka Ukigaya, Nozomu Izumi
  • Patent number: 7977253
    Abstract: A method for forming a semiconductor layer having a fine shape is provided. A method for manufacturing a semiconductor device with few variations is provided. In addition, a method for manufacturing a semiconductor device with a high yield is provided where the cost can be reduced with few materials. According to the invention, a semiconductor film is partially irradiated with a laser beam to form an insulating layer, and the semiconductor film is etched using the insulating film as a mask so as to form a semiconductor layer having a desired shape. Then, the semiconductor layer is used to manufacture a semiconductor device. According to the invention, a semiconductor layer having a fine shape can be formed in a predetermined position without using a known photolithography step using a resist.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: July 12, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Osamu Nakamura, Hiroko Yamamoto, Junko Sato
  • Publication number: 20110151601
    Abstract: A crystallization method, a method of manufacturing a thin-film transistor, and a method of manufacturing a display device are provided. The crystallization method comprises: forming a backup amorphous silicon layer on a substrate, forming nickel particles on the backup amorphous silicon layer, converting the backup amorphous silicon layer into an amorphous silicon layer by thermally processing the backup amorphous silicon layer so as to diffuse the nickel particles throughout said backup amorphous silicon layer; and irradiating the amorphous silicon layer with energy from a laser.
    Type: Application
    Filed: December 16, 2010
    Publication date: June 23, 2011
    Applicant: SAMSUNG MOBILE DISPLAY CO., LTD.
    Inventors: Kwang-Hae Kim, Moo-Jin Kim
  • Patent number: 7964873
    Abstract: A thin film transistor array panel is provided, which includes: a substrate; a first polysilicon member that is formed on the substrate and includes an intrinsic region, at least one first extrinsic region, and at least one second extrinsic region disposed between the intrinsic region and the at least one first extrinsic region and having an impurity concentration lower than the at least one first extrinsic region; a first insulator formed on the first polysilicon member and having an edge substantially coinciding with a boundary between the at least one first extrinsic region and the at least one second extrinsic region; and a first electrode formed on the first• insulator and having an edge substantially coinciding with a boundary between the intrinsic region and the at least one second extrinsic region.
    Type: Grant
    Filed: November 12, 2004
    Date of Patent: June 21, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chun-Gi You
  • Patent number: 7955890
    Abstract: Embodiments of the present invention relate to methods for depositing an amorphous film that may be suitable for using in a NIP photodiode in display applications. In one embodiment, the method includes providing a substrate into a deposition chamber, supplying a gas mixture having a hydrogen gas to silane gas ratio by volume greater than 4 into the deposition chamber, maintaining a pressure of the gas mixture at greater than about 1 Torr in the deposition chamber, and forming an amorphous silicon film on the substrate in the presence of the gas mixture, wherein the amorphous silicon film is configured to be an intrinsic-type layer in a photodiode sensor.
    Type: Grant
    Filed: June 17, 2009
    Date of Patent: June 7, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Soo Young Choi, Jriyan Jerry Chen, Tae Kyung Won, Dong-Kil Yim
  • Patent number: 7956425
    Abstract: Thin film transistors (TFT) and methods for making same. The TFTs generally comprise: (a) a semiconductor layer comprising source and drain terminals and a channel region therebetween; (b) a gate electrode comprising a gate and a gate dielectric layer between the gate and the channel region; (c) a first dielectric layer adjacent to the gate electrode and in contact with the source and drain terminals, the first dielectric layer comprising a material which comprises a dopant therein; and (d) an electrically functional source/drain extensions in the channel region, adjacent to the source and drain terminals, comprising a material which comprises the same dopant as the first dielectric layer.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: June 7, 2011
    Assignee: Kovio, Inc.
    Inventor: James Montague Cleeves
  • Publication number: 20110121308
    Abstract: Provided are a thin film transistor including a polycrystalline silicon layer having improved crystallinity by applying Joule heat to form stress gradient in a glass substrate that is disposed under an amorphous silicon layer from a surface to a predetermined depth of the glass substrate, thereby crystallizing the amorphous silicon layer into a polycrystalline silicon layer, and a method of fabricating the same. The film transistor includes a glass substrate having stress gradient from an upper surface to a predetermined depth, a semiconductor layer disposed on the glass substrate, and formed of a polycrystalline silicon layer crystallized by Joule heating, a gate insulating layer disposed on the semiconductor layer, a gate electrode disposed on the gate insulating layer, an interlayer insulating layer disposed on the gate electrode, and source and drain electrodes disposed on the interlayer insulating layer, and electrically connected to source and drain regions of the semiconductor layer.
    Type: Application
    Filed: July 8, 2009
    Publication date: May 26, 2011
    Applicant: ENSILTECH CORPORATION
    Inventors: Jae-Sang Ro, Won-Eui Hong
  • Publication number: 20110121305
    Abstract: A thin film transistor device and method of making the same are provided. The thin film transistor device includes a crystalline semiconductor layer and a patterned heavily doped semiconductor layer. The patterned heavily doped semiconductor layer includes a first heavily doped semiconductor layer and a second heavily doped semiconductor layer. The first heavily doped semiconductor layer covers a first side surface and a portion of a top surface of the crystalline semiconductor layer; the second heavily doped semiconductor layer covers a second side surface and a portion of the top surface of the crystalline semiconductor layer.
    Type: Application
    Filed: January 26, 2010
    Publication date: May 26, 2011
    Inventor: Cheng-Chieh Tseng
  • Publication number: 20110114963
    Abstract: A thin film transistor includes a substrate, a buffer layer on the substrate, a semiconductor layer including source/drain regions and a channel region on the buffer layer, a gate insulating layer corresponding to the channel region, a gate electrode corresponding to the channel region, and source/drain electrodes electrically connected to the semiconductor layer. A polysilicon layer of the channel region may include only a low angle grain boundary, and a high angle grain boundary may be disposed in a region of the semiconductor layer that is apart from the channel region.
    Type: Application
    Filed: August 27, 2010
    Publication date: May 19, 2011
    Inventors: Yong-Duck Son, Ki-Yong Lee, Joon-Hoo Choi, Min-Jae Jeong, Seung-Kyu Park, Kil-Won Lee, Jae-Wan Jung, Dong-Hyun Lee, Byung-Soo So, Hyun-Woo Koo, Ivan Maidanchuk, Jong-Won Hong, Heung-Yeol Na, Seok-Rak Chang
  • Patent number: 7943519
    Abstract: An etchant, a method for fabricating a multi-layered interconnection line using the etchant, and a method for fabricating a thin film transistor (TFT) substrate using the etchant. The etchant for the multi-layered line comprised of molybdenum/copper/molybdenum nitride illustratively includes 10-20 wt % hydrogen peroxide, 1-5 wt % organic acid, a 0.1-1 wt % triazole-based compound, a 0.01-0.5 wt % fluoride compound, and deionized water as the remainder.
    Type: Grant
    Filed: June 22, 2006
    Date of Patent: May 17, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hong-sick Park, Shi-yul Kim, Jong-hyun Choung, Won-suk Shin
  • Patent number: 7939827
    Abstract: To realize a semiconductor device including a capacitor element capable of obtaining a sufficient capacitor without reducing an opening ratio, in which a pixel electrode is flattened in order to control a defect in orientation of liquid crystal. A semiconductor device of the present invention includes a light-shielding film formed on the thin film transistor, a capacitor insulating film formed on the light-shielding film, a conductive layer formed on the capacitor insulating film, and a pixel electrode that is formed so as to be electrically connected to the conductive layer, in which a storage capacitor element comprises the light-shielding film, the capacitor insulating film, and the conductive layer, whereby an area of a region serving as the capacitor element can be increased.
    Type: Grant
    Filed: December 15, 2008
    Date of Patent: May 10, 2011
    Assignee: Semiconductor Energy laboratory Co., Ltd.
    Inventor: Tatsuya Arao
  • Patent number: 7939385
    Abstract: Application form of and demand for an IC chip formed with a silicon wafer are expected to increase, and further reduction in cost is required. An object of the invention is to provide a structure of an IC chip and a process capable of producing at a lower cost. A feature of the invention is to use a metal film and a reactant having the metal film as a separation layer. An etching rate of the metal film or the reactant having metal is high, and a physical means in addition to a chemical means of etching the metal film or the reactant having metal can be used in the invention. Thus, the IDF chip can be manufactured more simply and easily in a short time.
    Type: Grant
    Filed: October 21, 2008
    Date of Patent: May 10, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yoshitaka Dozen, Tomoko Tamura, Takuya Tsurume, Koji Dairiki
  • Patent number: 7935581
    Abstract: A method of fabricating a TFT array substrate that prevents mobile ions from moving from a photoresist to channels of the TFT by the gate electrode of the TFT by performing photolithography processes for ion injection after forming gate electrode of TFT and, in addition, a method of fabricating a TFT array substrate that omits a photolithography process for forming a lower electrode of a storage capacitor by forming the lower electrode of the storage capacitor by a channel doping process for a PMOS TFT.
    Type: Grant
    Filed: August 9, 2007
    Date of Patent: May 3, 2011
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventor: Eui-Hoon Hwang
  • Patent number: 7935584
    Abstract: There is provided a method for manufacturing a crystalline semiconductor film. An insulating film is formed over a substrate; an amorphous semiconductor film is formed over the insulating film; a cap film is formed over the amorphous semiconductor film; the amorphous semiconductor film is scanned and irradiated with a continuous wave laser beam or a laser beam with a repetition rate of greater than or equal to 10 MHz, through the cap film; and the amorphous semiconductor film is melted and crystallized At this time, an energy distribution in a length direction and a width direction in a laser beam spot is a Gaussian distribution, and the amorphous semiconductor film is scanned with the laser beam so as to be irradiated with the laser beam for a period of greater than or equal to 5 microseconds and less than or equal to 100 microseconds per region.
    Type: Grant
    Filed: August 28, 2007
    Date of Patent: May 3, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tomoaki Moriwaka, Koichiro Tanaka
  • Patent number: 7928013
    Abstract: A rework method of a gate insulating layer of a thin film transistor includes the following steps. First, a substrate including a silicon nitride layer, which serves as a gate insulating layer, disposed thereon. Subsequently, a first film removal process is performed to remove the silicon nitride layer. The first film removal process includes an inductively coupled plasma (ICP) etching process. The ICP etching process is carried out by introducing gases including sulfur hexafluoride and oxygen. The ICP etching process has an etching selectivity ratio of the silicon nitride layer to the substrate, which is substantially between 18 and 30.
    Type: Grant
    Filed: December 1, 2009
    Date of Patent: April 19, 2011
    Assignee: AU Optronics Corp.
    Inventors: Chia-Hsu Chang, Pei-Yu Chen
  • Patent number: 7927929
    Abstract: A method of fabricating a thin film transistor (TFT) includes first providing a strip-shaped silicon island which is a thin film region with a predetermined long side and short side. Next, the strip-shaped silicon island is subject to an ion implantation to form a first ion doping region and a second ion doping region. The first and second ion doping regions, respectively used as the source and the drain of the TFT, are located at two sides along the long side of the island and substantially perpendicular to the gate. A gate is formed over the strip-shaped silicon island and the first and second ion doping regions, wherein the gate is substantially parallel to the direction of the short side.
    Type: Grant
    Filed: February 16, 2009
    Date of Patent: April 19, 2011
    Assignee: Industrial Technology Research Institute
    Inventors: Chi-Lin Chen, Yu-Cheng Chen, Hsing-Hua Wu, Po-Tsun Liu
  • Publication number: 20110086472
    Abstract: An improved type thin film semiconductor device and a method for forming the same are described. That is, in a thin film semiconductor device such as TFT formed on an insulating substrate, it is possible to prevent the intrusion of a mobile ion from a substrate or other parts, by forming the first blocking film comprising a silicon nitride, an aluminum oxide, an aluminum nitride, a tantalum oxide, and the like, under the semiconductor device through an insulating film used in a buffering, and then, by forming the second blocking film on TFT, and further, by covering TFT with said first and second blocking films.
    Type: Application
    Filed: December 17, 2010
    Publication date: April 14, 2011
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Shunpei YAMAZAKI, Yasuhiko TAKEMURA
  • Patent number: 7923311
    Abstract: A semiconductor device having a pair of impurity doped second semiconductor layers, formed on a first semiconductor layer having a channel formation region therein, an outer edge of the first semiconductor film being at least partly coextensive with an outer edge of the impurity doped second semiconductor layers. The semiconductor device further includes source and drain electrodes formed on the pair of impurity doped second semiconductor layers, wherein the pair of impurity doped second semiconductor layers extend beyond inner sides edges of the source and drain electrodes so that a stepped portion is formed from an upper surface of the source and drain electrodes to a surface of the first semiconductor film.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: April 12, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hongyong Zhang, Naoto Kusumoto
  • Patent number: 7923316
    Abstract: In a method of forming a polysilicon film, a thin film transistor including a polysilicon film, and a method of manufacturing a thin film transistor including a polysilicon film, the thin film transistor includes a substrate, a first heat conduction film on the substrate, a second heat conduction film adjacent to the first heat conduction film, the second heat conduction film having a lower thermal conductivity than the first heat conduction film, a polysilicon film on the second heat conduction film and the first heat conduction film adjacent to the second heat conduction film, and a gate stack on the polysilicon film. The second heat conduction film may either be on the first heat conduction film or, alternatively, the first heat conduction film may be non-contiguous and the second heat conduction film may be interposed between portions of the non-contiguous first heat conduction film.
    Type: Grant
    Filed: June 11, 2007
    Date of Patent: April 12, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyung-bae Park, Takashi Noguchi, Se-young Cho, Do-young Kim, Jang-yeon Kwon
  • Patent number: 7915100
    Abstract: The present invention provides a method of integrated semiconductor devices such that different types of devices are formed upon a specific crystallographic orientation of a hybrid substrate. In accordance with the present invention, junction capacitance of one of the devices is improved in the present invention by forming the source/drain diffusion regions of the device in an epitiaxial semiconductor material such that they are situated on a buried insulating layer that extends partially underneath the body of the second semiconductor device. The second semiconductor device, together with the first semiconductor device, is both located atop the buried insulating layer. Unlike the first semiconductor device in which the body thereof is floating, the second semiconductor device is not floating. Rather, it is in contact with an underlying first semiconducting layer.
    Type: Grant
    Filed: October 7, 2008
    Date of Patent: March 29, 2011
    Assignee: International Business Machines Corporation
    Inventor: Min Yang
  • Patent number: 7902002
    Abstract: When a semi-conductor film is irradiated with conventional pulsed laser light, unevenness, which is called as ridge, is caused on the surface of the semiconductor film. In the case of a top-gate type TFT, element characteristics are changed depending on the ridge. In particular, there is a problem in that variation in the plural thin film transistors electrically connected in parallel with one another. According to the present invention, in manufacturing a circuit including plural thin film transistors, the width LP of a region (not including a microcrystal region) that is melted by irradiating a semiconductor film with light of a continuous wave laser is enlarged, and active layers of a plurality of thin film transistors (that are electrically connected in parallel with one another) are arranged in one region.
    Type: Grant
    Filed: July 25, 2005
    Date of Patent: March 8, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Koichiro Tanaka
  • Patent number: 7897445
    Abstract: A self-aligned LDD TFT and a fabrication method thereof. The method includes providing a semiconductor layer. A first masking layer is provided over a first region of the semiconductor layer, said first masking layer comprising a material that provide a permeable barrier to a dopant. The semiconductor layer is exposed, including the first region covered by the first masking layer, to the dopant, wherein the first region covered by the first masking layer is lightly doped with the dopant in comparison to a second region not covered by the first masking layer.
    Type: Grant
    Filed: February 21, 2007
    Date of Patent: March 1, 2011
    Assignee: TPO Displays Corp.
    Inventors: Shih Chang Chang, De-Hua Deng, Chun-Hsiang Fang, Yaw-Ming Tsai, Chang-Ho Tseng
  • Publication number: 20110037074
    Abstract: A thin film transistor includes a substrate, a buffer layer on the substrate, a semiconductor layer on the buffer layer, source and drain electrodes directly on the semiconductor layer, each of the source and drain electrodes including at least one hole therethrough, a gate insulating layer on the substrate, and a gate electrode on the gate insulating layer and corresponding to the semiconductor layer.
    Type: Application
    Filed: March 12, 2010
    Publication date: February 17, 2011
    Inventors: Ji-Su Ahn, Hoon-Kee Min
  • Publication number: 20110037073
    Abstract: A thin film transistor (TFT), an OLED device having the TFT and a method of fabricating the same and a method of fabricating an organic light emitting diode (OLED) display device that includes the TFT. The method of fabricating a TFT includes providing a substrate, forming a buffer layer on the substrate, forming an amorphous silicon layer pattern on the buffer layer, forming a metal layer on an entire surface of the substrate, forming a semiconductor layer by applying an electrical field to the metal layer to crystallize the amorphous silicon layer pattern, forming source and drain electrodes connected to the semiconductor layer by patterning the metal layer, forming a gate insulating layer on the entire surface of the substrate, forming a gate electrode on the gate insulating layer to correspond to the semiconductor layer and forming a protective layer on the entire surface of the substrate.
    Type: Application
    Filed: March 5, 2010
    Publication date: February 17, 2011
    Applicant: SAMSUNG MOBILE DISPLAY CO., LTD.
    Inventors: JI-SU AHN, WON-PIL LEE
  • Patent number: 7883931
    Abstract: In some embodiments, a memory cell includes a transistor gate spaced from a channel region by gate dielectric; a source region on one side of the channel region; and a drain region on an opposing side of the channel region from the source region. The channel region has phase change material adjacent the drain region. In some embodiments, the phase change material may be adjacent both the source region and the drain region. Some embodiments include methods of programming a memory cell that has phase change material adjacent a drain region. An inversion layer is formed within the channel region adjacent the gate dielectric, with the inversion layer having a pinch-off region within the phase change material adjacent the drain region. Hot carriers (for instance, electrons) within the pinch-off region are utilized to change a phase within the phase change material.
    Type: Grant
    Filed: February 6, 2008
    Date of Patent: February 8, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Jun Liu
  • Patent number: 7879664
    Abstract: A fabricating method of an array substrate for a liquid crystal display device including forming a polycrystalline silicon film on a substrate having a display region and a peripheral region, the polycrystalline silicon film having grains of square shape, forming a first active layer in the display region and a second active layer in the peripheral region by etching the polycrystalline silicon film, forming a first gate electrode over the first active layer, a second gate electrode over the second active layer and a gate line connected to the first gate electrode, and forming first source and drain electrodes connected to the first active layer, second source and drain electrodes connected to the second active layer and data line connected to the first source electrode. Further, the second gate electrode overlaps the first active layer to form a first channel region, and the first channel region is formed inside one of the grains.
    Type: Grant
    Filed: January 20, 2010
    Date of Patent: February 1, 2011
    Assignee: LG Display Co., Ltd.
    Inventor: Yun-Ho Jung
  • Patent number: 7867873
    Abstract: A method of manufacturing a semiconductor substrate is demonstrated, which enables the formation of a single crystal semiconductor layer on a substrate having an insulating surface. The manufacturing method includes the steps of: ion irradiation of a surface of a single-crystal semiconductor substrate to form a damaged region; laser light irradiation of the single-crystal semiconductor substrate; formation of an insulating layer on the surface of the single-crystal semiconductor substrate; bonding the insulating layer with a substrate having an insulating surface; separation of the single-crystal semiconductor substrate at the damaged region, resulting in a thin single-crystal semiconductor layer on the surface of the substrate having the insulating surface; and laser light irradiation of the surface of the single-crystal semiconductor layer which is formed on the substrate having the insulating surface.
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: January 11, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Satoshi Murakami, Hiromichi Godo, Atsuo Isobe
  • Patent number: 7858974
    Abstract: An organic light-emitting display panel having a storage capacitor comprised of a storage electrode overlapping a power line with a first gate-insulating layer disposed therebetween, wherein the storage capacitor includes a groove portion formed on a lateral side of the power line overlapping the storage electrode so that the overlapping area of the power line and the storage electrode is kept constant, and a method of manufacturing the same.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: December 28, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young Soo Yoon, Joon Chul Goh, Beohm Rock Choi
  • Patent number: 7855106
    Abstract: An improved type thin film semiconductor device and a method for forming the same are described. That is, in a thin film semiconductor device such as TFT formed on an insulating substrate, it is possible to prevent the intrusion of a mobile ion from a substrate or other parts, by forming the first blocking film comprising a silicon nitride, an aluminum oxide, an aluminum nitride, a tantalum oxide, and the like, under the semiconductor device through an insulating film used in a buffering, and then, by forming the second blocking film on TFT, and further, by covering TFT with said first and second blocking films.
    Type: Grant
    Filed: January 25, 2005
    Date of Patent: December 21, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Yasuhiko Takemura
  • Patent number: 7851277
    Abstract: An object is to reduce the adverse influence which a portion of a gate insulating layer where the thickness has decreased, that is, a step portion, has on semiconductor element characteristics so that the reliability of the semiconductor element is improved. A semiconductor layer is formed over an insulating surface; a side surface of the semiconductor layer is oxidized using wet oxidation to form a first insulating layer; a second insulating layer is formed over the semiconductor layer and the first insulating layer; and a gate electrode is formed over the semiconductor layer and the first insulating layer with the second insulating layer interposed therebetween.
    Type: Grant
    Filed: December 3, 2007
    Date of Patent: December 14, 2010
    Assignee: Semiconductor Energy laboratory Co., Ltd.
    Inventor: Hideto Ohnuma
  • Publication number: 20100308334
    Abstract: An array substrate including: a gate electrode and a gate insulation layer disposed on a base substrate, the gate insulation layer having a first thickness in a first region and a second thickness in a second region, the first thickness being greater than the second thickness; a semiconductor pattern disposed on the gate insulation layer in the first region, an end portion of the semiconductor pattern having a stepped portion with respect to the gate insulation layer; an ohmic contact pattern disposed on the semiconductor pattern, an end portion of the ohmic contact pattern opposite to a channel portion being aligned with the end portion of the semiconductor pattern; and source and drain electrodes disposed on the ohmic contact pattern, the source and drain electrodes spaced apart from each other and including first and second thin-film transistor patterns.
    Type: Application
    Filed: May 11, 2010
    Publication date: December 9, 2010
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Shin-Il CHOI, Sang-Gab KIM, Yu-Gwang JEONG, Hong-Kee CHIN
  • Publication number: 20100301336
    Abstract: Techniques for forming a thin coating of a material on a carbon-based material are provided. In one aspect, a method for forming a thin coating on a surface of a carbon-based material is provided. The method includes the following steps. An ultra thin silicon nucleation layer is deposited to a thickness of from about two angstroms to about 10 angstroms on at least a portion of the surface of the carbon-based material to facilitate nucleation of the coating on the surface of the carbon-based material. The thin coating is deposited to a thickness of from about two angstroms to about 100 angstroms over the ultra thin silicon layer to form the thin coating on the surface of the carbon-based material.
    Type: Application
    Filed: June 2, 2009
    Publication date: December 2, 2010
    Applicant: International Business Machines Corporation
    Inventors: Katherina Babich, Alessandro Callegari, Zhihong Chen, Edward Kiewra, Yanning Sun
  • Patent number: 7842563
    Abstract: A thin film transistor may include an active layer formed on an insulating substrate and formed with source/drain regions and a channel region; a gate insulating film formed on the active layer; and a gate electrode formed on the gate insulating film. The gate electrode may be formed of a conductive metal film pattern and a conductive oxide film covering the conductive metal film pattern. The source/drain regions may include an LDD region, and the LDD region may at least partially overlap with the gate electrode.
    Type: Grant
    Filed: May 22, 2007
    Date of Patent: November 30, 2010
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventors: Jae-Bon Koo, Sang-Gul Lee
  • Patent number: 7838884
    Abstract: The present invention provides a display device which can prevent the deterioration of a transparent conductive film attributed to a cell reaction without pushing up a cost of a film forming device. The display device includes a first conductive layer which is formed of a transparent conductive film containing indium oxide as a main component, a conductive background layer which is formed on the first conductive layer, a second conductive layer which is formed of a film containing Al as a main component on the background layer, and a third conductive layer which is formed of the same material as the second conductive layer on the second conductive layer. On an interface between the second conductive layer and the third conductive layer, positions of grain boundaries are arranged discontinuously. Further, the background layer is a film which contains any one of Mo, Ti and Ta as a main component. Still further, the third conductive layer is used as a reflective electrode.
    Type: Grant
    Filed: April 27, 2005
    Date of Patent: November 23, 2010
    Assignee: Hitachi Displays, Ltd.
    Inventors: Makoto Kurita, Jun Gotoh
  • Patent number: 7838885
    Abstract: A thin film transistor (TFT), a method of fabricating the TFT, and a display device including the TFT are provided. The TFT includes a semiconductor layer having a channel region and source and drain regions is crystallized using a crystallization-inducing metal. The crystallization-inducing metal is gettered by either a metal other than the crystallization-inducing metal or a metal silicide of a metal other than the crystallization-inducing metal. A length and width of the channel region of the semiconductor layer and a leakage current of the semiconductor layer satisfy the following equation: Ioff/W=3.4E-15L2+2.4E-12L+c, wherein Ioff (A) is the leakage current of the semiconductor layer, W (mm) is the width of the channel region, L (?m) is the length of the channel region, and “c” is a constant ranging from 2.5E-13 to 6.8E-13.
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: November 23, 2010
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventors: Tae-Hoon Yang, Ki-Yong Lee, Jin-Wook Seo, Byoung-Keon Park
  • Publication number: 20100291740
    Abstract: A semiconductor device includes at least one thin film transistor including a semiconductor layer that has a crystalline region including a channel region, a source region and a drain region, a gate insulating film disposed at least on the channel region, the source region and the drain region of the semiconductor layer, and a gate electrode arranged so as to oppose the channel region via the gate insulating film. At least a portion of the semiconductor layer includes a catalyst element capable of promoting crystallization, and the semiconductor layer further includes a gettering region that includes the catalyst element at a higher concentration than in the channel region or the source region and the drain region. The thickness of the gate insulating film on the gettering region is smaller than that on the source region and the drain region, or the gate insulating film is not disposed on the gettering region.
    Type: Application
    Filed: July 27, 2010
    Publication date: November 18, 2010
    Applicant: SHARP KABUSHIKI KAISHA
    Inventor: Naoki MAKITA
  • Patent number: 7834377
    Abstract: A finger length a1 of a transistor P11 is longer than a finger length A1 of a transistor P1, and a finger length b1 of a transistor N11 is longer than a finger length B1 of a transistor N1. The finger length b1 of the transistor N11 is shorter than the finger length A1 of the transistor P1, and the relation: a1>A1>b1>B1 is established. In a relation between an I/O section and a logic circuit section, as for MOS transistor of the same conductive type, a finger length of a MOS transistor constituting the logic circuit section is set so as to be longer than a finger length of a MOS transistor constituting the I/O section.
    Type: Grant
    Filed: April 10, 2007
    Date of Patent: November 16, 2010
    Assignee: Renesas Electronics Corporation
    Inventor: Toshiaki Iwamatsu
  • Patent number: 7833826
    Abstract: After a gate oxide film 10 has been formed on a silicon substrate G, a first step of forming a microcrystalline silicon film by high electron density plasma of an electron temperature of 2.0 eV or less and a second step of forming an ultra-microcrystalline silicon film by high electron density plasma of an electron temperature higher than 2.0 eV are repeated. A stacked-layer film 20 of the ultra-microcrystalline silicon film and the microcrystalline silicon film is thereby formed. With the film formation method described above, at least one of an n-channel thin-film transistor and a p-channel thin-film transistor with the stacked-layer film 20 functioned as an active layer may be manufactured.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: November 16, 2010
    Assignee: Tokyo Electron Limited
    Inventor: Shinsuke Oka
  • Patent number: 7834397
    Abstract: A thin film transistor (TFT), a method of fabricating the same, and a display device including the TFT, are provided. In the TFT, a channel region is connected to a gate electrode so that the influence of a substrate bias is reduced or eliminated. Thus, the threshold voltage of the TFT is reduced, a subthreshold slope can be improved, and a large drain current can be obtained at a low gate voltage.
    Type: Grant
    Filed: August 25, 2006
    Date of Patent: November 16, 2010
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventors: Byoung-Keon Park, Byoung-Deog Choi, Myeong-Seob So
  • Patent number: 7829393
    Abstract: A copper gate electrode, applied in a thin-film-transistor liquid crystal display (LCD) device, at least comprises a patterned copper layer formed on a glass substrate, and a barrier layer formed on the patterned copper layer. The barrier layer comprises at least one of nitrogen and phosphorus, or comprises an alloy formularized as M1M2R wherein M1 is cobalt (Co) or molybdenum (Mo), M2 is tungsten (W), molybdenum (Mo), rhenium (Re) or vanadium (V), and R is boron (B) or phosphorus (P).
    Type: Grant
    Filed: February 6, 2009
    Date of Patent: November 9, 2010
    Assignee: Au Optronics Corp.
    Inventors: Yu-Wei Liu, Wen-Ching Tsai, Kuo-Yu Huang, Hui-Fen Lin
  • Publication number: 20100279476
    Abstract: To provide a manufacturing method for a field-effect transistor, such as a thin-film transistor, enabling reductions in the number patterning steps and the number of photomasks and improvements in the throughput and the yield. In the method, an oxide film is formed by processing the surface of a crystalline semiconductor with ozone water or hydrogen peroxide water. Using the oxide film thus formed as an etch stop, a gate electrode, a source electrode, and a drain electrode of the field-effect transistor are simultaneously formed from a same starting film in one patterning step by use of one photomask. After forming the gate electrode, the source electrode, and the drain electrode, heating is performed thereon at 800° C. or higher for a predetermined time. Thereby, the contact resistances between the source electrode and the crystalline semiconductor and between the drain electrode and the crystalline semiconductor are reduced, whereby improving the electrical conductivity.
    Type: Application
    Filed: May 7, 2010
    Publication date: November 4, 2010
    Inventor: Tatsuya Arao
  • Patent number: 7820540
    Abstract: Metallization contact structures and methods for forming a multiple-layer electrode structure on solar cells include depositing a conductive contact layer on a semiconductor substrate and depositing a metal bearing ink onto a portion of the conductive contact layer, wherein exposed portions of the conductive contact layer are adjacent to the metal bearing ink. The conductive contact layer is patterned by removing exposed portions of the conductive contact layer from the semiconductor substrate. The metal bearing ink is aligned with openings in a dielectric layer of the semiconductor substrate and with unexposed portions of the conductive contact layer. The unexposed portions of the conductive contact layer are interposed between the metal bearing ink and the dielectric layer such that the conductive contact layer pattern is aligned with metal bearing ink. The semiconductor substrate is thermally processed to form a current carrying metal gridline by sintering the metal bearing ink.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: October 26, 2010
    Assignee: Palo Alto Research Center Incorporated
    Inventors: Baomin Xu, David K. Fork
  • Publication number: 20100244037
    Abstract: A thin film transistor (TFT) is provided which is capable of reducing leakage currents in a polycrystalline silicon TFT without causing an increase in manufacturing processes. Source/drain regions of an activated layer of the TFT to be formed in a circuit region and pixel region formed on a glass substrate of a liquid crystal display panel for a mobile phone is formed so that its boron impurity falls within a range of 2.5×1018/cm3 to 5.5×1018/cm3 and its impurity activation falls within a range of 1% to 7%.
    Type: Application
    Filed: March 19, 2010
    Publication date: September 30, 2010
    Applicant: NEC LCD TECHNOLOGIES, LTD.
    Inventor: KUNIHIRO SHIOTA
  • Publication number: 20100244031
    Abstract: The drain voltage of a transistor is determined depending on the driving voltage of an element connected to the transistor. With downsizing of a transistor, intensity of the electric field concentrated in the drain region is increased, and hot carriers are easily generated. An object is to provide a transistor in which the electric field hardly concentrates in the drain region. Another object is to provide a display device including such a transistor. End portions of first and second wiring layers having high electrical conductivity do not overlap with a gate electrode layer, whereby concentration of an electric field in the vicinity of a first electrode layer and a second electrode layer is reduced; thus, generation of hot carriers is suppressed. In addition, one of the first and second electrode layers having higher resistivity than the first and second wiring layers is used as a drain electrode layer.
    Type: Application
    Filed: March 17, 2010
    Publication date: September 30, 2010
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Kengo AKIMOTO, Hiromichi GODO, Akiharu MIYANAGA
  • Publication number: 20100244036
    Abstract: A thin film transistor, a method of fabricating the same, and an organic light emitting diode (OLED) display device including the same. The thin film transistor includes a substrate; a semiconductor layer disposed on the substrate and including a channel region; source/drain regions including ions and an offset region; a gate insulating layer disposed on the semiconductor layer; a gate electrode disposed on the gate insulating layer; a first insulating layer disposed on the gate electrode; a second insulating layer disposed on the first insulating layer; and source/drain electrodes disposed on the second insulating layer, and electrically connected to the source/drain regions of the semiconductor layer, respectively. The sum of thicknesses of the gate insulating layer and the first insulating layer that are on the source/drain regions is less than the vertical dispersion depth of the ions included in the source/drain regions.
    Type: Application
    Filed: February 26, 2010
    Publication date: September 30, 2010
    Applicant: Samsung Mobile Display Co., Ltd
    Inventors: Byoung-Keon PARK, Tae-Hoon Yang, Jin-Wook Seo, Ki-Yong Lee, Hyun-Gue Kim, Maxim Lisachenko, Dong-Hyun Lee, Kil-Won Lee, Jong-Ryuk Park, Bo-Kyung Choi
  • Patent number: 7803671
    Abstract: A method of manufacturing a display substrate comprises forming a thin-film transistor (TFT) on a silicon wafer, transferring the TFT from the silicon wafer onto a base substrate using a stamp unit and forming a pixel electrode electrically connected to the TFT.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: September 28, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Nam-Seok Roh, Jung-Mok Bae
  • Patent number: 7799624
    Abstract: Embodiments of methods, apparatuses, devices, and/or systems for forming a thin film component are described.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: September 21, 2010
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Randy Hoffman, Peter Mardilovich, David Punsalan
  • Patent number: 7799622
    Abstract: Provided is a method of manufacturing an oxide semiconductor thin film transistor using a transparent oxide semiconductor as a material for a channel. The method of manufacturing the oxide semiconductor thin film transistor includes forming a passivation layer on a channel layer and performing an annealing process for one hour or more at a temperature of about 100° C. or above.
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: September 21, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jisim Jung, Youngsoo Park, Sangyoon Lee, Changjung Kim, Taesang Kim, Jangyeon Kwon, Kyungseok Son