Abstract: In a nonvolatile memory cell with charge trapping dielectric (150), the tunnel dielectric (140) includes chlorine adjacent to the charge trapping dielectric but no chlorine (or less chlorine) adjacent to the cell's channel region (120). The chlorine adjacent to the charge trapping dielectric serves to improve the programming and/or erase speed. The low chlorine concentration adjacent to the channel region prevents chlorine from degrading the data retention. Other features are also provided.

Abstract: Isolated conductive nanoparticles on a dielectric layer and methods of fabricating such isolated conductive nanoparticles provide charge storage units in electronic structures for use in a wide range of electronic devices and systems. The isolated conductive nanoparticles may be used as a floating gate in a flash memory. In an embodiment, conductive nanoparticles are deposited on a dielectric layer by a plasma-assisted deposition process such that each conductive nanoparticle is isolated from the other conductive nanoparticles to configure the conductive nanoparticles as charge storage elements.

Abstract: Charge migration in a SONOS memory cell is eliminated by physically separating nitride layer storage sites with dielectric material. Increased storage in a cell is realized with a double gate structure for controlling bit storage in line channels between a source and a drain, such as with a FinFET structure in which the gates are folded over the channels on sides of a fin.

Abstract: Provided are a nonvolatile memory device, a method of manufacturing the nonvolatile memory device, and a method of manufacturing a flat panel display device provided therein with the nonvolatile memory device. According to an embodiment, an amorphous silicon layer is formed on a substrate, and then annealed by using an Excimer laser to form a crystallized silicon layer. A nitrogen plasma treatment is performed for the crystallized silicon layer to planarize an upper surface of the crystallized silicon layer. An ONO layer is formed on the nitrogen plasma-treated crystallized silicon layer. A metal layer is formed on the ONO layer. The metal layer, the ONO layer and the nitrogen plasma-treated crystallized silicon layer are patterned.

Abstract: A semiconductor memory device includes a first active region, a second active region, an element isolation region, memory cell transistors. Each of memory cell transistors includes a laminated gate and a first impurity diffusion layer functioning as a source and a drain. The laminated gate includes a first insulating film, a second insulating film, and a control gate electrode. The second insulating film is commonly connected between the plurality of memory cell transistors to step over the element isolation region and is in contact with an upper surface of the element isolation region. An upper surface of the element isolation region is higher than a bottom surface of the first insulating film and is located under the upper surface of the first insulating film.

Abstract: Non-volatile memory cells store a level of charge corresponding to the data being stored in a dielectric material storage element that is sandwiched between a control gate and the semiconductor substrate surface over channel regions of the memory cells. More than two memory states are provided by one of more than two levels of charge being stored in a common region of the dielectric material. More than one such common region may be included in each cell. In one form, two such regions are provided adjacent source and drain diffusions in a cell that also includes a select transistor positioned between them. In another form, NAND arrays of strings of memory cells store charge in regions of a dielectric layer sandwiched between word lines and the semiconductor substrate.

Abstract: In a method of manufacturing a semiconductor device, a tunnel insulation layer is formed on a substrate. A charge trapping layer is formed on the tunnel insulation layer. A protection layer pattern or a mold is formed on the charge trapping layer. Charge trapping layer patterns are formed on the tunnel insulation layer by etching the charge trapping layer using the protection layer pattern or the mold. The charge trapping layer patterns may be spaced apart from each other. Blocking layers are formed on the charge trapping layer patterns, respectively. A gate electrode is formed on the blocking layers and the tunnel insulation layer using the protection layer pattern or the mold.

Abstract: Example embodiments relate to a semiconductor memory device and methods of forming the same. Other example embodiments relate to a nonvolatile memory device and methods of forming the same. The memory device may include memory cells separately formed on a channel region between impurity regions formed on a substrate. The memory cells may each include a memory layer having a tunnel insulating layer, a nano-sized charge storage layer, and a blocking insulating layer and a side gate formed on the memory layer. According to example embodiments, larger scale integration of the nonvolatile memory devices may be achieved and the reliability of the memory devices may increase.

Abstract: A non-volatile memory (NVM) cell includes a silicon substrate having a main surface, a source region in a portion of the silicon substrate, a drain region in a portion of the silicon substrate, and a well region disposed in a portion of the silicon substrate between the source and drain regions. The cell includes a bottom oxide layer formed on the main surface of the substrate. The bottom oxide layer is disposed on a portion of the main surface proximate the well region. The cell includes a charge storage layer disposed above the bottom oxide layer, a dielectric tunneling layer disposed above the charge storage layer and a control gate formed above the dielectric tunneling layer. The dielectric tunneling layer includes a first oxide layer, a nitride layer and a second oxide layer. Erasing the NVM cell includes applying a positive gate voltage to inject holes from the gate.

Abstract: A semiconductor memory device includes a memory cell transistor and a first MOS transistor. The memory cell transistor includes a first insulating film, a second insulating film, a control gate electrode, and a first diffusion layer. The first insulating film formed on the first active region. The second insulating film formed on the first insulating film. The control gate electrode formed so as to include a first metal film formed on the second insulating film and a first conductive film formed on the first metal film. The first MOS transistor includes a second conductive film, a second metal film, a third conductive film, and a second diffusion layer. The second conductive film formed on a second active region. The second metal film formed on the second conductive film. The third conductive film formed on a second metal film.

Abstract: A thermal oxidation method capable of obtaining a high oxidation rate by generating a sufficient enhanced-rate oxidation phenomenon even in a low temperature region is provided. In addition, a thermal oxidation method capable of forming a silicon oxide film having a high reliability even when formed at a low temperature region. A basic concept herein is to form a silicon oxide film by thermal reaction by generating a large amount of oxygen radicals (O*) having a large reactivity without using plasma. More specifically, ozone (O3) and other active gas are reacted, so that ozone (O3) is decomposed highly efficiently even in a low temperature region, thereby generating a large amount of oxygen radicals (O*). For example, a compound gas containing a halogen element can be used as the active gas.

Abstract: A flash memory cell includes a charge storage element that includes at least a first layer and a second layer. One of the layers includes silicon-rich silicon nitride and the other layer includes silicon nitride. More specifically, the ratio of silicon-to-nitrogen in the first layer is greater than the ratio of silicon-to-nitrogen in the second layer.

Abstract: A semiconductor charge storage device includes a semiconductor substrate having a surface region. The semiconductor substrate is characterized by a first conductivity type. A charge trapping material overlies and is in contact with at least a portion of the surface region of the semiconductor substrate. The charge trapping material is characterized by a first dielectric constant and by a first charge trapping capability. The first dielectric constant is higher than a dielectric constant associated with silicon oxide. A dielectric material overlies and is in contact with at least a portion of the charge trapping material. The dielectric material is formed using a conversion of a portion of the charge trapping material for providing a second charge trapping capability. The device also includes a conductive material overlying the second dielectric. The conductive material is capable of receiving an electrical signal to cause electrical charges being trapped in the semiconductor charge storage device.

Abstract: A non-volatile memory cell is described, including a semiconductor substrate, two separate charge trapping structures on the substrate, first spacers at least on the opposite sidewalls of the two charge trapping structures, a gate dielectric layer on the substrate between the two charge trapping structures, a gate on the two charge trapping structures and the gate dielectirc layer, and two doped regions in the substrate beside the gate.

Abstract: A charge trapping floating gate is described with asymmetric tunneling barriers. The memory cell includes a source region and a drain region separated by a channel region. A first tunneling barrier structure is disposed above the channel region. A floating gate is disposed above the first tunneling barrier structure covering the channel region. A second tunneling barrier is disposed above the floating gate. A dielectric charge trapping structure disposed above the second tunneling barrier and a blocking dielectric structure is disposed above the charge trapping structure. A top conductive layer disposed above the top dielectric structure acts as a gate. The second tunneling barrier is a more efficient conductor of tunneling current, under bias conditions applied for programming and erasing the memory cell, than the first tunneling barrier structure.

Abstract: In a nonvolatile semiconductor memory device where a tunnel insulating film, a charge storage layer, a blocking insulating film, and a control gate are stacked one on top of another on a semiconductor substrate, with an element isolation insulating film buried between adjacent cells, a barrier layer composed of at least one of a silicon nitride film, a silicon oxynitride film, and a silicon oxide film which has a higher density than that of the element isolation insulating film is provided at the interface between the element isolation insulating film and the blocking insulating film or between the element isolation film and the control gate.

Abstract: A memory cell in a semiconductor memory device has a pair of charge traps formed on opposite sides of a control electrode, above variable resistance regions in the semiconductor substrate. Each charge trap includes a tunnel oxide film, a dual-layer charge trapping film, and a top oxide film. The dual-layer charge trapping film includes a silicon-rich silicon nitride layer or amorphous silicon layer adjacent to the tunnel oxide film, and a stoichiometric or nitrogen-rich silicon nitride layer adjacent to the top oxide film. Most charges injected into the charge trapping film are trapped in the layer adjacent to the tunnel oxide film, near the substrate, which facilitates the reading of the data that the trapped charges represent.

Abstract: Nonvolatile memory devices are provided including an integrated circuit substrate and a charge storage pattern on the integrated circuit substrate. The charge storage pattern has a sidewall and a tunnel insulating layer is provided between the charge storage pattern and the integrated circuit substrate. A gate pattern is provided on the charge storage pattern. A blocking insulating layer is provided between the charge storage pattern and the gate pattern. The sidewall of the charge storage pattern includes a first nitrogen doped layer. Related methods of fabricating nonvolatile memory devices are also provided herein.

Abstract: Charge-trapping dielectric (160) in a nonvolatile memory cell is recessed from under the control gate's edge and/or from an edge of a substrate isolation region. The recessed geometry serves to reduce or eliminate charge trapping in regions from which the charge may be difficult to erase.

Abstract: In a nonvolatile semiconductor memory device, a stacked body is formed by alternately stacking dielectric films and conductive films on a silicon substrate and a plurality of through holes extending in the stacking direction are formed in a matrix configuration. A shunt interconnect and a bit interconnect are provided above the stacked body. Conductor pillars are buried inside the through holes arranged in a line immediately below the shunt interconnect out of the plurality of through holes, and semiconductor pillars are buried inside the remaining through holes. The conductive pillars are formed from a metal, or low resistance silicon. Its upper end portion is connected to the shunt interconnect and its lower end portion is connected to a cell source formed in an upper layer portion of the silicon substrate.

Abstract: A finFET-based non-volatile memory device on a semiconductor substrate includes source and drain regions, a fin body, a charge trapping stack and a gate. The fin body extends between the source and the drain region as a connection. The charge trapping stack covers a portion of the fin body and the gate covers the charge trapping stack at the location of the fin body. The fin body has a corner-free shape for at least ¾ of the circumference of the fin body which lacks distinct crystal faces and transition zones in between the crystal faces.

Abstract: In a semiconductor device, the side walls are made of SiO2, SiN or SiON, and the top insulating film or gate insulating film is made of an oxide including Al, Si, and metal element M so that the number ratio Si/M is set to no less than a number ratio Si/M at a solid solubility limit of SiO2 composition in a composite oxide including metal element M and Al and set to no more than a number ratio Si/M at the condition that the dielectric constant is equal to the dielectric constant of Al2O3 and so that the number ratio Al/M is set to no less than a number ratio Al/M where the crystallization of an oxide of said metal element M is suppressed due to the Al element and set to no more than a number ratio Al/M where the crystallization of the Al2O3 is suppressed due to the metal element M.

Abstract: A method for making a nitride read only memory device with buried diffusion spacers is disclosed. An oxide-nitride-oxide (ONO) layer is formed on top of a silicon substrate, and a polysilicon gate is formed over the ONO layer. The polysilicon gate is formed less than a length of the ONO layer. Two buried diffusion spacers are formed beside two sidewalls of the polysilicon gate and over the ONO layer. Two buried diffusion regions are implanted on the silicon substrate next to the two buried diffusion spacers. The two buried diffusion regions are then annealed such that the approximate interfaces of the buried diffusion regions are under the sidewalls of the polysilicon gate. The structure of a nitride read only memory device with buried diffusion spacers is also described.

Abstract: The present invention provides a semiconductor device and a method for manufacturing thereof. The semiconductor device includes bit lines disposed in a semiconductor substrate, a first ONO disposed between the bit lines on the semiconductor substrate, and a second ONO film disposed on each of the bit lines. The film thickness of a first silicon nitride film in the first ONO film is larger than the film thickness of a second silicon nitride film in the second ONO film.

Abstract: A method of fabricating a nonvolatile memory device includes forming a tunnel insulating layer on a semiconductor substrate, forming a charge storage layer on the tunnel insulating layer, forming a dielectric layer on the charge storage layer, the dielectric layer including a first aluminum oxide layer, a silicon oxide layer, and a second aluminum oxide layer sequentially stacked on the charge storage layer, and forming a gate electrode on the dielectric layer, the gate electrode directly contacting the second aluminum oxide layer of the dielectric layer.

Abstract: A semiconductor memory having an electrically writable/erasable memory cell includes a first gate insulating layer made from a compound containing silicon and oxygen; a first charge-storage layer being in contact with the first gate insulating layer made from a silicon nitride film, a silicon oxynitride film, or an alumina film; a second insulating layer thicker than the first gate insulting layer; a second charge-storage layer being in contact with the second insulating layer; a third insulating layer thicker than the first gate insulating layer being in contact with the second charge-storage layer; and a control electrode upon the third insulating layer.

Abstract: A semiconductor memory device includes a first dopant area and a second dopant area in a semiconductor substrate, the first dopant area and the second dopant area doped with one selected from the group consisting of Sb, Ga, and Bi. The semiconductor memory device includes an insulating layer disposed in contact with the first dopant area and the second dopant area, and a gate electrode layer disposed in contact with the insulating layer.

Abstract: A method for manufacturing a nonvolatile semiconductor storage device, including: forming a first conductive layer so that it is sandwiched in an up-down direction by first insulating layers; forming a first hole so that it penetrates the first insulating layers and the first conductive layer; forming a first side wall insulating layer on a side wall facing the first hole; forming a sacrificing layer so that the sacrificing layer infills the first hole; forming a second conductive layer on an upper layer of the sacrificing layer so that the second conductive layer is sandwiched by the second insulating layer in an up-down direction; forming a second hole on a position which matches with the first hole so that the second hole penetrates the second insulating layer and the second conductive layer; forming a second side wall insulating layer on a side wall facing the second hole; removing the sacrificing layer after the formation of the second side wall insulating layer; and forming a semiconductor layer so that

Abstract: The present invention provides a semiconductor storage device having: a first conductivity type region formed in a semiconductor layer; a second conductivity type region formed in the semiconductor layer in contact with the first conductivity type region; a memory functional element disposed on the semiconductor layer across the boundary of the first and second conductivity type regions; and an electrode provided in contact with the memory functional element and on the first conductivity type region via an insulation film, and a portable electronic apparatus comprising the semiconductor storage device. The present invention can fully cope with scale-down and high-integration by constituting a selectable memory cell substantially of one device.

Abstract: A semiconductor device includes a semiconductor substrate, and a nonvolatile memory cell provided on the semiconductor substrate, the nonvolatile memory cell including a tunnel insulating film provided on a surface of the semiconductor substrate, the tunnel insulating film including semiconductor grains, the semiconductor grains included in both end portions of the tunnel insulating film having smaller grain size than the semiconductor grains included in other portions of the tunnel insulating film, a charge storage layer provided on the tunnel insulating film, an insulating film provided on the charge storage layer, and a control gate electrode provided on the insulating film.

Abstract: A nonvolatile memory device which contributes to improvement of electrical erase characteristics and a method of manufacturing the same are provided. The nonvolatile memory device includes a semiconductor substrate, a gate electrode formed on the semiconductor substrate, a diffusing layer electrode formed adjacent to the gate electrode on the semiconductor substrate; a charge accumulating layer formed on a lateral side of the gate electrode and retaining injected electrons, and an LDD region formed below the diffusing layer electrode. The charge accumulating layer is formed on only the lateral side of the gate electrode and does not extend along the LDD region.

Abstract: A method for manufacturing a semiconductor device which includes steps of forming a dummy layer on a semiconductor substrate, forming a groove 12 in the semiconductor substrate while using the dummy layer as a mask, forming a tunnel insulating film and a trap layer to cover an inner surface of the groove and the dummy layer, eliminating the trap layer formed above the upper surface and at the sides of the dummy layer, and forming a top insulating film to cover a remaining trap layer and the exposed tunnel insulating film.

Abstract: A non-volatile memory device has improved operating characteristics. The non-volatile memory device includes an active region; a wordline formed on the active region to cross the active region; and a charge trapping layer interposed between the active region and the wordline, wherein a cross region of the active region and the wordline includes an overlap region in which the charge trapping layer is disposed and a non-overlap region in which the charge trapping layer is not disposed.

Abstract: A NAND flash memory array, an operating method and a fabricating method of the same are provided. The NAND flash memory array has a cut-off gate line under a control gate in order to operate two cells having vertical channels independently with one control gate (i.e., a shared word line). The memory cell area is reduced considerably compared to the conventional vertical channel structure, and is better for high integration. A shared cut-off gate turn off is made during a programming operation and prevents programming the opposite cell by a self-boosting effect. It is possible to shield electrically with a shared word line (a control gate) during a reading operation, and minimizes the effect of storage condition of the opposite cell. Also, the NAND flash memory array can be fabricated by using the conventional CMOS process.

Abstract: Data storage device, comprising: a stack of layers formed by an alternation of first layers with a conductivity of less than approximately 0.01 (?·cm)?1 and second layers with a conductivity greater than approximately 1 (?·cm)?1, a plurality of columns disposed in the stack of layers, and passing through each layer in this stack. Each of the columns is formed by at least one portion of semiconductor material surrounded by least one electrical charge storage layer electrically insulated from the portion of semiconductor material and from the stack; and means of applying voltage to the terminals of the columns comprising a network of moving microspikes.

Abstract: A semiconductor device and a method for manufacturing thereof are provided. The semiconductor device includes two epitaxial semiconductor layers formed on a semiconductor substrate, bit lines formed on upper portions of the two epitaxial semiconductor layers, and a charge storage layer formed on the semiconductor substrate between the two epitaxial semiconductor layers.

Abstract: A example embodiment may provide a memory device that may include an active pattern on a semiconductor substrate, a first charge trapping layer pattern on the active pattern, a first gate electrode on the first charge trapping layer pattern, a second charge trapping layer pattern on a sidewall of the active pattern in a first direction, a second gate electrode on the second charge trapping layer pattern in the first direction, and/or a source/drain region in the active pattern. The memory device may have improved integration by forming a plurality of charge trapping layer patterns on the same active pattern.

Abstract: A semiconductor memory in which a gate insulating film (tunnel insulating film) in a memory cell provides higher operational reliability. The semiconductor memory includes an insulating film 3 between a silicon substrate 1 and a gate electrode 4. The insulating film 3 is composed of a silicon oxide film 3f, a silicon nitride film 3d and a silicon oxide film 3b, stacked in this order between the silicon substrate and the gate electrode from the side of the silicon substrate 1. There are provided hydrogen occluding films 3a, 3c and 3e on an interface between the silicon oxide film 3f and the silicon nitride film 3d, on an interface between the silicon nitride film 3d and the silicon oxide film 3b and on an interface between the silicon oxide film 3b and the gate electrode 4 (FIGS. 1A and 1B).

Abstract: An electronic device includes a memory cell. The memory cell includes a semiconductor region, a first current-carrying electrode adjacent to the semiconductor region, and a first dopant-containing region adjacent to a first current-carrying electrode. The semiconductor region includes a Group 14 atom and the first dopant-containing region includes a Group 13 atom. The Group 13 atom has an atomic number greater than the atomic number of the Group 14 atom.

Abstract: A method of producing metallic nanocrystals (107) embedded in high-k dielectric material as well as a nonvolatile flash memory device (100) comprising a discrete charge carrier storage layer, the discrete charge carrier storage layer comprising metallic nanocrystals (107) embedded in high-k dielectric material. In the method described in this invention, firstly an ultra-thin metal film is deposited over a first (105) and a second (106) dielectric layer including high-k dielectric material provided on a substrate (101). Then, the ultra-thin metal film is annealed for forming the metallic nanocrystals (107) on the second dielectric layer (106). Finally, the second dielectric layer (106) and the metallic nanocrystals (107) are covered with a third dielectric layer (108) of high-k dielectric material for forming metallic nanocrystals (107) embedded in high-k dielectric material.

Abstract: A NOR-type flash memory device comprises a plurality twin-bit memory cells arranged so that pairs of adjacent memory cells share a source/drain region and groups of four adjacent memory cells are electrically connected to each other by a single bitline contact.

Abstract: The semiconductor device includes: a plurality of bit lines formed in stripes in a semiconductor substrate of a first conductivity type, each of the bit lines being a diffusion layer of an impurity of a second conductivity type; a plurality of gate insulation films s formed on regions of the semiconductor substrate between the bit lines; a plurality of word lines formed on the semiconductor substrate via the gate insulating films, the word lines extending in a direction intersecting with the bit lines; and a plurality of bit line isolation diffusion layers formed in regions of the semiconductor substrate between the word lines, each of the bit line isolation diffusion layers being a diffusion layer of an impurity of the first conductivity type. The bit line isolation diffusion layer includes a diffusion suppressor for suppressing diffusion of an impurity.

Abstract: A method for manufacturing a semiconductor device includes the steps of: forming a gate on a semiconductor substrate; sequentially stacking a first oxide layer, a nitride layer and a second oxide layer on the semiconductor substrate including the gate; forming a first photoresist layer pattern on the second oxide layer; forming a second oxide layer pattern by wet etching the second oxide layer by using the first photoresist layer pattern as a mask; forming a nitride layer pattern by dry etching the nitride layer using the second oxide layer pattern as a mask; and forming a first oxide layer pattern by etching the first oxide layer using the nitride layer pattern as a mask.

Abstract: A semiconductor memory device has a substrate having a semiconductor layer, an n-type semiconductor region formed beneath a main surface of the semiconductor layer, a plurality of cell gates being aligned at a space from each other and including a gate insulating film formed on the main surface of the semiconductor layer, a charge storage layer formed on the gate insulating film, a charge block layer formed on the charge storage layer and a control gate electrode formed on the charge block layer, an insulating film between cells formed on the main surface of the semiconductor layer between the cell gates, and a carbon accumulation region formed in the insulating film between the cells and has a maximum concentration of a carbon element in a region within 2 nm from an interface between the semiconductor layer and the insulating film between the cells.

Abstract: A semiconductor memory device includes a tunnel insulating film, charge storage layer, block insulating film and control gate electrode stacked and formed on the surface of a semiconductor substrate. The charge storage layer is formed of an insulating film containing nitrogen. A dopant that reduces the trap density of charges moved in and out of an internal portion of the charge storage layer via the tunnel insulating film is doped into a region of the charge storage layer on the interface side with the tunnel insulating film or a dopant is doped into the above region with higher concentration in comparison with that of another region.

Abstract: A non-volatile semiconductor storage device includes device regions and device isolation regions that are formed on a semiconductor substrate, with a first direction defined as their longitudinal direction. The non-volatile semiconductor storage device also includes memory cells having a cell transistor formed on the device regions and a selection transistor to select the cell transistor. Each of gate electrode wires provides a common connection between a plurality of memory cells arranged in a line in a second direction, and is arranged to extend in the second direction. Each of the gate electrode wires has a first width on the device regions and a second width larger than the first width on the device isolation regions.

Abstract: Devices and methods for forming charge storage regions are disclosed. In one embodiment, a semiconductor device comprises a semiconductor layer having a trench, charge storage layers formed at both side surfaces of the trench, a wordline buried in the trench in contact with the charge storage layers, and source-drain regions formed in the semiconductor layer at both sides of the trench.

Abstract: Non-volatile memory devices include a tunnel insulating layer on a channel region of a substrate, a charge-trapping layer pattern on the tunnel insulating layer and a first blocking layer pattern on the charge-trapping layer pattern. Second blocking layer patterns are on the tunnel insulating layer proximate sidewalls of the charge-trapping layer pattern. The second blocking layer patterns are configured to limit lateral diffusion of electrons trapped in the charge-trapping layer pattern. A gate electrode is on the first blocking layer pattern. The second blocking layer patterns may prevent lateral diffusion of the electrons trapped in the charge-trapping layer pattern.

Abstract: Non-volatile memory device on a semiconductor substrate, comprising a semiconductor base layer, a charge storage layer stack, and a control gate; the base layer comprising source and drain regions and a current-carrying channel region being positioned in between the source and drain regions; the charge storage layer stack comprising a first insulating layer, a charge trapping layer and a second insulating layer, the first insulating layer being positioned above the current-carrying channel region, the charge trapping layer being above the first insulating layer and the second insulating layer being above the charge trapping layer; the control gate being positioned above the charge storage layer stack; the charge storage layer stack being arranged for trapping charge in the charge trapping layer by direct tunneling of charge carriers from the current-carrying channel region through the first insulating layer, wherein the current-carrying channel region is a p-type channel for p-type charge carriers, and the ma

Abstract: A silicon-oxide-nitride-oxide-silicon (SONOS) memory and the corresponding forming method are disclosed. The memory includes a plurality of select gate structures arranged in an array, a plurality of charge trap spacers that do not contact each other, and a plurality of word lines. The word lines can directly contact the select gates' surfaces of the select gate structures. All of the select gate structures disposed in one line can share two charge trap spacers, and the two charge trap spacers are disposed on the opposed sidewalls of these select gate structures.