Control Gate Layer Used For Peripheral Fet (epo) Patents (Class 257/E21.685)
  • Patent number: 10096596
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a first source region, a second source region, a first drain region, and a second drain region. The semiconductor device structure includes a first gate structure over the substrate and between the first source region and the first drain region. The semiconductor device structure includes a second gate structure over the substrate and between the second source region and the second drain region. A first thickness of the first gate structure is greater than a second thickness of the second gate structure. A first gate width of the first gate structure is less than a second gate width of the second gate structure.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: October 9, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cong-Min Fang, Chih-Lin Wang, Kang-Min Kuo
  • Patent number: 9377962
    Abstract: Disclosed is an apparatus and method for determining memory cell bias information for use in memory operations. One or more memory die are selected from a group of memory die, and one or more memory blocks selected from the selected one or more memory die. A group of cells within the selected memory blocks are programmed and cycled. Bias values are generated based on comparing one or more program levels associated with respective wordlines with predetermined programming levels. The bias values are stored lookup table that is configured to be accessible at runtime by a memory controller for retrieval of the bias value during a memory operation.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: June 28, 2016
    Assignee: HGST TECHNOLOGIES SANTA ANA, INC.
    Inventors: Aldo G. Cometti, Pablo Alejandro Ziperovich
  • Patent number: 8877585
    Abstract: A method of making a semiconductor structure using a substrate having a non-volatile memory (NVM) portion, a first high voltage portion, a second high voltage portion and a logic portion, includes forming a first conductive layer over an oxide layer on a major surface of the substrate in the NVM portion, the first and second high voltage portions, and logic portion. A memory cell is fabricated in the NVM portion while the first conductive layer remains in the first and second high voltage portions and the logic portion. The first conductive layer is patterned to form transistor gates in the first and second high voltage portions. A protective mask is formed over the NVM portion and the first and second high voltage portions. A transistor gate is formed in the logic portion while the protective mask remains in the NVM portion and the first and second high voltage portions.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: November 4, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Asanga H. Perera, Cheong Min Hong, Sung-Taeg Kang
  • Patent number: 8610193
    Abstract: Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
    Type: Grant
    Filed: February 12, 2013
    Date of Patent: December 17, 2013
    Assignee: Micron Technology Inc.
    Inventor: D. V. Nirmal Ramaswamy
  • Patent number: 8076713
    Abstract: A non-volatile memory device includes a substrate having a first region and a second region. A first gate electrode is disposed on the first region. A multi-layered charge storage layer is interposed between the first gate electrode and the substrate, the multi-layered charge storage including a tunnel insulation, a trap insulation, and a blocking insulation layer which are sequentially stacked. A second gate electrode is placed on the substrate of the second region, the second gate electrode including a lower gate and an upper gate connected to a region of an upper surface of the lower gate. A gate insulation layer is interposed between the second gate electrode and the substrate. The first gate electrode and the upper gate of the second gate electrode comprise a same material.
    Type: Grant
    Filed: April 13, 2009
    Date of Patent: December 13, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-Hyun Lee, Kyu-Charn Park
  • Patent number: 8058132
    Abstract: The present disclosure relates to a method of fabricating a flash memory device. According to the present disclosure, a hard mask layer to which surface roughnesses have been transferred by a metal silicide layer, including the surface roughness, is polished before or during a gate etch process in order to diminish the surface roughnesses. Thus, although surface roughnesses exist in the metal silicide layer, a SAC nitride layer formed over a gate can be prevented from being lost in a subsequent polishing process of a pre-metal dielectric layer, which is performed in order to form a contact plug. Accordingly, a hump phenomenon of a transistor can be improved.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: November 15, 2011
    Assignee: Hynix Semiconductor Inc.
    Inventors: Myung-Kyu Ahn, In No Lee
  • Patent number: 7998811
    Abstract: A semiconductor device includes a semiconductor substrate, a memory cell region provided on the semiconductor substrate, a word line provided on the memory cell region, a first gate insulating film provided in the memory cell region beneath the word line, a first floating gate electrode provided on the first gate insulating film, a second gate insulating film provided in the memory cell region beneath the word line, the second gate insulating film being different from the first gate insulating film in thickness, and a second floating gate electrode provided on the second gate insulating film.
    Type: Grant
    Filed: December 3, 2010
    Date of Patent: August 16, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Shinya Takahashi
  • Patent number: 7719046
    Abstract: The present invention includes floating gate transistor structures used in non-volatile memory devices such as flash memory devices. In one embodiment, a system includes a CPU and a memory device including an array having memory cells having columnar structures and a floating gate structure interposed between the structures that is positioned closer to one of the structures. In another embodiment, a memory device includes an array having memory cells having adjacent FETs having source/drain regions and a common floating gate structure that is spaced apart from the source/drain region of one FET by a first distance, and spaced apart from the source/drain region of the opposing FET by a second distance. In still another embodiment, a memory device is formed by positioning columnar structures on a substrate, and interposing a floating gate between the structures that is closer to one of the structures.
    Type: Grant
    Filed: May 3, 2006
    Date of Patent: May 18, 2010
    Assignee: Micron Technology, Inc.
    Inventor: Leonard Forbes
  • Patent number: 7605072
    Abstract: An interconnect structure that includes a barrier-redundancy feature which is capable of avoiding a sudden open circuit after an electromigration (EM) failure as well as a method of forming the same are provided. In accordance with the present invention, the barrier-redundancy feature is located within preselected locations within the interconnect structure including in a wide line region, a thin line region or any combination thereof. The barrier-redundancy feature includes an electrical conductive material located between, and in contact with, a conductive line diffusion barrier of a conductive line and a via diffusion barrier of an overlying via. The presence of the inventive barrier-redundancy feature creates an electrical path between the via diffusion barrier along the sidewalls of the via and the conductive line diffusion barrier along the sidewalls of the conductive line.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: October 20, 2009
    Assignee: International Business Machines Corporation
    Inventors: Chih-Chao Yang, Louis L. Hsu
  • Patent number: 7582550
    Abstract: A semiconductor memory device includes: a semiconductor substrate; a first impurity region; a second impurity region; a channel region; a first gate formed on a main surface on a side of the first impurity region; a second gate formed on the main surface on a side of the second impurity region, with a second insulating film being interposed; and a third insulating film formed on a side surface of the first gate. An interface between the third insulating film and the semiconductor substrate directly under the third insulating film is located above an interface between the second insulating film and the main surface of the semiconductor substrate directly under the second insulating film. The total number of steps can thus be reduced, and lower cost is achieved.
    Type: Grant
    Filed: March 21, 2006
    Date of Patent: September 1, 2009
    Assignee: Renesas Technology Corp.
    Inventor: Motoi Ashida
  • Patent number: 7553726
    Abstract: A method of fabricating nonvolatile memory devices may involve forming separate floating gates on a semiconductor substrate, forming control gates on the semiconductor substrate, conformally forming a buffer film on a surface of the semiconductor substrate, injecting ions into the semiconductor substrate between the pairs of the floating gates to form a common source region partially overlapping each floating gate of the respective pair of the floating gates, depositing an insulating film on the buffer film, etching the buffer film and the insulating film at side walls of the floating gates and the control gates to form spacers at the side walls of the floating gates and the control gates, and forming a drain region in the semiconductor substrate at a side of the control gate other than a side of the control gate where the common source region is formed.
    Type: Grant
    Filed: August 17, 2006
    Date of Patent: June 30, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: In-gu Yoon, Chul-soon Kwon, Jae-won Um, Jung-ho Moon
  • Patent number: 7547603
    Abstract: A memory cell has a trench formed into a surface of a semiconductor substrate, and spaced apart source and drain regions with a channel region formed therebetween. The source region is formed underneath the trench, and the channel region includes a first portion extending vertically along a sidewall of the trench and a second portion extending horizontally along the substrate surface. An electrically conductive floating gate is disposed in the trench adjacent to and insulated from the channel region first portion. An electrically conductive control gate is disposed over and insulated from the channel region second portion. An erase gate is disposed in the trench adjacent to and insulated from the floating gate. A block of conductive material has at least a lower portion thereof disposed in the trench adjacent to and insulated from the erase gate, and electrically connected to the source region.
    Type: Grant
    Filed: September 14, 2006
    Date of Patent: June 16, 2009
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Bomy Chen, Sohrab Kianian, Yaw Wen Hu
  • Patent number: 7504294
    Abstract: A semiconductor device comprises a memory cell array portion and peripheral circuit portion, wherein a first insulation film including elements as main components other than nitrogen fills between the memory cell gate electrodes of the memory cell array portion, the first insulation film is formed as a liner on a sidewall of a peripheral gate electrode of the peripheral circuit portion simultaneously with the memory cell portion, and a second insulation film including nitrogen as the main component is formed on the sidewall of the peripheral gate electrode via the first insulation film, thus enabling not only the formation of the memory cell portion having high reliability, but also the formation of a peripheral circuit with good efficiency, simultaneously, and avoiding gate offset of a peripheral gate.
    Type: Grant
    Filed: July 1, 2004
    Date of Patent: March 17, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kikuko Sugimae, Hiroyuki Kutsukake, Masayuki Ichige, Michiharu Matsui, Yuji Takeuchi, Riichiro Shirota
  • Patent number: 7425482
    Abstract: A non-volatile memory device and a method for fabricating the same are provided. The method includes: forming a plurality of gate structures on a substrate, each gate structure including a first electrode layer for a floating gate; forming a first insulation layer covering the gate structures and active regions located at each side of the gate structures; forming a second electrode layer over the first insulation layer; and forming a plurality of control gates on the active regions located at each side of the gate structures by performing an etch-back process to the second electrode layer.
    Type: Grant
    Filed: October 12, 2005
    Date of Patent: September 16, 2008
    Assignee: Magna-Chip Semiconductor, Ltd.
    Inventor: Yong-Sik Jeong
  • Publication number: 20070284645
    Abstract: A non-volatile memory device includes a substrate having a first region and a second region. A first gate electrode is disposed on the first region. A multi-layered charge storage layer is interposed between the first gate electrode and the substrate, the multi-layered charge storage including a tunnel insulation, a trap insulation, and a blocking insulation layer which are sequentially stacked. A second gate electrode is placed on the substrate of the second region, the second gate electrode including a lower gate and an upper gate connected to a region of an upper surface of the lower gate. A gate insulation layer is interposed between the second gate electrode and the substrate. The first gate electrode and the upper gate of the second gate electrode comprise a same material.
    Type: Application
    Filed: May 2, 2007
    Publication date: December 13, 2007
    Inventors: Chang-Hyun Lee, Kyu-Charn Park
  • Patent number: 7122430
    Abstract: The memory cell transistor has a first cell site gate insulator, a first lower conductive layer on the first cell site gate insulator, a first inter-electrode dielectric on the first lower conductive layer, and a first upper conductive layer on the first inter-electrode dielectric. A select transistor has a second cell site gate insulator having a same thickness as the first cell site gate insulator, a second lower conductive layer on the second cell site gate insulator, a second inter-electrode dielectric on the second lower conductive layer, and a second upper conductive layer on the second inter-electrode dielectric. The peripheral transistor has a first peripheral site gate insulator having a thickness thinner than the first cell site gate insulator.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: October 17, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Atsuhiro Sato, Makoto Sakuma, Fumitaka Arai
  • Patent number: 6911701
    Abstract: A metal oxide semiconductor transistor includes a semiconductor substrate; a source area formed in a device area of the semiconductor substrate; a drain area formed in the device area; a gate layer formed on and across the device area between the source area and the drain area; a control gate layer; and a diffusion area formed in the device area between the gate area and the control gate area. The control gate layer has a first part including a first end of the control gate layer and a second part including a second end of the control gate layer. The first part is formed on the device area between the source area and the gate layer. The first end is disposed so that there is a gap between the first end and an edge of the device area.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: June 28, 2005
    Assignees: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Yutaka Arima