Abstract: An acoustic sensing element has a substrate that includes a back chamber, a vibration electrode plate that is provided in a surface of the substrate while being opposite an upper surface opening of the back chamber, and a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate. The acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate. A lower surface of the back chamber is closed into a pouched shape by the substrate.

Abstract: The present invention provides an actuator exhibiting improved performance. The actuator is formed of an electrically conductive thin film formed from an ionic liquid and carbon nanotubes having an aspect ratio of not less than 104; or an electrically conductive thin film formed from an ionic liquid and carbon nanotubes having a length of not less than 50 ?m.

Abstract: A capacitive electromechanical transducer has at least one cell. The cell includes a first electrode, a movable vibrating portion including a second electrode disposed opposite the first electrode with a space therebetween, and a supporting portion that supports the vibrating portion. In order to regulate the strength of a border portion between the vibrating portion and the supporting portion, a strength regulating portion is provided.

Abstract: A Micro-electro-mechanical systems (MEMS) switching array includes circuitry, which may be coupled to a gate line of the array to adjust a temporal distribution of a gating signal applied to a plurality of MEMS switches that make up the switching array. The temporal distribution may be shaped to reduce a voltage surge that can develop in the switches during switching of electrical current. This voltage surge reduction is conducive to improving the durability of the array.

Abstract: An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a mechanical restoring force to the first capacitor plate. The deformable connector is configured to restore the first capacitor plate to be at an equilibrium rest position in response to no control voltage being applied across the capacitor. The comb drive is more engaged at the equilibrium rest position than at a mechanical stability threshold of the comb drive. The capacitor plates are disengaged at the equilibrium rest position.

Abstract: A method of forming a nanostructured surface, the method comprising including providing an original nanostructured surface having an array of high aspect ratio structures formed on a planar substrate; forming a negative replica mold of the original nanostructured surface, wherein the negative replica mold comprises a flexible material; deforming the negative replica mold; and using the deformed negative replica mold to form a deformed replica of the original nanostructured surface, wherein the deforming step is performed at least one of before, during, or after introducing a material for forming the deformed replica into the negative replica mold.

Abstract: The function of the key element of the SMA, is based on a mutual alternating slipping of two systems of filaments. Its contraction is caused by the attractive effect of van der Waal's forces between the functional particles among the filaments. The relaxation is attained through the repulsive effect of the electrostatic repulsive forces between the functional particles. The alternating change of ionic concentration in the area of the particles results in the alternating function of van der Waal's attraction and repulsive electrostatic forces. The size and material of the particles, their configuration and working temperature must be specifically optimized. The total contraction of the key element results from the summation of its partial contractions. The total force and contraction of the SNA result from the summation of the key elements in the parallel (collateral) and/or serial (linear ranked) arrangements, respectively.

Abstract: A flywheel system has an approximately toroidal flywheel rotor having an outer radius, the flywheel rotor positioned around and bound to a hub by stringers, the stringers each of a radius slightly smaller than the outer radius of the flywheel rotor. The hub is suspended from a motor-generator by a flexible shaft or rigid shaft with flexible joint, the flywheel rotor having a mass, substantially all of the mass of the flywheel rotor comprising fibers, the fibers in large part movable relative to each other. The motor-generator is suspended from a damped gimbal, and the flywheel rotor and motor-generator are within a chamber evacuatable to vacuum. An electrostatic motor/generator can also be within the same vacuum as the flywheel.

Abstract: A meter device includes an indicator unit, movably supported within a predetermined range, for representing an amplitude value of an input signal by a movement amount ?? from a reference position ?0 which is one end of the predetermined range. A gain acquiring unit acquire a gain of the input signal; and a maximum movement amount determining part determines a maximum movement amount ??M of the indicator unit at the gain based on the gain acquired by the gain acquiring unit. A drive control unit moves the indicator unit to a position corresponding to the amplitude value of the input signal between the reference position ?0 and a maximum movement position ?M moved from the reference position ?0 by the maximum movement amount ??M based on the maximum movement amount ??M determined by the maximum movement amount determining part and the amplitude value of the input signal.

Abstract: There is provided with a resonator which can correct the resonance frequency of a vibrator in a wide range and with a high accuracy and also provided with an oscillator using the resonator. In the resonator configured by the vibrator 101, electrodes 4, 5 disposed so as to oppose to parts of the surface of the vibrator 101 via gaps, and variable voltage sources 24, 25 for applying a voltage to both or one of the vibrator 101 and the electrodes 4, 5, each of the electrodes 4, 5 is configured by plural electrodes. The electrodes 4, 5 are respectively disposed via gaps close to the portions of the vibrator 101 having different vibration amplitudes. The DC voltages being applied are independently adjusted with respect to the electrodes 4, 5 which differ in distances from the shaft of the vibrator among the plural electrodes close to the vibrator 101.

Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application.

Abstract: A micro actuator system includes a micro actuator and a light beam generator. The micro actuator includes a substrate, a cantilever beam, and a carbon nano-tube layer. The cantilever beam has a connection portion connected to the substrate, and the carbon nano-tube layer is disposed on the cantilever beam in a spray deposition technique. When the light beam generator generates a light beam for irradiating the carbon nano-tube layer on the connection portion of the cantilever beam, the carbon nano-tube layer drives the cantilever beam to be deformed towards a first direction.

Abstract: This invention provides a polymer actuator having a structure such that voltage can be efficiently applied to two or more actuator electrodes without directly providing an electrical contact point to an expanding and contracting portion. An actuator has: an insulating base material 1; a first terminal 2 for energizing provided contacting the insulating base material; a first actuator electrode 4 provided contacting the first terminal; an electrolyte layer 5 provided contacting the first actuator electrode; a second actuator electrode 6 provided contacting the electrolyte layer; a second terminal 3 for energizing provided spaced apart from the first terminal and contacting the insulating base material; an energization preventing portion 7 for preventing energization of the first terminal and the second terminal; and a connecting portion 8 provided contacting the energization preventing portion in order to energize the second actuator electrode and the second terminal.

Abstract: An object of the invention is to provide a surface mounted resonator that improves impact resistance by the shape of a mounting terminal provided on an outside bottom face of a stacked resonator. A surface mounted crystal resonator is provided with a plurality of mounting terminals electrically connected to a hermetically sealed crystal piece at both ends of an outside bottom face having a rectangular shape long in the lengthwise direction, the mounting terminals having the same external dimensions with a total dimension of the mounting terminals in a lengthwise direction of the outside bottom face being 70% or more [but less than 100%] of a dimension in the lengthwise direction of the outside bottom face. Respective facing sides of the mounting terminals facing each other in a central area of the outside bottom face are formed curved in a convex shape such that a curvature thereof decreases gradually.

Abstract: An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers.

Abstract: An increased frequency power generator that includes a pair of transducers located on opposite sides of a suspended inertial mass. Magnetic attraction is used to couple the mass to each of the two transducers in alternating fashion in response to vibration and other movement externally imparted on the generator. Each transducer includes a suspended magnetic element that couples and decouples to the inertial mass as it reciprocates in the housing due to the applied external moving force. As the inertial mass decouples from one transducer on its way to magnetically connecting to the other transducer, the decoupled suspended magnetic element oscillates at a frequency greater than the imparting force, thereby generating electrical power.

Abstract: A method of producing an electromechanical device includes forming a layer of density-changing material on a substructure, and forming a support layer on at least a portion of the layer of density-changing material. The density-changing material has a first density during the forming the layer and a second density subsequent to the forming the support layer, the second density being greater than the first density such that the layer of density-changing material shrinks in at least one dimension to provide a gap between the layer of density changing material and at least one of the support layer and the substructure. A combined electronic and electromechanical device has a substrate, an electronic circuit formed on the substrate, and an electromechanical system formed on the substrate to provide a combined electronic and electromechanical device on a common substrate. The electromechanical system comprises a structure that is free to move within a gap defined by the electromechanical system.

Abstract: A gravitational shielding material that is composed of a chiral dielectric as well as a polar or non-polar dielectric matrixing material. Polarization of the dielectric is through the thickness of the material.

Abstract: A micro movable device according to an embodiment of the present invention may include a signal line formed on a support substrate, a ground line formed on the support substrate and arranged side by side with the signal line, a first driving electrode formed above the signal line, a second driving electrode formed above the ground line, a first auxiliary driving electrode arranged side by side with the first driving electrode, a second auxiliary driving electrode arranged side by side with the second driving electrode, and a movable electrode which is formed above the first driving electrode, the second driving electrode, the first auxiliary driving electrode and the second auxiliary driving electrode with a space therebetween, and which is supported on the support substrate.

Abstract: The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device comprises a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Abstract: A mechanical oscillator in accordance with one embodiment of the invention includes first and second electrodes and an electrolyte for conducting ions between the first and second electrodes. A power source, such as a voltage or current source, may be provided to create an alternating current between the first and second electrodes. This alternating current will cause ions to travel back and forth between the first and second electrodes through the electrolyte. The movement of ions will cause the first and second electrodes to physically expand and contract as the electrodes gain and lose mass, thereby creating desired oscillations or vibrations.

Abstract: An electromechanical resonating structure, including: first level major elements coupled to each other to form a second or higher level hierarchy; and first level sub-micron size minor elements with a characteristic frequency and coupled to each of the first level major elements to form a second level hierarchy in which a signal is effectively amplified by vibrating each of the plurality of major elements in at least one mode determined by the geometry and dimensions of the first level sub-micron minor elements.

Abstract: An electromechanical transducer, including: a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap; and an outer frame extending along an outer periphery of the plurality of devices, wherein the first electrode of each of the devices each includes a plurality of portions formed by electrically separating a device substrate with grooves, wherein the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves, wherein the first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and wherein the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions.

Abstract: Generating efficiency of a vibration power generating device, which generates power by vibration in the biaxial direction, is improved. The vibration power generating device is provided with: a first substrate (101) and a second substrate (106); a first electrode (104) formed on the first substrate; a fixed structural body (103); elastic structural bodies (102X, 102Y) which connect the first substrate and the fixed structural body with each other; and a second electrode (105) formed on the second substrate. Since the overlapping area of the electrodes is increased by arranging rectangular or square conductor parts (104a) of the first electrode and rectangular or square conductor parts (105a) of the second electrode in a checkerboard pattern, a generation region where power is generated by vibration is increased.

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators.

Abstract: An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°.

Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.

Abstract: In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are in contact with each other, and a remaining region of the vibration membrane other than the contact region is able to vibrate. There is an overlap region of the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region.

Abstract: An oscillator apparatus and method for vibration energy harvesting includes a nonlinear oscillator (e.g. piezoelectric, magnetic or liquid oscillator) configured in association with a potential energy profile to enhance a desirable nonlinear effect with a larger displacement and a wider spectrum response. A cantilever beam associated with a vibrating structure generates a mechanical energy in response to vibration forces. A mechanical-to-electrical power converter can be coupled to the nonlinear oscillator to convert the mechanical power into an electrical power. The frequency response of the nonlinear oscillator adapts to varying ambient vibrations and auto-tunes with respect to the ambient vibration change for wireless and MEMS applications.

Abstract: A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.

Abstract: An ultrasonic probe is provided with a CMUT chip having a plurality of transducer elements that change electromechanical coupling coefficients or sensitivities in accordance with a bias voltage to transmit and receive ultrasonic waves, an electric conducting layer formed on the ultrasonic irradiation side of the CMUT chip, an acoustic lens arranged on the ultrasonic irradiation side of the CMUT chip, an insulating layer formed in the direction opposite to the ultrasonic irradiation side of the acoustic lens, a housing unit that stores the CMUT chip in which the electric conducting layer and the insulating layer are fixed with an adhesive and the acoustic lens, wherein the insulating layer is formed by the material that includes at least either silicon oxide or paraxylene to prevent a solvent of the adhesive from soaking into the adhered portion.

Abstract: A method and device for using magnetostriction to generate electricity from fluid motion. The device includes a first structural component, an outer housing, and a strain structure. The outer housing substantially circumscribes the first structural component and at least partially defines an annular space between the first structural component and the outer housing. The strain structure is coupled within the annular space between the first structural component and the outer housing. The strain structure experiences a change in physical strain imposed by a bearing in response to a relative movement between the bearing and the strain structure. The strain structure includes a magnetostrictive material to generate a magnetic field in response to the change in the physical strain.

Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.

Abstract: A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current.

Abstract: A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass.

Abstract: Electrostatic generators/motors designs are provided that include a stator fixedly connected to a first central support centered about a central axis. The stator elements are attached to the first central support. Similarly, a second stator is connected to a central support centered about the central axis, and the second stator has stator elements attached to the second central support. A rotor is located between the first stator and the second stator and includes an outer support, where the rotor is rotatably centered about the central axis, the rotor having elements in contact with the outer support, each rotor element having an extending rotor portion that extends radially from the outer support toward the axis of rotation.

Abstract: To provide an electret having a high surface voltage, and an electrostatic induction conversion device comprising such an electret. An electret comprising a laminate wherein a layer (A) containing a resin (a) and a layer (B) containing a resin (b) other than the resin (a) or an inorganic substance (c) are directly laminated, wherein the resin (a) is a fluororesin (a1), or a resin (a2) having an alicyclic structure and containing no fluorine atom; and the layer (B) is disposed on the outermost surface on a side opposite to the side where electric charge is injected at the time of injecting electric charge into the laminate to form the electret.

Abstract: Provided is an electromechanical transducer device including a substrate that is conductive, and a plurality of electromechanical transducer elements disposed on a first surface of the substrate. A groove that electrically isolates the plurality of electromechanical transducer elements from each other is formed in the substrate, the groove extending from a second surface side of the substrate toward the first surface side of the substrate, the second surface being opposite the first surface. The width of the groove on the first surface side of the substrate is smaller than the width of the groove on the second surface side of the substrate.

Abstract: An electrostrictive composite includes a flexible polymer matrix and a number of one dimensional conductive materials dispersed in the flexible polymer matrix. The flexible polymer matrix is a sheet. The one dimensional conductive materials cooperatively form an electrically conductive structure in the flexible polymer matrix. The one dimensional conductive materials are oriented substantially along a same preferred direction.

Abstract: A nanoscale nanocrystal which may be used as a reciprocating motor is provided, comprising a substrate having an energy differential across it, e.g. an electrical connection to a voltage source at a proximal end; an atom reservoir on the substrate distal to the electrical connection; a nanoparticle ram on the substrate distal to the atom reservoir; a nanolever contacting the nanoparticle ram and having an electrical connection to a voltage source, whereby a voltage applied between the electrical connections on the substrate and the nanolever causes movement of atoms between the reservoir and the ram. Movement of the ram causes movement of the nanolever relative to the substrate. The substrate and nanolever preferably comprise multiwalled carbon nanotubes (MWNTs) and the atom reservoir and nanoparticle ram are preferably metal (e.g. indium) deposited as small particles on the MWNTs.

Abstract: Novel configurations for a miniature vibrating beam mechanical resonator provide low energy transfer to a supporting structure and low sensitivity to mounting misalignment. A symmetric suspended portion includes two vibrating beams that vibrate normal to a quiescent plane of the resonator, 180 degrees out of phase relative to one another. The vibrating beams are attached, at least at one end, to a torsional coupling element that is joined to a mounting pad along a non-translating suspension boundary. Counterbalances are attached to the vibrating beams, and the resonator is configured such that dynamic forces and moments coupled to each torsional coupling element from the vibrating beams are balanced along each nominal non-translating suspension boundary proximate to the symmetry axis and along the symmetry axis proximate to each nominal non-translating suspension boundary. Each non-translating suspension boundary is a torsional axis for a twisting deformation of the first torsional coupling element.

Abstract: Disclosed herein is a resonator including, a vibrating portion having a conductor portion, and three or more insulating portions provided so as to electrically separate the conductor portion into a plurality of blocks, wherein when a potential difference is caused across both ends in each of the three or more insulating portions, the vibrating portion carries out a resonance vibration based on a longitudinal vibration in accordance with a frequency of an A.C. signal inputted to each of corresponding ones of the plurality of blocks in the conductor portion.

Abstract: An electricity generator having variable capacitors that each includes a repeatedly stretched and relaxed sheet (20, FIG. 3) of SM (stretchable material) and electrodes (22, 24) lying against opposite faces of the sheet, which includes a power extraction unit (110, FIG. 9) coupled to the electrodes of at least a pair of capacitors that are activated out of phase with each other. The unit directs an electrical charge (current) from a first pair of electrodes that have a higher voltage, to one or more second pairs of electrodes that have a lower voltage, to recharge the second pairs of electrodes. During the current flow electrical power is extracted by the drop in voltage of current passing through the unit. The power extraction unit can be provided with a control unit that has voltage detectors (54) and that selectively connect capacitors, based on their voltages, for maximum efficiency in generating power output.

Abstract: Methods and systems for chip-to-chip communication via on-chip leaky wave antennas are provided. In this regard, RF signals may be communicated between a first leaky wave antenna in a first integrated circuit and a second leaky wave antenna in a second integrated circuit, where the first integrated circuit and the second integrated circuit are housed in a single integrated circuit package. The first integrated circuit and the second integrated circuit may be electrically isolated from one another. One or both of the first leaky wave antenna and the second leaky wave antenna may comprise a pair of coplanar conductive lines. Spacing between the coplanar conductive lines may be configured by applying a voltage which causes one or both of the coplanar conductive lines to deflect towards or away from the other one of the coplanar conductive lines.

Abstract: A capacitive micromachined ultrasonic transducer (CMUT) array connected to a separate electronic unit is provided. The CMUT array includes at least two active elements, a ground element at the array end, and a non-active element having isolation trenches disposed between the active and ground elements. The active element includes a doped first silicon layer, a doped second silicon layer, and a first insulating layer disposed there between. A cavity is in the first silicon layer having a cross section that includes vertical portions disposed at each end of a horizontal portion, and the vertical portion spans from the first insulating layer through the first silicon layer such that a portion of the first silicon layer is isolated by the first insulating layer and the cavity. A membrane layer on the first silicon layer spans the cavity. A bottom electrode is disposed on the bottom of the second silicon layer.

Abstract: The embodiments of the present invention are directed to multi-layer electrostatic energy harvester structures for extracting and converting more ambient vibration energy into electrical energy and/or extracting ambient vibration energy at a plurality of different vibration frequencies or frequency ranges. In some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of bonded variable capacitor layers. In some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of variable capacitor layers and at least one moving mass layer that are bonded together. Still in some embodiments, a multi-layer electrostatic energy harvester structure comprises a plurality of separate variable capacitor layers.

Abstract: The embodiments relate to a device, especially a microsystem, which comprises an energy converter unit having an electrode structure for the capacitive conversion of mechanical energy to electrical energy The electrode structure includes a first electrode and a second electrode the distance of which to the first electrode is variable. The device according to the invention also comprises a load circuit via which the first and second electrode are interconnected in an electroconductive manner. A transmitter is coupled to the second electrodes. The distance between the first and the second electrode can be varied by displacing the transmitter and the displacement of the transmitter can be effected in a countactles manner by interaction of the transmitter with a mobile part.

Abstract: An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to inject an electric charge into the capacitor and to remove the electric charge therefrom, including a charge injection electrode forming a portion of the second face positioned upstream from the fixed electrode in the direction of displacement of the liquid electrode, and a charge removal electrode forming a portion of the second face positioned downstream from the fixed electrode in the direction of displacement of the liquid electrode.

Abstract: A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.

Abstract: A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element.