Abstract: The present invention relates to an actuator which is one of the energy conversion devices, and is characterized by improving the ability to convert electrical energy into mechanical energy by way of using a dielectric elastomer composite comprising a filler with an efficient dispersibility. In case of using a conventional resilient dielectric layer, there was a problem in that the operating voltage is high, while advantageously exhibiting a fast response and a high strain.

Abstract: The present invention provides a technology for decreasing a dispersion of the performance among electromechanical transducers each having through wiring. A method for manufacturing an electromechanical transducer includes: obtaining a structure in which an insulative portion having a through hole therein is bonded onto an electroconductive substrate; filling the through hole with an electroconductive material to form a through wiring which is electrically connected with the electroconductive substrate; and using the electroconductive substrate as a first electrode, forming a plurality of vibrating membrane portions including a second electrode, which opposes to the first electrode through a plurality of gaps, on an opposite side of the first electrode to the side having the insulative portion, to thereby forming a plurality of cells.

Abstract: An applying liquid is applied to a first electrode by ejecting from a nozzle the applying liquid including a raw material for forming an elecromechanical transducer film, and a film of the applying liquid applied onto the first electrode is dried. The dried film is thermally decomposed and crystallized. At this time, a voltage is applied to an accompanying droplet collecting electrode for collecting a small accompanying droplet accompanying a chief droplet. The accompanying droplet is electrostatically attracted and collected by the accompanying droplet collecting electrode before reaching the first electrode. At this time, the voltage is applied to the accompanying droplet collecting electrode by the voltage applying part after a predetermined period of time has elapsed from when a droplet of the applying liquid has been ejected from the nozzle.

Abstract: Electrostatic generators/motors designs are provided that generally may include a first cylindrical stator centered about a longitudinal axis; a second cylindrical stator centered about the axis, a first cylindrical rotor centered about the axis and located between the first cylindrical stator and the second cylindrical stator. The first cylindrical stator., the second cylindrical stator and the first cylindrical rotor may be concentrically aligned. A magnetic field having field lines about parallel with the longitudinal axis is provided.

Abstract: An ultrasonic transducer and a method of manufacturing the same. The ultrasonic transducer includes a substrate, a supporting unit that is disposed on the substrate and comprises a through-hole, a thin-film disposed over the substrate in a region corresponding to the through-hole, wherein the thin-film is separated from the substrate and the supporting unit, and a connection unit that connects the supporting unit to the thin-film. In the method of manufacturing the ultrasonic transducer, a plurality of SOI wafers and a Si wafer are bonded without performing an aligning process.

Abstract: Provided are a capacitive transducer, and methods of manufacturing and operating the same. The capacitive transducer includes: a monolithic substrate comprising a first doping region, a second doping region that is opposite in conductivity to the first doping region, and a vibrating portion; and an empty space that is disposed between the first doping region and the vibrating portion. The vibrating portion includes a plurality of through-holes, and a material film for sealing the plurality of through-holes is disposed on the vibrating portion.

Abstract: A capacitive transducer and a readout circuit for processing a signal from a capacitive transducer. The readout circuit includes a high gain circuit element, two summing amplifiers and two feedback path. The high gain circuit element generates an amplified transducer signal, and the summing amplifiers sum the amplified transducer signal with a positive reference voltage and the negative reference voltage, respectively, to generate a first summation signal and a second summation signal. The feedback paths feed back the summation signals to the transducer. Output circuitry generates an output signal based on the summation signals. The high gain circuit element can be a a switched capacitor integrator. The output circuitry can generates the output signal based on the first and second summation signals.

Abstract: A method and system for using a method of pre-equilibrium ballistic charge carrier refraction comprises fabricating one or more solid-state electric generators. The solid-state electric generators include one or more of a chemically energized solid-state electric generator and a thermionic solid-state electric generator. A first material having a first charge carrier effective mass is used in a solid-state junction. A second material having a second charge carrier effective mass greater than the first charge carrier effective mass is used in the solid-state junction. A charge carrier effective mass ratio between the second effective mass and the first effective mass is greater than or equal to two.

Abstract: An electromechanical transducer includes a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap, and an outer frame extending along an outer periphery of the plurality of devices. The first electrode of each of the devices includes a plurality of portions formed by electrically separating a device substrate with grooves, and the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves. The first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions.

Abstract: Provided is an actuator which has high degree of integration and can reduce a difference of the developed force depending on a direction of displacement, and obtain a substantially uniform developed force over all directions. The actuator including a laminate which includes: a pair of electrode layers; an ion-conducting layer that is held between the pair of electrode layers; and an insulating layer that is disposed on one of the pair of electrode layers, in which the laminate forms a multilayer structure that is spirally wound around a conductive shaft, and multiple notches are formed in at least a partial region of the multilayer structure.

Abstract: A wafer level package of micro electromechanical system (MEMS) microphone includes a substrate, a number of dielectric layers stacked on the substrate, a MEMS diaphragm, a number of supporting rings and a protective layer. The MEMS diaphragm is disposed between two adjacent dielectric layers. A first chamber is between the MEMS diaphragm and the substrate. The supporting rings are disposed in some dielectric layers and stacked with each other. An inner diameter of the lower supporting ring is greater than that of the upper supporting ring. The protective layer is disposed on the upmost supporting ring and covers the MEMS diaphragm. A second chamber is between the MEMS diaphragm and the protective layer. The protective layer defines a number of first through holes for exposing the MEMS diaphragm. The wafer level package of MEMS microphone has an advantage of low cost.

Abstract: A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current.

Abstract: An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1a to 1d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1a to 1d of the stator 1. Multiple projecting elements 104b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2, forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface.

Abstract: A micro-image acquisition and transmission system is provided. In a preferred embodiment, the system is comprised of an image acquisition chip comprising an electronic imager, control electronics and a micro powered rotary stage comprising a transceiver array that acts as a hub to optically link a group of distributed image acquisition chips. A preferred embodiment is further comprised of a transceiver array chip comprising one or more micro-powered rotary stages having a transceiver array assembly disposed thereon. The micro-powered rotary stage is supported by a micro-brush bearing.

Abstract: An electric energy generating device. The electric energy generating device includes a piezoelectric structure including a material having piezoelectric characteristics, and an insulating film including a material having electret characteristics. When external energy is supplied to the insulating film, the insulating film contacts the piezoelectric structure and the piezoelectric structure is then deformed to generate electric energy. Also, electric energy is generated when an electrostatic capacitance between the insulating film and a substrate adjacent to the insulating film changes.

Abstract: A four-wire electrostatic actuator including: a stator having a substrate with two surfaces and at least four main-movement linear electrodes separately provided on one surface of the substrate and arranged in parallel at regular intervals; and a movable element disposed on the stator. The first and third main-movement linear electrodes of the four main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The second and fourth main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The two signals inputted to the adjacent two electrodes are shifted from each other by a quarter of a period with identical strength. The stator further includes a plurality of one-side auxiliary-movement linear electrodes on one side of the four main-movement linear electrodes, the auxiliary-movement linear electrodes being extended perpendicularly to the four main-movement linear electrodes.

Abstract: The present invention provides devices and structures and methods of use thereof in electrochemical actuation. This invention provides electrochemical actuators, which are based, inter-alia, on an electric field-driven intercalation or alloying of high-modulus inorganic compounds, which can produce large and reversible volume changes, providing high actuation energy density, high actuation authority and large free strain.

Abstract: A MEMS microphone. The MEMS microphone includes a membrane, a spring, and a first layer having a backplate, and a first OTS structure. The spring has a first end coupled to the membrane, and a second end mounted to a support. The first OTS structure is released from the backplate and coupled to a structure other than the backplate, and is configured to stop movement of the membrane in a first direction after the membrane has moved a predetermined distance.

Abstract: A microelectromechanical system (MEMS) device that reduces or eliminates stiction includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. A protrusion extends from the substrate and is configured to contact the movable element when the moving element moves in the at least one degree of freedom. The protrusion comprises a surface having a low surface energy relative a silicon oxide surface. The protrusion may be coupled to a voltage potential node to avoid or counteract electrostatic forces.

Abstract: A micro-electromechanical resonator includes a resonator body having a semiconductor region therein doped with boron to a level greater than about 1×1018 cm?3 and even greater than about 1×1019 cm?3, in order to obtain reductions in the temperature coefficient of frequency (TCF) of the resonator over a relatively large temperature range. Still further improvements in TCF can be achieved by degenerately doping the resonator body with boron and/or by boron-assisted aluminum doping of the resonator body.

Abstract: An electroconductive film for an actuator is formed from a gel composition including carbon nanofibers, an ionic liquid, and a polymer. The carbon nanofibers are produced with an aromatic mesophase pitch by melt spinning.

Abstract: The invention encompasses a method for production of electric power from a system of contacts of nanostructured conductive surfaces with a thin water-containing layer, and a hydroelectric generator for carrying out the method. The basis of the invention is a discovery, confirmed by experiments, that the contacts of the conductive surfaces, having nano-dimensional structural and/or parametrical heterogeneities, with the water-containing layer, having a thickness from several nanometers to a fraction of a millimeter, under certain conditions, described in the present disclosure, generate electromotive force in an external electrical load. The invention utilizes new principles for building power systems, which can find further wide application in various areas of science and technology.

Abstract: Methods of fabricating an electromechanical systems (EMS) device with spacers between plates and EMS devices formed by the same are disclosed. In one embodiment, a EMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier may be released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the EMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. Spacers are provided between the front substrate and the backplate to maintain a gap therebetween. The resulting EMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.

Abstract: Provided is an ion conducting actuator that easily allows reduction in size and integration thereof, compared to existing one, and gives a large generating force. The columnar ion conducting actuator includes a tubular member serving as a first electrode, an ion-supplying material disposed inside the tubular member, and linear second electrodes disposed inside the tubular member. The ion-supplying material lies between the inner wall of the tubular member and the second electrodes and includes a polymer gel containing positive ions and negative ions. The tubular member contains a plurality of the second electrodes. Either the positive ions or the negative ions contained in the polymer gel move toward the plurality of second electrodes side and the other ions move toward the inner wall side of the tubular member by applying a voltage between the tubular member and the plurality of the second electrodes to elongate the ion conducting actuator.

Abstract: An ultrasonic transducer includes a first electrode, a first insulation film covering the first electrode, a hollow part overlapping the first electrode on the first insulation film, a second insulation film covering the hollow part, a second electrode overlapping the hollow part on the second insulation film, and an interconnection joined to the second electrode. An edge of the first electrode is formed so as to moderate a step of the first electrode.

Abstract: To provide an electret whose surface potential is improved and an electrostatic induction conversion device comprising the same, an electret is formed by spin-coating a fluorine-containing polymer composition for coating which contains a fluorine-containing polymer having a ring structure in its main chain, a silane coupling agent, an aprotic fluorine-containing solvent, and a fluorine-containing alcohol as a protic fluorine-containing solvent on a copper substrate and baking it.

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam.

Abstract: A MEMS or NEMS device with at least one component made of a non-naturally occurring isotope material. The refined isotopic material provides advantages to device operation such as reduced mechanical loss, increased breakdown voltage, improved tunability and other advantages.

Abstract: In an ultrasonic transducer comprising a first electrode, a first insulating film disposed on the first electrode, a hollow part provided above the first insulating film and disposed between surfaces above and below the hollow part, a second insulating film disposed above the hollow part, and a second electrode disposed on the second insulating film, a first conductive film disposed on the side of the surface below the hollow part and a second conductive film disposed on the side of the surface above the hollow part are provided, the first conductive film and the second conductive film are disposed so that they overlap with a region in which the surfaces above and below the hollow part contact with each other as seen from above when the transducer is driven, and they do not overlap with each other in the region as seen from above.

Abstract: The present invention provides an actuator which suppresses the inflow of water and the like, and is unlikely to cause cracking and peeling even when repeatedly driven. An actuator having a conductive layer and an ion-conducting layer includes: a first layer which is provided in contact with the actuator and is formed from a polymer that suppresses the permeation of water; and a second layer which is provided in contact with the first layer, has a lower tensile elastic modulus than that of the first layer, protects the first layer, and is formed from a polymer. The first layer and the second layer can cover the whole actuator.

Abstract: An object of the present invention is to provide a vibration power generator in which the wiring from the movably held substrate can be omitted or simplified.

Abstract: A micromechanical component including a mass structure which may be deflected with respect to a substrate with the aid of at least one spiral spring in a direction of deflection. The spiral spring includes at least one folding section, which is formed by two spring legs which are situated essentially in parallel to each other and are connected to each other with the aid of a connecting bar. A damping device for oscillating movements of the folding section in the direction of deflection is provided in the area of the connecting bar.

Abstract: A system and method for biasing a capacitive ultrasonic transducer (CMUT) device with a circuit that includes a CMUT that includes a first plate and a second plate that form a membrane structure; a circuit voltage source at a complementary metal-oxide-semiconductor (CMOS) compatible voltage; a bias voltage source that applies a bias voltage greater than a CMOS compatible voltage and is applied to the first plate; and readout electronics with an input connected on the second plate side of the circuit.

Abstract: Systems and methods for creating a multiple degree of freedom (DOF) actuated device having a single transducer source, wherein each DOF is individually actuated by a particular amplified response frequency and wherein simultaneous multiple DOF actuation is possible through superimposing multiple frequencies. Further included are several embodiments rectifying DOF(s) into a continuous output motion.

Abstract: A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.

Abstract: A microelectromechanical systems (MEMS) device (20) includes a substrate (24) and a movable element (22) adapted for motion relative to the substrate (24). A secondary structure (58) extends from the movable element (22). The secondary structure (58) includes a secondary mass (70) and a spring (68) interconnected between the movable element (22) and the mass (70). The spring (68) is sufficiently stiff to prevent movement of the mass (70) when the movable element (22) is subjected to force within a sensing range of the device (20). However, the spring (68) deflects when the device (20) is subjected to mechanical shock (86), and the spring (68) rebounds thus causing the mass (70) to impact the movable element (22) in a direction that would be likely to dislodge a potentially stuck movable element (22).

Abstract: An electrostatic motor has a disc-shaped stator and a disc-shaped rotor are opposed to each other in a vacuum container. In the stator, first and second electrodes, which are attached to electrode supports, and which are electrically insulated from each other by an insulator, are arranged alternately in the circumferential direction. The first electrodes and the second electrodes on the side of the stator are arranged at a spacing of two or more rows at a predetermined distance from the center of a rotating shaft. The first electrodes and the second electrodes are arranged at a predetermined distance from the center of the rotating shaft and at an intermediate position between the rows of the first and second electrodes on the side of the stator.

Abstract: The micro-electro-mechanical system is provided with at least two separate anchoring elements (F1, F2) designed to be bound to a support. A anchoring element (F1, F2) is solidly linked to at least one beam (P1, P2) that can be deformed in bending, and two beams (P1, P2) respectively linked to two distinct anchoring elements (F1, F2) have different directions. A beam has a length L, a thickness e, and a height h, such that the stiffnesses KL in the directions of the length and of the height Kh are large and the stiffness in the direction of the thickness Ke is small.

Abstract: An actuator with a sensor, including an actuator having a pair of electrodes and an ionic conduction layer present between the pair of electrodes, and a sensor having electrodes and an electromechanical conversion element. When the actuator is deformed, the sensor is also deformed. The relationship between the modulus of elasticity (A) of the actuator and the modulus of elasticity (S) of the sensor satisfies S<A.

Abstract: Method and system (1) for stabilizing a temperature (Tcomp) of an integrated electrical component, placed in an oven, at a predefined temperature (Tset). The temperature of the integrated electrical component is sensed by means of temperature sensing means, comprising a first resp. second sensing element (61, 62) located in good thermal contact with the integrated electrical component, the first resp. second sensing elements (61, 62) having a first resp. second temperature dependent characteristic (63, 64), the second temperature dependency being different from the first temperature dependency such that the first and second characteristics (63, 64) intersect at the predefined temperature (Tset), and a sensing circuit (72) adapted for sensing the first and the second sensing elements (61, 62) and for supplying a first resp. second measurement signal (83, 84) indicative of the first resp.

Abstract: This invention provides a polymer actuator having a structure such that voltage can be efficiently applied to two or more actuator electrodes without directly providing an electrical contact point to an expanding and contracting portion. An actuator has: an insulating base material 1; a first terminal 2 for energizing provided contacting the insulating base material; a first actuator electrode 4 provided contacting the first terminal; an electrolyte layer 5 provided contacting the first actuator electrode; a second actuator electrode 6 provided contacting the electrolyte layer; a second terminal 3 for energizing provided spaced apart from the first terminal and contacting the insulating base material; an energization preventing portion 7 for preventing energization of the first terminal and the second terminal; and a connecting portion 8 provided contacting the energization preventing portion in order to energize the second actuator electrode and the second terminal.

Abstract: A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body (34) of the structure (30). The proof mass (32) includes movable fingers (60), each of which is disposed between a pair (62) of the fixed fingers (36, 38). A central area (42) of the body (34) is coupled to an underlying substrate (24), with the remainder of the immovable structure (30) and the proof mass (32) being suspended above the substrate (24) to largely isolate the MEMS device (20) from package stress, Additionally, the MEMS device (20) includes isolation trenches (80) and interconnects (46, 50, 64) so that the fixed fingers (36), the fixed fingers (38), and the movable fingers (60) are electrically isolated from one another to yield a differential device configuration.

Abstract: This invention relates generally to capacitive micromachined ultrasonic transducers (CMUTs), particularly to those comprising diamond or diamond like carbon membranes and a method of microfabrication of such CMUTs, wherein the membrane of diamond or diamond like carbon is attached to the substrate by plasma-activated direct bonding of an interlayer of high temperature oxide (HTO).

Abstract: An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.

Abstract: An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.

Abstract: A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.

Abstract: An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.

Abstract: A micromechanical component is described having a substrate which has at least one stator electrode fixedly mounted with respect to the substrate, a movable mass having at least one actuator electrode fixedly mounted with respect to the movable mass, and at least one spring via which the movable mass is displaceable. The movable mass is structured from the substrate with the aid of at least one separating trench, at least one outer stator electrode spans at least one section of the at least one separating trench and/or of the movable mass, the at least one actuator electrode protrudes between the at least one outer stator electrode and the substrate, and at least one inner stator electrode protrudes between the at least one actuator electrode and the substrate. A related manufacturing method is also described for a micromechanical component.

Abstract: A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.