Superlattice Patents (Class 257/15)
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Patent number: 11387356Abstract: A semiconductor structure includes a seed layer on a substrate and an epitaxial stack on the seed layer. The epitaxial stack includes a first superlattice part and a second superlattice part on the first superlattice part. The first superlattice part includes first units repetitively stacked M1 times on the seed layer. Each first unit includes a first sub-layer that is an Aly1Ga1-y1N layer, and a second sub-layer that is an Alx1Ga1-x1N layer, wherein y1<x1. The second superlattice part includes second units repetitively stacked M2 times on the first superlattice part. Each second unit includes a third sub-layer that is an Aly2Ga1-y2N layer, and a fourth sub-layer that is an Alx2Ga1-x2N layer, wherein y2<x2. M1 and M2 are positive integers, 0?x1, y1 and y2<1, 0<x2?1, and x1<x2, or x1=x2 and y1<y2.Type: GrantFiled: July 31, 2020Date of Patent: July 12, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan
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Patent number: 11329154Abstract: A semiconductor device may include a substrate and spaced apart first and second doped regions in the substrate. The first doped region may be larger than the second doped region to define an asymmetric channel therebetween. The semiconductor device may further include a superlattice extending between the first and second doped regions to constrain dopant therein. The superlattice may include a plurality of stacked groups of layers, with each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. A gate may overly the asymmetric channel.Type: GrantFiled: April 21, 2020Date of Patent: May 10, 2022Assignee: ATOMERA INCORPORATEDInventors: Hideki Takeuchi, Richard Burton, Yung-Hsuan Yang
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Patent number: 11276796Abstract: Photovoltaic structures having multiple absorber layers separated by a diffusion barrier are provided. In one aspect, a method of forming an absorber on a substrate includes: depositing a first layer of light absorbing material on the substrate; depositing a diffusion barrier; depositing a second layer of light absorbing material on the diffusion barrier, wherein the first layer of light absorbing material has a different band gap from the second layer of light absorbing material; and annealing the absorber, wherein the diffusion barrier prevents diffusion of elements between the first layer of light absorbing material and the second layer of light absorbing material during the annealing. A solar cell and method for formation thereof are also provided.Type: GrantFiled: June 11, 2019Date of Patent: March 15, 2022Assignee: International Business Machines CorporationInventors: Priscilla D. Antunez, Arthur W. Ellis, Richard A. Haight, James B. Hannon, Satoshi Oida
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Patent number: 11257909Abstract: A stacked, high-blocking III-V semiconductor power diode having a first metallic terminal contact layer, formed at least in regions, and a highly doped semiconductor contact region of a first conductivity type and a first lattice constant. A drift layer of a second conductivity type and having a first lattice constant is furthermore provided. A semiconductor contact layer of a second conductivity, which includes an upper side and an underside, and a second metallic terminal contact layer are formed, and the second metallic terminal contact layer being integrally connected to the underside of the semiconductor contact layer, and the semiconductor contact layer having a second lattice constant at least on the underside, and the second lattice constant being the lattice constant of InP, and the drift layer and the highly doped semiconductor contact region each comprising an InGaAs compound or being made up of InGaAs.Type: GrantFiled: April 30, 2020Date of Patent: February 22, 2022Assignees: AZUR SPACE Solar Power GmbH, 3-5 Power Electronics GmbHInventors: Daniel Fuhrmann, Gregor Keller, Clemens Waechter, Volker Dudek
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Seminconductor chip having internal terrace-like steps and method for producing a semiconductor chip
Patent number: 11031526Abstract: A semiconductor chip may include a semiconductor body, a current spreading layer, and a contact structure. The semiconductor body may include a first semiconductor layer, a second semiconductor layer, and an intervening active layer, and a current spreading layer arranged in a vertical direction between the contact structure and the semiconductor body. The semiconductor boy has a plurality of internal step configured in a terrace-like manner where the contact structure may include a plurality of conductor tracks arranged with regard to the lateral orientations of the internal step in such a way that current spreading along the internal steps is promoted vis-à-vis current spreading transversely with respect to the internal steps. A method for producing the semiconductor chip is also included.Type: GrantFiled: May 17, 2018Date of Patent: June 8, 2021Assignee: OSRAM OLED GmbHInventor: Alexander Tonkikh -
Patent number: 10910078Abstract: In a method of forming a one-time-programming (OTP) bit, a thin-film memory device is provided, which includes at least one memory element and a transistor, and the memory element is coupled to the transistor in series. Then, an alternating current is applied to the memory element and the transistor, the power applied to the memory element is constrained, and the transistor is turned on to change the resistance of the memory element for a plurality of cycles of the alternating current until the resistance of the memory element is irreversibly changed.Type: GrantFiled: June 9, 2020Date of Patent: February 2, 2021Assignee: NS Poles Technology Corp.Inventor: Yu Chou Ke
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Patent number: 10873017Abstract: A thermoelectric generator includes a perovskite dielectric substrate containing Sr and Ti and having electric conductivity by being doped to n-type; an energy filter formed on a top surface of the perovskite dielectric substrate, the energy filter including a first perovskite dielectric film, which contains Sr and Ti, has electric conductivity by being doped to n-type, and has a conduction band at an energy level higher than that of the perovskite dielectric substrate; a first electrode formed in electrical contact with a bottom surface of the perovskite dielectric substrate; and a second electrode formed in electrical contact with a top surface of the energy filter. The thermoelectric generator produces a voltage between the first and second electrodes by the top surface of the energy filter being exposed to a first temperature and the bottom surface of the perovskite dielectric substrate being exposed to a second temperature.Type: GrantFiled: August 12, 2019Date of Patent: December 22, 2020Assignee: FUJITSU LIMITEDInventors: John David Baniecki, Masatoshi Ishii, Kazuaki Kurihara
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Patent number: 10847619Abstract: An embodiment includes an apparatus comprising: a trench included in an insulation layer that is formed on a substrate, the trench having a top portion and a bottom portion between the top portion and the substrate; a first layer which comprises a first material and is included in the bottom portion; and a superlattice, in the trench and on the first layer, including second and third layers that directly contact each other; wherein: (a) the second and third layers respectively include second and third materials, (b) the second and third materials have different chemical compositions from each other, and (c) the first layer is thicker than each of the second and third. Other embodiments are described herein.Type: GrantFiled: September 30, 2016Date of Patent: November 24, 2020Assignee: Intel CorporationInventors: Cheng-Ying Huang, Matthew V. Metz, Willy Rachmady, Gilbert Dewey, Jack T. Kavalieros
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Patent number: 10816703Abstract: A coating composition comprising 6 to 20 alternating layers of SiO2 and one of ZrO2 or Nb2O5 wherein the thickness of each individual layer is about 70 nm to 200 nm is described. Also described is a substrate comprising a coating on at least a first major side thereof, the coating comprising 6 to 20 alternating layers of SiO2 and one of ZrO2 or Nb2O5 wherein the thickness of each individual layer is about 70 nm to 200 nm. The substrate can be glass, plastic, or metal. Also disclosed herein are methods of making the coated substrate. The coatings have good optical transparency and NIR reflectivity.Type: GrantFiled: September 28, 2016Date of Patent: October 27, 2020Assignee: Tru Vue, Inc.Inventor: James C. DeCoux
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Patent number: 10741994Abstract: A light emitter includes a substrate, a first mirror layer provided on the substrate, a columnar section including an active layer provided on a side of the first mirror layer that is the side opposite the substrate and a second mirror layer provided on a side of the active layer that is the side opposite the first mirror layer, a semi-insulating member provided on the side surface of the columnar section and having thermal conductivity higher than the thermal conductivity of the first mirror layer and the thermal conductivity of the second mirror layer, and a sub-mount which has a first surface bonded to the semi-insulating member and through which light produced in the active layer passes, and a second surface of the sub-mount that is the surface opposite the first surface is oriented in the direction in which the light produced in the active layer exits.Type: GrantFiled: January 29, 2019Date of Patent: August 11, 2020Assignee: Seiko Epson CorporationInventor: Masamitsu Mochizuki
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Patent number: 10700497Abstract: Provided is an optical semiconductor device including a laminate structural body 20 in which an n-type compound semiconductor layer 21, an active layer 23, and a p-type compound semiconductor layer 22 are laminated in this order. The active layer 23 includes a multiquantum well structure including a tunnel barrier layer 33, and a compositional variation of a well layer 312 adjacent to the p-type compound semiconductor layer 22 is greater than a compositional variation of another well layer 311. Band gap energy of the well layer 312 adjacent to the p-type compound semiconductor layer 22 is smaller than band gap energy of the other well layer 311. A thickness of the well layer 312 adjacent to the p-type compound semiconductor layer 22 is greater than a thickness of the other well layer 311.Type: GrantFiled: September 27, 2018Date of Patent: June 30, 2020Assignee: SONY CORPORATIONInventors: Masaru Kuramoto, Noriyuki Futagawa, Tatsushi Hamaguchi, Shoichiro Izumi
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Patent number: 10586701Abstract: Semiconductor base including: silicon-based substrate; buffer layer including first and second layers alternately on silicon-based substrate, first layer made of nitride-based compound semiconductor containing first material, second layer made of nitride-based compound semiconductor containing second material having larger lattice constant than first material; channel layer on buffer layer and made of nitride-based compound semiconductor containing second material, buffer layer has: first composition graded layer between at least one of first layers and second layer immediately thereabove, made of nitride-based compound semiconductor whose composition ratio of second material is increased gradually upward, whose composition ratio of first material is decreased gradually upward; second composition graded layer between at least one of second layers and first layer immediately thereabove, made of nitride-based compound semiconductor whose first material is increased gradually upward, whose composition ratio of sType: GrantFiled: February 26, 2016Date of Patent: March 10, 2020Assignees: SANKEN ELECTRIC CO., LTD., SHIN-ETSU HANDOTAI CO., LTD.Inventors: Hiroshi Shikauchi, Ken Sato, Masaru Shinomiya, Keitaro Tsuchiya, Kazunori Hagimoto
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Patent number: 10580927Abstract: A process of forming a light-receiving device type of avalanche photodiode (APD) is disclosed. The process includes steps of: (1) growing semiconductor layers on a semiconductor substrate, the semiconductor layers providing a first area on a top thereof; (2) thermally diffusing impurities within the semiconductor layers in a second area outside of the first area so as to leave a roughed surface in a top of the second area, the impurities laterally diffusing to form an diffusion edge locating inside of the first area; and (3) removing the semiconductor layers including the roughed surface thereof in the second area to form a mesa in the first area, the mesa including the diffusion edge in a periphery thereof but excluding the roughed surface.Type: GrantFiled: February 28, 2018Date of Patent: March 3, 2020Assignee: Sumitomo Electric Device Innovations, Inc.Inventors: Shin-ichi Domoto, Takumi Endo
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Patent number: 10505087Abstract: A nitride semiconductor ultraviolet light-emitting element 1 comprises a sapphire substrate 10 and an element structure part 20 formed on a main surface 101 of the substrate 10. In the substrate 10, in a first portion 110 extending from the main surface 101 by a first distance, a sectional area of a cross section parallel to the main surface 101 continuously increases with distance from the main surface 101, and in a second portion 120 extending from a side opposite to the main surface 101 by a second distance, a sectional area of a cross section parallel to the main surface 101 continuously increases with distance from the side opposite to the main surface 101. The sum of the first distance and the second distance is equal to or less than the thickness of the substrate 10.Type: GrantFiled: August 24, 2017Date of Patent: December 10, 2019Assignee: SOKO KAGAKU CO., LTD.Inventors: Akira Hirano, Yosuke Nagasawa
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Patent number: 10454006Abstract: A semiconductor structure including an anodic aluminum oxide layer is described. The anodic aluminum oxide layer can include a plurality of pores extending to an adjacent surface of the semiconductor structure. A filler material can penetrate at least some of the plurality of pores and directly contact the surface of the semiconductor structure. In an illustrative embodiment, multiple types of filler material at least partially fill the pores of the aluminum oxide layer.Type: GrantFiled: August 19, 2016Date of Patent: October 22, 2019Assignee: Sensor Electronic Technology, Inc.Inventors: Michael Shur, Maxim S. Shatalov, Alexander Dobrinsky
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Patent number: 10367332Abstract: An edge emitting laser light source and a three-dimensional (3D) image obtaining apparatus including the edge emitting laser light source are provided. The edge emitting laser light source includes a substrate; an active layer disposed on the substrate; a wavelength selection section comprising grating regions configured to select wavelengths of light emitted from the active layer; and a gain section configured to resonate the light having the selected wavelengths in a direction parallel with the active layer.Type: GrantFiled: October 7, 2016Date of Patent: July 30, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Changyoung Park, Byunghoon Na, Yonghwa Park
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Patent number: 10366918Abstract: After forming source/drain contact openings to expose portions of source/drain regions composed of an n-doped III-V compound semiconductor material, surfaces of the exposed portions of the source/drain regions are cleaned to remove native oxides and doped with plasma-generated n-type dopant radicals. Semiconductor caps are formed in-situ on the cleaned surfaces of the source/drain regions, and subsequently converted into metal semiconductor alloy regions. Source/drain contacts are then formed on the metal semiconductor alloy regions and within the source/drain contact openings.Type: GrantFiled: October 4, 2016Date of Patent: July 30, 2019Assignee: International Business Machines CorporationInventors: Kevin K. Chan, Sebastian U. Engelmann, Marinus Johannes Petrus Hopstaken, Christopher Scerbo, Hongwen Yan, Yu Zhu
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Patent number: 10361130Abstract: A method of forming fin structures that includes providing at least one silicon germanium containing fin structure, and forming a fin liner on the at least one silicon germanium containing fin structure. The fin liner includes a silicon germanium and oxygen containing layer. The method continues with annealing the at least on silicon germanium containing fin structure having the fin liner present thereon. During the annealing, the silicon germanium oxygen containing layer reacts with the silicon germanium containing fin structure to provide surface formation of a silicon rich layer on the silicon germanium containing fin structure.Type: GrantFiled: April 26, 2017Date of Patent: July 23, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ruqiang Bao, Hemanth Jagannathan, Choonghyun Lee, Richard G. Southwick
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Patent number: 10312390Abstract: A light receiving device includes a substrate having a principal surface and a back surface including a light receiving surface; a metal wire disposed on the principal surface, the metal wire including a bonding portion having an opening; and photodiodes that is arranged in an array on the substrate, each of the photodiodes including an electrode connected to the bonding portion of the metal wire and a semiconductor mesa including a stacked semiconductor layer, the stacked semiconductor layer including a first semiconductor layer disposed on the substrate, an optical absorption layer including a type-II superlattice structure, and a second semiconductor layer. Each of the electrodes of the photodiodes is disposed on a side surface of the semiconductor mesa in contact with the first semiconductor layer. The first semiconductor layer faces to the light receiving surface through the opening of the bonding portion.Type: GrantFiled: March 26, 2018Date of Patent: June 4, 2019Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Sundararajan Balasekaran, Daisuke Kimura
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Patent number: 10297691Abstract: A semiconductor device is provided and includes a semiconductor fin protruding from a semiconductor substrate. The semiconductor fin includes plural pairs of semiconductor layers on the semiconductor substrate, each pair of semiconductor layers consists of a first semiconductor layer of a first conductivity type, and a second semiconductor layer of a second conductivity type. The second semiconductor layer is stacked on and contacts the first semiconductor layer.Type: GrantFiled: November 6, 2017Date of Patent: May 21, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Pin Chen, Chi-Cherng Jeng, Ru-Shang Hsiao, Li-Yi Chen
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Patent number: 10276746Abstract: A hole supplier and p-contact structure for a light emitting device or a photodetector includes a p-type group III nitride structure and a hole supplier and p-contact layer made of Al-containing group III nitride formed on the p-type group III nitride structure and being under a biaxial in-plane tensile strain, the hole supplier and p-contact layer has a thickness in the range of 0.6-10 nm, and the p-type group III nitride structure is formed over an active region of the light emitting device or photodetector. A light emitting device and a photodetector with a hole supplier and p-contact structure.Type: GrantFiled: November 14, 2017Date of Patent: April 30, 2019Assignee: BOLB INC.Inventors: Jianping Zhang, Ying Gao, Ling Zhou
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Patent number: 10204988Abstract: An apparatus comprising: a fermion source nanolayer (90); a first insulating nanolayer (92); a fermion transport nanolayer (94); a second insulating nanolayer (96); a fermion sink nanolayer (98); a first contact for applying a first voltage to the fermion source nanolayer; a second contact for applying a second voltage to the fermion sink nanolayer; and a transport contact for enabling an electric current via the fermion transport nanolayer. In a particular example, the apparatus comprises three graphene sheets (90, 94, 98) interleaved with two-dimensional Boron-Nitride (hBN) layers (92, 96).Type: GrantFiled: December 1, 2015Date of Patent: February 12, 2019Assignee: Nokia Technologies OyInventor: Michael Astley
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Patent number: 10170302Abstract: A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of alternating layers of semiconductor material. A collector and emitter are formed adjacent to the intrinsic base on opposite sides of the base. An extrinsic base structure is formed on the intrinsic base.Type: GrantFiled: December 19, 2017Date of Patent: January 1, 2019Assignee: International Business Machines CorporationInventors: Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
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Patent number: 10109984Abstract: Provided is an optical semiconductor device including a laminate structural body 20 in which an n-type compound semiconductor layer 21, an active layer 23, and a p-type compound semiconductor layer 22 are laminated in this order. The active layer 23 includes a multiquantum well structure including a tunnel barrier layer 33, and a compositional variation of a well layer 312 adjacent to the p-type compound semiconductor layer 22 is greater than a compositional variation of another well layer 311. Band gap energy of the well layer 312 adjacent to the p-type compound semiconductor layer 22 is smaller than band gap energy of the other well layer 311. A thickness of the well layer 312 adjacent to the p-type compound semiconductor layer 22 is greater than a thickness of the other well layer 311.Type: GrantFiled: October 2, 2015Date of Patent: October 23, 2018Assignee: SONY CORPORATIONInventors: Masaru Kuramoto, Noriyuki Futagawa, Tatsushi Hamaguchi, Shoichiro Izumi
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Patent number: 10026868Abstract: A method is specified for producing an optoelectronic semiconductor component, comprising the following steps: A) providing a structured semiconductor layer sequence (21, 22, 23) having —a first semiconductor layer (21) with a base region (21c), at least one well (211), and a first cover region (21a) in the region of the well (211) facing away from the base surface (21c), —an active layer (23), and —a second semiconductor layer (22) on a side of the active layer (23) facing away from the first semiconductor layer (21), wherein —the active layer (23) and the second semiconductor layer (22) are structured jointly in a plurality of regions (221, 231) and each region (221, 231) forms, together with the first semiconductor layer (21), an emission region (3), B) simultaneous application of a first contact layer (41) on the first cover surface (21a) and a second contact layer (42) on a second cover surface (3a) of the emission regions (3) facing away from the first semiconductor layer (21) in such a way that —the fiType: GrantFiled: September 2, 2015Date of Patent: July 17, 2018Assignee: OSRAM Opto Semiconductors GmbHInventors: Isabel Otto, Alexander F. Pfeuffer, Dominik Scholz
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Patent number: 9984871Abstract: A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of alternating layers of semiconductor material. A collector and emitter are formed adjacent to the intrinsic base on opposite sides of the base. An extrinsic base structure is formed on the intrinsic base.Type: GrantFiled: May 2, 2017Date of Patent: May 29, 2018Assignee: International Business Machines CorporationInventors: Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
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Patent number: 9959947Abstract: A composite including: silicon (Si); a silicon oxide of the formula SiOx, wherein 0<x<2; and a graphene disposed on the silicon oxide.Type: GrantFiled: September 29, 2014Date of Patent: May 1, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Inhyuk Son, Hyunjae Song, Inyong Song, Jaeman Choi, Seungsik Hwang, Junhwan Ku, Jonghwan Park, Yeonji Chung
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Patent number: 9946021Abstract: A method for fabricating a waveguide construction is described and has steps of: providing a layered structure by: forming a first-type InGaAsP layer on a substrate, forming a first-type InP layer on the first-type InGaAsP layer, forming an active layer containing gallium on the first-type InP layer, forming a second-type InP layer on the active layer, and forming a second-type InGaAsP layer on the second-type InP layer; forming an SiO2 patterned layer having SiO2 regions and at least one channel facing toward a desired direction and formed between the SiO2 regions on the second-type InGaAsP layer; and performing a rapid thermal annealing treatment on the layered structure formed with the SiO2 patterned layer. The rapid thermal annealing treatment has a treating temperature between 720° C. and 760° C. and a treating time between 60 and 240 seconds.Type: GrantFiled: July 6, 2017Date of Patent: April 17, 2018Assignee: NATIONAL SUN YAT-SEN UNIVERSITYInventors: Yi-Jen Chiu, Po-Yun Wang, Wei Lin, Yang-Jeng Chen
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Patent number: 9935202Abstract: To provide a transistor having a favorable electric characteristics and high reliability and a display device including the transistor. The transistor is a bottom-gate transistor formed using an oxide semiconductor for a channel region. An oxide semiconductor layer subjected to dehydration or dehydrogenation through heat treatment is used as an active layer. The active layer includes a first region of a superficial portion microcrystallized and a second region of the rest portion. By using the oxide semiconductor layer having such a structure, a change to an n-type, which is attributed to entry of moisture to the superficial portion or elimination of oxygen from the superficial portion, and generation of a parasitic channel can be suppressed. In addition, contact resistance between the oxide semiconductor layer and source and drain electrodes can be reduced.Type: GrantFiled: June 20, 2012Date of Patent: April 3, 2018Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Shunpei Yamazaki, Masayuki Sakakura, Ryosuke Watanabe, Junichiro Sakata, Kengo Akimoto, Akiharu Miyanaga, Takuya Hirohashi, Hideyuki Kishida
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Patent number: 9935185Abstract: A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of alternating layers of semiconductor material. A collector and emitter are formed adjacent to the intrinsic base on opposite sides of the base. An extrinsic base structure is formed on the intrinsic base.Type: GrantFiled: May 2, 2017Date of Patent: April 3, 2018Assignee: International Business Machines CorporationInventors: Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Alexander Reznicek
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Patent number: 9910220Abstract: Photonic integrated circuits on silicon are disclosed. By bonding a wafer of HI-V material as an active region to silicon and removing the substrate, the lasers, amplifiers, modulators, and other devices can be processed using standard photolithographic techniques on the silicon substrate. The coupling between the silicon waveguide and the III-V gain region allows for integration of low threshold lasers, tunable lasers, and other photonic integrated circuits with Complimentary Metal Oxide Semiconductor (CMOS) integrated circuits.Type: GrantFiled: July 8, 2015Date of Patent: March 6, 2018Assignee: The Regents of the University of CaliforniaInventor: John E. Bowers
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Patent number: 9911868Abstract: A nitride semiconductor device includes: a conductive substrate; a first nitride semiconductor layer which is formed on the substrate and contains Ga or Al; an electron supply layer which is formed in contact with the first nitride semiconductor layer and is made of a second nitride semiconductor having a different composition from that of the first nitride semiconductor layer in an interface between the electron supply layer and the first nitride semiconductor layer; and a source, a gate and a drain or an anode and a cathode which are formed on a front surface of the substrate, wherein the first nitride semiconductor layer has a thickness of w or more, a deep acceptor concentration distribution NDA(z) and a shallow acceptor concentration distribution NA(z), which satisfy the following equations (1) to (3): ? 0 w ? { E c ? ( x ) - ? 0 w ? q ? ( N DA ? ( z ) + N A ? ( z ) ) ? 0 ? ? ? dz } ? ? dz ? ? V b ( 1 ) E c ? ( x ) = 3.Type: GrantFiled: March 24, 2016Date of Patent: March 6, 2018Assignee: ROHM CO., LTD.Inventor: Taketoshi Tanaka
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Patent number: 9899479Abstract: A semiconductor device may include a semiconductor substrate, and a plurality of field effect transistors (FETs) on the semiconductor substrate. Each FET may include a gate, spaced apart source and drain regions on opposite sides of the gate, upper and lower vertically stacked superlattice layers and a bulk semiconductor layer therebetween between the source and drain regions, and a halo implant having a peak concentration vertically confined in the bulk semiconductor layer between the upper and lower superlattices.Type: GrantFiled: May 13, 2016Date of Patent: February 20, 2018Assignee: ATOMERA INCORPORATEDInventors: Robert J. Mears, Hideki Takeuchi
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Patent number: 9859457Abstract: A template for a semiconductor device is made by providing an AGN substrate, growing a first layer of Group III nitrides on the substrate, depositing a thin metal layer on the first layer, annealing the metal such as gold so that it agglomerates to form a pattern of islands on the first layer; transferring the pattern into the first layer by etching then removing excess metal; and then depositing a second Group III nitride layer on the first layer. The second layer, through lateral overgrowth, coalesces over the gaps in the island pattern leaving a smooth surface with low defect density. A Group III semiconductor device may then be grown on the template, which may then be removed. Chlorine gas may be used for etching the pattern in the first layer and the remaining gold removed with aqua regia.Type: GrantFiled: May 18, 2015Date of Patent: January 2, 2018Assignee: Nitek, Inc.Inventors: Vinod Adivarahan, Asif Khan, Iftikhar Ahmad, Bin Zhang, Alexander Lunev
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Patent number: 9831397Abstract: Fabricating a semiconductor structure including forming a nanocrystalline core from a first semiconductor material, forming a nanocrystalline shell from a second, different, semiconductor material that at least partially surrounds the nanocrystalline core, wherein the nanocrystalline core and the nanocrystalline shell form a quantum dot. Fabrication further involves forming an insulator layer encapsulating the quantum dot to create a coated quantum dot, and forming an additional insulator layer on the coated quantum dot using an Atomic Layer Deposition (ALD) process.Type: GrantFiled: March 8, 2016Date of Patent: November 28, 2017Assignee: Pacific Light Technologies Corp.Inventors: Brian Theobald, Matthew Bertram, Weiwen Zhao, Juanita N. Kurtin, Norbert Puetz
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Patent number: 9773909Abstract: Tunneling field-effect transistors including silicon, germanium or silicon germanium channels and III-N source regions are provided for low power operations. A broken-band heterojunction is formed by the source and channel regions of the transistors. Fabrication methods include selective anisotropic wet-etching of a silicon substrate followed by epitaxial deposition of III-N material and/or germanium implantation of the substrate followed by the epitaxial deposition of the III-N material.Type: GrantFiled: August 8, 2016Date of Patent: September 26, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Anirban Basu, Bahman Hekmatshoartabari, Davood Shahrjerdi
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Patent number: 9607987Abstract: Methods are disclosed for forming fins in transistors. In one embodiment, a method of fabricating a device includes forming silicon fins on a substrate and forming a dielectric layer on the substrate and adjacent to the silicon fins such that an upper region of each silicon fin is exposed. Germanium may then be epitaxially grown germanium on the upper regions of the silicon fins to form germanium fins.Type: GrantFiled: December 21, 2011Date of Patent: March 28, 2017Assignee: Intel CorporationInventors: Martin D. Giles, Tahir Ghani
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Patent number: 9595810Abstract: Light emitting elements, and methods of producing the same, the light emitting elements including: a laminated structure, the laminated structure including a first compound semiconductor layer that includes a first surface and a second surface facing the first surface, an active layer that is in contact with the second surface of the first compound semiconductor layer, and a second compound semiconductor layer; where the first surface of the first compound semiconductor layer has a first surface area and a second surface area, the first and second surface areas being different in at least one of a height or a roughness, a first light reflection layer is formed on at least a portion of the first surface area, and a first electrode is formed on at least a portion of the second surface area.Type: GrantFiled: August 1, 2014Date of Patent: March 14, 2017Assignee: Sony CorporationInventors: Tatsushi Hamaguchi, Masaru Kuramoto, Noriyuki Futagawa
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Patent number: 9583566Abstract: An embodiment includes a heterojunction tunneling field effect transistor including a source, a channel, and a drain; wherein (a) the channel includes a major axis, corresponding to channel length, and a minor axis that corresponds to channel width and is orthogonal to the major axis; (b) the channel length is less than 10 nm long; (c) the source is doped with a first polarity and has a first conduction band; (d) the drain is doped with a second polarity, which is opposite the first polarity, and the drain has a second conduction band with higher energy than the first conduction band. Other embodiments are described herein.Type: GrantFiled: November 16, 2015Date of Patent: February 28, 2017Assignee: Intel CorporationInventors: Uygar E. Avci, Dmitri E. Nikonov, Ian A. Young
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Patent number: 9559196Abstract: A semiconductor wafer includes a base wafer, a first semiconductor portion that is formed on the base wafer and includes a first channel layer containing a majority carrier of a first conductivity type, a separation layer that is formed over the first semiconductor portion and contains an impurity to create an impurity level deeper than the impurity level of the first semiconductor portion, and a second semiconductor portion that is formed over the separation layer and includes a second channel layer containing a majority carrier of a second conductivity type opposite to the first conductivity type.Type: GrantFiled: October 30, 2012Date of Patent: January 31, 2017Assignee: SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Naohiro Nishikawa, Tsuyoshi Nakano, Takayuki Inoue
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Patent number: 9548395Abstract: Provided is a field-effect transistor (FET) having small off-state current, which is used in a miniaturized semiconductor integrated circuit. The field-effect transistor includes a thin oxide semiconductor which is formed substantially perpendicular to an insulating surface, a gate insulating film formed to cover the oxide semiconductor, and a gate electrode which is formed to cover the gate insulating film. The gate electrode partly overlaps a source electrode and a drain electrode. The source electrode and the drain electrode are in contact with at least a top surface of the oxide semiconductor. In this structure, three surfaces of the thin oxide semiconductor are covered with the gate electrode, so that electrons injected from the source electrode or the drain electrode can be effectively removed, and most of the space between the source electrode and the drain electrode can be a depletion region; thus, off-state current can be reduced.Type: GrantFiled: September 9, 2015Date of Patent: January 17, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hiromichi Godo, Yasuhiko Takemura
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Patent number: 9548377Abstract: Thermal treatment of a semiconductor wafer in the fabrication of integrated circuits including MOS transistors and ferroelectric capacitors, including those using lead-zirconium-titanate (PZT) ferroelectric material, to reduce variation in the electrical characteristics of the transistors. Thermal treatment of the wafer in a nitrogen-bearing atmosphere in which hydrogen is essentially absent is performed after formation of the transistors and capacitor. An optional thermal treatment of the wafer in a hydrogen-bearing atmosphere prior to deposition of the ferroelectric treatment may be performed.Type: GrantFiled: May 9, 2014Date of Patent: January 17, 2017Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Kezhakkedath R. Udayakumar, Kemal Tamer San
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Patent number: 9548420Abstract: A light-emitting device comprises a substrate comprising a top surface; a light-emitting stack formed on a portion of the top surface of the substrate; and a plurality of pores formed in an area of the substrate, wherein the area is under another portion of the top surface where the light-emitting stack is not formed thereon.Type: GrantFiled: April 20, 2015Date of Patent: January 17, 2017Assignee: EPISTAR CORPORATIONInventors: Chun-Hsiang Tu, De-Shan Kuo, Po-Shun Chiu, Chi-Shiang Hsu
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Patent number: 9510445Abstract: In the present invention, a copper electrode having a nanohole structure is prepared by using a polymer substrate in the form of nanopillars in order to avoid fatigue fracture that causes degradation of electrical and mechanical properties of a flexible electrode during repetitive bending of a typical metal electrode. The nanohole structure may annihilate dislocations to suppress the initiation of fracture and may blunt crack tips to delay the propagation of damage. Therefore, the nanohole electrode exhibits very small changes in electrical resistance during a bending fatigue test.Type: GrantFiled: November 26, 2012Date of Patent: November 29, 2016Assignees: SNU R&DB FOUNDATION, KOREA INSTITUTE OF SCIENCE AND TECHNOLOGYInventors: Young Chang Joo, In Suk Choi, Myoung Woon Moon, Byoung Joon Kim, Min Suk Jung
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Patent number: 9466739Abstract: The present disclosure relates to an electromagnetic energy detector. The detector can include a substrate having a first refractive index; a metal layer; an absorber layer having a second refractive index and disposed between the substrate and the metal layer; a coupling structure to convert incident radiation to a surface plasma wave; additional conducting layers to provide for electrical contact to the electromagnetic energy detector, each conducting layer characterized by a conductivity and a refractive index; and a surface plasma wave (“SPW”) mode-confining layer having a third refractive index that is higher than the second refractive index disposed between the substrate and the metal layer.Type: GrantFiled: March 14, 2014Date of Patent: October 11, 2016Assignee: STC.UNMInventors: Steven R. J. Brueck, Sanjay Krishna, Seung-Chang Lee
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Patent number: 9406823Abstract: Methods for fabricating self-aligned heterostructures and semiconductor arrangements using silicon nanowires are described.Type: GrantFiled: July 11, 2014Date of Patent: August 2, 2016Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGYInventors: Andrew P. Homyk, Michael D. Henry, Axel Scherer, Sameer Walavalkar
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Patent number: 9318645Abstract: A nitride semiconductor light-emitting element includes a second light-emitting layer, a third barrier layer, and a first light-emitting layer from a side close to a p-type nitride semiconductor layer. The first light-emitting layer includes a plurality of first quantum well layers and a first barrier layer provided between the plurality of first quantum well layers. The second light-emitting layer includes a plurality of second quantum well layers and a second barrier layer provided between the plurality of second quantum well layers. The second quantum well layers include a multiple quantum well light-emitting layer thicker than the first quantum well layers.Type: GrantFiled: October 16, 2013Date of Patent: April 19, 2016Assignee: SHARP KABUSHIKI KAISHAInventors: Yoshihiko Tani, Tadashi Takeoka, Akihiro Kurisu, Tetsuya Hanamoto, Mathieu Senes
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Patent number: 9287456Abstract: Provided is an element structure whereby it is possible to produce a silicon-germanium light-emitting element enclosing an injected carrier within a light-emitting region. Also provided is a method of manufacturing the structure. Between the light-emitting region and an electrode there is produced a narrow passage for the carrier, specifically, a one-dimensional or two-dimensional quantum confinement region. A band gap opens up in this section due to the quantum confinement, thereby forming an energy barrier for both electrons and positive holes, and affording an effect analogous to a double hetero structure in an ordinary Group III-V semiconductor laser. Because no chemical elements other than those used in ordinary silicon processes are employed, the element can be manufactured inexpensively, simply by controlling the shape of the element.Type: GrantFiled: June 12, 2012Date of Patent: March 15, 2016Assignee: HITACHI, LTD.Inventors: Yuji Suwa, Shinichi Saito, Etsuko Nomoto, Makoto Takahashi
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Patent number: 9279763Abstract: An analyte measuring device (5) for monitoring, for example, levels of a tissue analyte (e.g., bilirubin), includes a number of narrow band light sources (10), each narrow band light source being structured to emit a spectrum of light covering a number of wavelengths, and a number of detector assemblies (15) configured to receive light reflected from the transcutaneous tissues of a subject. Each of the detector assemblies includes a filter (20) and a photodetector (25), each filter being structured to transmit a main transmission band and one or more transmission sidebands, wherein for each narrow band light source the spectrum thereof includes one or more wavelengths that fall within the transmission band of at least one of the filters, and wherein for each narrow band light source the spectrum thereof does not include any wavelengths that fall within the one or more transmission sidebands of any of the optical filters.Type: GrantFiled: April 27, 2011Date of Patent: March 8, 2016Assignee: Koninklijke Philip N.V.Inventors: Eduard Johannes Meijer, Srinivas Rao Kudavelly
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Patent number: 9263662Abstract: The present disclosure provides a thermoelectric element comprising a flexible semiconductor substrate having exposed surfaces with a metal content that is less than about 1% as measured by x-ray photoelectron spectroscopy (XPS) and a figure of merit (ZT) that is at least about 0.25, wherein the flexible semiconductor substrate has a Young's Modulus that is less than or equal to about 1×106 pounds per square inch (psi) at 25° C.Type: GrantFiled: March 24, 2015Date of Patent: February 16, 2016Assignee: SILICIUM ENERGY, INC.Inventors: Akram I. Boukai, Douglas W. Tham, Haifan Liang