For Protecting Against Gate Insulator Breakdown Patents (Class 257/356)
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Patent number: 7807528Abstract: An electrostatic discharge (ESD) transistor structure includes a self-aligned outrigger less than 0.4 microns from a gate electrode that is 50 microns wide. The outrigger is fabricated on ordinary logic transistors of an integrated circuit without severely affecting the performance of the transistors. The outrigger is used as an implant blocking structure to form first and second drain regions on either side of a lightly doped region that underlies the outrigger. The self-aligned outrigger and the lightly doped region beneath it are used to move the location of avalanche breakdown upon an ESD event away from the channel region. Durability is extended when fewer “hot carrier” electrons accumulate in the gate oxide. A current of at least 100 milliamperes can flow into the drain and then through the ESD transistor structure for a period of more than 30 seconds without causing a catastrophic failure of the ESD transistor structure.Type: GrantFiled: March 24, 2009Date of Patent: October 5, 2010Assignee: ZiLOG, Inc.Inventors: John A. Ransom, Brett D. Lowe, Michael J. Westphal
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Patent number: 7795684Abstract: An active device array substrate including a substrate, a plurality of pixel units, a plurality of first conductive lines, a plurality of second conductive lines, a lead line, at least one first electrostatic discharge protection circuit, and at least one second electrostatic discharge protection circuit is provided. The pixel units are arranged on the substrate. Additionally, the first conductive lines and the second conductive lines are disposed on the substrate and electrically connected to the pixel units respectively. Moreover, the lead line crosses the first conductive lines. The first electrostatic discharge protection circuit is disposed at one side of the lead line, and the second electrostatic discharge protection circuit corresponding to the first electrostatic discharge protection circuit is disposed at the other side of the lead line.Type: GrantFiled: November 24, 2006Date of Patent: September 14, 2010Assignee: Chunghwa Picture Tubes, LTD.Inventors: Chun-An Lin, Wen-Hsiung Liu
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Patent number: 7781769Abstract: A transistor array panel includes switching elements provided in intersecting portions between gate and data lines, and display electrodes connected to the switching elements. A conductive film pattern is provided to be electrically insulated from the gate and data lines, and display electrodes, and to be overlapped on the display electrodes, thereby forming a storage capacitance between each of the display electrodes and the conductive film pattern. A protection circuit is electrically connected to the gate and data lines, and disposed in an outer peripheral portion of a display region in which the switching elements and the display electrodes are formed on the one side of the substrate. A common line is insulated from the protection circuit, connected to the conductive film pattern, and provided to be insulated from the protection circuit and to be at least partially overlapped on the protection circuit, in the outer peripheral portion of the display region.Type: GrantFiled: September 29, 2008Date of Patent: August 24, 2010Assignee: Casio Computer Co., Ltd.Inventor: Yayoi Nakamura
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Patent number: 7768034Abstract: An electrostatic discharge (ESD) protection network for power MOSFETs includes parallel branches, containing polysilicon zener diodes and resistors, used for protecting the gate from rupture caused by high voltages caused by ESD. The branches may have the same or independent paths for voltage to travel across from the gate region into the semiconductor substrate. Specifically, the secondary branch has a higher breakdown voltage than the primary branch so that the voltage is shared across the two branches of the protection network. The ESD protection network of the device provides a more effective design without increasing the space used on the die. The ESD protection network can also be used with other active and passive devices such as thyristors, insulated-gate bipolar transistors, and bipolar junction transistors.Type: GrantFiled: October 1, 2007Date of Patent: August 3, 2010Assignee: Fairchild Semiconductor CorporationInventors: Daniel S. Calafut, Hamza Yilmaz, Steven Sapp
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Patent number: 7763940Abstract: An electronic device having an LV-well element trigger structure that reduces the effective snapback trigger voltage in MOS drivers or ESD protection devices. A reduced triggering voltage facilitates multi-finger turn-on and thus uniform current flow and/or helps to avoid competitive triggering issues.Type: GrantFiled: December 15, 2005Date of Patent: July 27, 2010Assignee: Sofics BVBAInventors: Markus Paul Josef Mergens, Bart Keppens, Koen Verhaege, John Armer, Cong Son Trinh
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Patent number: 7763908Abstract: A silicon-controlled rectifier apparatus, comprising a substrate upon which a low-voltage triggered silicon-controlled rectifier is configured. A plurality of triggering components (e.g., NMOS fingers) are formed upon the substrate and integrated with the low-voltage triggered silicon-controlled rectifier, wherein the plurality of triggering components are inserted into the low-voltage triggered silicon-controlled rectifier in order to permit the low-voltage triggered silicon-controlled rectifier to protect against electrostatic discharge during human-body model and charged-device model stress events.Type: GrantFiled: July 25, 2005Date of Patent: July 27, 2010Assignee: LSI CorporationInventor: Jau-Wen Chen
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Patent number: 7750408Abstract: Disclosed are embodiments of a circuit (e.g., an electrostatic discharge (ESD) circuit), a design methodology and a design system. In the circuit, an ESD device is wired to a first metal level (e.g., M1). An inductor is formed in a second metal level (e.g., M5) above the first metal level and is aligned over and electrically connected in parallel to the ESD device by a single vertical via stack. The inductor is configured to nullify, for a given application frequency, the capacitance value of the ESD device. The quality factor of the inductor is optimized by providing, on a third metal level (e.g., M3) between the second metal level and the first metal level, a shield to minimize inductive coupling. An opening in the shield allows the via stack to pass through, trading off Q factor reduction for size-scaling and ESD robustness improvements.Type: GrantFiled: March 29, 2007Date of Patent: July 6, 2010Assignee: International Business Machines CorporationInventors: Zhong-Xiang He, Robert M. Rassel, Steven H. Voldman
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Patent number: 7750407Abstract: A semiconductor device includes a substrate and a memory cell formed on the substrate. The memory cell includes a word line. The semiconductor device also includes a protection area formed in the substrate, a conductive structure configured to extend the word line to the protection area, and a contact configured to short the word line and the protection area.Type: GrantFiled: December 18, 2006Date of Patent: July 6, 2010Assignee: Spansion LLCInventors: Wei Zheng, Jean Yang, Mark Randolph, Ming Kwan, Yi He, Zhizheng Liu, Meng Ding
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Patent number: 7746608Abstract: An ESD protection circuit (710) is guarded by a parallel first precharge elimination circuit (720) relative to an I/O pad (721) and a parallel second precharge elimination circuit (730) relative to a VDD pad (731). The precharge elimination circuits are synchronized with the ESD protection circuit to eliminate any precharge voltage to ground before an ESD pulse affects the I/O pad or VDD pad. A diode (722) is connected between I/O pad and VDD. Circuit (720) is between I/O pad and ground (740) and is powered by the same VDD. Circuit (720) includes a first resistor (723), a first nMOS transistor (724), and a first RC timer including a second resistor (725) and a first capacitor (726). Circuit (730) includes a third resistor (733), a second nMOS transistor (734), and a second RC timer including a fourth resistor (735) and a second capacitor (736).Type: GrantFiled: October 10, 2006Date of Patent: June 29, 2010Assignee: Texas Instruments IncorporatedInventors: Chih-Ming Hung, Charvaka Duvvury
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Patent number: 7728385Abstract: A device structure is disclosed for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop the trench MOSFET. The ESD protection module has a low temperature oxide (LTO) bottom layer whose patterning process was found to cause the gate oxide damage before. The present invention structure includes a semiconductor substrate having an active area and a termination area; numerous trench MOSFET cells disposed in the active area; numerous electrostatic discharge (ESD) diodes disposed above the semiconductor substrate in the termination area; and an insulation layer comprising Oxide/Nitride/Oxide (ONO) sandwiched between the ESD diodes and the semiconductor substrate. In one embodiment, the active area does not contain the ONO insulation layer.Type: GrantFiled: July 22, 2009Date of Patent: June 1, 2010Assignee: Alpha & Omega Semiconductor, Ltd.Inventors: Mengyu Pan, Zengyi He, Kaiyu Chen
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Patent number: 7696591Abstract: The invention relates to an overvoltage protection apparatus having a semiconductor substrate, a first doping region in order to provide a protection diode, and a second doping region in order to provide a protection resistance, with the second doping region being immediately adjacent to the first doping region.Type: GrantFiled: July 25, 2007Date of Patent: April 13, 2010Assignee: Infineon Technologies AGInventors: Michael Schrenk, Christian Herzum
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Patent number: 7692247Abstract: An integrated receiver with channel selection and image rejection substantially implemented on a single CMOS integrated circuit is described. A receiver front end provides programmable attenuation and a programmable gain low noise amplifier. Frequency conversion circuitry advantageously uses LC filters integrated onto the substrate in conjunction with image reject mixers to provide sufficient image frequency rejection. Filter tuning and inductor Q compensation over temperature are performed on chip. The filters utilize multi track spiral inductors. The filters are tuned using local oscillators to tune a substitute filter, and frequency scaling during filter component values to those of the filter being tuned. In conjunction with filtering, frequency planning provides additional image rejection. The advantageous choice of local oscillator signal generation methods on chip is by PLL out of band local oscillation and by direct synthesis for in band local oscillator.Type: GrantFiled: July 26, 2007Date of Patent: April 6, 2010Assignee: Broadcom CorporationInventors: Agnes N. Woo, Kenneth R. Kindsfater, Fang Lu
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Patent number: 7687858Abstract: An integrated receiver with channel selection and image rejection substantially implemented on a single CMOS integrated circuit is described. A receiver front end provides programmable attenuation and a programmable gain low noise amplifier. Frequency conversion circuitry advantageously uses LC filters integrated onto the substrate in conjunction with image reject mixers to provide sufficient image frequency rejection. Filter tuning and inductor Q compensation over temperature are performed on chip. The filters utilize multi track spiral inductors. The filters are tuned using local oscillators to tune a substitute filter, and frequency scaling during filter component values to those of the filter being tuned. In conjunction with filtering, frequency planning provides additional image rejection. The advantageous choice of local oscillator signal generation methods on chip is by PLL out of band local oscillation and by direct synthesis for in band local oscillator.Type: GrantFiled: January 3, 2008Date of Patent: March 30, 2010Assignee: Broadcom CorporationInventors: Agnes N. Woo, Kenneth R. Kindsfater, Fang Lu
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Patent number: 7682918Abstract: A process for forming a vertical DMOS device with an ESD protection transistor that is configured for carrying a breakdown current includes the steps of masking a substrate of a first polarity type and forming spaced apart surface isolation regions. An insulated gate is formed between the spaced apart surface isolation regions. Selected portions of the surface regions between the gate and the surface isolation regions are heterodoped to form p-n junctions having retrograde doping profiles beneath the substrate surface thereby lowering the breakdown voltage beneath the heterodoped portions in order to direct a substantial portion of the breakdown current below the surface of the substrate and into the body of the substrate between the heterodoped regions. Source and drain regions are formed in the substrate surface on opposite sides of the gate.Type: GrantFiled: February 9, 2005Date of Patent: March 23, 2010Assignee: Fairchild Semiconductor CorporationInventors: Jun Cai, Alvin Sugerman, Steven Park
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Patent number: 7675116Abstract: A semiconductor device with an ESD protection function has an SOI substrate, first to fourth diffusion layers, and a gate. The SOI substrate has a semiconductor layer on an insulation layer. The first diffusion layer is of a first conductivity type and is formed on the semiconductor layer. The second diffusion layer is of the first conductivity type and is formed on the semiconductor layer. The third diffusion layer is of a second conductivity type and is formed on the semiconductor layer so as to be adjacent to the first and second diffusion layers. The fourth diffusion layer is of the second conductivity type and is formed on the semiconductor layer so as to be adjacent to the first diffusion layer and electrically connected to the second diffusion layer. The gate is formed over the third diffusion layer.Type: GrantFiled: November 14, 2005Date of Patent: March 9, 2010Assignee: Oki Semiconductor Co., Ltd.Inventor: Yasuhiro Fukuda
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Publication number: 20100038706Abstract: Provided is an ESD protection element, in which: LOCOS oxide films are formed at both ends of a gate electrode, and a conductivity type of a diffusion layer formed below one of the LOCOS oxide films which is not located on a drain side is set to a p-type, to thereby limit an amount of a current flowing in a portion below a source-side n-type high concentration diffusion layer, the current being generated due to surface breakdown of a drain. With this structure, even in a case of protecting a high withstanding voltage element, it is possible to easily satisfy a function required for the ESD protection element, the function of being constantly in an off-state during a steady state, while operating, upon application of a surge or noise to a semiconductor device, so as not to reach a breakage of an internal element, discharging a generated large current, and then returning to the off-state again.Type: ApplicationFiled: August 12, 2009Publication date: February 18, 2010Applicant: Seiko Instruments Inc.Inventor: Yuichiro KITAJIMA
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Patent number: 7659497Abstract: Disclosed is a method of executing an electrical function, such as a fusing operation, by activation through a chip embedded photodiode through spectrally selected external light activation, and corresponding structure and circuit. The present invention is based on having incident light with specific intensity/wave length characteristics, in conjunction with additional circuit elements to an integrated circuit, perform the implementation of repairs, i.e., replacing failing circuit elements with redundant ones for yield and/or reliability. Also to perform disconnection of ESD protection device from input pad once the packaged chip is placed in system. No additional pins on the package are necessary.Type: GrantFiled: December 6, 2005Date of Patent: February 9, 2010Assignee: International Business Machines CorporationInventors: Wagdi W. Abadeer, James W. Adkisson, Jeffrey S. Brown, Kiran V. Chatty, Robert J. Gauthier, Jr., Michael J. Hauser, Jed H. Rankin, William R. Tonti
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Patent number: 7638847Abstract: An ESD protection structure includes, in part, a NMOS transistor having a source and drain in a well in a substrate and a gate on the substrate with the source and drain being connected between ground and a series diode, and the gate being connected to ground. The structure further includes a diode having a cathode connected to the input pad and an anode connected to the well so that the diode is reverse-biased in the event of a positive voltage ESD event on the input pad. As a result, in a positive voltage ESD event, the avalanche effect rapidly injects current into the substrate and therefore into the base of the parasitic bipolar transistor so as to trigger the transistor into conduction and discharge the ESD pulse. Alternatively, the diode is a Zener diode and the current is generated by the Zener effect. A complementary structure provides protection against a negative ESD pulse.Type: GrantFiled: January 25, 2006Date of Patent: December 29, 2009Assignee: Altera CorporationInventors: Hugh Sungki O, Chih-Ching Shih, Cheng-Hsiung Huang, Yow-Juang Bill Liu
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Patent number: 7633125Abstract: Integration of silicon boron nitride in high voltage semiconductors is generally described. In one example, a microelectronic apparatus includes a semiconductor substrate upon which transistors of an integrated circuit are formed, a plurality of transistor gates formed upon the semiconductor substrate, a gate spacer dielectric disposed between the gates, and a contact etch stop dielectric disposed upon the gates and gate spacer dielectric, the contact etch stop dielectric comprising silicon boron nitride (SiBN) to reduce breakdown of the contact etch stop dielectric in high voltage applications.Type: GrantFiled: August 31, 2007Date of Patent: December 15, 2009Assignee: Intel CorporationInventors: Donghui Lu, Jun-Yen J. Tewg
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Patent number: 7622775Abstract: An ESD protection system providing extra headroom at an integrated circuit (IC) terminal pad. The system includes an ESD protection circuit having one or more first diodes coupled in series between the supply voltage and terminal pad, and a second diode coupled to ground. One or more third diodes are coupled in series between the terminal pad and second diode, and are configured to permit a voltage on the interconnection nodes between the one or more third diodes and second diode different from ground. The one or more third diodes include an n+ on an area of P-substrate. A deep N-well separates the area of P-substrate from a common area of P-substrate, which is coupled to ground. The allowable signal swing at the terminal pad is increased to greater than supply voltage plus 1.4 V. The ESD protection circuit is useful for, among other things, relatively low supply voltage ICs.Type: GrantFiled: August 29, 2006Date of Patent: November 24, 2009Assignee: Broadcom CorporationInventors: Hung-Sung Li, Laurentiu Vasiliu
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Publication number: 20090278204Abstract: There is provided a technology which allows improvements in manufacturing yield and product reliability in a semiconductor device having a triple well structure. A shallow p-type well is formed in a region different from respective regions in a p-type substrate where a deep n-type well, a shallow p-type well, and a shallow n-type well are formed. A p-type diffusion tap formed in the shallow p-type well is wired to a p-type diffusion tap formed in a shallow n-type well in the deep n-type well using an interconnection in a second layer. The respective gate electrodes of an nMIS and a pMIS each formed in the deep n-type well are coupled to the respective drain electrodes of an nMIS and a pMIS each formed in the substrate using an interconnection in a second or higher order layer.Type: ApplicationFiled: April 12, 2009Publication date: November 12, 2009Inventors: Naozumi MORINO, Atsushi HIRAIWA, Kazutoshi OKU, Toshiaki ITO, Motoshige IGARASHI, Takayuki SASAKI, Masao SUGIYAMA, Hiroshi YANAGITA, Shinichi WATARAI
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Patent number: 7615826Abstract: An electrostatic discharge (ESD) protection device with adjustable single-trigger or multi-trigger voltage is provided. The semiconductor structure has multi-stage protection semiconductor circuit function and adjustable discharge capacity. The single-trigger or multi-trigger semiconductor structure may be fabricated by using the conventional semiconductor process, and can be applied to IC semiconductor design and to effectively protect the important semiconductor devices and to prevent the semiconductor devices from ESD damage. In particular, the present invention can meet the requirements of high power semiconductor device and has better protection function compared to conventional ESD protection circuit. In the present invention, a plurality of N-wells or P-wells connected in parallel are used to adjust the discharge capacity of various wells in the P-substrate so as to improve the ESD protection capability and meet different power standards.Type: GrantFiled: June 29, 2006Date of Patent: November 10, 2009Assignee: System General Corp.Inventors: Chih-Feng Huang, Tuo-Hsin Chien, Jenn-Yu G. Lin, Ta-yung Yang
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Patent number: 7612410Abstract: The present invention is a trigger device useful, for example, in triggering an SCR in an ESD protection circuit. Illustratively, an NMOS trigger device comprises a gate and heavily doped P and N regions in a P-well on opposite sides of the gate. A first N type source/drain extension and a first P-type pocket region extend from the P region toward the N region with the pocket region located under the source/drain extension and extending under the gate. A second N-type source/drain extension and a second P-type pocket region extend from the N region toward the P region with the pocket region located under the source/drain extension and extending under the gate. Preferably, the gate itself is heavily doped so that one half of the gate on the side adjacent the heavily doped P region is also heavily doped with dopants of P-type conductivity and the other half of the gate on the side adjacent the heavily doped N region is also heavily doped with dopants of N-type conductivity.Type: GrantFiled: August 8, 2005Date of Patent: November 3, 2009Assignee: Altera CorporationInventors: Jeffrey Watt, Irfan Rahim
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Publication number: 20090261418Abstract: A protection diode group includes multiple protection diodes connected to each other in parallel. A total junction area average of the protection diode group is set to a value large enough to guarantee a desired electrostatic discharge tolerance. By setting the total junction area average to be equal to a junction area average of a conventional structure, the occupation area of the protection diode group on the chip is reduced while the ESD tolerance is made equal to a conventional ESD tolerance.Type: ApplicationFiled: April 17, 2009Publication date: October 22, 2009Applicants: SANYO Electric Co., Ltd., SANYO Semiconductor Co., Ltd.Inventor: Manabu YAJIMA
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Patent number: 7602022Abstract: To prevent the destruction of a semiconductor element due to negative resistance, and to reduce the dynamic resistance of a static electricity prevention diode, the ratio of the maximum electric field intensity during an avalanche and the average electric field in a strong electric field region, as well as the impurity density gradient in the vicinity of the strong electric field region are optimized. During avalanche breakdown, a depletion layer is formed across the entire high resistivity region, and its average electric field is kept to ½ or more of the maximum electric field intensity. The density gradients (the depths and impurity densities) of a p+ region and of an n+ region that form a p-n junction of the diode are controlled so that the density gradient in the neighborhood of the high resistivity region does not have negative resistance with respect to increase of the avalanche current.Type: GrantFiled: March 14, 2006Date of Patent: October 13, 2009Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Naoki Kumagai, Hiroshi Kanemaru, Yuiichi Harada, Yoshihiro Ikura, Ryuu Saitou
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Publication number: 20090250759Abstract: A breakdown voltage of a clamp diode can be reduced while a leakage current is suppressed. A P? type diffusion layer is formed in a surface of an N? type semiconductor layer. An N+ type diffusion layer is formed in a surface of the P? type diffusion layer. A P+ type diffusion layer is formed adjacent the N+ type diffusion layer in the surface of the P? type diffusion layer. An N+ type diffusion layer is formed adjacent the P? type diffusion layer in the surface of the N? type semiconductor layer. There is formed a cathode electrode, which is electrically connected with the N+ type diffusion layer through a contact hole formed in an insulation film on the N+ type diffusion layer. There is formed a wiring (an anode electrode) connecting between the P+ type diffusion layer and the N+ type diffusion layer through a contact hole formed in the insulation film on the P+ type diffusion layer and a contact hole formed in the insulation film on the N+ type diffusion layer.Type: ApplicationFiled: April 6, 2009Publication date: October 8, 2009Applicants: Sanyo Electric Co., Ltd., Sanyo Semiconductor, Co., Ltd.Inventor: Seiji OTAKE
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Patent number: 7595537Abstract: In a semiconductor device, a well region is formed in a semiconductor substrate, a transistor-formation region is defined in the well region. An electrostatic discharge protection device is produced in the transistor-formation region, and features a multi-finger structure including a plurality of fingers. A guard-ring is formed in the well region so as to surround the transistor-formation region, and a well blocking region is formed in the well region between the transistor-formation area and the guard-ring. A substrate resistance determination system is associated with the electrostatic discharge protection device to determine a substrate resistance distribution at the transistor-formation area such that snapbacks occur in all the fingers in a chain-reaction manner, and such that occurrence of a latch-up state is suppressed.Type: GrantFiled: June 13, 2005Date of Patent: September 29, 2009Assignee: NEC Electronics CorporationInventors: Noriyuki Kodama, Hitoshi Irino
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Patent number: 7589566Abstract: A CMOS LSI includes an inverter including first and second MOS transistors, a relatively long metal interconnection connected to an input node of the inverter, first and second diodes releasing charges born by the metal interconnection during a plasma process to first and second wells, and first and second MOS transistors maintaining a voltage between the first and second wells at a level not higher than a prescribed voltage. Therefore, even when an antenna ratio is high, a gate oxide film in the first and second MOS transistors is not damaged during the plasma process.Type: GrantFiled: December 1, 2005Date of Patent: September 15, 2009Assignee: Renesas Technology Corp.Inventors: Shigeki Ohbayashi, Hiroaki Suzuki, Koichiro Ishibashi, Hiroshi Makino
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Patent number: 7585705Abstract: A method and device structure are disclosed for preventing gate oxide damage of a trench MOSFET during wafer processing while adding an ESD protection module atop the trench MOSFET. The ESD protection module has a low temperature oxide (LTO) bottom layer whose patterning process is found to cause the gate oxide damage. The method includes: a) Fabricate numerous trench MOSFETs on a wafer. b) Add a Si3N4 isolation layer, capable of preventing the LTO patterning process from damaging the gate oxide, atop the wafer. c) Add numerous ESD protection modules atop the Si3N4 isolation layer. d) Remove those portions of the Si3N4 isolation layer that are not beneath the ESD protection modules. In one embodiment, hydrofluoric acid is used as a first etchant for patterning the LTO while hot phosphoric acid is used as a second etchant for removing portions of the Si3N4 isolation layer.Type: GrantFiled: November 29, 2007Date of Patent: September 8, 2009Assignee: Alpha & Omega Semiconductor, Inc.Inventors: Mengyu Pan, Zengyi He, Kaiyu Chen
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Patent number: 7582938Abstract: A technique to enhancing substrate bias of grounded-gate NMOS fingers (ggNMOSFET's) has been developed. By using this technique, lower triggering voltage of NMOS fingers can be achieved without degrading ESD protection in negative zapping. By introducing a simple gate-coupled effect and a PMOSFET triggering source with this technique, low-voltage triggered NMOS fingers have also been developed in power and I/O ESD protection, respectively. A semiconductor device which includes a P-well which is underneath NMOS fingers. The device includes an N-well ring which is configured so that the inner P-well underneath the NMOS fingers is separated from an outer P-well. The inner P-well and outer P-well are connected by a P-substrate resistance which is much higher than the resistance of the P-wells. A P+-diffusion ring surrounding the N-well ring is configured to connect to VSS, i.e., P-taps.Type: GrantFiled: October 25, 2005Date of Patent: September 1, 2009Assignee: LSI CorporationInventor: Jau-Wen Chen
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Patent number: 7579658Abstract: ESD protection devices without current crowding effect at the finger's ends. It is applied under MM ESD stress in sub-quarter-micron CMOS technology. The ESD discharging current path in the NMOS or PMOS device structure is changed by the proposed new structures, therefore the MM ESD level of the NMOS and PMOS can be significantly improved. In this invention, 6 kinds of new structures are provided. The current crowding problem can be successfully solved, and have a higher MM ESD robustness. Moreover, these novel devices will not degrade the HBM ESD level and are widely used in ESD protection circuits.Type: GrantFiled: February 28, 2007Date of Patent: August 25, 2009Assignee: Vanguard International Semiconductor CorporationInventors: Ming-Dou Ker, Geeng-Lih Lin, Hsin-Chyh Hsu
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Patent number: 7573067Abstract: It is an object of the present invention to provide a semiconductor display device using a protective circuit in which dielectric breakdown is prevented more effectively. In the invention, in the cases that a first interlayer insulating film is formed covering a TFT used for a protective circuit and a second interlayer insulating film, which is an insulating coating film, is formed covering a wiring formed over the first interlayer insulating film, a wiring for connecting the TFT to other semiconductor elements is formed so as to be in contact with the surface of the second interlayer insulating film so as to secure a path discharging charge accumulated in the surface of the second interlayer insulating film. Note that the TFT used for the protective diode is a so-called diode-connected TFT in which either of the first terminal or the second terminal is connected to a gate electrode.Type: GrantFiled: June 18, 2007Date of Patent: August 11, 2009Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 7566935Abstract: An electrostatic discharge (ESD) structure connected to a bonding pad in an integrated circuit comprising: a P-type substrate with one or more first P+ regions connected to a low voltage supply (GND), a first Nwell formed in the P-type substrate, one or more second P+ regions disposed inside the first Nwell and connected to the bonding pad, at least one first N+ region disposed outside the first Nwell but in the P-type substrate and connected to the GND, at least one second N+ region disposed outside the first Nwell but in the P-type substrate and connected to the bonding pad, wherein the second N+ region is farther away from the first Nwell than the first N+ region, and at least one conductive material disposed above the P-type substrate between the first and second N+ regions and coupled to the GND, wherein the first N+ region, the second N+ region and the conductive material form the source, drain and gate of an NMOS transistor, respectively, and the first P+ region is farther away from the first Nwell thaType: GrantFiled: March 1, 2007Date of Patent: July 28, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shu Huei Lin, Jian Hsing Lee, Shao Chang Huang, Cheng Hsu Wu, Chuan Ying Lee
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Patent number: 7554158Abstract: An N-type deep well is used to protect a circuit from a noise. However, a noise with a high frequency propagates through the N-type deep well, and as a result, the circuit that should be protected malfunctions. To reduce the area of the N-type deep well. For instance, in the present invention, a semiconductor device comprises a semiconductor substrate of a first conductivity type, a digital circuit part and an analog circuit part provided on the semiconductor substrate, a plurality of wells of the first conductivity type formed in either the analog circuit part or the digital circuit part, and a first deep well of a second conductivity type, which is the opposite conductivity type to the first conductivity type, isolating some of the plurality of wells from the semiconductor substrate.Type: GrantFiled: January 25, 2006Date of Patent: June 30, 2009Assignee: NEC Electronics CorporationInventors: Ryota Yamamoto, Kuniko Kikuta
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Patent number: 7541235Abstract: A method for providing a programmable electrostatic discharge (ESD) protection device is provided. The method includes providing a source diffusion in a substrate, providing a deeper body diffusion in the substrate, providing a gate at a space between the source diffusion and the body diffusion, and providing a variable structure for shorting the source diffusion and the body diffusion to each other when ESD voltage is encountered on a circuit connected thereto, wherein the variable structure comprises a plurality of contacts over the source diffusion for the source diffusion to be grounded to the body diffusion.Type: GrantFiled: June 5, 2006Date of Patent: June 2, 2009Assignee: Micrel, Inc.Inventor: John D. Husher
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Publication number: 20090121290Abstract: A semiconductor device includes a high-breakdown-voltage transistor having a semiconductor layer. The semiconductor layer has an element portion and a wiring portion. The element portion has a first wiring on a front side of the semiconductor layer and a backside electrode on a back side of the semiconductor layer. The element portion is configured as a vertical transistor that causes an electric current to flow in a thickness direction of the semiconductor layer between the first wiring and the backside electrode. The backside electrode is elongated to the wiring portion. The wiring portion has a second wiring on the front side of the semiconductor layer. The wiring portion and the backside electrode provide a pulling wire that allows the electric current to flow to the second wiring.Type: ApplicationFiled: November 6, 2008Publication date: May 14, 2009Applicant: DENSO CORPORATATIONInventors: Akira Yamada, Nozomu Akagi
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Patent number: 7525159Abstract: A semiconductor device suitable for applications in an electrostatic discharge (ESD) protection circuit, including a semiconductor substrate, a first well formed in the substrate, a second well formed in the substrate, and a first doped region formed in the second well, wherein the first well, the second well, and the first doped region collectively form a parasitic bipolar junction transistor (BJT), and wherein the first well is the collector of the BJT, the second well is the base of the BJT, and the first doped region is the emitter of the BJT.Type: GrantFiled: June 26, 2007Date of Patent: April 28, 2009Inventors: Ming-Dou Ker, Che-Hao Chuang
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Publication number: 20090096027Abstract: A power semiconductor device comprising a first group of power transistor cells arranged in a first area of the power semiconductor device and a second group of power transistor cells arranged in a second area of the power semiconductor device. The first group of power transistor cells has an overall cell density different from that of the second group of power transistor cells such that the first and second groups of power transistor cells have different charge carrier densities.Type: ApplicationFiled: October 10, 2007Publication date: April 16, 2009Inventors: Franz Hirler, Hans-Joachim Schulze
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Patent number: 7518192Abstract: A semiconductor structure for electrostatic discharge protection is presented. The semiconductor structure comprises a grounded gate nMOS (GGNMOS) having a substrate, a gate electrode, a source region and a drain region. A plurality of contact plugs is formed on the source and drain side. A plurality of first level vias is electrically coupled to the GGNMOS and has a substantially asymmetrical layout in the source and drain regions. A second level via(s) re-routes the ESD current to the desired first level vias. The uniformity of the current flow in the GGNMOS is improved.Type: GrantFiled: November 10, 2004Date of Patent: April 14, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Feng Yu, Jian-Hsing Lee, Jiaw-Ren Shih, Fu Chin Yang
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Patent number: 7511345Abstract: The present invention provides a MOS transistor device for providing ESD protection including at least one interleaved finger having a source, drain and gate region formed over a channel region disposed between the source and the drain regions. The transistor device further includes at least one isolation gate formed in at least one of the interleaved fingers. The device can further include a bulk connection coupled to at least one of the source, drain and gate regions via through at least one of diode, MOS, resistor, capacitor inductor, short, etc. The bulk connection is preferably isolated through the isolation gate.Type: GrantFiled: June 12, 2006Date of Patent: March 31, 2009Assignees: Sarnoff Corporation, Sarnoff EuropeInventors: Benjamin Van Camp, Gerd Vermont
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Patent number: 7508038Abstract: An electrostatic discharge (ESD) transistor structure includes a self-aligned outrigger less than 0.4 microns from a gate electrode that is 50 microns wide. The outrigger is fabricated on ordinary logic transistors of an integrated circuit without severely affecting the performance of the transistors. The outrigger is used as an implant blocking structure to form first and second drain regions on either side of a lightly doped region that underlies the outrigger. The self-aligned outrigger and the lightly doped region beneath it are used to move the location of avalanche breakdown upon an ESD event away from the channel region. Durability is extended when fewer “hot carrier” electrons accumulate in the gate oxide. A current of at least 100 milliamperes can flow into the drain and then through the ESD transistor structure for a period of more than 30 seconds without causing a catastrophic failure of the ESD transistor structure.Type: GrantFiled: April 29, 2005Date of Patent: March 24, 2009Assignee: ZiLOG, Inc.Inventors: John A. Ransom, Brett D. Lowe, Michael J. Westphal
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Publication number: 20090072315Abstract: Embodiments of the invention relate to semiconductor manufacturing process charge protection circuits, integrated circuits and to methods for manufacturing a semiconductor manufacturing process charge protection circuit. In an embodiment of the invention, a charge protection circuit includes a first terminal coupled to a charge receiving region, a second terminal providing a discharge path, and a rectifying circuit coupled between the first terminal and the second terminal, the rectifying circuit including at least two anti-parallel coupled rectifying components.Type: ApplicationFiled: September 13, 2007Publication date: March 19, 2009Inventors: Uwe Hodel, Peter Baumgartner
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Publication number: 20090057766Abstract: Integration of silicon boron nitride in high voltage semiconductors is generally described. In one example, a microelectronic apparatus includes a semiconductor substrate upon which transistors of an integrated circuit are formed, a plurality of transistor gates formed upon the semiconductor substrate, a gate spacer dielectric disposed between the gates, and a contact etch stop dielectric disposed upon the gates and gate spacer dielectric, the contact etch stop dielectric comprising silicon boron nitride (SiBN) to reduce breakdown of the contact etch stop dielectric in high voltage applications.Type: ApplicationFiled: August 31, 2007Publication date: March 5, 2009Inventors: Donghui Lu, Jun-Yen J. Tewg
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Patent number: 7482659Abstract: A semiconductor device is provided with a main electrode of main switching elements region, a sensor electrode of sensor switching elements region, and a protective device formed between the main electrode and the sensor electrode. The protective device electrically connects the main electrode and the sensor electrode when a predetermined potential difference is produced between the main electrode and the sensor electrode. The semiconductor device can handle excessive voltage such as ESD generated between the sensor electrode and the gate electrode while simultaneously preventing gate drive loss from increasing.Type: GrantFiled: December 6, 2006Date of Patent: January 27, 2009Assignee: Toyota Jidosha Kabushiki KaishaInventor: Koji Hotta
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Patent number: 7473973Abstract: A semiconductor device includes a silicon-controlled rectifier to protect an internal circuit from electrostatic discharge damage and a first metal-oxide-silicon field-effect transistor to apply a trigger voltage to the silicon-controlled rectifier. The first metal-oxide-silicon field-effect transistor including a gate electrode and a substrate which are electrically connected to each other.Type: GrantFiled: September 12, 2005Date of Patent: January 6, 2009Assignee: Kabushiki Kaisha ToshibaInventor: Masaki Kondo
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Publication number: 20090001473Abstract: At least a laminate of a gate insulating film 6 and a gate electrode 7 and an active region 13 are formed on a silicon substrate 1, and an underlying interlayer insulating film 10 is further formed. Then, a conductor 11a connected to the gate electrode 7, and a conductor 11b that is a dummy conductor and is connected to the active region 13 are formed simultaneously on the underlying interlayer insulating film 10. Thereafter, an interlayer insulating film 12 is formed on the underlying interlayer insulating film 10 by a plasma process. At this time, charging current from a plasma 14 is emitted through the conductor 11b, which is a dummy conductor.Type: ApplicationFiled: August 29, 2008Publication date: January 1, 2009Applicant: Matsushita Electric Industrial Co., Ltd.Inventors: Koji ERIGUCHI, Susumu MATSUMOTO
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Patent number: 7470959Abstract: Disclosed is a circuit for preventing charging damage in an integrated circuit design, for example, a design having silicon over insulator (SOI) transistors. The circuit prevents damage from charging during processing to the gate of IC devices by assigning regions to the IC design such that the devices located within the regions have electrically independent nets, identifying devices that may have a voltage differential between the source or drain, and gate as susceptible devices within a given region, and connecting an element across the source or drain, and the gate of each of the susceptible devices such that the element is positioned within the region. Alternatively, the method/circuit provides for connecting compensating conductors to an element to eliminate potential charging damage.Type: GrantFiled: January 9, 2006Date of Patent: December 30, 2008Assignee: International Business Machines CorporationInventors: Terence Blackwell Hook, Jeffery Scott Zimmerman
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Patent number: 7465610Abstract: A fully protected H-bridge for a d-c motor consists of two high side MOSFETs and a control and logic IC on a first conductive heat sink all within a first package and two discrete low side MOSFETs. The entire bridge is controlled by the IC. Shoot thru protection is provided for each leg, and a PMW soft start sequence is provided through the control of the low side MOSFETs, programed by an external, chargeable RC circuit. Input signals to the high side MOSFETs select the operation modes. Protective circuits are provided for short circuit current and over current conditions. Sleep mode and braking/non braking control is also provided.Type: GrantFiled: August 14, 2006Date of Patent: December 16, 2008Assignee: International Rectifier CorporationInventors: Bruno C. Nadd, Vincent Thiery, Xavier de Frutos, Chik Yam Lee
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Patent number: 7465995Abstract: A semiconductor device includes an ESD protection device on a substrate, and a resistor having a gate structure overlying a resistor well separating a first doped region coupled to the ESD protection device and a second doped region coupled to a supply voltage for passing an ESD current from the second doped region to the first doped region to turn on the ESD protection device for dissipating the ESD current during an ESD event. The resistor well has an impurity density lower than that of the first and second doped regions for increasing resistance therebetween.Type: GrantFiled: January 10, 2006Date of Patent: December 16, 2008Assignee: Taiwan Semiconductor Manufacturing Co.Inventors: Yu-Hung Chu, Shao-Chuang Huang
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Patent number: 7465993Abstract: A semiconductor chip may include a plurality of pads arranged in at least a first and a second row, and a plurality of protection circuits connected to the plurality of pads. The plurality of protection circuits may include at least one diode. A first protection circuit may be connected to a first pad in the first row of pads, and a second protection circuit may be connected to a second pad in the second row of pads. The first and second protection circuits may be arranged under the first row of pads.Type: GrantFiled: January 18, 2007Date of Patent: December 16, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Ki-Tae Lee, Han-Gu Kim, Jae-Hyok Ko