Abstract: An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis. The first input axis, the second input axis, and the third input axis are substantially orthogonal. The first proofmass, the second proofmass, and the third proofmass are substantially coplanar.

Abstract: A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried by, and radially extends from the mass to oppose a respective first arm. A shock event will cause the mass to move in a certain direction to an extent where one or more of the arm assemblies will latch. The latching may be determined by an electrical circuit connected to contact pads on the central post and on the anchor members.

Abstract: A method of making a fiber optic accelerometer includes (a) drawing an optical fiber through a resin; (b) winding the resin coated fiber onto a disc mounted on an assembly having a central shaft; and (c) curing the resin-coated fiber. The optical fiber may be drawn through a resin by providing a container filled with a resin having an orifice therethrough and drawing the fiber through the orifice. The resin may be cured such that the fiber is bonded to the disc by curing the resin to the fiber and the disc at the same time.

Abstract: An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield mounted on the substrate surface. The structure includes two regions of differing total moments disposed above a respective conductive plate and separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate, each region having a substantially planar outer surface and an inner surface having a first corrugation formed thereon. For each of the two regions, an inner gap exists between the first corrugation and an opposing conductive plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. The at least one protective shield is placed apart from either of the conductive plates.

Abstract: The invention relates to a differential accelerometer micromachined in a plane plate, comprising a base and a differential measurement cell which includes a moveable seismic mass and two force sensors that are connected to the mass and to the base.

Abstract: A method for designing and optimnizing compliant mechanisms is provided, in addition to bistable compliant mechanism designs. According to the method, a selected compliant structure may be modeled analytically, and the characteristics of the analytical model may be optimized. Multiple recursive optimization algorithms may be used, for example, to determine the general location of a global optimum, and then to determine the values of the analytical model characteristics that obtain the global optimum or a feasible configuration for the selected compliant structure. Geometric characteristics of the selected compliant structure may be derived from the values of the analytical model characteristics. Bistable compliant designs may have a shuttle disposed between a pair of base members. The shuttle (20) may be linked to the base members (22, 24) by a pair of legs (30, 32), via flexural pivots. The base members may have cantilevered mounting beams to create deformable mounts that receive and store potential energy.

Abstract: A capacitance of a capacitor member, which varies according to a dynamic force such as an acceleration force imposed on the capacitor member, is detected by a detecting circuit. The detecting circuit is composed of an operational amplifier and a switched capacitor circuit connected in parallel to each other. A reset time (t), during which a feedback capacitor in the switched capacitor circuit is discharged, is set to satisfy the following formula: t>(?C+m)/n, where ?C is an initial capacitance of the capacitor member, and n and m are constant factors having values in certain ranges. By setting the reset time (t) according to the above formula, an amount of acceleration imposed on the capacitor member is accurately detected even when the capacitor member has a certain level of the initial capacitance.

Abstract: A computer input device and method used to input coordinates and three-dimensional graphical information into a computer. The device includes an acceleration sensor that has a fixed volume vessel containing a magnetic fluid. A non-magnetic inertial body is located in the magnetic fluid. Three magnetic field sources are located on three perpendicular axes where each magnetic field source has an output for connection to a computer. Changes in Q-factors and inductance of electromagnetic coils aligned on the X, Y, and Z-axis of the sensor are used to compute linear and angular acceleration components of any movement involving the sensor which permits three-dimensional coordinates to be provided in real-time.

Abstract: An acceleration sensor capable of standing a great acceleration is to be provided. It is configured of a mounting board and a sensor chip in which the sensor chip is formed of a weight, a beam and a frame. Then, the weight is surrounded by the frame. The weight is joined to the frame by a plurality of the beams, and the weight is separated from the board by being supported by the beams. Additionally, a thin, rectangular stopper is disposed on the mounting board right under the weight.

Abstract: A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a stem (21). The appendage (15) comprises a metal (17) or other such material that may be disposed on a semiconductor material (19). The metal increases the total mass of the proof mass (11) as compared to a proof mass of similar dimensions made solely from semiconductor materials, without increasing the size of the proof mass. At the same time, the attachment of the appendage (15) by way of a stem (21) prevents stresses arising from CTE differentials in the appendage from being transmitted to the base, where they could contribute to temperature errors.

Abstract: An acceleration sensor includes an acceleration sensor element and a frame portion surrounding the element. The sensor element and the frame portion are located on a major surface of a substrate. An intermediate layer is formed on the frame portion. A cap portion is bonded to the intermediate layer, thereby sealing-off the acceleration sensor element. Grooves in the form of a frame are provided in the frame portion and the intermediate layer, respectively, and located at positions generally identical to each other with regard to the major surface direction of the substrate.

Abstract: A semiconductor device includes a first substrate including first, second and third layers; and a second substrate including fourth, fifth and sixth layers. The first substrate provides an electric device. The second substrate provides a physical quantity sensor. The first layer of the first substrate and the fourth layer of the second substrate are shields for protecting the electric device and the physical quantity sensor. The device is protected from outside disturbance without adding an additional shield.

Abstract: An acceleration sensor includes a semiconductor substrate, a sensing element formed on the semiconductor substrate, a bonding frame made of polysilicon which is formed on the semiconductor substrate and surrounds the sensing element, and a glass cap which is bonded to a top surface of the bonding frame made of polysilicon to cover the sensing element above the sensing element while being spaced by a predetermined distance from the sensing element. The bonding frame made of polysilicon is not doped with any impurity.

Abstract: A micro machined accelerometer package includes a chip having a top surface and a bottom surface. A micro machined accelerometer is formed in the chip, the accelerometer including a mass cantilevered from the remainder of the chip to be movable out of the plane of the chip, one or more motion detectors for detecting motion of the mass, processing circuitry and one or more bond pads for communicating detected accelerations. A first hollow molded cap is bonded to the top surface over at least part of the accelerometer to define a first cavity into which the cantilevered mass may move. The first molded cap is bonded to the chip such that the cap covers the mass, the motion detectors and the processing circuitry but leaves the bond pads uncovered.

Abstract: For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural component, and which also includes an unsupported a seismic mass, a spring system having at least one spring, the seismic mass being connected to the substrate through the spring system, and an overload protection to limit the deflection of the spring system and the seismic mass in at least one direction, and an arrangement for detecting the deflections of the spring system and the seismic mass, whereby the impact forces may be reduced to prevent conchoidal breaks and resulting incipient damage to the sensor structure, as well as formation of particles. To that end, at least one two-dimensional stop for at least one moving part of the sensor structure is provided as overload protection.

Abstract: An acceleration sensor which has a vibrator, a weight portion that is connected to the vibrator, and supported at a position different from the center of gravity of the vibrator plus its own structure, and a detecting section which detects the amount of characteristic corresponding to an angular moment that is exerted in the vibrator upon application of an acceleration in one direction to the vibrator and the weight portion. When an acceleration in one direction is applied to the vibrator and the weight portion connected thereto, an angular moment is exerted in the vibrator due to the difference between the supporting point of the weight portion and the center of gravity of the vibrator plus the weight portion, and the amount of characteristic corresponding to the angular moment is detected by the detecting section so that the acceleration of a linear motion is detected.

Abstract: An accelerometer system includes a rigid plate system coupled to an inertial platform. A first flexure plate defines a first flex axis and is adjacent to the rigid plate system a first distance from the spin axis. The first flexure plate generates a first frequency signal in response to acceleration of the first flexure plate. A second flexure plate defines a second flex axis and is adjacent to the rigid plate system a second distance from the spin axis. The second flexure plate generates a second frequency signal in response to acceleration of the second flexure plate. A controller including receives the first frequency signal and the second frequency signal and generates an angular acceleration signal from a difference of the first frequency signal and the second frequency signal. The controller also generates a linear acceleration signal in response to an average of the first frequency signal and the second frequency signal.

Abstract: A semiconductor dynamic sensor such as an acceleration sensor is composed of a sensor chip having electrodes movable in response to acceleration applied thereto and a circuit chip having a circuit for processing signals fed from the sensor chip. The sensor chip and the circuit chip are contained and held in a packaging case. The sensor chip and the circuit chip are fixedly connected via an adhesive film. The sensor chip is correctly positioned on the circuit chip without creating misalignment relative to a sensing axis, because the adhesive film from which an adhesive material does not flow out under heat is used. A semiconductor wafer including plural sensor chips is first made and the adhesive film is stuck to one surface of the wafer, and then individual sensor chips are separated by dicing. The sensor chip is connected to the circuit chip via the adhesive film.

Abstract: An acceleration measuring apparatus capable of calibrating its output with a zero-point in the state of no acceleration applied as well as sensitivity. An acceleration sensor detects each component of an acceleration and creates an output based on each of the detected components in each direction of at least two mutually perpendicular axes of orthogonal coordinates for the acceleration sensor. The acceleration sensor is held at at least two different positions; each of the acceleration sensor axes at one position is at a angle, with the gravitational acceleration direction, that is different from the angle at the other position. A processing circuit develops calibration parameters based on output by each component in the at least two axis directions of the gravitational acceleration measured by the acceleration sensor positioned at each of the at least two different positions and calibrates the output of the acceleration measured by using the calibration parameters to provide a calibrated output.

Abstract: A leveling system for a missile system includes a platform defining an xz-plane and a yz-plane. A first dual bridge sensor is coupled to the platform at an angle such that the first dual bridge sensor is sensitive to movement of the first dual bridge sensor in the xy-plane. The first dual bridge sensor includes a first flexure plate generating a first dual bridge sensor signal in response to movement of the first flexure plate. A second dual bridge sensor is coupled to the platform at an angle such that the second dual bridge sensor is sensitive to movement of the second dual bridge sensor in the xy-plane. The second dual bridge sensor includes a second flexure plate generating a second dual bridge sensor signal in response to movement of the second flexure plate. Third and fourth dual bridge sensors are arranged similarly to the first and second dual bridge sensors but with respect to the yz-plane.

Abstract: In a semiconductor dynamic quantity sensor, a mass serving as a weight portion for detecting application of a dynamic quantity is divided into three masses (301, 302, 303) in series. The masses (301, 302, 303) thus divided are connected to one another by connecting beams (CB1, CB2, CB3, CB4). The masses (301, 302, 303) located at both the end portions are supported through beams (B1, B2, B3, B4) by a semiconductor substrate (1) so as to be allowed to be displaced in the direction orthogonal to the connection direction of the masses. The center mass (302) connected to the masses (301, 302, 303) through the connecting beams (CB1, CB2, CB3, CB4) is allowed to be displaced only in the connecting direction of the masses by the connecting beams (CB1, CB2, CB3, CB4).

Abstract: A method of forming a composite diaphragm for a pressure transducer is disclosed. The method comprises providing a substrate layer having a first conductivity type and a first surface. Positive implants are deposited in the first surface of the substrate layer, and an epitaxial layer is grown on the first surface of the substrate layer so that the positive implants form positive diffusions in the epitaxial layer. An oxide pattern is formed on the epitaxial layer, and a top layer is deposited over the epitaxial layer and oxide pattern. The substrate layer and positive diffusions of the epitaxial layer are then etched to form the composite diaphragm. The positive diffusions can be patterned so that the resulting etched structure has improved diaphragm performance characteristics. For example, the remaining pattern can include a plurality of bosses and interconnecting battens so that the diaphragm has a relatively high burst pressure and a high output signal with improved linearity at low pressures.

Abstract: An apparatus is provided for concurrently detecting a plurality of physical quantities to be detected. The apparatus comprises plural sensing units, plural processors, and controller. The sensing units are formed on the same substrate to form a single sensor. Each sensing unit senses each physical quantity to output a voltage signal changing depending on each physical quantity sensed. Each of the processors samples and holds, at a predetermined frequency, the voltage signal outputted by each of the sensing units. Hence sampled and held voltage signals are produced and outputted from the apparatus as information indicative of the plurality of physical quantities. In the sampling and holding processing, a controller controls the plural processors so that the processors perform sampling operations at predetermined different phases shifted from each other during an interval defined by the predetermined frequency.

Abstract: A method and system for analyzing the transfer of motion to a subject on a sleeping surface. A mattress is positioned on a frame, and a subject is positioned on the mattress. A sensor is placed in communication with the subject. The surface adjacent the subject is moved by means of a moving mass, and the sensor detects the motion of the subject. Motion transferred to the subject as a result of the mattress moving is measured and recorded.

Abstract: An electronic control unit for a vehicle system that includes at least one acceleration sensor and at least one angular rate sensor for generating data concerning motion of the vehicle relative to vehicle reference axes.

Abstract: A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.

Abstract: An inertial sensor includes a plurality of sense elements disposed upon a silicon wafer. Each of the sense elements senses a different inertia range. The sense elements are electrically connected to a common signal conditioning circuit that generates an output signal for each of the sense elements. The signal conditioning circuit has an output that is electrically connected to at least one control system and provides output signals in different ranges to the control system.

Abstract: A device for acceleration measurement is proposed, in which measuring signals from a two-dimensional sensor from different measuring directions are combined with one another and then jointly evaluated in an evaluation circuit. This evaluation is carried out, for example, using a threshold-value discriminator, in order to perform a plausibility check for a crash detection.

Abstract: A sensor device (11) which can be attached at at least two different installation locations in a motor vehicle (10) by at least one attachment device and which has a data output. The sensor device (11) is installed at a predefined installation location in the motor vehicle (10) by attachment to at least one predefined attachment point (13), the attachment point (13) being characteristic of the installation location in such a way that the attachment to the one predefined attachment point (13) generates a predefined electrical effect, and the sensor device (11) is installed at another predefined installation location in the motor vehicle (10) by attachment to at least one other predefined attachment point (14), the attachment to the other predefined attachment point (14) generates a different predefined electrical effect. It is possible to determine the actual installation location of the sensor device (11) by sensing the generated electrical effect.

Abstract: An inertia force sensor of the invention is provided with a damper portion. The damper portion includes a cantilever for a movable part disposed in a movable electrode portion so as to protrude therefrom and a cantilever for a fixed part disposed in a support portion for the movable part or a support portion for the fixed part so as to protrude therefrom. The damper portion is formed so that the cantilever for the movable part and the cantilever for the fixed part contact each other before the movable electrode portion contacts the support portion for the movable part and the support portion for the fixed part. As a result, it is possible to prevent a stopper portion from being damaged and improve the reliability of the sensor.

Abstract: An acceleration detecting device comprising a movable weight, a movable electric contact disposed on the weight, a fixed electric contact, an resilient member, and a friction creating mechanism. The movable electric contact slides on the fixed electric contact when a force is given to the weight for moving the weight in a first direction. The resilient member urges the weight continually in a second direction opposing to the first direction. The friction creating mechanism gives a frictional force to the weight when the weight travels a distance in excess of a certain amount in the first direction. The friction creating mechanism increases the frictional force as the weight continues to advance further in the first direction.

Abstract: An acceleration or deceleration sensor for locking a payout aircrew harness system comprises a frame or housing in which is received a heavy ball accommodated between opposing shells having opposing conical recesses receiving the ball. The shells are held against the ball by respective opposing springs whereby the ball and shells, in the absence of accelerating or decelerating forces are held in a balanced, equilibrium, position between the shells. The shells are carried at respective ends of respective levers or arms pivoted in the frame or housing, whereby movement of the ball in any direction relative to said frame or housing will cause pivotal movement of the arms. The sensor includes a trigger or trip mechanism of which one said arm forms part. Thus said a trigger or trip mechanism is operable by movement of said heavy ball relative to said frame or housing, to move from a sensing position to a locked position in which it will remain until a positive re-setting operation is carried out.

Abstract: The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially parallel to the sensor layer, at least one dither frame formed of the upper sensor layer, the frame having a dither axis disposed substantially parallel to the upper sensor layer and the lower handle layer. The apparatus further comprises a first accelerometer formed of the upper sensor layer and having a first force sensing axis perpendicular to the dither axis for producing a first output signal indicative of the acceleration of the moving body along the first force sensing axis, the first accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis.

Abstract: An apparatus and method for suspending and strain isolating a structure is provided, the apparatus having a first elongated flexure having first and second ends structured for connection to a support structure, and a second elongated flexure having first and second ends structured for connection to a structure to be isolated from the support structure. A portion of the second flexure intermediate the first and second ends thereof is interconnected to a portion of the first flexure intermediate the first and second ends thereof.

Abstract: Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like.

Abstract: A vibration sensor device includes a hollow casing having a plurality of protrusions extending from an inner periphery of the casing. A ball is received in the casing and located in contact with at least three of the protrusions. The ball freely rolls when the casing senses vibration and the ball contacts different protrusions when it rolls so as to activate a cooperated warning device.

Abstract: A system for detecting the loading of a vehicle including at least one accelerometer in a first position and arranged in gravitational acceleration in the preferred direction may be used as a reference value for the accelerometer. The accelerometer related to detect the deviation of acceleration relative to said reference value, and said deviation is related to the loading of the vehicle.

Abstract: The acceleration recorder provides a three dimensional mechanical record of the acceleration sustained in a collision or impact. The recorder converts impact into a rotational movement of an internal weight about three orthoganl axes. Mechanical indicators remain at the limits of the weight rotations.

Abstract: A method is provided to process system test data to determine certification parameters of the system based on the test data. For a torpedo launch system, the velocity data is generated by a Pressure/Velocity/Displacement housing interfaced with a computer based data acquisition system and known launch system and test parameters, such as sample rate, muzzle exit length, time of acquisition, decimation factor and low pass cutoff frequency are provided as inputs. The method forces assigns a value of zero to any data less than a predetermined threshold in order to eliminate non-zero levels contributed by ambient noise. The method then passes the data through a filter chosen to agree with hand fit smoothing methods, so as to obtain a smoothed velocity profile. The smoothed data is processed to obtain and display an acceleration profile and a displacement profile, as well as data points for peak acceleration, time at peak, acceleration pulse width, muzzle exit velocity and time at exit.

Abstract: An inertial sensor having a stator and a rotor made of semiconductor material and electrostatically coupled together, and a microactuator also made of semiconductor material, coupled to the rotor and controlled so as to move the rotor itself and thus compensate for the position offset thereof.

Abstract: A method of forming a composite diaphragm for a pressure transducer is disclosed. The method comprises providing a substrate layer having a first conductivity type and a first surface. Positive implants are deposited in the first surface of the substrate layer, and an epitaxial layer is grown on the first surface of the substrate layer so that the positive implants form positive diffusions in the epitaxial layer. An oxide pattern is formed on the epitaxial layer, and a top layer is deposited over the epitaxial layer and oxide pattern. The substrate layer and positive diffusions of the epitaxial layer are then etched to form the composite diaphragm. The positive diffusions can be patterned so that the resulting etched structure has improved diaphragm performance characteristics. For example, the remaining pattern can include a plurality of bosses and interconnecting battens so that the diaphragm has a relatively high burst pressure and a high output signal with improved linearity at low pressures.

Abstract: A small-sized, high detection sensitivity and high performance acceleration sensor having directional or non-directional sensitivity is disclosed. The acceleration sensor is provided with a vibrator having uni-directional polarization and a weight connected to the vibrator. The weight is supported at the position different from the center of gravity of the total body of the vibrator and the weight itself. The vibrator is disposed so that its direction of polarization axis is either consistent or inconsistent with an axis of the torsion of the vibrator.

Abstract: Inertial trackers have been successfully applied to a wide range of head mounted display (HMD) applications including virtual environment training, VR gaming and even fixed-base vehicle simulation, in which they have gained widespread acceptance due to their superior resolution and low latency. Until now, inertial trackers have not been used in applications which require tracking motion relative to a moving platform, such as motion-base simulators, virtual environment trainers deployed on board ships, and live vehicular applications including helmet-mounted cueing systems and enhanced vision or situational awareness displays, to the invention enables the use of inertial head-tracking systems on-board moving platforms by computing the motion of a “tracking” Inertial Measurement Unit (IMU) mounted on the HMD relative to a “reference” IMU rigidly attached to the moving platform.

Abstract: A displacement sensor and an acceleration sensor are mounted to a common support member. The displacement sensor comprises a first circular flexural disk having a natural frequency less than the frequency range of the acoustic waves of interest. Spiral-wound optical fiber coils are mounted to opposite sides of the first flexural disk. The acceleration sensor comprises a second flexural disk having a natural frequency greater than the frequency range of the acoustic waves. Spiral-wound optical fiber coils are mounted to opposite sides of the second flexural disk. A fiber optic interferometer provides an output signal that is a combination of signals output from the displacement sensor and the acceleration sensor. The displacement sensor includes an inertia ring mounted to an edge of the first flexural disk to keep it nearly stationary when an acoustic wave in the selected frequency range is incident upon the housing.

Abstract: Determining a measurement value in particular a distance in the area of a printing device, especially a printing machine, with a measurement instrument arranged on a device component and oriented relative to a measurement or reference area to improve the measurement value determination even when the printing device is operating. An oscillation or vibration of the measurement instrument is recorded and taken into account in the measurement.

Abstract: Disclosed is an accelerometer for measuring seismic data. The accelerometer includes a proof mass that is resiliently coupled to a support structure by folded beams, S-shaped balanced beams, straight beams, and/or folded beams with resonance damping. The support structure further includes travel stops for limiting transverse motion of the proof mass.

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositi

Abstract: A computer input device used to input coordinates and three-dimensional graphical information into a computer. The device includes an acceleration sensor that has a fixed volume vessel containing a magnetic fluid. A non-magnetic inertial body is located in the magnetic fluid. Three magnetic field source are located on three perpendicular axes where each magnetic field source has an output for connection to a computer.

Abstract: A micro inertial measurement unit, which is adapted to apply to output signals proportional to rotation and translational motion of a carrier, respectively from angular rate sensors and acceleration sensors, is employed with MEMS rate and acceleration sensors. Compared with a conventional IMU, the processing method utilizes a feedforward open-loop signal processing scheme to obtain highly accurate motion measurements by means of signal digitizing, temperature control and compensation, sensor error and misalignment calibrations, attitude updating, and damping control loops, and dramatically shrinks the size of mechanical and electronic hardware and power consumption, meanwhile, obtains highly accurate motion measurements.

Abstract: The size reduction of an acceleration sensor having an acceleration detecting chip (ACa) and a signal processing chip (SCa), can be attained with an improvement in arrangement of both chips. Specifically, the acceleration detecting chip (ACa) is disposed in a through-hole (HL1) formed in the signal processing chip (SCa). A cap (CPa) is provided in order to prevent resin flowing into an acceleration detecting part (AS), when forming a resin encapsulation package.