Abstract: This document discusses, among other things, an inertial sensor including a single proof-mass formed in an x-y plane of a device layer, the single proof-mass including a single, central anchor configured to suspend the single proof-mass above a via wafer. The inertial sensor further includes first and second electrode stator frames formed in the x-y plane of the device layer on respective first and second sides of the inertial sensor, the first and second electrode stator frames symmetric about the single, central anchor, and each separately including a central platform and an anchor configured to fix the central platform to the via wafer, wherein the anchors for the first and second electrode stator frames are asymmetric along the central platforms with respect to the single, central anchor.

Abstract: A physical quantity sensor includes a substrate, an oscillating member that is disposed over the substrate, support portions that support the oscillating member and that are disposed along a first axis, and detection electrodes that are disposed on the substrate so as to oppose the oscillating member. The oscillating member has a pair of side faces intersecting a second axis perpendicular to the first axis in a plane, and a protrusion is formed on at least one of the pair of side faces.

Abstract: An accelerometer for reducing undesired attraction or repulsion forces between a proof mass and a cover. An exemplary accelerometer includes a proof mass, a base, a flexure that flexibly attaches the proof mass to the base, at least one double-ended tuning fork (DETF) attached at one end to the proof mass and at another end to the base, and a housing structure that encloses the proof mass within a cavity. A layer of graphene is located on at least a portion of the nonconductive surfaces within the housing structure. The nonconductive surfaces include a surface on the proof mass, the housing structure, the base, the flexure, or the DETF. The layer of graphene is attached to a heat sink and/or to an electrical charge dissipation component.

Abstract: Disclosed is an inertial sensor, including a membrane, a mass body provided underneath a central portion of the membrane, a post provided underneath a peripheral portion of the membrane, and a cap having a peripheral portion bonded to a lower surface of the post using low-temperature silicon direct bonding. A method of manufacturing the inertial sensor is also provided.

Abstract: The present invention relates to a MEMS acceleration sensor comprising a substrate and a sensor mass that is disposed parallel to the substrate in an X-Y plane. The sensor mass is rotatable about a rotary axis, and includes a plurality of holes. The weight of the sensor mass is different on the two sides of the rotary axis. The sensor further includes sensor elements for detecting a rotary motion of the sensor mass about the rotary axis. To change the weight of the sensor mass on one side of the rotary axis relative to the other side, material of the sensor mass is partially removed in some of the holes for reducing the weight of the sensor mass, and/or material of the sensor mass is added in the Z-direction, in particular in the extension of the holes, for increasing the weight of the sensor mass.

Abstract: A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided.

Abstract: Systems and methods for fabricating a multi-axis sensor are provided. In one implementation, a method comprises: fabricating a first die having a first active surface with first application electronics; fabricating a second die having a second active surface with second application electronics and a plurality of electrical connections that extend from the second application electronics to a side surface interface of the second die that is adjacent to the second active surface; aligning the side surface interface to be coplanar with the first active surface; and forming at least one electrical connection between the plurality of electrical connections and the first active surface.

Abstract: An inertial sensor with stress isolation structure includes a substrate, a suspension bridge, a guard ring and an electromechanical conversion mechanism. The substrate has a housing trough and an annular wall surrounding the housing trough. The suspension bridge is located in the housing trough and connected to the annular wall. The guard ring is connected to the suspension bridge and suspended in the housing trough. The suspension bridge is located between the substrate and guard ring. The electromechanical conversion mechanism is connected to and surrounded by the guard ring. Through the guard ring, interferences of applied forces to the electromechanical conversion mechanism can be reduced, precision of the inertial sensor can be improved, and performance impact caused by succeeding element package process can also be reduced. Thus package, test and calibration processes can be simplified to lower production cost.

Abstract: An inertia MEMS sensor and a manufacturing method are provided. The inertia MEMS sensor includes a main body and a weight block relatively removable. The main body includes a first main body with a first surface and a second main body vertically connecting with the first surface. A first electrode parallel to the first surface is in the first main body. A second electrode perpendicular to the first surface is in the second main body. The weight block is suspended in a space defined by the first and second main bodies. The weight block includes a third electrode parallel to the first surface, a forth electrode is perpendicular to the first surface, and a weight layer. The third electrode connects with the forth electrode to form a U-shaped groove for accommodating the weight layer, thereby increasing the weight block weight, improving precision and reducing the cost.

Abstract: An apparatus for amplifying a vibratory movement includes a micromechanical device having an interface for fixedly joining it to a vibrating member; a mass mounted to be mobile in at least one degree of freedom relative to the interface; a spring capable of exerting a return force between the mobile mass and the interface; an orientation-detecting member for detecting the orientation of the shift of the interface according to said degree of freedom; and a coupling member for coupling the mobile mass to the interface. The coupling member is configured to couple the mobile mass to the interface when an orientation of shift of the interface is opposite that of the mobile mass and to uncouple the mobile mass from the interface before a change in orientation of the interface and when the orientation of shift of the interface is identical to that of the mobile mass.

Abstract: A micro inertial measurement system includes a housing, a sensing module, and a damper. The sensing module includes a rigid sensing support, a measuring and controlling circuit board mounted on the rigid sensing support and an inertial sensor set on the measuring and controlling circuit board. The inertial sensor includes a gyroscope and an accelerometer. The sensing module is mounted in the housing. The damper is mounted in the housing and set in the gap between the sensing module and the inside wall of the housing. By use of the above-mentioned structure, the noise immunity of the inertial measuring system can be greatly improved, and the volume and weight of the inertial measuring system can be greatly reduced.

Abstract: A system is provided for transmitting data between a first component and a second component, which rotates relative to the first component. The system includes a first coupling element of limited angular extent mounted to the first component, and a second coupling element of limited angular extent mounted to the second component. The first and second coupling elements come into angular alignment once per revolution of the second component relative to the first component. The system further includes a first transceiver connected to the first coupling element, and a second transceiver connected to the second coupling element. The first and second transceivers are configured to detect the angular alignment of the first and second coupling elements. The first and second transceivers are further configured to transmit data between the first and second transceivers via the first and second coupling elements when the angular alignment is detected.

Abstract: An apparatus for analyzing movement of equipment includes an inertial measurement unit continuously measuring six rigid body degrees of freedom of the equipment and outputting data representative thereof, wherein the inertial measurement unit includes a planar substrate defining a single common plane (either rigid or flexible). The inertial measurement unit further includes at least one angular rate gyro and at least one accelerometer sufficient to measure the six rigid body degrees of freedom and each being mounted on the single common plane. The apparatus further includes a communication device transmitting the data.

Abstract: An imaging apparatus comprises a remote controller including no operating button and an imaging instrument including a display screen portion capable of displaying a first graphical user interface in association with movement of the remote controller. Selection item of the first graphical user interface is selected and determined on the basis of anteroposterior movement of the remote controller.

Abstract: A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

Abstract: An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.

Abstract: The invention is a frequency modulated (FM) inertial sensing device and method which, in one embodiment, comprises an accelerometer having a proof mass coupled to a nano-resonator element. The nano-resonator element is oscillated at a first predetermined frequency, which may be a first resonant frequency, and is altered to oscillate at a second frequency, which may be a second resonant frequency, in response to a resultant force produced by the acceleration of the proof mass. The degree of change in nano-resonator element output frequency is sensed and processed using suitable processing circuitry as a change in acceleration.

Abstract: The disclosure discloses a motion sensing apparatus and a mobile terminal. The apparatus includes a sensing module and a processing module, wherein the sensing module includes at least two outputs, the processing module includes at least two signal ports, each signal port of the processing module is connected with one of the outputs of the sensing module respectively, and the sensing module outputs sensing signals from different outputs according to sensed different motions, and the processing module performs corresponding processes according to the sensing signals received from different signal ports. The apparatus simplifies a hardware circuit to some extent, saves the cost, and reduces the consumption of electric energy. By using the apparatus, a mobile terminal with screen shaking function can be produced.

Abstract: In a wheel position identifying device for a vehicle, transmitters are disposed in wheels, respectively. Each of the transmitters has a dual axis acceleration sensor and a control unit. The dual axis acceleration sensor detects a normal-direction acceleration and a tangential-direction acceleration of the wheel associated with the transmitter. The control unit determines whether the wheel associated with the transmitter is a right wheel or a left wheel based on a sign of a product of a time differential value of the normal-direction acceleration and the tangential-direction acceleration, and stores data regarding a determination result in a frame. A receiver receives the frame from each transmitter and identifies a position of the transmitter based on the data stored in the frame. The wheel position identifying device is for example employed to a tire pressure detecting apparatus.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor 100 according to a preferred embodiment of the present invention includes a membrane including wiring layers that are partitioned into insulating regions and conducting regions, a mass body provided under a central portion of the membrane, and a post provided under an edge of the membrane so as to support the membrane and surrounding the mass body. By this configuration, the membrane is formed as a chief metal core, thereby making it possible to reduce the total manufacturing cost of the inertial sensor and the parasitic capacitance is reduced, thereby making it possible to improve sensitivity of the inertial sensor. Further, the mass body extending from the membrane is made of metals to increase a mass density of the mass body, thereby making it possible to improve the sensitivity of the inertial sensor.

Abstract: A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Abstract: A sensor device includes a time determining part and an output circuit. The time determining part determines time point information, and adds the time point information to the output supplied from a part subjected to failure diagnosis and related to generation of a failure detection signal, and to the output related to generation of a sense signal. The output circuit outputs the sense signal with the time point information added by the time determining part after the failure detection signal correlated with the sense signal by the time point information is output.

Abstract: A micromechanical component including a mass structure which may be deflected with respect to a substrate with the aid of at least one spiral spring in a direction of deflection. The spiral spring includes at least one folding section, which is formed by two spring legs which are situated essentially in parallel to each other and are connected to each other with the aid of a connecting bar. A damping device for oscillating movements of the folding section in the direction of deflection is provided in the area of the connecting bar.

Abstract: An integrated sensor device is provided. The integrated sensor device comprises a first substrate including a surface portion and a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate. The integrated sensor device also comprises one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity. The integrated sensor device further comprises one or more additional sensors.

Abstract: Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110 on which a hole 200 penetrating in a thickness direction is formed, a mass body 120 disposed on a bottom of a central portion 113 of the membrane 110, and a post 130 disposed on a bottom of an edge 115 of the membrane 110 to support the membrane 110 and surrounding the mass body 120. By the configuration, the preferred embodiment of the present invention reduces damping force due to viscosity of air at the time of vibration by forming the hole 200 on the membrane 110 to increase displacement or amplitude of the mass body 120, thereby increasing sensitivity of the inertial sensor 100.

Abstract: An sensor device with high detection accuracy. The sensor device includes an angular velocity sensor for outputting an angular velocity sensing signal, an acceleration sensor for outputting an acceleration sensing signal, and an output circuit for outputting the angular velocity sensing signal and the acceleration sensing signal. The output circuit outputs signals in a digital format according to the time-division system, so as to link timewise the angular velocity sensing signal and the acceleration sensing signal detected at the same timing as one signal.

Abstract: A system and method for analyzing a device that includes a mass configured for motion. The system includes a tri-axial accelerometer disposed to detect acceleration vectors of the device and to output three channels of acceleration data, and a user interface receiving the three channels of acceleration data. The user interface is configured to correlate the three channels of acceleration data with a reference frame defined by three orthogonal axes intersecting at a vertex, and includes a display and a selector. The display shows sets of options that represent dispositions of the device with respect to gravity, placements of the tri-axial accelerometer with respect to the device, and orientations of the tri-axial accelerometer with respect to the device. The selector selects one device disposition option, one tri-axial accelerometer placement option, and one tri-axial accelerometer orientation option.

Abstract: A method for generating electrical power from an acceleration of an object is provided. The method including: vibrating a mass-spring unit upon an acceleration of an object; transmitting a force resulting from the acceleration from the mass-spring unit to the one or more piezoelectric elements; converting the vibration of the mass-spring unit to an electrical energy; and calculating at least one of the force and acceleration based on an output of the one or more piezoelectric elements.

Abstract: An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.

Abstract: A crystal device that has stable vibration characteristics and that offers high reliability and high accuracy. The crystal device includes a first major face, which contains a portion of a base and a portion of a vibrating prong within a single plane, formed on the crystal plate, and a second major face, which contains another portion of the base and another portion of the vibrating prong within a single plane, formed on a crystal plate, wherein the first major face and the second major face have different outer shapes. The shapes of the first and second major faces can be produced by first forming mask layer patterns on a crystal substrate by exposure through different mask patterns and then etching the crystal substrate using the thus formed mask layer patterns.

Abstract: A MEMS device (20) includes a substrate (24) and a movable element (22) adapted for motion relative to the substrate (24). A secondary structure (46) extends from the movable element (22). The secondary structure (46) includes a secondary mass (54) and a spring (56) interconnected between the movable element (22) and the mass (54). The spring (56) is sufficiently stiff to prevent movement of the mass (54) when the movable element (22) is subjected to force within a sensing range of the device (20). When the device (20) is subjected to mechanical shock (66), the spring (56) deflects so that the mass (54) moves counter to the motion of the movable element (22). Movement of the mass (54) causes the movable element (22) to vibrate to mitigate stiction between the movable element (22) and other structures of the device (20) and/or to prevent breakage of components within the device (22).

Abstract: A communication apparatus includes a bone conduction communication apparatus with a housing having a shape which is conformable to at least a portion of at least one tooth of a user; a transceiver mounted in the housing; and a transducer disposed within or upon the housing and in vibratory communication with a surface of the at least one tooth to transmit sound through the at least one tooth. A positioning system is provided to transmit positional information to the transceiver to be delivered to the transducer; and a communication device links the transceiver with a second person. The electronic and transducer assembly may receive incoming sounds either directly or through a receiver to process and amplify the signals and transmit the processed sounds via a vibrating transducer element coupled to a tooth or other bone structure, such as the maxillary, mandibular, or palatine bone structure.

Abstract: Embodiments of the invention provide a method and a device for measuring the progress of a moving person. The method calculating at least one of the following quantities describing the progress of the moving person: speed, step rate, step count, step length, distance and way of progress, based on values of a vertical acceleration of a body of the moving person measured by an acceleration sensor over a measured time.

Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.

Abstract: A MEMS system includes an inertial sensor having sensor circuitry and management circuitry implemented with the sensor circuitry. The management circuitry includes a detection module that detects a condition of the system and a management module that coordinates the functionality of the inertial sensor and the detection module based on the detected condition.

Abstract: Methods, systems, and computer-readable mediums are provided that determine the angular orientation of detectors and detector electronic assemblies (“DEAs”). In various embodiments, the orientation of detectors/DEAs (in the ring) is determined with respect to other detectors/DEAs in the ring, the orientation of the detectors/DEAs with respect to a patient bed, or the orientation of the detectors/DEAs with respect to Earth's gravitational field. In another embodiment, a nuclear medical imaging system has one or more detector units arranged around or that can be swept around a patient bed. Each of the detector units includes an angular orientation-sensing accelerometer. By determining angular orientation of the detector from signals outputted by the accelerometer, the circumferential position of the detector relative to the patient bed can be determined. That information is used in conjunction with information about detected events to construct an image of an organ or tissue mass of interest.

Abstract: An X-axis acceleration level determining section determines whether an X-axis acceleration signal output from a three-axis acceleration sensor has a value equal to or more than a predetermined positive threshold level, a value equal to or less than a predetermined negative threshold level, a value between the positive threshold level and a level of 0, or a value between the level of 0 and the negative threshold level. A Y-axis acceleration level determining section also makes a similar determination for a Y-axis acceleration signal output from the three-axis acceleration sensor. An attitude determining section determines the rotated attitude of a device equipped with the three-axis acceleration sensor with respect to the Z axis based on results of determinations made by the X-axis acceleration level determining section and the Y-axis acceleration level determining section.

Abstract: The invention relates to a device for measuring the dynamic interaction, in particular power transfer and work performed, between a first and a second body, in particular during relatively random movements. The device comprises a housing in which at least one kinematic sensor and at least one kinetic sensor is arranged, in addition to processing means for processing the signals from the sensors, and communication means for data exchange with the outside world. The invention also relates to a method for measuring the dynamic interaction between a first and a second body, and a carrier provided with a number of devices according to the invention.

Abstract: A method and apparatus for sensing movement resonates a primary member in a flexure mode at a given frequency, thus causing the primary member to have top and bottom portions that resonate at substantially about zero Hertz. The method also secures the bottom portion to a first substrate, and mechanically constrains the top portion while resonating in the flexure mode to substantially eliminate vibrations in the top portion. Finally, the method generates a changing capacitance signal in response to movement of the primary member. When generating this changing capacitance signal, the primary member resonates in a bulk mode at a given frequency.

Abstract: A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.

Abstract: An audio electronic device includes a player, an output device, a detector, and an automatic turn-off module. The player is for reproducing audio data. The output device is for transforming the audio data to audible sound. The detector is for detecting positional shift of the output device. The automatic turn-off module is for turning off the player based on the positional shift. An automatic turn-off method is also disclosed.

Abstract: A mode matching servo for an inertial sensor having a resonator and an accelerometer provides a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than an accelerometer resonance mode frequency so as to induce acceleration signals from the accelerometer substantially at the test signal frequency when the modes are not matched. A feedback signal is provided in response to such induced signals to substantially nullify the signals.

Abstract: A tilt and vibration sensor incorporating a plurality of electrodes and a conductive spherical. body which is turned on and off by the moving displacement of the spherical body, and which may be remarkably reduced in size and may have high performance and high operating sensitivity, high durability, and high reliability; and a method of manufacturing the sensor. The case (1) of the sensor comprises a case body (5) formed of a non-conductive material having such excellent gas-barrier property and heat resistance that can stop the transmission of gases which affects the on/off operation of the sensor due to the moving displacement of the conductive spherical body (4) and a cover body (7) sealing airtight the opening part (6) of the case body.

Abstract: In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.

Abstract: The invention relates to a motion determination apparatus for determining motion of a moving object, wherein the motion determination apparatus (1) comprises a multi-axial accelerometer (2) for being positioned at the moving object (4), wherein the multi-axial accelerometer (2) is adapted to generate accelerometer signals indicative of the acceleration along different spatial axes. The motion determination apparatus further comprises a motion signal generation unit (3) for generating a motion signal indicative of the motion of the object (4) by combining the accelerometer signals of different spatial axes. The combination of the accelerometer signals of different spatial axes yields a motion signal having a large signal-to-noise ratio, even if an axis is located close to a rotational axis of the movement.

Abstract: An electronic component analyzing apparatus is provided with a fixing part configured to hold a substrate to which an electronic component is soldered; a gripper configured to grip the electronic component; a transmission part coupled to the gripper, and configured to transmit an external force to the gripper as a force acting in a direction away from the substrate; and a support part configured to pivotally support the transmission part.

Abstract: A system determines a vehicle vibration dosage. The system includes a movably mounted vehicle component, a sensor for sensing movement magnitude of the vehicle component and an evaluation unit. The evaluation unit calculates the dosage magnitude reflecting the vibration dosage, on the basis of the sensed movement magnitude. The evaluation unit stores the calculated dosage magnitude in a storage unit in the form of an appropriate dosage entry.

Abstract: Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.

Abstract: The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Abstract: The invention relates to a method for determining a travel direction of a vehicle (1), particularly a trailer vehicle, wherein wheel speed signals (n1, n2, n3) are captured and a travel speed (v) is determined, a longitudinal acceleration (a) of the vehicle (1) is measured, and a longitudinal acceleration measurement signal (Sa) is output, an approach process is determined from a time change in the travel speed (v), and the direction of the approach process is determined from the longitudinal acceleration measurement signal (Sa). An approach process in the reverse direction is particularly detected thereby. The invention further relates to a control device (2) for performing the method, particularly in a vehicle controller, a vehicle system, and a corresponding vehicle.