Particular Type Of Scanning Probe Microscopy [spm] Or Microscope; Essential Components Thereof (epo) Patents (Class 850/21)
  • Publication number: 20120278957
    Abstract: A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.
    Type: Application
    Filed: April 29, 2011
    Publication date: November 1, 2012
    Inventors: Nghi Phan, Jeff Markakis, Johannes Kindt, Carl Masser
  • Patent number: 8296856
    Abstract: A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: October 23, 2012
    Assignee: Infinitesima Ltd.
    Inventors: Andrew Humphris, David Catto
  • Patent number: 8296859
    Abstract: A localized nanostructure growth apparatus that has a partitioned chamber is provided, where a first partition includes a scanning probe microscope (SPM) and a second partition includes an atomic layer deposition (ALD) chamber, where the first partition is hermetically isolated from the second partition, and at least one SPM probe tip of the SPM is disposed proximal to a sample in the ALD chamber. According to the invention, the hermetic isolation between the chambers prevents precursor vapor from damaging critical microscope components and ensuring that contaminants in the ALD chamber can be minimized.
    Type: Grant
    Filed: March 23, 2009
    Date of Patent: October 23, 2012
    Assignees: The Board of Trustees of the Leland Stanford Junior University, Honda Motor Co., Ltd
    Inventors: James F. Mack, Neil Dasgupta, Timothy P. Holme, Friedrich B. Prinz, Andrei Iancu, Wonyoung Lee
  • Patent number: 8296857
    Abstract: The piezo-electric actuator (1) to oscillate the probe of a scanning probe microscope is arranged in the feedback branch (3) of an analog amplifier (4). A current source (10) is provided for feeding a defined alternating current to the input of the amplifier (4). The amplifier (4) strives to adjust the voltage over the actuator (1) such that the current from the current source (10) flows through the actuator (1). As the current through the actuator (1) is proportional to its deflection, this design allows to run the actuator at constant amplitude without the need of complex feedback loops.
    Type: Grant
    Filed: December 17, 2008
    Date of Patent: October 23, 2012
    Assignee: Specs Zürich GmbH
    Inventor: Jörg Rychen
  • Patent number: 8291510
    Abstract: An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.
    Type: Grant
    Filed: September 27, 2010
    Date of Patent: October 16, 2012
    Assignee: Agilent Technologies, Inc.
    Inventors: Dale W. Schroeder, Richard P. Tella
  • Patent number: 8284483
    Abstract: A method for acquiring signals in laser scanning microscopy, includes the steps of: moving a focused optical excitation beam relative to an object to be measured so that the focus point of the beam follows a predetermined path in the space of the object; and acquiring optical measurement signals along the path according to at least one acquisition parameter; characterized in that the path of the excitation beam is determined so as to substantially minimize the variations of the optical properties of at least one portion of the environments crossed by the excitation beam between consecutive acquisitions, and in that at least one acquisition parameter among the acquisition parameters is modulated during the movement of the excitation beam. A device for implementing the method is also described.
    Type: Grant
    Filed: February 3, 2010
    Date of Patent: October 9, 2012
    Assignee: Ecole Polytechnique
    Inventors: Emmanuel Jean-Marc Beaurepaire, Israel Veilleux, Nicolas Olivier, Delphine Malvina Daniele Marie Debarre, Jean-Louis Martin
  • Patent number: 8286261
    Abstract: A microscope, in particular a scanning probe microscope, comprising a programmable logic device.
    Type: Grant
    Filed: July 14, 2010
    Date of Patent: October 9, 2012
    Assignee: Witec Wissenchaftliche Instrumente und Technologie GmbH
    Inventors: Peter Spizig, Detief Sanchen, Jörg Förstner, Joachim Koenen, Othmar Marti, Gerhard Volswinkler
  • Patent number: 8276210
    Abstract: A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval ?t0, so that the electrode finally receives a voltage pulse of duration ?t0.
    Type: Grant
    Filed: October 13, 2009
    Date of Patent: September 25, 2012
    Assignees: Cameca, CNRS
    Inventors: François Vurpillot, Alain Bostel
  • Patent number: 8266718
    Abstract: A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.
    Type: Grant
    Filed: February 16, 2010
    Date of Patent: September 11, 2012
    Assignee: The Board of Trustees of Leland Stanford Junior University
    Inventors: Keji Lai, Michael Kelly, Zhi-Xun Shen
  • Patent number: 8209767
    Abstract: An optical metrology tool may include a source of electromagnetic radiation having a characteristic wavelength, an objective having a central obscuration, a near field element located within the central obscuration of the objective, and an electromagnetic radiation detector coupled to the near field element. A mechanism is configured to bring the near field element into proximity to the target. A characteristic dimension of the near field element is sufficient smaller than the wavelength of the electromagnetic radiation that when the electromagnetic radiation passes through the cavity and the cavity is in sufficient proximity to the target that evanescent waves can couple energy from propagating radiation in the near-field element to the target. The detector detects an optical signal due to the evanescent waves coupling to the target.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: June 26, 2012
    Assignee: KLA-Tencor Corporation
    Inventor: Amnon Manassen
  • Patent number: 8209766
    Abstract: A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: June 26, 2012
    Assignee: Park Systems Corp.
    Inventors: Sang-il Park, Sang Han Chung, Byoung-Woon Ahn
  • Patent number: 8209768
    Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: June 26, 2012
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Oliver Krause, Mathieu Burri, Manfred Detterbeck, Bernd Irmer, Christian Penzkofer
  • Publication number: 20120137396
    Abstract: A method comprising characterizing the dimensions of structures on a semiconductor device having dimensions less than approximately 100 nanometers (nm) using one of scanning probe microscopy (SPM) or profilometry.
    Type: Application
    Filed: January 25, 2012
    Publication date: May 31, 2012
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Duncan M. Rogers, Vladimir A. Ukraintsev
  • Patent number: 8166568
    Abstract: It is an object to provide a contact probe pin for a semiconductor test apparatus, including an amorphous carbon type conductive film formed on the probe pin base material surface. The conductive film is excellent in tin adhesion resistance of preventing tin which is the main component of solder from adhering to the contact part of the probe pin during contact between the probe pin and solder. The contact probe pin for a semiconductor test apparatus, includes an amorphous carbon type conductive film formed on the conductive base material surface. The amorphous carbon type conductive film has an outer surface with a surface roughness (Ra) of 6.0 nm or less, a root square slope (R?q) of 0.28 or less, and a mean value (R) of curvature radii of concave part tips of the surface form of 180 nm or more, in a 4-?m2 scan range by an atomic force microscope.
    Type: Grant
    Filed: July 30, 2010
    Date of Patent: April 24, 2012
    Assignee: Kobe Steel, Ltd.
    Inventors: Hirotaka Ito, Kenji Yamamoto
  • Patent number: 8161568
    Abstract: A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: April 17, 2012
    Assignee: SII NanoTechnology Inc.
    Inventors: Masato Iyoki, Naoya Watanabe
  • Publication number: 20120079632
    Abstract: Scanning hall probe microscopy is used to measure 3 components of the magnetic field vector at nanometer resolution by connecting of Hall probe to the end of the piezo scanner, then gluing of the sample to the sample holder, thereafter positioning of the SHPM head under the optical microscope with approximately X40 magnification, then moving back of the slider puck around approximately 30 steps or moving the sensor or sample back by suffient amount using motors, piezo or other positioner such that signal decays to negligible levels; thereafter setting the temperature of cryostat or to desired temperature, then offset nulling of the Hall sensor in gradiometer or normal conditions, and finally setting of the scan area, speed, resolution and the acquisition channels through SPM control program.
    Type: Application
    Filed: December 7, 2011
    Publication date: March 29, 2012
    Inventors: Ahmet Oral, Munir Dede, Rizwan Arkam
  • Publication number: 20120066800
    Abstract: The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or Nanotool™ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. The invention can also produce electrical current for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).
    Type: Application
    Filed: April 4, 2011
    Publication date: March 15, 2012
    Applicant: General Nanotechnology LLC.
    Inventor: Victor B. Kley
  • Patent number: 8108943
    Abstract: There is provided in one embodiment of the invention a method for analyzing a sample material using surface enhanced spectroscopy. The method comprises the steps of imaging the sample material with an atomic force microscope (AFM) to select an area of interest for analysis, depositing nanoparticles onto the area of interest with an AFM tip, illuminating the deposited nanoparticles with a spectrometer excitation beam, and disengaging the AFM tip and acquiring a localized surface enhanced spectrum. The method may further comprise the step of using the AFM tip to modulate the spectrometer excitation beam above the deposited nanoparticles to obtain improved sensitivity data and higher spatial resolution data from the sample material. The invention further comprises in one embodiment a system for analyzing a sample material using surface enhanced spectroscopy.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: January 31, 2012
    Assignee: California Institute of Technology
    Inventor: Mark S. Anderson
  • Patent number: 8099792
    Abstract: Atomic force photovoltaic microscopy apparatus and related methodologies, as can be used to quantitatively measure spatial performance variations in functioning photovoltaic devices.
    Type: Grant
    Filed: January 7, 2009
    Date of Patent: January 17, 2012
    Assignees: Northwestern University, The United States of America as represented by the Secretary of the Air Force
    Inventors: Mark C. Hersam, Benjamin Leever
  • Patent number: 8091143
    Abstract: A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1?) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM?). A method of atomic force microscopy including the use of such a probe.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: January 3, 2012
    Assignees: Centre National de la Recherche Scientifique, Universite de Bordeaux 1
    Inventors: Marc Faucher, Lionel Buchaillot, Jean-Pierre Aime, Bernard Louis Amand Legrand, Gerard Couturier
  • Patent number: 8074292
    Abstract: The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: December 6, 2011
    Assignee: Cameca
    Inventors: Alain Bostel, Mikhail Yavor, Ludovic Renaud, Bernard Deconihout
  • Publication number: 20110296562
    Abstract: A method for acquiring signals in laser scanning microscopy, includes the steps of: moving a focused optical excitation beam relative to an object to be measured so that the focus point of the beam follows a predetermined path in the space of the object; and acquiring optical measurement signals along the path according to at least one acquisition parameter; characterised in that the path of the excitation beam is determined so as to substantially minimise the variations of the optical properties of at least one portion of the environments crossed by the excitation beam between consecutive acquisitions, and in that at least one acquisition parameter among the acquisition parameters is modulated during the movement of the excitation beam. A device for implementing the method is also described.
    Type: Application
    Filed: February 3, 2010
    Publication date: December 1, 2011
    Applicant: ECOLE POLYTECHNIQUE
    Inventors: Emmanuel Jean-Marc Beaurepaire, Israël Veilleux, Nicolas Olivier, Delphine Malvina Danièle Marie Debarre, Jean-Louis Martin
  • Patent number: 8069492
    Abstract: A spin-torque probe microscope and methods of using the same are described. The spin-torque probe microscope includes a cantilever probe body, a magnetic tip disposed at a distal end of the cantilever probe body, an electrically conductive sample disposed proximate to the magnetic tip, an electrical circuit providing a spin-polarized electron current to the electrically conductive sample, and a vibration detection element configured to sense vibration frequency of the cantilever probe body. The spin-polarized electron current is sufficient to alter a local electron spin or magnetic moment within the electrically conductive sample and be sensed by the magnetic tip.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: November 29, 2011
    Assignee: Seagate Technology LLC
    Inventors: Haiwen Xi, Song S. Xue
  • Publication number: 20110271412
    Abstract: The piezoelectric response of a sample is measured by applying a scanning probe microscope, whose probe is in contact with the sample The probe is mounted to a cantilever and an actuator is driven by a feedback loop to oscillate at a resonance frequency f. An AC voltage with principally the same frequency f but with a phase (with respect to the oscillation) and/or amplitude varying periodically with a frequency fmod is applied to the probe for generating a piezoelectric response of the sample A lock-in detector measures the spectral components at the frequency fmod of the control signals (K, f) of the feedback loop. These components describe the piezoelectric response and can be recorded as output signals of the device. The method allows a reliable operation of the resonator at its resonance frequency and provides a high sensitivity.
    Type: Application
    Filed: August 27, 2008
    Publication date: November 3, 2011
    Applicant: SPECS ZURICH GMBH
    Inventor: Jörg Rychen
  • Publication number: 20110247108
    Abstract: Sample inspection apparatuses and sample inspection methods which may include scanning a sample at high speed while inducing electrostatic force due to an electric field generated between a probe tip and the sample and generating and displaying a surface topography of the sample from a vibration displacement variation of a cantilever due to the electrostatic force.
    Type: Application
    Filed: March 17, 2011
    Publication date: October 6, 2011
    Applicant: Samsung Electronics Co., Ltd.
    Inventor: Yonmook Park
  • Publication number: 20110231966
    Abstract: A method for determining chemical characteristics of a sample, the method including directly applying a first acoustic wave at a first frequency to a probe and applying, independent of the directly applying the first acoustic wave, a second acoustic wave at a second frequency to the sample, wherein the first frequency is different than the second frequency and the first acoustic wave and the second acoustic wave are simultaneously applied to the probe and the sample, respectively, and form a coupling. The method further including applying electromagnetic energy to the sample, wherein the electromagnetic energy is absorbed by the sample causing a change in phase of the second acoustic wave. The method further including detecting an effect of the coupling and determining a spectrum of the sample based on the detecting.
    Type: Application
    Filed: March 17, 2010
    Publication date: September 22, 2011
    Inventors: Ali Passian, Laurene Tetard, Thomas George Thundat, Brian Henry Davison, Martin Keller
  • Publication number: 20110207163
    Abstract: A method is disclosed for the preparation of isomorphic and nonspherical shape standards as isometric as possible and their mixtures for validation of the measurement methods and analyzers for quantification of particle shapes and their characteristics especially in the microscale and nanoscale size range. Furthermore the shape standards also provide quality control and performance qualification can be used at the operator of the corresponding shape measurement devices.
    Type: Application
    Filed: June 4, 2009
    Publication date: August 25, 2011
    Applicant: Dr. Lerche KG
    Inventor: Dietmar Lerche
  • Patent number: 8001830
    Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.
    Type: Grant
    Filed: May 15, 2007
    Date of Patent: August 23, 2011
    Assignee: Anasys Instruments, Inc.
    Inventors: Alexandre Dazzi, Rui Prazeres, Kevin Kjoller, Michael Reading
  • Patent number: 7979916
    Abstract: Aspects of the invention are directed to piezoresponse force analysis of a material. A stimulus signal including a first frequency component is applied to a contact point on the material such that the stimulus signal actuates a portion of the material to experience a motion as a result of a piezoelectric effect. A resonant device is coupled to the contact point such that the resonant device experiences a resonant motion at the first frequency component in response to the motion of the material, the resonant motion having a greater displacement than a displacement of the motion of the material, and is substantially unaffected by mechanical properties of the material at the contact point. The resonant motion of the resonant device is detected and processed to produce a measurement representing the piezoresponse of the material at the contact point.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: July 12, 2011
    Inventors: Bede Pittenger, Kumar Virwani, Benedikt Zeyen
  • Patent number: 7961379
    Abstract: A pump probe measuring device (1) includes an ultrashort optical pulse laser generator (11) for generating a first ultrashort optical pulse train, which becomes a pump light, and a second ultrashort optical pulse train, which becomes a probe light, a delay time adjusting unit (15) for adjusting a delay time between ultrashort optical pulse trains, a first pulse picker and a second pulse picker (13, 14) for accepting each of the first and the second ultrashort optical pulse trains and allowing only one pulse to be transmitted at an arbitrary repetition periodicity, thus reducing the effective repetition frequency of the optical pulses, a delay time modulation unit (10) for periodically changing a position through which pulses are transmitted by the first and the second pulse pickers (13, 14), an irradiation optical system (16) for applying pump light and probe light to a sample (19), a measuring unit (20) for detecting probe signals from a sample (19), and a lock-in amplifier (18).
    Type: Grant
    Filed: November 28, 2007
    Date of Patent: June 14, 2011
    Assignee: Japan Science and Technology Agency
    Inventors: Hidemi Shigekawa, Osamu Takeuchi
  • Patent number: 7958564
    Abstract: A scanning measurement instrument is capable of simultaneously achieving both higher accuracy and higher speed in autonomous scanning measurement. The instrument includes a path information holding unit for holding information about the path of the center position of a tip of a scanning probe at past tip center positions with respect to the current tip center position during autonomous scanning measurement performed with the scanning probe; a path reference direction setting unit for setting an approximate straight line direction of the path as a path reference direction; a traveling direction setting unit for setting the path reference direction as a traveling direction; a movement control unit for controlling a moving unit such that the scanning probe is moved in the traveling direction; and a normal direction setting unit for setting the normal direction of a measurement surface according to the traveling direction.
    Type: Grant
    Filed: February 19, 2009
    Date of Patent: June 7, 2011
    Assignee: Mitutoyo Corporation
    Inventors: Takashi Noda, Hiroshi Kamitani, Naoya Kikuchi
  • Patent number: 7954166
    Abstract: An improved method of loading tips and other surfaces with patterning compositions or inks for use in deposition. A method of patterning is described, the method comprising: (i) providing at least one array of tips; (ii) providing a plurality of patterning compositions; (iii) ink jet printing at least some of the patterning compositions onto some of the tips; and (iv) depositing at least some of the patterning compositions onto a substrate surface; wherein the ink jet printing is adapted to prevent substantial cross-contamination of the patterning composition on the tips. Good printing reproducibility and control of printing rate can be achieved. The surfaces subjected to ink jet printing can be treated to encourage localization of the ink at the tip. The method is particularly important for high density arrays.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: May 31, 2011
    Assignee: Northwestern University
    Inventors: Chad A. Mirkin, Yuhuang Wang, Louise R. Giam, Matthew Park
  • Patent number: 7930766
    Abstract: The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or Nanotool™ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. The invention can also produce electrical current for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).
    Type: Grant
    Filed: March 6, 2009
    Date of Patent: April 19, 2011
    Assignee: General Nanotechnology LLC
    Inventor: Victor B. Kley
  • Publication number: 20110072543
    Abstract: A modular laser scanning system where the laser scanner and various optical “building blocks” are contained in separate mechanical and optical modules. These modules can be combined to provide flexible systems with unique laser scanning capabilities or combinations of techniques. Additionally, the combining of these modules is achieved through the use of a mechanical and optical coupling standard.
    Type: Application
    Filed: September 22, 2010
    Publication date: March 24, 2011
    Applicant: INTELLIGENT IMAGING INNOVATIONS, INC.
    Inventor: Glen Ivan Redford
  • Publication number: 20110058177
    Abstract: The present invention relates to a method for analyzing chromosomes by preparing a chromosome preparation, measuring at least one interference property of the chromosome preparation and characterizing at least one chromosome structure by way of the interference property. Also, the invention relates to the use of a near field microscope for analyzing unstained chromosomes.
    Type: Application
    Filed: February 19, 2009
    Publication date: March 10, 2011
    Inventors: Rudolf Kessler, Tobias Merz, Karsten Rebner
  • Patent number: 7900506
    Abstract: The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: March 8, 2011
    Assignee: Insitutec, Inc.
    Inventors: Shane C. Woody, Marcin B. Bauza, Stuart T. Smith
  • Patent number: 7891016
    Abstract: Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: February 15, 2011
    Assignee: IUCF HYU (Industry-University Cooperation Foundation Hanyang University
    Inventors: Haiwon Lee, Chung Choo Chung, Cheolsu Han
  • Patent number: 7877816
    Abstract: Microscope, in particular a scanning probe microscope, comprising a programmable logic device.
    Type: Grant
    Filed: October 23, 2006
    Date of Patent: January 25, 2011
    Assignee: Witec Wissenschaftliche Instrumente und Technologie GmbH
    Inventors: Peter Spizig, Detlef Sanchen, Jörg Förstner, Joachim Koenen, Othmar Marti, Gerhard Volswinkler
  • Patent number: 7870616
    Abstract: A probe arrangement with a probe for local electrophysiological analysis of cells (4) such as patch-clamp techniques for use with atomic force microscopy, has a probe with a cantilever arm (2) connected to a probe holder (3). The probe has a probe tip (4) at a probing end (5) of the cantilever arm (2) and a fluid channel (6) in the cantilever arm (2) connecting a probe tip aperture (7) with a fluid reservoir (8) via a duct (9). The fluid channel (6), the duct (9) and the fluid reservoir (8) are adapted to be filled with a fluid solution (10) enabling ion transport for electrophysiological analysis. A first electrode (15) for electrophysiological analysis is placed in the fluid reservoir (8) and/or in the duct (9) and/or in the fluid channel (6).
    Type: Grant
    Filed: May 9, 2008
    Date of Patent: January 11, 2011
    Assignee: CSEM Centre Suisse D'Electronique Et de Microtechnique SA
    Inventors: André Meister, Jérôme Polesel-Maris, Michael Gabi, Tomaso Zambelli, Janos Vörös
  • Publication number: 20110004967
    Abstract: Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation).
    Type: Application
    Filed: June 2, 2010
    Publication date: January 6, 2011
    Applicant: UT-Battelle, LLC
    Inventors: Stephen Jesse, Sergei V. Kalinin
  • Patent number: 7861316
    Abstract: A microscope probe including a coaxial tip and a coplanar waveguide (CPW) formed on a silicon substrate is provided. The coaxial tip includes a tip shaft and a tip nib formed from the silicon substrate with the tip nib extending from the tip shaft opposite the silicon substrate. The tip shaft includes a first layer of a first conductive material formed over the silicon substrate, a second layer of an insulating material formed over the first layer, and a third layer of a second conductive material formed over the second layer. The tip nib includes the first layer of the first conductive material formed over the silicon substrate and exposed from the second layer and the third layer of the tip shaft. The CPW includes a center conductor formed from the first layer of the first conductive material and a first and a second outer conductor formed from the second layer of the second conductive material.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: December 28, 2010
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Daniel Warren van der Weide, Yaqiang Wang
  • Patent number: 7856665
    Abstract: An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atomic force microscope, and data collection is coordinated by a digital computer using digital trigger signals between the AFM controller and the vector network analyzer. Methods for imaging tip-sample capacitance and spectroscopic measurements at a single point on the sample are described. A method for system calibration is described.
    Type: Grant
    Filed: November 15, 2007
    Date of Patent: December 21, 2010
    Assignee: Asylum Research Corporation
    Inventors: Maarten Rutgers, William H. Hertzog, Keith M. Jones, Amir A. Moshar
  • Publication number: 20100285210
    Abstract: The fabrication and use of a multifunctional micropipette biological sensor for in-situ detection of temperature changes, ion conductivity, and light is described herein.
    Type: Application
    Filed: May 7, 2010
    Publication date: November 11, 2010
    Applicant: UNIVERSITY OF NORTH TEXAS
    Inventor: Tae-Youl Choi
  • Patent number: 7823215
    Abstract: The present invention relates to near-field scanning optical microscopy (NSOM) and near-field/far-field scanning microscopy methods, systems and devices that permit the imaging of biological samples, including biological samples or structures that are smaller than the wavelength of light. In one embodiment, the present invention permits the production of multi-spectral, polarimetric, near-field microscopy systems that can achieve a spatial resolution of less than 100 nanometers. In another embodiment, the present invention permits the production of a multifunctional, multi-spectral, polarimetric, near-field/far-field microscopy that can achieve enhanced sub-surface and in-depth imaging of biological samples. In still another embodiment, the present invention relates to the use of polar molecules as new optical contrast agents for imaging applications (e.g., cancer detection).
    Type: Grant
    Filed: May 12, 2006
    Date of Patent: October 26, 2010
    Assignee: The University of Akron
    Inventor: George C. Giakos
  • Patent number: 7814565
    Abstract: Techniques for forming a nanostructure on a probe tip are provided.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: October 12, 2010
    Assignee: SNU R&DB Foundation
    Inventors: Yong Hyup Kim, Tae June Kang
  • Patent number: 7810166
    Abstract: The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: October 5, 2010
    Assignee: Nambition GmbH
    Inventors: Jens Struckmeier, Karl Schlagenhauf
  • Publication number: 20100218286
    Abstract: A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.
    Type: Application
    Filed: February 16, 2010
    Publication date: August 26, 2010
    Applicant: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Keji Lai, Michael Kelly, Zhi-Xun Shen
  • Patent number: 7775086
    Abstract: Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation).
    Type: Grant
    Filed: September 1, 2006
    Date of Patent: August 17, 2010
    Assignee: UT-Battelle, LLC
    Inventors: Stephen Jesse, Sergei V. Kalinin
  • Publication number: 20100170016
    Abstract: An imaging microwave probe (1) with at least one measuring tip (5) on a measuring arm (2), whereby at least one of the measuring lips (5) has an antenna (6) for the detection or emission of electromagnetic signals and the measuring tip is significantly smaller in the near field than the wavelength of the electromagnetic signals, a positioning device for positioning of an object (3) for measuring relative to the measuring tip (5) in at least one spatial dimension (X, Y, Z), with a signal processing device (7) in electrical connection to the antenna (6) for conversion of the sensor signal from the antenna to a measured signal with a reduced frequency suitable for analysis or for conversion of a coupling signal with reduced frequency into a signal for transmission from the antenna (6) are described.
    Type: Application
    Filed: March 16, 2005
    Publication date: July 1, 2010
    Applicant: KUKA SCHWEISSANLAGEN GMBH
    Inventors: Meinhard Schilling, Andre Kaestner, Felix Stewing
  • Patent number: 7735146
    Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an atmospheric-pressure or near-atmospheric-pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated vacuum chamber; (E) an atmospheric pressure interface connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument comprising a near-field probe for scanning the sample; a vacuum capillary nozzle for sucking in particles which are desorbed by said laser, the nozzle being connected to an inlet orifice of said atmospheric pressure interface; a scanner platform connected to the sample holder, the platform being movable to a distance within a near-field distance of the probe; and a controller for maintaining distance information about a current distance between said probe
    Type: Grant
    Filed: January 26, 2006
    Date of Patent: June 8, 2010
    Assignee: The George Washington University
    Inventors: Akos Vertes, Mark E. Reeves, Fatah Kashanchi