Baffle for substrate processing system
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Description
Claims
The ornamental design for a baffle for a substrate processing system as shown and described.
Referenced Cited
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Patent History
Patent number: D1073758
Type: Grant
Filed: Oct 13, 2022
Date of Patent: May 6, 2025
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventors: Karthik Adappa Sathish (Bangalore), Cody Barnett (Beaverton, OR), Mitali Mrigendra Basargi (Karad), Ravi Kumar (Beaverton, OR)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Cheng Chen
Application Number: 29/856,399
Type: Grant
Filed: Oct 13, 2022
Date of Patent: May 6, 2025
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventors: Karthik Adappa Sathish (Bangalore), Cody Barnett (Beaverton, OR), Mitali Mrigendra Basargi (Karad), Ravi Kumar (Beaverton, OR)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Cheng Chen
Application Number: 29/856,399
Classifications