Baffle for substrate processing system

- LAM RESEARCH CORPORATION
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Description

FIG. 1 is a top view of a baffle for a substrate processing system;

FIG. 2 is a bottom view of the baffle shown in FIG. 1;

FIG. 3 is a front view of the baffle shown in FIG. 1;

FIG. 4 is a back view of the baffle shown in FIG. 1;

FIG. 5 is a right-side view of the baffle shown in FIG. 1;

FIG. 6 is a left-side view of the baffle shown in FIG. 1;

FIG. 7 is a top perspective view of the baffle shown in FIG. 1; and,

FIG. 8 is a bottom perspective view of the baffle shown in FIG. 1.

Claims

The ornamental design for a baffle for a substrate processing system as shown and described.

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Patent History
Patent number: D1073758
Type: Grant
Filed: Oct 13, 2022
Date of Patent: May 6, 2025
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventors: Karthik Adappa Sathish (Bangalore), Cody Barnett (Beaverton, OR), Mitali Mrigendra Basargi (Karad), Ravi Kumar (Beaverton, OR)
Primary Examiner: Calvin E Vansant
Assistant Examiner: Cheng Chen
Application Number: 29/856,399