Wafer holder for stepper
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The broken lines shown in the drawings represent portions of the wafer holder for a stepper that form no part of the claimed design.
Claims
The ornamental design for a wafer holder for a stepper, as shown and described.
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Type: Grant
Filed: Mar 13, 2013
Date of Patent: Apr 22, 2014
Assignee: Sumitomo Electric Industries, Ltd. (Osaka-shi)
Inventor: Hideto Tamaso (Osaka)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/448,577