Wafer holder for stepper

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front view of a wafer holder for a stepper showing my new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a front perspective view thereof, wherein each of the three pins leans toward the center of the holder;

FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 3;

FIG. 9 is an enlarged portion view taken along line 9-9 of FIG. 6;

FIG. 10 is an enlarged portion view taken along line 10-10 of FIG. 5; and,

FIG. 11 is an enlarged portion view taken along line 11-11 of FIG. 1.

The broken lines shown in the drawings represent portions of the wafer holder for a stepper that form no part of the claimed design.

Claims

The ornamental design for a wafer holder for a stepper, as shown and described.

Referenced Cited
U.S. Patent Documents
D320361 October 1, 1991 Karasawa
5310339 May 10, 1994 Ushikawa
6095806 August 1, 2000 Suzuki et al.
7100954 September 5, 2006 Klein et al.
D544452 June 12, 2007 Nakamura et al.
D552565 October 9, 2007 Nakamura et al.
D583779 December 30, 2008 Kuriyama et al.
D589474 March 31, 2009 Ogasawara et al.
D589912 April 7, 2009 Ogasawara et al.
D606952 December 29, 2009 Lee et al.
7644968 January 12, 2010 Hirooka et al.
D609652 February 9, 2010 Nagasaka et al.
D614593 April 27, 2010 Lee et al.
D616394 May 25, 2010 Sato
D639757 June 14, 2011 Root et al.
D654883 February 28, 2012 Honma et al.
D654884 February 28, 2012 Honma et al.
D655257 March 6, 2012 Honma et al.
D655259 March 6, 2012 Honma et al.
D674366 January 15, 2013 Kajiwara
D674761 January 22, 2013 Iida et al.
D684551 June 18, 2013 Nguyen
Patent History
Patent number: D703162
Type: Grant
Filed: Mar 13, 2013
Date of Patent: Apr 22, 2014
Assignee: Sumitomo Electric Industries, Ltd. (Osaka-shi)
Inventor: Hideto Tamaso (Osaka)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/448,577