Electrostatic chuck for semiconductor manufacturing equipment
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The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.
The alternate long and short dash lines are merely the boundary lines between the claimed parts and the non-claimed parts.
In the
Claims
The ornamental design for an electrostatic chuck for semiconductor manufacturing equipment, as shown and described.
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Type: Grant
Filed: Feb 1, 2016
Date of Patent: Nov 28, 2017
Assignee: Tokyo Electron Limited (Minato-Ku, Tokyo)
Inventors: Yasuharu Sasaki (Miyagi), Tomoyuki Takahashi (Miyagi)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/553,360