Ring for a plasma processing apparatus
Latest Hitachi High-Technologies Corporation Patents:
This application contains subject matter related to the following co-pending U.S. design patent applications:
Application Ser. No. 29/610,995, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;
Application Ser. No. 29/610,996, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;
Application Ser. No. 29/610,999, filed herewith and entitled “Cover Ring for a Plasma Processing Apparatus”; and
Application Ser. No. 29/611,001, filed herewith and entitled “Discharge Chamber for a Plasma Processing Apparatus”.
The broken lines showing a rectangular box labeled 10 in the drawings in
Claims
The ornamental design for a ring for a plasma processing apparatus, as shown and described.
| 5310453 | May 10, 1994 | Fukasawa |
| D404372 | January 19, 1999 | Ishii |
| 6068548 | May 30, 2000 | Vote |
| 6602116 | August 5, 2003 | Prince |
| D490450 | May 25, 2004 | Hayashi |
| D494551 | August 17, 2004 | Doba |
| D494552 | August 17, 2004 | Tezuka |
| D496008 | September 14, 2004 | Takahashi |
| D552565 | October 9, 2007 | Nakamura |
| D557226 | December 11, 2007 | Uchino et al. |
| D557425 | December 11, 2007 | Nakamura et al. |
| D559994 | January 15, 2008 | Nagakubo et al. |
| D606952 | December 29, 2009 | Lee |
| D694790 | December 3, 2013 | Matsumoto |
| D697038 | January 7, 2014 | Matsumoto |
| D699199 | February 11, 2014 | Kuwabara |
| D699200 | February 11, 2014 | Nagakubo |
| D766849 | September 20, 2016 | Fukushima |
| D770992 | November 8, 2016 | Tauchi et al. |
| D793976 | August 8, 2017 | Fukushima |
| D794585 | August 15, 2017 | Nabeya |
| D797691 | September 19, 2017 | Joubert |
| D799437 | October 10, 2017 | Nabeya |
| D810705 | February 20, 2018 | Krishnan |
| 20040025788 | February 12, 2004 | Ogasawara |
| 20050277375 | December 15, 2005 | Young |
| 20080308230 | December 18, 2008 | Takahashi |
| 20160158910 | June 9, 2016 | Lee |
| D1210213 | June 2004 | JP |
| D1361441 | June 2009 | JP |
| D1551512 | June 2016 | JP |
- Ichino et al., Design U.S. Appl. No. 29/610,995, filed Jul. 18, 2017.
- Ichino et al., Design U.S. Appl. No. 29/610,996, filed Jul. 18, 2017.
- Ichino et al., Design U.S. Appl. No. 29/610,999, filed Jul. 18, 2017.
- Nunomura et al., Design U.S. Appl. No. 29/611,001, filed Jul. 18, 2017.
Type: Grant
Filed: Jul 18, 2017
Date of Patent: Dec 25, 2018
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Takamasa Ichino (Tokyo), Kohei Sato (Tokyo), Kazunori Nakamoto (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,998