Target profile for a physical vapor deposition chamber target
Latest APPLIED MATERIALS, INC. Patents:
Description
The dashed lines in
Claims
The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
6659850 | December 9, 2003 | Korovin |
D557226 | December 11, 2007 | Uchino |
D559993 | January 15, 2008 | Nagakubo et al. |
D559994 | January 15, 2008 | Nagakubo et al. |
D614593 | April 27, 2010 | Lee |
D616390 | May 25, 2010 | Sato |
D633452 | March 1, 2011 | Namiki |
D691974 | October 22, 2013 | Osada |
D716742 | November 4, 2014 | Jang |
D724553 | March 17, 2015 | Choi |
D741823 | October 27, 2015 | Tateno |
D769200 | October 18, 2016 | Fukushima |
D770992 | November 8, 2016 | Tauchi |
D795208 | August 22, 2017 | Sasaki et al. |
D797067 | September 12, 2017 | Zhang |
D797691 | September 19, 2017 | Joubert |
D798248 | September 26, 2017 | Hanson |
D801942 | November 7, 2017 | Riker et al. |
D810705 | February 20, 2018 | Krishnan et al. |
20050152089 | July 14, 2005 | Matsuda |
20050193952 | September 8, 2005 | Goodman |
D1420846 | August 2011 | JP |
D1421157 | August 2011 | JP |
D1422692 | September 2014 | JP |
D146490 | April 2012 | TW |
- U.S. Appl. No. 29/524,109, filed Apr. 16, 2015, Riker et al.
- U.S. Appl. No. 29/524,557, filed Apr. 21, 2015, Zhang et al.
- U.S. Appl. No. 29/530,683, filed Jun. 18, 2015, Hanson et al.
- Search Report for Taiwan Design Application No. 106301373 dated Jun. 20, 2017.
Patent History
Patent number: D836572
Type: Grant
Filed: Sep 30, 2016
Date of Patent: Dec 25, 2018
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (Cupertino, CA), Xiaodong Wang (San Jose, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/579,470
Type: Grant
Filed: Sep 30, 2016
Date of Patent: Dec 25, 2018
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (Cupertino, CA), Xiaodong Wang (San Jose, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/579,470
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)