Collimator for use in a physical vapor deposition (PVD) chamber
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Claims
We claim the ornamental design for a collimator for use in a physical vapor deposition (PVD) chamber, as shown and described.
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Type: Grant
Filed: Apr 4, 2022
Date of Patent: Aug 29, 2023
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Lanlan Zhong (Sunnyvale, CA), Kishor Kumar Kalathiparambil (Santa Clara, CA)
Primary Examiner: George D. Kirschbaum
Assistant Examiner: Antoinette Martine Suiter
Application Number: 29/833,398