Inner shield for a substrate processing chamber
Latest APPLIED MATERIALS, INC. Patents:
The broken lines in
Claims
The ornamental design for an inner shield for a substrate processing chamber, as shown and described.
5762748 | June 9, 1998 | Banholzer et al. |
6583064 | June 24, 2003 | Wicker et al. |
D557425 | December 11, 2007 | Nakamura |
D642605 | August 2, 2011 | Ishikawa |
D655258 | March 6, 2012 | Honma |
D693782 | November 19, 2013 | Mori |
D703160 | April 22, 2014 | Tanimura |
D711331 | August 19, 2014 | Lau |
D716239 | October 28, 2014 | Lau |
D802790 | November 14, 2017 | Tauchi |
D804436 | December 5, 2017 | Tauchi |
9865437 | January 9, 2018 | Chia et al. |
D812578 | March 13, 2018 | Uemura |
D827592 | September 4, 2018 | Ichino |
D830981 | October 16, 2018 | Jeong |
D840364 | February 12, 2019 | Ichino |
D840365 | February 12, 2019 | Ichino |
D855027 | July 30, 2019 | Okajima |
D891382 | July 28, 2020 | Koppa |
D893441 | August 18, 2020 | Rao |
20040149216 | August 5, 2004 | Osada et al. |
20070113783 | May 24, 2007 | Lee |
20100291319 | November 18, 2010 | Yamashita et al. |
20110108524 | May 12, 2011 | Dhindsa et al. |
20130098554 | April 25, 2013 | Chhatre et al. |
20130284700 | October 31, 2013 | Nangoy et al. |
- International Search Report and Written Opinion for PCT/US2020/048302 dated Dec. 4, 2020.
Type: Grant
Filed: Aug 28, 2019
Date of Patent: Mar 23, 2021
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Sarath Babu (Singapore), Ananthkrishna Jupudi (Singapore), Yueh Sheng Ow (Singapore), Junqi Wei (Singapore), Kelvin Boh (Singapore), Yuichi Wada (Chiba), Kang Zhang (Singapore)
Primary Examiner: Michael C Stout
Assistant Examiner: Fritzgerald L Butac
Application Number: 29/703,655