Bonding Of Semiconductor Wafer To Insulating Substrate Or To Semic Onducting Substrate Using An Intermediate Insulating Layer (epo) Patents (Class 257/E21.122)
E Subclasses
- Heteroepitaxy (EPO) (Class 257/E21.124)
- Defect and dislocati on suppression due to lattice mismatch, e.g., lattice adaptation (EPO) (Class 257/E21.125)
- Group III-V compound on dissimilar Group III-V compound (EPO) (Class 257/E21.126)
- Group III-V compound on Si or Ge (EPO) (Class 257/E21.127)
- Carbon on a noncarbon semiconductor substrate (EPO) (Class 257/E21.128)
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Patent number: 9406854Abstract: Aspects of the invention include an electronic device comprising a first contact point; a metal pad disposed to provide electrical connection to the first contact point; a substrate comprising a first face and a second face opposing the first face of the substrate, the first face of the substrate adjacent a face of the electronic device; and a VIA passing through the substrate from the second face of the substrate to the metal pad, the VIA exhibiting: a pass through extending through the substrate from the first face to the second face; a metal layer disposed within the pass through arranged to provide electrical connectivity to the metal pad from an area adjacent the second face of the substrate; and an electrically insulating first passivation layer disposed between the metal layer and the substrate arranged to provide electrical insulation between the substrate and the metal layer.Type: GrantFiled: March 20, 2012Date of Patent: August 2, 2016Inventors: Mordehai Margalit, Israel Petronius
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Patent number: 9379000Abstract: The present invention relates to a method for producing a nanocarbon film using a hybrid substrate with which a nanocarbon film free from defects can be produced at low cost. This method is characterized in forming an ion implantation region by implanting ion into a single crystal silicon carbide substrate from a surface thereof and after bonding together the surface of the silicon carbide substrate implanted with ion and a surface of a base substrate, releasing the silicon carbide substrate at the ion implanted region to produce a hybrid substrate in which a thin film that includes the single crystal silicon carbide is transferred onto the base substrate, and then heating the hybrid substrate to sublime silicon atoms from the thin film that includes the single crystal silicon carbide so as to obtain the nanocarbon film.Type: GrantFiled: August 7, 2013Date of Patent: June 28, 2016Assignee: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Makoto Kawai, Yoshihiro Kubota
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Patent number: 9362348Abstract: An exemplary printable composition of a liquid or gel suspension of diodes comprises a plurality of diodes, a first solvent and/or a viscosity modifier. An exemplary method of fabricating an electronic device comprises: depositing one or more first conductors; and depositing a plurality of diodes suspended in a mixture of a first solvent and a viscosity modifier. Various exemplary diodes have a lateral dimension between about 10 to 50 microns and about 5 to 25 microns in height. Other embodiments may also include a plurality of substantially chemically inert particles having a range of sizes between about 10 to about 50 microns.Type: GrantFiled: August 27, 2014Date of Patent: June 7, 2016Assignee: NthDegree Technologies Worldwide IncInventors: Mark David Lowenthal, William Johnstone Ray, Neil O. Shotton, Richard A. Blanchard, Brad Oraw, Mark Allan Lewandowski, Jeffrey Baldridge, Eric Anthony Perozziello
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Patent number: 9362255Abstract: The invention relates to a method for manufacturing a multilayer strucute on a first substrate, the method including: using the first substrate made of a first material having a Young's modulus Ev and a thickness ev, and using a second substrate covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Es that is different from the Young's modulus Ev and a thickness es, the thicknesses es and ev complying, plus or minus 10%, with the relation (I); molecularly bonding the first substrate and the multilayer structure together; and removing the second substrate.Type: GrantFiled: December 27, 2012Date of Patent: June 7, 2016Assignee: Commissariat à l'énergie atomique et aux énergies alternativesInventors: Umberto Rossini, Thierry Flahaut, Vincent Larrey
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Patent number: 9349916Abstract: A semiconductor light emitting device includes a substrate structure; a semiconductor layer disposed on the substrate structure, the semiconductor layer including a light emitting layer; and an electrode formed on a surface of the semiconductor layer, wherein a relatively coarse uneven portion and a relatively fine uneven portion are formed by a frost process on a surface of the semiconductor layer at a side of the electrode.Type: GrantFiled: July 14, 2015Date of Patent: May 24, 2016Assignee: ROHM CO., LTD.Inventor: Yohei Ito
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Patent number: 9349928Abstract: An exemplary printable composition of a liquid or gel suspension of diodes comprises a plurality of diodes, a first solvent and/or a viscosity modifier. An exemplary method of making a liquid or gel suspension of diodes comprises: adding a viscosity modifier to a plurality of diodes in a first solvent; and mixing the plurality of diodes, the first solvent and the viscosity modifier to form the liquid or gel suspension of the plurality of diodes. Various exemplary diodes have a lateral dimension between about 10 to 50 microns and about 5 to 25 microns in height. Other embodiments may also include a plurality of substantially chemically inert particles having a range of sizes between about 10 to about 50 microns.Type: GrantFiled: August 28, 2014Date of Patent: May 24, 2016Assignee: NthDegree Technologies Worldwide IncInventors: Mark David Lowenthal, William Johnstone Ray, Neil O. Shotton, Richard A. Blanchard, Brad Oraw, Mark Allan Lewandowski, Jeffrey Baldridge, Eric Anthony Perozziello
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Patent number: 9343593Abstract: An exemplary printable composition of a liquid or gel suspension of diodes comprises a plurality of diodes, a first solvent and/or a viscosity modifier. In other exemplary embodiments a second solvent is also included, and the composition has a viscosity substantially between about 100 cps and about 25,000 cps at about 25° C. In an exemplary embodiment, a composition comprises: a plurality of diodes or other two-terminal integrated circuits; one or more solvents comprising about 15% to 99.9% of any of N-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, 1-methoxy-2-propanol, N-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol, and mixtures thereof; a viscosity modifier comprising about 0.10% to 2.5% methoxy propyl methylcellulose resin or hydroxy propyl methylcellulose resin or mixtures thereof; and about 0.01% to 2.5% of a plurality of substantially optically transparent and chemically inert particles having a range of sizes between about 10 to about 50 microns.Type: GrantFiled: July 2, 2014Date of Patent: May 17, 2016Assignee: NthDegree Technologies Worldwide IncInventors: Mark David Lowenthal, William Johnstone Ray, Neil O. Shotton, Richard A. Blanchard, Brad Oraw, Mark Allan Lewandowski, Jeffrey Baldridge, Eric Anthony Perozziello
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Patent number: 9337388Abstract: A method can be used for producing a semiconductor layer sequence, which is based on a nitride compound semiconductor material and which comprises a microstructured outer surface. The method has the following steps: A) growing at least one first semiconductor layer of the semiconductor layer sequence on a substrate; B) applying an etch-resistant layer on the first semiconductor layer; C) growing at least one further semiconductor layer on the layer sequence obtained in step B); D) separating the semiconductor layer sequence from the substrate, a separating zone of the semiconductor layer sequence being at least partly removed; E) etching the obtained separating surface of the semiconductor layer sequence by an etching means such that a microstructuring of the first semiconductor layer is carried out and the microstructured outer surface is formed.Type: GrantFiled: September 30, 2011Date of Patent: May 10, 2016Assignee: OSRAM OPTO SEMICONDUCTORS GMBHInventors: Joachim Hertkorn, Tetsuya Taki, Jürgen Off
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Patent number: 9324741Abstract: Disclosed herein is a manufacturing method of a display device including: forming a gate electrode on a substrate; forming a laminated film by photolithography techniques. The laminated film is provided above the gate electrode with a gate insulating film sandwiched therebetween and includes a semiconductor layer, at least either a source/drain electrode or a pixel electrode, a planarizing film and a pixel isolation film. The manufacturing method further includes forming a functional layer and a common electrode in this order after the formation of the laminated film. The functional layer includes an organic electric field light-emitting layer. Two or more layers are patterned all together in at least part of the laminated film during the formation of the laminated film.Type: GrantFiled: March 12, 2012Date of Patent: April 26, 2016Assignee: JOLED INC.Inventor: Takahide Ishii
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Patent number: 9275929Abstract: Embodiments of the present disclosure provide a method that includes providing a semiconductor substrate comprising a semiconductor material, forming a dielectric layer on the semiconductor substrate, forming an interconnect layer on the dielectric layer, attaching a semiconductor die to the semiconductor substrate, and electrically coupling an active side of the semiconductor die to the interconnect layer, the interconnect layer to route electrical signals of the semiconductor die. Other embodiments may be described and/or claimed.Type: GrantFiled: April 3, 2015Date of Patent: March 1, 2016Assignee: Marvell World Trade Ltd.Inventors: Shiann-Ming Liou, Sehat Sutardja, Albert Wu, Chuan-Cheng Cheng, Chien-Chuan Wei
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Patent number: 9275893Abstract: The present disclosure concerns a method of detaching a layer to be detached from a donor substrate, comprising the following steps: a) assembling the donor substrate and a porous substrate, b) application of a treatment of chemical modification of the crystallites, the chemical modification being adapted to generate a variation of the volume of the crystallites, the volume variation generates deformation in compression or in tension of the porous substrate, the deformation in compression or in tension generates a stress in tension or in compression in the donor substrate, which causes fracture in a fracture plane, the fracture plane delimiting the layer to be detached, the stress leading to the detachment of the layer to be detached from the donor substrate.Type: GrantFiled: April 10, 2013Date of Patent: March 1, 2016Assignee: SoitecInventor: Alexandre Barthelemy
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Patent number: 9257414Abstract: A method for forming a stacked semiconductor structure comprises providing a first chip comprising a plurality of first active circuits and a first aluminum connection pad, depositing a first dielectric layer on a first side of the first chip, forming a first copper bonding pad on the first aluminum connection pad, providing a second chip comprising a plurality of second active circuits, depositing a second dielectric layer on a first side of the second chip, forming a second copper bonding pad in the second dielectric layer, stacking the first chip on the second chip, wherein the first copper bonding pad is in direct contact with the second copper bonding pad and bonding the first chip and the second chip to form a uniform bonded feature.Type: GrantFiled: April 10, 2014Date of Patent: February 9, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Szu-Ying Chen, Meng-Hsun Wan, Dun-Nian Yaung
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Patent number: 9228091Abstract: To provide a ferrite thin film-forming composition material that is a composition material for forming a ferrite thin film by using the sol-gel method which can form a thin ferrite thin film having a uniform thickness and, furthermore, has excellent long-term storage stability, a method of forming a ferrite thin film using the above composition material, and a ferrite thin film formed by using the above method. A ferrite thin film-forming composition material is a composition material for forming a NiZn ferrite, CuZn ferrite, or NiCuZn ferrite thin film by using a sol-gel method, in which the composition material is formed by dissolving metallic raw materials in a solvent including acetonitrile, and the fraction of acetonitrile is 30 mass % to 60 mass % with respect to 100 mass % of the composition material.Type: GrantFiled: March 14, 2013Date of Patent: January 5, 2016Assignee: MITSUBISHI MATERIALS CORPORATIONInventors: Toshihiro Doi, Hideaki Sakurai, Kenzo Nakamura, Kazunori Igarashi, Nobuyuki Soyama
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Patent number: 9216559Abstract: A method for transferring graphene nondestructively and at a low cost. In the method, a graphene is used whose surface is coated with transferring media and whose original substrate is an electrode, the electrode is placed into an electrolyte, and the graphene is separated from the original substrate by means of the driving force of bubbles and the gas intercalation produced on the graphene electrode surface during electrolysis. Then, the graphene coated with transferring media is nondestructively combined with a target substrate. The transferring media is removed so as to transfer the graphene to the target substrate nondestructively. The transferring method results in no damage or loss with respect to the graphene and the original substrate, and the original substrate can be re-used. Furthermore, the method is easy to perform, works quickly, is easy to control, and is pollution-free.Type: GrantFiled: June 8, 2012Date of Patent: December 22, 2015Assignee: INSTITUTE OF METAL RESEARCH CHINESE ACADEMY OF SCIENCESInventors: Wencai Ren, Libo Gao, Laipeng Ma, Huiming Cheng
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Patent number: 9212054Abstract: A pressure sensor assembly comprising: three stacked silicon wafers which form a support, a sensor and a cover wherein the sensor includes a cavity extending from the bottom of the sensor up towards the top of the sensor to form a cavity bottom and a diaphragm; a dielectric layer covering the bottom of the sensor and the cavity and wherein the support is coupled to the dielectric layer along the bottom of the sensor; a plurality of ports located on a top of the support within an area defined by the cavity, the plurality of ports extending through the support to its bottom and wherein the cover is coupled to the top of the sensor covering the diaphragm; and, a second cavity cut into a bottom of the cover wherein the second cavity is sized and positioned to surround the diaphragm.Type: GrantFiled: October 15, 2014Date of Patent: December 15, 2015Assignee: DunAn Sensing, LLCInventor: Tom Kwa
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Patent number: 8993370Abstract: In one embodiment, a method includes depositing a photoactive layer onto a first substrate, depositing a contact layer onto the photoactive layer, attaching a second substrate onto the contact layer, and removing the first substrate from the photoactive layer, contact layer, and second substrate.Type: GrantFiled: April 20, 2012Date of Patent: March 31, 2015Assignee: Zetta Research and Development LLC—AQT SeriesInventors: Mariana Rodica Munteanu, Amith Kumar Murali, Kirk Hayes, Brian Josef Bartholomeusz
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Patent number: 8980671Abstract: A manufacturing method of a semiconductor device according to embodiments includes forming a photodiode layer, which is an active region including a photodiode, on a main surface of a first substrate, forming a wiring layer, which includes a wire and a dielectric layer covering the wire, on the photodiode layer, and forming a dielectric film on the wiring layer. The manufacturing method of the semiconductor device according to the embodiments further includes bonding a second substrate to the dielectric film of the first substrate so that a crystal orientation of the photodiode layer matches a crystal orientation of the second substrate.Type: GrantFiled: February 8, 2012Date of Patent: March 17, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Satoshi Hongo, Kazumasa Tanida, Akihiro Hori, Kenji Takahashi, Hideo Numata
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Patent number: 8962449Abstract: Methods of forming a semiconductor structure include exposing a carrier substrate to a silane material to form a coating, removing a portion of the coating at least adjacent a periphery of the carrier substrate, adhesively bonding another substrate to the carrier substrate, and separating the another substrate from the carrier substrate. The silane material includes a compound having a structure of (XO)3Si(CH2)nY, (XO)2Si((CH2)nY)2, or (XO)3Si(CH2)nY(CH2)nSi(XO)3, wherein XO is a hydrolyzable alkoxy group, Y is an organofunctional group, and n is a nonnegative integer. Some methods include forming a polymeric material comprising Si—O—Si over a first substrate, removing a portion of the polymeric material, and adhesively bonding another substrate to the first substrate.Type: GrantFiled: July 30, 2013Date of Patent: February 24, 2015Assignee: Micron Technology, Inc.Inventor: Jaspreet S. Gandhi
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Patent number: 8956951Abstract: A method for manufacturing an SOI wafer includes performing a flattening heat treatment on an SOI wafer under an atmosphere containing an argon gas, in which conditions of SOI wafer preparation are set so that a thickness of an SOI layer of the SOI wafer to be subjected to the flattening heat treatment is 1.4 or more times thicker than that of a BOX layer, and the thickness of the SOI layer is reduced to less than a thickness 1.4 times the thickness of the BOX layer by performing a sacrificial oxidation treatment on the SOI layer of the SOI wafer after the flattening heat treatment.Type: GrantFiled: September 1, 2010Date of Patent: February 17, 2015Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Isao Yokokawa, Masahiro Kato, Masayuki Imai
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Patent number: 8936998Abstract: A device is provided with: a first substrate mainly containing silicon dioxide; a second substrate mainly containing silicon, compound semiconductor, silicon dioxide or fluoride; and a bonding functional intermediate layer arranged between the first substrate and the second substrate. The first substrate is bonded to the second substrate thorough room temperature bonding in which a sputtered first surface of the first substrate is contacted with a sputtered second surface of the second substrate via the bonding functional intermediate layer. Here, the material of the bonding functional intermediate layer is selected from among optically transparent materials which are oxide, fluoride, or nitride, the materials being different from the main component of the first substrate and different from the main component of the second substrate.Type: GrantFiled: March 12, 2013Date of Patent: January 20, 2015Assignees: Mitsubishi Heavy Industries, Ltd., National Institute of Advanced Industrial Science and TechnologyInventors: Jun Utsumi, Takayuki Goto, Kensuke Ide, Hideki Takagi, Masahiro Funayama
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Patent number: 8921157Abstract: Solder bumps are formed on a plurality of electrode parts of a printed substrate and a semiconductor chip is loaded on the printed substrate via the plurality of solder bumps. In this case, a thermoplastic film is prepared as an underfill that covers a surface of the printed substrate on which the solder bumps are formed. In the film, parts corresponding to the solder bumps are removed and a peripheral edge of a part on which the semiconductor chip will be loaded has a protruded form. After the printed substrate has been covered with the film, the film is bonded onto the board and the semiconductor chip is loaded on the printed substrate and carried into a reflow furnace. In the reflow furnace, heat and pressure are applied to fuse the solder bumps.Type: GrantFiled: March 22, 2012Date of Patent: December 30, 2014Assignee: Hitachi, Ltd.Inventors: Noriaki Mukai, Masaru Mitsumoto, Makoto Homma
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Patent number: 8916407Abstract: A method of manufacturing a micromachined resonator having a moveable member comprising forming the moveable member from a material having a first concentration of dopants of a first impurity type, depositing a dopant carrier layer on or over at least a portion of the moveable member, wherein the dopant carrier layer includes one or more dopants of the first impurity type, transferring at least a portion of the one or more dopants from the dopant carrier layer to the moveable member, wherein, in response, the concentration of dopants of the first impurity type in the moveable member increases (for example, to greater than 1019 cm?3, and preferably between 1019 cm?3 and 1021 cm?3). The method further includes removing the dopant carrier layer and may include providing an encapsulation structure over the moveable member of the micromachined resonator.Type: GrantFiled: March 15, 2013Date of Patent: December 23, 2014Assignee: SiTime CorporationInventors: Charles I Grosjean, Ginel Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Partridge, Markus Lutz
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Patent number: 8906487Abstract: In a base material with a single-crystal silicon carbide film according to an embodiment of the invention, a plurality of recessed portions is formed on the surface of a silicon substrate, an insulating film including silicon oxide is formed across the surface of the silicon substrate including the inner surfaces of the recessed portions, the top surfaces of side wall portions of recessed portions of the insulating film form flat surfaces, a single-crystal silicon carbide film is joined on the flat surfaces, and the recessed portions below the single-crystal silicon carbide film form holes.Type: GrantFiled: June 30, 2011Date of Patent: December 9, 2014Assignee: Seiko Epson CorporationInventor: Hiroyuki Shimada
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Patent number: 8906778Abstract: The present invention related to a method for manufacturing a semiconductor, comprising steps of: providing a growing substrate; forming a semiconductor substrate on the growing substrate; forming a first structure with plural grooves and between the growing substrate and the semiconductor substrate; and changing the temperature of the growing substrate and the semiconductor substrate.Type: GrantFiled: June 17, 2011Date of Patent: December 9, 2014Assignee: National Chiao Tung UniversityInventors: YewChung Sermon Wu, Bau-Ming Wang, Feng-Ching Hsiao
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Patent number: 8883609Abstract: According to an embodiment, a method for manufacturing a semiconductor structure includes providing a first monocrystalline semiconductor portion having a first lattice constant in a reference direction and forming a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion.Type: GrantFiled: November 21, 2013Date of Patent: November 11, 2014Assignee: Infineon Technologies Austria AGInventors: Mathias Plappert, Hans-Joachim Schulze
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Patent number: 8860229Abstract: Embodiments of forming a semiconductor device structure are provided. The semiconductor device structure includes a first semiconductor wafer and a second semiconductor wafer bonded via a hybrid bonding structure, and the hybrid bonding structure includes a first conductive material embedded in a polymer material and a second conductive material embedded in a second polymer material. The first conductive material of the first semiconductor wafer bonded to the second conductive material of the second semiconductor wafer and the first polymer material of the first semiconductor wafer is bonded to the second polymer material of the second semiconductor wafer. The semiconductor device structure further includes at least one through substrate via (TSV) extending from a bottom surface of the second semiconductor wafer to a top surface of the first semiconductor wafer.Type: GrantFiled: July 16, 2013Date of Patent: October 14, 2014Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Jing-Cheng Lin
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Patent number: 8828845Abstract: Provided is a method of fabricating an oxide thin film device using laser lift-off and an oxide thin film device fabricated by the same. The method includes: forming an oxide thin film on a growth substrate; bonding a temporary substrate on the oxide thin film; irradiating laser onto the growth substrate to separate the oxide thin film on which the temporary substrate has been bonded from the growth substrate; bonding a device substrate on the oxide thin film on which the temporary substrate has been bonded; and forming an upper electrode film on the oxide thin film. Therefore, it is possible to overcome problems caused by a defective layer by transferring an oxide thin film transferred on a polymer-based temporary substrate onto a device substrate, without using an interface on which a defective layer formed due to oxygen diffusion upon laser lift-off is formed.Type: GrantFiled: December 13, 2012Date of Patent: September 9, 2014Assignee: Korea Institute of Science and TechnologyInventors: Chong Yun Kang, Seok Jin Yoon, Young Ho Do, Ji Won Choi, Seung Hyub Baek, Hyun Cheol Song, Jin Sang Kim
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Patent number: 8822308Abstract: A method is disclosed which includes: forming at least one layer of material on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; attaching a second substrate to a second surface of the at least one layer of material; forming bubbles at the interface; and applying mechanical force; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate. Related arrangements are also described.Type: GrantFiled: December 6, 2013Date of Patent: September 2, 2014Assignee: Graphene FrontiersInventor: Bruce Ira Willner
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Patent number: 8802540Abstract: The present invention provides a method of manufacturing a bonded wafer. The method includes ozone washing two silicon wafers to form an oxide film equal to or less than 2.2 nm in thickness on each surface of the two silicon wafers, and bonding the two silicon wafers through the oxide films formed to obtain a bonded wafer.Type: GrantFiled: December 13, 2007Date of Patent: August 12, 2014Assignee: Sumco CorporationInventors: Nobuyuki Morimoto, Akihiko Endo
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Patent number: 8796056Abstract: A method for fabricating a display panel includes the following steps. A surface of a first substrate is adhered to a first supporting substrate with a first adhesive layer. First devices are formed on the other surface of the first substrate. The other surface of the first substrate is adhered to a second supporting substrate with a second adhesive layer. The first adhesive layer and supporting substrate are separated from the first substrate. Second devices are formed on the surface of the first substrate. A second substrate is adhered to a third supporting substrate with a third adhesive layer. The first substrate and the second substrate are assembled, and a display medium layer is interposed between the first substrate and the second substrate. The second adhesive layer and supporting substrate are separated from the first substrate, and the third adhesive layer and supporting substrate are separated from the second substrate.Type: GrantFiled: March 15, 2013Date of Patent: August 5, 2014Assignee: AU Optronics Corp.Inventor: Chi-Ho Chang
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Patent number: 8796109Abstract: A method includes depositing a thin film on a first surface of a first substrate and moving a second surface of a second substrate into contact with the thin film such that the thin film is located between the first and second surfaces. The method further includes generating electromagnetic (EM) radiation of a first wavelength, the first wavelength selected such that the thin film absorbs EM radiation at the first wavelength. Additionally, the method includes directing the EM radiation through one of the first and second substrates and onto a region of the thin film until the first and second substrates are fused in the region.Type: GrantFiled: December 23, 2010Date of Patent: August 5, 2014Assignee: Medtronic, Inc.Inventors: David A. Ruben, Michael S. Sandlin
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Patent number: 8790996Abstract: Methods of processing a device substrate are disclosed herein. In one embodiment, a method of processing a device substrate can include bonding a first surface of a device substrate to a carrier with a polymeric material. The device substrate may have a plurality of first openings extending from the first surface towards a second surface of the device substrate opposite from the first surface. Then, material can be removed at the second surface of the device substrate, wherein at least some of the first openings communicate with the second surface at least one of before or after performing the removal of the material. Then, at least a portion of the polymeric material disposed between the first surface and the carrier substrate can be exposed to a substance through at least some first openings to debond the device substrate from the carrier substrate.Type: GrantFiled: July 16, 2012Date of Patent: July 29, 2014Assignee: Invensas CorporationInventor: Pezhman Monadgemi
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Patent number: 8778773Abstract: Embodiments of the present invention include methods of directly bonding together semiconductor structures. In some embodiments, a cap layer may be provided at an interface between directly bonded metal features of the semiconductor structures. In some embodiments, impurities are provided within the directly bonded metal features of the semiconductor structures. Bonded semiconductor structures are formed using such methods.Type: GrantFiled: December 16, 2010Date of Patent: July 15, 2014Assignee: SoitecInventor: Mariam Sadaka
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Patent number: 8778778Abstract: According to an embodiment, an active layer is formed on a first surface of a semiconductor substrate, a wiring layer is formed on the active layer, and an insulating layer is formed covering the wiring layer. The first surface of the semiconductor substrate is bonded to a support substrate via the insulating layer, and the semiconductor substrate bonded to the support substrate is thinned leaving the semiconductor substrate having a predetermined thickness which covers the active layer from a second surface. At least a part of area of the thinned semiconductor substrate is removed to expose the active layer.Type: GrantFiled: August 18, 2011Date of Patent: July 15, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Kazumasa Tanida, Masahiro Sekiguchi, Masayuki Dohi, Tsuyoshi Matsumura, Hideo Numata, Mari Otsuka, Naoko Yamaguchi, Takashi Shirono, Satoshi Hongo
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Patent number: 8765508Abstract: Methods of fabricating semiconductor devices or structures include bonding a layer of semiconductor material to another material at a temperature, and subsequently changing the temperature of the layer of semiconductor material. The another material may be selected to exhibit a coefficient of thermal expansion such that, as the temperature of the layer of semiconductor material is changed, a controlled and/or selected lattice parameter is imparted to or retained in the layer of semiconductor material. In some embodiments, the layer of semiconductor material may comprise a III-V type semiconductor material, such as, for example, indium gallium nitride. Novel intermediate structures are formed during such methods. Engineered substrates include a layer of semiconductor material having an average lattice parameter at room temperature proximate an average lattice parameter of the layer of semiconductor material previously attained at an elevated temperature.Type: GrantFiled: July 23, 2009Date of Patent: July 1, 2014Assignee: SoitecInventor: Chantal Arena
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Patent number: 8748294Abstract: There is provided an SOS substrate with reduced stress. The SOS substrate is a silicon-on-sapphire (SOS) substrate comprising a sapphire substrate and a monocrystalline silicon film on or above the sapphire substrate. The stress of the silicon film of the SOS substrate as measured by a Raman shift method is 2.5×108 Pa or less across an entire in-plane area of the SOS substrate.Type: GrantFiled: December 27, 2010Date of Patent: June 10, 2014Assignee: Shin-Etsu Chemical Co., Ltd.Inventor: Shoji Akiyama
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Patent number: 8741683Abstract: An embodiment of the invention provides a chip package, which includes: a semiconductor substrate having a device region; a package layer disposed on the semiconductor substrate; a spacing layer disposed between the semiconductor substrate and the package layer and surrounding the device region; and an auxiliary pattern having a hollow pattern formed in the spacing layer, a material pattern located between the spacing layer and the device region, or combinations thereof.Type: GrantFiled: November 7, 2013Date of Patent: June 3, 2014Inventors: Yu-Lung Huang, Tsang-Yu Liu
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Patent number: 8735219Abstract: A method of integrating a first substrate having a first surface with a first insulating material and a first contact structure with a second substrate having a second surface with a second insulating material and a second contact structure. The first insulating material is directly bonded to the second insulating material. A portion of the first substrate is removed to leave a remaining portion. A third substrate having a coefficient of thermal expansion (CTE) substantially the same as a CTE of the first substrate is bonded to the remaining portion. The bonded substrates are heated to facilitate electrical contact between the first and second contact structures. The third substrate is removed after heating to provided a bonded structure with reliable electrical contacts.Type: GrantFiled: August 30, 2012Date of Patent: May 27, 2014Assignee: Ziptronix, Inc.Inventors: Paul M. Enquist, Gaius Gillman Fountain
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Patent number: 8728912Abstract: The present invention is directed to a method for manufacturing an SOI wafer, the method by which treatment that removes the outer periphery of a buried oxide film to obtain a structure in which a peripheral end of an SOI layer of an SOI wafer is located outside a peripheral end of the buried oxide film, and, after heat treatment is performed on the SOI wafer in a reducing atmosphere containing hydrogen or an atmosphere containing hydrogen chloride gas, an epitaxial layer is formed on a surface of the SOI layer. As a result, there is provided a method that can manufacture an SOI wafer having a desired SOI layer thickness by performing epitaxial growth without allowing a valley-shaped step to be generated in an SOI wafer with no silicon oxide film in a terrace portion, the SOI wafer fabricated by an ion implantation delamination method.Type: GrantFiled: November 18, 2011Date of Patent: May 20, 2014Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Hiroji Aga, Isao Yokokawa, Satoshi Oka
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Patent number: 8729677Abstract: A semiconductor wafer including: a base wafer; a seed crystal disposed on the base wafer; a compound semiconductor disposed above the seed crystal; and a high resistance layer disposed between the seed crystal and the compound semiconductor, the high resistance layer having a larger resistivity than the seed crystal, and the seed crystal lattice matching or pseudo lattice matching the compound semiconductor is provided.Type: GrantFiled: November 26, 2009Date of Patent: May 20, 2014Assignee: Sumitomo Chemical Company, LimitedInventors: Sadanori Yamanaka, Masahiko Hata, Tomoyuki Takada
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Patent number: 8704238Abstract: A three-dimensional integrated circuit device includes a first substrate having a first crystal orientation comprising at least one or more PMOS devices thereon and a first dielectric layer overlying the one or more PMOS devices. The three-dimensional integrated circuit device also includes a second substrate having a second crystal orientation comprising at least one or more NMOS devices thereon; and a second dielectric layer overlying the one or more NMOS devices. An interface region couples the first dielectric layer to the second dielectric layer to form a hybrid structure including the first substrate overlying the second substrate.Type: GrantFiled: December 5, 2011Date of Patent: April 22, 2014Assignee: mCube Inc.Inventor: Xiao (Charles) Yang
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Patent number: 8685833Abstract: A method is provided for bonding a semiconductor chip to a packaging substrate while minimizing the variation in the solder ball heights and controlling the stress in the solder balls and the stress in the packaging substrate. During the solder reflow, the warp of the packaging substrate, including the absolute warp, thermal warp, and substrate to substrate variations of the warp, is constrained at a minimal level by providing a clamping constraint to the packaging substrate. During cool down of the solder balls, the stresses and strains of the solder joints are maintained at levels that do not cause tear of the solder joints or breakage of the packaging substrate by removing the clamping constraint. Thus, the bonding process provides both uniform solder height with minimized solder non-wets and stress minimization of the solder balls and the packaging substrate.Type: GrantFiled: April 2, 2012Date of Patent: April 1, 2014Assignee: International Business Machines CorporationInventors: Vijayeshwar D. Khanna, Sri M. Sri-Jayantha
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Patent number: 8664083Abstract: InP epitaxial material is directly bonded onto a Silicon-On-Insulator (SOI) wafer having Vertical Outgassing Channels (VOCs) between the bonding surface and the insulator (buried oxide, or BOX) layer. H2O and other molecules near the bonding surface migrate to the closest VOC and are quenched in the buried oxide (BOX) layer quickly by combining with bridging oxygen ions and forming pairs of stable nonbridging hydroxyl groups (Si—OH). Various sizes and spacings of channels are envisioned for various devices.Type: GrantFiled: January 27, 2012Date of Patent: March 4, 2014Assignee: The Regents of the University of CaliforniaInventor: Di Liang
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Patent number: 8659157Abstract: An object of the present invention is to provide an adhesive composition that can form an adhesive sheet for producing a semiconductor device capable of suppressing deterioration in ion scavengeability after the adhesive sheet goes through thermal history. It is an adhesive composition for producing a semiconductor device containing at least an organic complex-forming compound that forms a complex with cations, and the 5% weight loss temperature of the organic complex-forming compound measured by thermogravimetry is 180° C. or more.Type: GrantFiled: May 22, 2012Date of Patent: February 25, 2014Assignee: Nitto Denko CorporationInventors: Yuta Kimura, Yasushi Inoue, Takeshi Matsumura
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Patent number: 8652935Abstract: A method of bonding first and second microelectronic elements includes pressing together a first substrate containing active circuit elements therein with a second substrate, with a flowable dielectric material between confronting surfaces of the respective substrates, each of the first and second substrates having a coefficient of thermal expansion less than 10 parts per million/° C., at least one of the confronting surfaces having a plurality of channels extending from an edge of such surface, such that the dielectric material between planes defined by the confronting surfaces is at least substantially free of voids and has a thickness over one micron, and at least some of the dielectric material flows into at least some of the channels.Type: GrantFiled: December 16, 2010Date of Patent: February 18, 2014Assignee: Tessera, Inc.Inventors: Ilyas Mohammed, Piyush Savalia, Craig Mitchell, Vage Oganesian, Belgacem Haba
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Patent number: 8652925Abstract: A structure and method is provided for fabricating isolated capacitors. The method includes simultaneously forming a plurality of deep trenches and one or more isolation trenches surrounding a group or array of the plurality of deep trenches through a SOI and doped poly layer, to an underlying insulator layer. The method further includes lining the plurality of deep trenches and one or more isolation trenches with an insulator material. The method further includes filling the plurality of deep trenches and one or more isolation trenches with a conductive material on the insulator material. The deep trenches form deep trench capacitors and the one or more isolation trenches form one or more isolation plates that isolate at least one group or array of the deep trench capacitors from another group or array of the deep trench capacitors.Type: GrantFiled: July 19, 2010Date of Patent: February 18, 2014Assignee: International Business Machines CorporationInventors: Oh-Jung Kwon, Junedong Lee, Paul C. Parries, Dominic J. Schepis
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Patent number: 8648387Abstract: A nitride semiconductor template and a manufacturing method thereof are provided. The nitride semiconductor template includes a carrier substrate with a first thermal expansion coefficient, a nitride semiconductor layer with a second thermal expansion coefficient different from the first thermal expansion coefficient, and a bonding layer. The nitride semiconductor layer disposed on the carrier substrate is at least 10 ?m in thickness. A ratio of a dislocation density of the nitride semiconductor layer at a first surface to that at a second surface is from 0.1 to 10. The bonding layer is disposed between the carrier substrate and the nitride semiconductor layer to adhere the nitride semiconductor layer onto the carrier substrate. The second surface is near an interface between the nitride semiconductor layer and the bonding layer, and the first surface is 10 ?m from the second surface.Type: GrantFiled: December 30, 2009Date of Patent: February 11, 2014Assignee: Industrial Technology Research InstituteInventors: Jenq-Dar Tsay, Po-Chun Liu
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Patent number: 8647964Abstract: A method for temporary wafer bonding employs a curable adhesive composition and a degradation agent combined with the curable adhesive composition. The adhesive composition may include (A) a polyorganosiloxane containing an average of at least two silicon-bonded unsaturated organic groups per molecule, (B) an organosilicon compound containing an average of at least two silicon-bonded hydrogen atoms per molecule in an amount sufficient to cure the composition, (C) a catalytic amount of a hydrosilylation catalyst, and (D) a base. The film prepared by curing the composition is degradable and removable by heating.Type: GrantFiled: December 15, 2010Date of Patent: February 11, 2014Assignee: Dow Corning CorporationInventor: Brian Harkness
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Patent number: 8618639Abstract: According to an embodiment, a semiconductor structure includes a first monocrystalline semiconductor portion having a first lattice constant in a reference direction; a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion; and a metal layer formed on and in contact with the second monocrystalline semiconductor portion.Type: GrantFiled: May 16, 2012Date of Patent: December 31, 2013Assignee: Infineon Technologies Austria AGInventors: Mathias Plappert, Hans-Joachim Schulze
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Patent number: 8609511Abstract: According to one embodiment, an insulation film is formed over the surface, backside, and sides of a first substrate. Next, the insulation film formed over the surface of the first substrate is removed. Then, a joining layer is formed over the surface of the first substrate, from which the insulation film has been removed. Subsequently, the first substrate is bonded to a second substrate via a joining layer.Type: GrantFiled: August 29, 2011Date of Patent: December 17, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Takashi Shirono, Kazumasa Tanida, Naoko Yamaguchi, Satoshi Hongo, Tsuyoshi Matsumura