Bonding Of Semiconductor Wafer To Insulating Substrate Or To Semic Onducting Substrate Using An Intermediate Insulating Layer (epo) Patents (Class 257/E21.122)
E Subclasses
- Heteroepitaxy (EPO) (Class 257/E21.124)
- Defect and dislocati on suppression due to lattice mismatch, e.g., lattice adaptation (EPO) (Class 257/E21.125)
- Group III-V compound on dissimilar Group III-V compound (EPO) (Class 257/E21.126)
- Group III-V compound on Si or Ge (EPO) (Class 257/E21.127)
- Carbon on a noncarbon semiconductor substrate (EPO) (Class 257/E21.128)