One-transistor Memory Cell Structure, I.e., Each Memory Cell Containing Only One Transistor (epo) Patents (Class 257/E27.085)
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Patent number: 11101275Abstract: A nonvolatile logic cell (nonvolatile storage element) 21 includes ferroelectric capacitors 25 and MOSFETs 26. A plurality of ferroelectric dummy capacitors 32 and 33 are formed in a periphery of the nonvolatile logic cell 21. Each of the ferroelectric capacitors 25 and the ferroelectric dummy capacitors 32 and 33 includes a lower electrode 51, a ferroelectric film 52 formed above the lower electrode 51, and an upper electrode 53 formed above the ferroelectric film 52.Type: GrantFiled: November 21, 2016Date of Patent: August 24, 2021Assignee: ROHM CO., LTD.Inventors: Takanori Ozawa, Izumi Yano, Toshiyuki Shiraishi
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Patent number: 10707220Abstract: Ferroelectric memory and methods of forming the same are provided. An example memory cell can include a buried recessed access device (BRAD) formed in a substrate and a ferroelectric capacitor formed on the BRAD.Type: GrantFiled: August 31, 2017Date of Patent: July 7, 2020Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Alessandro Calderoni, D. V. Nirmal Ramaswamy
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Patent number: 10658368Abstract: A dynamic random access memory (DRAM) includes a first bit line extending along a first direction, a first buried word line extending along a second direction, and an active region overlapping part of the first bit line and part of the first buried word line. Preferably, the active region comprises a V-shape. Moreover, the DRAM also includes at least a storage node contact overlapping one end of the active region, in which the storage node contact includes an ellipse.Type: GrantFiled: December 20, 2017Date of Patent: May 19, 2020Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Wan-Chi Wu, Kai-Ping Chen, Hong-Ru Liu
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Patent number: 10529797Abstract: A semiconductor device includes a semiconductor region, deep trenches, a dielectric film, a conductive material, an interlayer insulating film, and a metal interconnection. The semiconductor region has a first conductivity type in a silicon substrate. The deep trenches are disposed in the semiconductor region. The dielectric film is disposed on sidewalls of the deep trenches. The conductive material is disposed on the dielectric film. The interlayer insulating film is disposed on upper surface portions of the deep trenches to create a void inside each of the deep trenches. The metal interconnection is disposed on the interlayer insulating film.Type: GrantFiled: June 6, 2018Date of Patent: January 7, 2020Assignee: MagnaChip Semiconductor, Ltd.Inventors: Yang Beom Kang, Kang Sup Shin
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Patent number: 10310999Abstract: An integrated circuit device includes a transmitter circuit operable to transmit a timing signal over a first wire to a DRAM. The DRAM receives a first signal having a balanced number of logical zero-to-one transitions and one-to-zero transitions and samples the first signal at a rising edge of the timing signal to produce a respective sampled value. The device further includes a receiver circuit to receive the respective sampled value from the DRAM over a plurality of wires separate from the first wire. In a first mode, the transmitter circuit repeatedly transmits incrementally offset versions of the timing signal to the DRAM until sampled values received from the DRAM change from a logical zero to a logical one or vice versa; and in a second mode, it transmits write data over the plurality of wires to the DRAM according to a write timing offset generated based on the sampled values.Type: GrantFiled: September 13, 2017Date of Patent: June 4, 2019Inventors: Jared LeVan Zerbe, Kevin S. Donnelly, Stefanos Sidiropoulos, Donald C. Stark, Mark A. Horowitz, Leung Yu, Roxanne Vu, Jun Kim, Bruno W. Garlepp, Tsyr-Chyang Ho, Benedict Chung-Kwong Lau
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Patent number: 10304553Abstract: The above-substrate decoding stage of a compact three-dimensional memory (3D-Mc) could be an intra-level decoding stage, an inter-level decoding stage, or a combination thereof. For the intra-level decoding stage, contact vias can be shared by address-lines in the same memory level; for the inter-level decoding stage, contact vias can be shared by address-lines from different memory levels.Type: GrantFiled: April 19, 2017Date of Patent: May 28, 2019Assignees: HangZhou HaiCun Information Technology Co., Ltd.Inventor: Guobiao Zhang
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Patent number: 9991887Abstract: To reduce power consumption, a semiconductor device includes a power source circuit for generating a power source potential, and a power supply control switch for controlling supply of the power source potential from the power source circuit to a back gate of a transistor, and the power supply control switch includes a control transistor for controlling conduction between the power source circuit and the back gate of the transistor by being turned on or off in accordance with a pulse signal that is input into a control terminal of the control transistor. The power source potential is intermittently supplied from the power source circuit to the back gate of the transistor, using the power supply control switch.Type: GrantFiled: May 3, 2016Date of Patent: June 5, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Jun Koyama, Shunpei Yamazaki
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Patent number: 9935143Abstract: A small semiconductor device suitable for high-speed operation is provided. The semiconductor device includes a first circuit, a global bit line pair for writing, a global bit line pair for reading, and a local bit line pair. The first circuit includes second to fifth circuits. The second to fifth circuits are electrically connected to each other by the local bit line pair. The second circuit functions as a read/write selection switch. The third circuit functions as a working memory that stores 1-bit complementary data temporarily. The fourth circuit has a function of precharging the local bit line pair. The fifth circuit includes n (n is an integer of 2 or more) sixth circuits. The sixth circuits each have a function of retaining 1-bit complementary data written from the third circuit.Type: GrantFiled: September 21, 2016Date of Patent: April 3, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Takuro Ohmaru, Yukio Maehashi
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Patent number: 9472251Abstract: A semiconductor device includes a plurality of memory cell region regions with each memory cell region region having a plurality of normal memory cell regions, a dummy memory cell region disposed at one side of the plurality of normal memory cell regions, and another dummy memory cell region disposed at another side of the plurality of normal memory cell regions. The semiconductor device further includes a plurality of circuit regions, each including a control circuit to control a portion of the plurality of normal memory cell regions, the dummy memory cell region, and the other dummy memory cell region. The plurality of memory cell region regions and the plurality of control regions are symmetrically disposed about a peripheral region of the semiconductor device.Type: GrantFiled: June 13, 2014Date of Patent: October 18, 2016Assignee: SK Hynix Inc.Inventor: Sung-Soo Chi
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Patent number: 9472263Abstract: An object is to increase the retention characteristics of a memory device formed using a semiconductor with a wide bandgap, such as an oxide semiconductor. A transistor including a back gate (a back gate transistor) is inserted in series at one end of a bit line so that the back gate is constantly at a sufficiently negative potential. The minimum potential of the bit line is set higher than that of a word line. When power is turned off, the bit line is cut off by the back gate transistor, ensuring prevention of outflow of charge accumulated in the bit line. At this time, the potential of a source or a drain (bit line) of a cell transistor is sufficiently higher than that of a gate of the cell transistor (0 V), so that the cell transistor is put in a sufficiently off state; thus, data can be retained.Type: GrantFiled: November 5, 2014Date of Patent: October 18, 2016Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yasuhiko Takemura
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Patent number: 8969936Abstract: Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a substrate including first and second junction regions, a word line buried in the substrate, a bit line provided over the word line to cross the word line, a first contact provided between the substrate and the bit line and electrically connected to the first junction region, and a second contact provided between the bit lines and electrically connected to the second junction region. An overlapping area of a lower portion of the second contact may be greater than an overlapping area of an upper portion of the second contact with respect to the second junction region.Type: GrantFiled: December 31, 2012Date of Patent: March 3, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Wonchul Lee, Eun A Kim, Ja Young Lee
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Patent number: 8748254Abstract: A method of manufacturing a semiconductor device includes forming a bit line on a substrate comprising an active region; forming an interlayer insulating layer covering the bit line on the substrate; forming a first hole at a location of the active region through the interlayer insulating layer; forming a dummy contact layer by filling the first hole; forming a mold layer on the interlayer insulating layer and the dummy contact layer; forming a second hole at a location of the dummy contact layer through the mold layer; removing the dummy contact layer in the first hole through the second hole; forming an epitaxial layer on a portion of the active region, which is exposed at a lower surface of the first hole; and forming a lower electrode on internal surfaces of the first hole and the second hole.Type: GrantFiled: June 12, 2012Date of Patent: June 10, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Kwang-wook Lee, Sang-jun Lee, In-seak Hwang, In-sang Jeon, Byoung-yong Gwak, Ho-kyun An
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Patent number: 8748959Abstract: A semiconductor memory device is disclosed. In one particular exemplary embodiment, the semiconductor memory device includes a plurality of memory cells arranged in an array of rows and columns. Each memory cell may include a first region connected to a source line extending in a first orientation. Each memory cell may also include a second region connected to a bit line extending a second orientation. Each memory cell may further include a body region spaced apart from and capacitively coupled to a word line, wherein the body region is electrically floating and disposed between the first region and the second region. The semiconductor device may also include a first barrier wall extending in the first orientation and a second barrier wall extending in the second orientation and intersecting with the first barrier wall to form a trench region configured to accommodate each of the plurality of memory cells.Type: GrantFiled: March 31, 2010Date of Patent: June 10, 2014Assignee: Micron Technology, Inc.Inventors: Michael A. Van Buskirk, Christian Caillat, Viktor I Koldiaev, Jungtae Kwon, Pierre C. Fazan
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Patent number: 8723154Abstract: An integrated circuit device. The integrated circuit device includes a semiconductor substrate having a surface region. A gate dielectric layer overlies the surface region of the substrate. The device includes a MOS device having a p+ active region. The p+ active region forms a first electrode for a resistive switching device. The resistive switching device includes an amorphous silicon switching material overlying the p+ active region and a metal electrode overlies the first metal conductor structure. The metal electrode includes a metal material, upon application of a positive bias to the metal electrode, forms a metal region in the amorphous silicon switching material. The MOS device provides for a select transistor for the integrated circuit device.Type: GrantFiled: September 29, 2010Date of Patent: May 13, 2014Assignee: Crossbar, Inc.Inventors: Sung Hyun Jo, Hagop Nazarian
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Patent number: 8710576Abstract: A charge trap type of memory having a memory channel with vertical and possibly horizontal components is described. The invention includes a new operation method of simultaneous hole and electron injection operation for high speed and high reliability non-volatile memories, as well as high-density non-volatile memories. Array implementations for high-density memory arrays and high-speed memory arrays and their fabrication methods are also described.Type: GrantFiled: February 11, 2009Date of Patent: April 29, 2014Assignee: Halo LSI Inc.Inventors: Seiki Ogura, Tomoko Ogura Iwasaki, Nori Ogura
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Patent number: 8704286Abstract: Methods for fabricating integrated circuits include fabricating a logic device on a substrate, forming an intermediate semiconductor substrate on a surface of the logic device, and fabricating a capacitor-less memory cell on the intermediate semiconductor substrate. Integrated circuits with capacitor-less memory cells formed on a surface of a logic device are also disclosed, as are multi-core microprocessors including such integrated circuits.Type: GrantFiled: September 11, 2012Date of Patent: April 22, 2014Assignee: Micron Technology, Inc.Inventor: Gurtej S. Sandhu
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Patent number: 8569089Abstract: Semiconductor nano-devices, such as nano-probe and nano-knife devices, which are constructed using graphene films that are suspended between open cavities of a semiconductor structure. The suspended graphene films serve as electro-mechanical membranes that can be made very thin, from one or few atoms in thickness, to greatly improve the sensitivity and reliability of semiconductor nano-probe and nano-knife devices.Type: GrantFiled: August 31, 2012Date of Patent: October 29, 2013Assignee: International Business Machines CorporationInventor: Wenjuan Zhu
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Patent number: 8564027Abstract: Semiconductor nano-devices, such as nano-probe and nano-knife devices, which are constructed using graphene films that are suspended between open cavities of a semiconductor structure. The suspended graphene films serve as electro-mechanical membranes that can be made very thin, from one or few atoms in thickness, to greatly improve the sensitivity and reliability of semiconductor nano-probe and nano-knife devices.Type: GrantFiled: January 27, 2012Date of Patent: October 22, 2013Assignee: International Business Machines CorporationInventor: Wenjuan Zhu
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Patent number: 8557686Abstract: Embodiments relate to a method of forming a graphene-based memory device. The method includes forming a forming a first graphene layer on an first insulator layer, and forming a second insulation layer on the first graphene layer. The method further includes forming a second graphene layer on the second insulation layer and forming an opening in the second insulation layer to expose a portion of the first graphene layer and a portion of the second graphene layer and to suspend the exposed portion of the second graphene layer in the opening.Type: GrantFiled: August 27, 2012Date of Patent: October 15, 2013Assignee: International Business Machines CorporationInventor: Wenjuan Zhu
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Patent number: 8519450Abstract: Embodiments relate to a graphene-based memory device. The graphene-based memory device includes a first graphene layer and a second graphene layer. A first insulation layer is located between the first and second graphene layers. The first insulation layer has an opening between the first and second graphene layers, and the first graphene layer is configured to bend into the opening to contact the second graphene layer based on a first electrostatic force.Type: GrantFiled: August 17, 2012Date of Patent: August 27, 2013Assignee: International Business Machines CorporationInventor: Wenjuan Zhu
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Patent number: 8482045Abstract: Channels of two transistors are vertically formed on portions of two opposite side surfaces of one active region, and gate electrodes are vertically formed on a device isolation layer contacting the channels of the active region. A common bit line contact plug is formed in the central portions of the active region, two storage node contact plugs are formed on both sides of the bit line contact plug, and an insulating spacer is formed on a side surface of the bit line contact plug. A word line, a bit line, and a capacitor are sequentially stacked on the semiconductor substrate, like a conventional semiconductor memory device. Thus, effective space arrangement of a memory cell is possible such that a 4F2 structure is constituted, and a conventional line and contact forming process can be applied such that highly integrated semiconductor memory device is readily fabricated.Type: GrantFiled: July 16, 2012Date of Patent: July 9, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Hyeoung-won Seo, Bong-soo Kim, Dong-gun Park, Kang-yoon Lee, Jae-man Yoon, Seong-goo Kim, Seung-bae Park
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Publication number: 20130049091Abstract: A semiconductor device comprises an MIS field effect transistor including a channel region made of p-conductive silicon, a gate insulating film including a first insulating film having dielectric constant higher than dielectric constant of silicon dioxide, and a gate electrode. The gate electrode includes a first metal film formed on the gate insulating film and having a work function greater than a work function of intrinsic semiconductor silicon, and a p-conductive silicon film formed on the first metal film and in contact with the first metal film.Type: ApplicationFiled: August 6, 2012Publication date: February 28, 2013Applicant: ELPIDA MEMORY, INC.Inventor: Kanta SAINO
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Patent number: 8378448Abstract: A set of metal line structures including a signal transmission metal line and a capacitively-grounded inductively-signal-coupled metal line is embedded in a dielectric material layer. A capacitor is serially connected between the capacitively-grounded inductively-signal-coupled metal line and a local electrical ground, which may be on the input side or on the output side. The set of metal line structures and the capacitor collective provide a frequency dependent inductor. The Q factor of the frequency dependent inductor has multiple peaks that enable the operation of the frequency dependent inductor at multiple frequencies. Multiple capacitively-grounded inductively-signal-coupled metal lines may be provided in the frequency-dependent inductor, each of which is connected to the local electrical ground through a capacitor. By selecting different capacitance values for the capacitors, multiple values of the Q-factor may be obtained in the frequency dependent inductor at different signal frequencies.Type: GrantFiled: December 7, 2009Date of Patent: February 19, 2013Assignee: International Business Machines CorporationInventors: Hanyi Ding, Wayne H. Woods, Jr.
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Patent number: 8349662Abstract: An integrated circuit device (e.g., a logic device or a memory device) having (i) a memory cell array which includes a plurality of memory cells (for example, memory cells having electrically floating body transistors) arranged in a matrix of rows and columns, wherein each memory cell includes at least one transistor having a gate, gate dielectric and first, second and body regions, wherein: (i) the gate and gate dielectric are disposed on or above the first semiconductor layer that is disposed on or above an insulating layer or region, (ii) the body region of each transistor is electrically floating, (iii) the transistors of adjacent memory cells include a layout that provides a common first region, and (iv) the first regions of the transistors are comprised of a semiconductor material which is different from the material of the first semiconductor layer. Also disclosed are inventive methods of manufacturing, for example, such integrated circuit devices.Type: GrantFiled: December 11, 2008Date of Patent: January 8, 2013Assignee: Micron Technology, Inc.Inventor: Danngis Liu
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Publication number: 20120273862Abstract: Apparatus and methods are disclosed, including an apparatus that includes a number of tiers of a first semiconductor material, each tier including at least one access line of at least one memory cell and at least one source, channel and/or drain of at least one peripheral transistor, such as one used in an access line decoder circuit or a data line multiplexing circuit. The apparatus can also include a number of pillars of a second semiconductor material extending through the tiers of the first semiconductor material, each pillar including either a source, channel and/or drain of at least one of the memory cells, or a gate of at least one of the peripheral transistors. Methods of forming such apparatus are also described, along with other embodiments.Type: ApplicationFiled: April 28, 2011Publication date: November 1, 2012Applicant: MICRON TECHNOLOGY, INC.Inventor: Toru Tanzawa
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Publication number: 20120261733Abstract: A semiconductor device comprises a trench isolation. The trench isolation is formed in a surface of a semiconductor substrate to define an active region a well region, and a bottom of the trench isolation is positioned within the well region. The trench isolation includes a conductive wiring electrically connected to the well region and an insulating film which buries the conductive wiring in the bottom of the trench isolation. Semiconductor elements are disposed in the active region.Type: ApplicationFiled: March 12, 2012Publication date: October 18, 2012Applicant: ELPIDA MEMORY, INC.Inventor: Kiyonori OYU
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Patent number: 8283717Abstract: Device isolation/insulation films each have a first height within a first area and a second height higher than the first height within a second area. At least the device isolation/insulation films adjacent to a contact diffusion region exist in the second area, and the device isolation/insulation films adjacent to memory transistors exist in the first area. The device isolation/insulation films are implanted with an impurity of a first conductivity type, and device formation regions each have a diffusion region of the first conductivity type, the diffusion region being formed by diffusion of the impurity of the first conductivity type from the device isolation/insulation films.Type: GrantFiled: September 20, 2010Date of Patent: October 9, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Junya Matsunami, Hiroyuki Kutsukake
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Patent number: 8278167Abstract: Methods for fabricating integrated circuits include fabricating a logic device on a substrate, forming an intermediate semiconductor substrate on a surface of the logic device, and fabricating a capacitor-less memory cell on the intermediate semiconductor substrate. Integrated circuits with capacitor-less memory cells formed on a surface of a logic device are also disclosed, as are multi-core microprocessors including such integrated circuits.Type: GrantFiled: December 18, 2008Date of Patent: October 2, 2012Assignee: Micron Technology, Inc.Inventor: Gurtej S. Sandhu
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Publication number: 20120211813Abstract: A semiconductor device includes a semiconductor device may include, but is not limited to, a semiconductor substrate, an isolation electrode, a gate electrode, a gate insulating film, and a first insulating film. The semiconductor substrate has a first groove and a second groove. An isolation electrode is positioned in the first groove. The gate electrode is positioned in the second groove. The gate insulating film is adjacent to the gate electrode. The first insulating film is adjacent to the isolation electrode. The isolation electrode is greater in threshold voltage than the gate electrode.Type: ApplicationFiled: February 15, 2012Publication date: August 23, 2012Applicant: ELPIDA MEMORY, INC.Inventor: Hiroaki TAKETANI
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Patent number: 8168530Abstract: A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.Type: GrantFiled: July 23, 2010Date of Patent: May 1, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jae-Hun Jeong, Ki-Nam Kim, Soon-Moon Jung, Jae-Hoon Jang
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Patent number: 8026542Abstract: Methods for forming memory devices and integrated circuitry, for example, DRAM circuitry, structures and devices resulting from such methods, and systems that incorporate the devices are provided.Type: GrantFiled: August 29, 2006Date of Patent: September 27, 2011Assignee: Micron Technology, Inc.Inventors: Terrence McDaniel, Sandra Tagg, Fred Fishburn
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Patent number: 7977707Abstract: Provided are a capacitorless DRAM and methods of manufacturing the same. The capacitorless DRAM may include a substrate including a source, a drain and a channel, a gate on the channel of the substrate, and a hole reserving unit below the channel.Type: GrantFiled: December 27, 2007Date of Patent: July 12, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Ki-ha Hong, Jae-woong Hyun, Young-gu Jin, Jai-kwang Shin
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Patent number: 7968937Abstract: A vertical transistor includes a substrate, a semiconductor structure, a gate, a gate dielectric layer, and a conductive layer. The semiconductor structure is disposed on the substrate and includes two vertical plates and a bottom plate. The bottom plate has an upper surface connected to bottoms of the two vertical plates and a bottom surface connected to the substrate. The gate surrounds the semiconductor structure to fill between the two vertical plates, and the gate is disposed around the two vertical plates. The gate dielectric layer is sandwiched in between the gate and the semiconductor structure, and the conductive layer is disposed on the semiconductor structure and electrically connected with tops of the two vertical plates.Type: GrantFiled: September 24, 2008Date of Patent: June 28, 2011Assignee: Nanya Technology CorporationInventors: Kuo-Chen Wang, Jung-Hua Chen
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Publication number: 20110121374Abstract: A vertical transistor comprises a semiconductor region, a pillar region formed on the semiconductor region, a gate insulating film formed so as to cover a side surface of the pillar region, a gate electrode formed on the gate insulating film, a first impurity diffusion region formed in an upper portion of the pillar region, and a second impurity diffusion region formed in the semiconductor region so as to surround the pillar region. The first impurity diffusion region is formed so as to be spaced from the side surface of the pillar region.Type: ApplicationFiled: October 12, 2010Publication date: May 26, 2011Applicant: Elpida Memory, Inc.Inventor: Kazuo OGAWA
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Publication number: 20110108901Abstract: Device isolation/insulation films each have a first height within a first area and a second height higher than the first height within a second area. At least the device isolation/insulation films adjacent to a contact diffusion region exist in the second area, and the device isolation/insulation films adjacent to memory transistors exist in the first area. The device isolation/insulation films are implanted with an impurity of a first conductivity type, and device formation regions each have a diffusion region of the first conductivity type, the diffusion region being formed by diffusion of the impurity of the first conductivity type from the device isolation/insulation films.Type: ApplicationFiled: September 20, 2010Publication date: May 12, 2011Applicant: Kabushiki Kaisha ToshibaInventors: Junya MATSUNAMI, Hiroyuki Kutsukake
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Patent number: 7851859Abstract: A single transistor floating-body dynamic random access memory (DRAM) device includes a floating body located on a semiconductor substrate and a gate electrode located on the floating body, the floating body including an excess carrier storage region. The DRAM device further includes source and drain regions respectively located at both sides of the gate electrode, and leakage shielding patterns located between the floating body and the source and drain regions. Each of the source and drain regions contact the floating body, which may be positioned between the source and drain regions. The floating body may also laterally extend under the leakage shielding patterns, which may be arranged at outer sides of the gate electrode.Type: GrantFiled: July 27, 2007Date of Patent: December 14, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Nam-Kyun Tak, Ki-Whan Song, Chang-Woo Oh, Woo-Yeong Cho
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Patent number: 7808054Abstract: An OTP memory cell according to the present invention includes: a semiconductor substrate including a lower electrode forming region having a lower electrode formed therein, a diffusion layer forming region having a source and a drain formed therein, a first trench-type insulating region, and a second trench-type insulating region; an upper electrode being in contact with the first trench-type insulating region and formed on the lower electrode with the first insulating film interposed therebetween; and a gate electrode being in contact with the second trench-type insulating region and formed on a channel region with the second insulating film interposed therebetween, in which a shape of at least a part of an end of the lower electrode forming region in contact with the first insulating film is sharper than a shape of an end of the channel region in contact with the second insulating film.Type: GrantFiled: May 15, 2008Date of Patent: October 5, 2010Assignee: NEC Electronics CorporationInventor: Masahiro Wada
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Patent number: 7795651Abstract: A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.Type: GrantFiled: February 1, 2008Date of Patent: September 14, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Jae-Hun Jeong, Ki-Nam Kim, Soon-Moon Jung, Jae-Hoon Jang
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Patent number: 7781283Abstract: A method of manufacturing a dynamic random access memory cell includes: forming a substrate having an insulating region over a conductive region; forming a fin of a fin-type field effect transistor (FinFET) device over the insulating region; forming a storage capacitor at a first end of the fin; and forming a back-gate at a lateral side of the fin. The back-gate is in electrical contact with the conductive region and is structured and arranged to influence a threshold voltage of the fin.Type: GrantFiled: August 15, 2008Date of Patent: August 24, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Patent number: 7768014Abstract: As for a memory element implemented in a semiconductor device typified by an RFID, it is an object of the present invention to reduce manufacturing steps and to provide a memory element and a memory circuit having the element with reduced cost. It is a feature of the present invention that a memory element sandwiched between electrodes has an organic compound, and an electrode connected to a semiconductor element controlling the memory element functions as an electrode of the memory element. In addition, an extremely thin semiconductor film formed on an insulated surface is used for the memory element; therefore cost can be reduced.Type: GrantFiled: January 24, 2006Date of Patent: August 3, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yoshinobu Asami
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Patent number: 7737481Abstract: A semiconductor memory device has bit lines, capacitors, bit contacts and capacitor contacts, wherein the bit lines are provided over a semiconductor substrate, the bit lines are connected to the semiconductor substrate through the bit contacts, the capacitors are connected to the semiconductor substrate through the capacitor contacts, and wherein in two adjacent bit lines, pitch d2 (first pitch) representing a pitch of portions provided with the capacitor contacts is larger than pitch d3 (second pitch) representing a pitch of portions provided with the bit contacts, and distance d4 between two such bit lines in the portions provided with the bit contacts is larger than width d5 of the bit lines in the portions provided with the bit contacts.Type: GrantFiled: February 15, 2008Date of Patent: June 15, 2010Assignee: NEC Electronics CorporationInventors: Takashi Sakoh, Mami Toda
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Patent number: 7723807Abstract: A semiconductor device includes at least two adjacent memory cell blocks, each of the memory cell blocks having a plurality of memory cell units, each of memory cell units having a plurality of electrically reprogrammable and erasable memory cells connected in series, a plurality of cell gates for selecting the plurality of memory cells within the two adjacent memory cell blocks, each of the plurality of cell gates being formed with roughly rectangular closed loops or roughly U shaped open loops, each of the loops being connected to a corresponding cell of the memory cells in a corresponding memory cell unit of the plurality of memory cell units within one of the two adjacent memory cell blocks and being connected to a corresponding memory cell of the memory cells in a corresponding memory cell unit of the plurality of memory cell units within the other memory cell block of the two adjacent memory cell blocks and a plurality of pairs of first and second selection gates for selecting the memory cell block, theType: GrantFiled: June 15, 2007Date of Patent: May 25, 2010Assignee: Kabushiki Kaisha ToshibaInventor: Nobuyasu Nishiyama
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Patent number: 7683430Abstract: An integrated circuit having a memory cell and/or memory cell array including a plurality of memory cells (as well as techniques for reading, controlling and/or operating, the memory cell, and/or memory cell array). Each memory cell includes at least one transistor having an electrically floating body transistor and an active access element. The electrically floating body region of the transistor forms a storage area or node of the memory cell wherein an electrical charge which is representative of a data state is stored in the electrically floating body region. The active access element is coupled to the electrically floating body transistor to facilitate programming of the memory cell and to provide a relatively large amount of majority carriers to the storage area or node of the memory cell during a write operation.Type: GrantFiled: December 4, 2006Date of Patent: March 23, 2010Assignee: Innovative Silicon ISi SAInventor: Serguei Okhonin
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Publication number: 20100052028Abstract: A transistor formed on a semiconductor substrate has a gate electrode formed via a gate insulating film and first and second diffusion layers formed in the semiconductor substrate, the first and second diffusion layers being positioned at both sides of the gate electrode. A first electrode is connected to the first diffusion layer of the transistor. A capacitor insulating film formed on the first electrode is formed of a silicon oxide film containing a substrate which is faster than Cu in diffusion velocity and which more readily reacts with oxygen than Cu does. A second electrode formed on the capacitor insulating film is formed of one of a Cu layer and another Cu layer containing the substance.Type: ApplicationFiled: November 16, 2009Publication date: March 4, 2010Inventors: Yumi HAYASHI, Hayato Nasu, Kazumichi Tsumura, Takamasa Usui, Hiroyoshi Tanimoto
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Publication number: 20100001326Abstract: A one-transistor dynamic random access memory (DRAM) cell includes a transistor which has a first source/drain region, a second source/drain region, a body region between the first and second source/drain regions, and a gate over the body region. The first source/drain region includes a Schottky diode junction with the body region and the second source/drain region includes an n-p diode junction with the body region.Type: ApplicationFiled: September 11, 2009Publication date: January 7, 2010Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: JAMES D. BURNETT, BRIAN A. WINSTEAD
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Patent number: 7633117Abstract: Provided are a capacitorless DRAM (dynamic random access memory) and a fabrication method thereof. In a capacitorless DRAM, a pair of cylindrical auxiliary gates is formed within a bulk substrate. Thus, a volume of a channel body formed at a region where the cylindrical auxiliary gates contact with each other can be increased, while an area of a junction region where the channel body contact source and drain regions can be reduced. As a result, capacitance of the channel body can be increased, and a generation of leakage current through the second junction region can be reduced. The application of a back bias to the cylindrical auxiliary gates can improve a charge storage capability of the channel body.Type: GrantFiled: January 4, 2007Date of Patent: December 15, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Ki-whan Song, Hoon Jeong
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Patent number: 7576379Abstract: A floating body dynamic random access memory (DRAM) structure has a shallow source (first source portion) and a deep source (second source portion), of which the deep source is thicker. A portion of the floating body extends beneath the shallow source to provide extra capacitance. Optionally, the portion of the floating body beneath the shallow source may be more heavily doped than the depletion zone of the body to further enhance the capacitance. Also, by forming a raised portion of the source without raising the drain, the same implantation energy may be used to dope the raised source and the regular drain. The resulting floating body DRAM structure has an enhanced source to floating body capacitance and stores more charges. Operating margins for write and sense operations are increased and the performance and stability of the floating body DRAM are enhanced.Type: GrantFiled: February 5, 2007Date of Patent: August 18, 2009Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Publication number: 20090179246Abstract: A semiconductor device comprises a memory cell region, a peripheral circuit region and a boundary region. In the memory cell region, a concave lower electrode and a foundation layer have a same uppermost surface positioned in a height of H above the plane-A. In the boundary region, one concave lower conductive region and a foundation layer have a same uppermost surface positioned in a height of H above the plane-A.Type: ApplicationFiled: January 7, 2009Publication date: July 16, 2009Inventors: Yoshitaka NAKAMURA, Kenji KOMEDA, Ryota SUEWAKA, Noriaki IKEDA
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Publication number: 20090146219Abstract: An integrated circuit device (e.g., a logic device or a memory device) having (i) a memory cell array which includes a plurality of memory cells (for example, memory cells having electrically floating body transistors) arranged in a matrix of rows and columns, wherein each memory cell includes at least one transistor having a gate, gate dielectric and first, second and body regions, wherein: (i) the gate and gate dielectric are disposed on or above the first semiconductor layer that is disposed on or above an insulating layer or region, (ii) the body region of each transistor is electrically floating, (iii) the transistors of adjacent memory cells include a layout that provides a common first region, and (iv) the first regions of the transistors are comprised of a semiconductor material which is different from the material of the first semiconductor layer. Also disclosed are inventive methods of manufacturing, for example, such integrated circuit devices.Type: ApplicationFiled: December 11, 2008Publication date: June 11, 2009Inventor: Danngis Liu
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Patent number: 7534687Abstract: A semiconductor device, comprises: a transistor having structured to include a gate electrode formed on a semiconductor layer on a semiconductor substrate via a gate insulating film, and a source layer and a drain layer formed on the semiconductor layer sandwiching the gate electrode; a hollow portion existing between the source layer and the semiconductor substrate, and between the drain layer and the semiconductor substrate, respectively; and the hollow portion in absence between the semiconductor layer under the gate electrode and the semiconductor substrate.Type: GrantFiled: July 13, 2006Date of Patent: May 19, 2009Assignee: Seiko Epson CorporationInventor: Toshiki Hara