Inner tube for process tube for manufacturing semiconductor wafers
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The broken lines shown in the drawings represent portions of the inner tube for process tube for manufacturing semiconductor wafers that form no part of the claimed design.
Claims
The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described.
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Type: Grant
Filed: May 10, 2012
Date of Patent: Dec 30, 2014
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventors: Hirofumi Kaneko (Oshu), Atsushi Endo (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/420,536