Inner tube for process tube for manufacturing semiconductor wafers

Description

FIG. 1 is a perspective view of an inner tube for process tube for manufacturing semiconductor wafers showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged cross-sectional view taken along line 8-8 of FIG. 2; and,

FIG. 9 is another front view thereof, shown in a used condition.

The broken lines shown in the drawings represent portions of the inner tube for process tube for manufacturing semiconductor wafers that form no part of the claimed design.

Claims

The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described.