Dummy wafer
Latest Tokyo Electron Limited Patents:
- 3D ISOLATION OF A SEGMENTATED 3D NANOSHEET CHANNEL REGION
- METHODS FOR FABRICATING ISOLATION STRUCTURES USING DIRECTIONAL BEAM PROCESS
- INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD
- PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF
Description
The broken lines shown in the drawings represent portions of the dummy wafer that form no part of the claimed design. Right, left and back views of the dummy wafer shown in
Claims
The ornamental design for a dummy wafer, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
198816 | January 1878 | Robinson |
415734 | November 1889 | Randall |
1769409 | July 1930 | Armstrong |
D92994 | August 1934 | Aaronson |
D122735 | September 1940 | Christen |
D133264 | August 1942 | Perkins |
D179747 | February 1957 | Sylvester et al. |
4244761 | January 13, 1981 | Remi et al. |
4374906 | February 22, 1983 | Breault |
D273582 | April 24, 1984 | Bolt |
D273860 | May 15, 1984 | Bolt |
4450212 | May 22, 1984 | Feigenbaum |
4460634 | July 17, 1984 | Hasegawa |
D308247 | May 29, 1990 | Adam et al. |
D320361 | October 1, 1991 | Karasawa |
5458938 | October 17, 1995 | Nygard et al. |
5514439 | May 7, 1996 | Sibley |
5662758 | September 2, 1997 | Hamilton et al. |
5766702 | June 16, 1998 | Lin |
5773110 | June 30, 1998 | Shields |
5804281 | September 8, 1998 | Phan et al. |
5853840 | December 29, 1998 | Saito |
D417235 | November 30, 1999 | Malik et al. |
D425113 | May 16, 2000 | Kleman et al. |
6150023 | November 21, 2000 | Yasaka |
6340514 | January 22, 2002 | Kerr et al. |
6550092 | April 22, 2003 | Brown et al. |
6589631 | July 8, 2003 | Suzuki et al. |
6610390 | August 26, 2003 | Kauschke et al. |
D483187 | December 9, 2003 | Cheng |
D508180 | August 9, 2005 | Sneed |
6988942 | January 24, 2006 | Chen |
7030046 | April 18, 2006 | Wong et al. |
D540272 | April 10, 2007 | Higashibata |
D544452 | June 12, 2007 | Nakamura et al. |
D552565 | October 9, 2007 | Nakamura et al. |
D562568 | February 26, 2008 | Johnston et al. |
7462094 | December 9, 2008 | Yoshida |
D589472 | March 31, 2009 | Li |
D589473 | March 31, 2009 | Takamoto et al. |
D598380 | August 18, 2009 | Kuriki |
7572173 | August 11, 2009 | Huang |
7632170 | December 15, 2009 | O'Moore |
D609652 | February 9, 2010 | Nagasaka |
D621804 | August 17, 2010 | Sip et al. |
D633672 | March 1, 2011 | McKnight |
D633673 | March 1, 2011 | McKnight |
D651991 | January 10, 2012 | Nishiguchi et al. |
D651992 | January 10, 2012 | Nishiguchi et al. |
D655256 | March 6, 2012 | Nishiguchi et al. |
D670917 | November 20, 2012 | Blackford |
D674759 | January 22, 2013 | Chang et al. |
D676672 | February 26, 2013 | Lee |
D677062 | March 5, 2013 | Lee |
D684551 | June 18, 2013 | Nguyen |
D686175 | July 16, 2013 | Gurary et al. |
D686582 | July 23, 2013 | Krishnan et al. |
D690671 | October 1, 2013 | Gurary et al. |
D695241 | December 10, 2013 | Gurary et al. |
D699201 | February 11, 2014 | Petsch |
D699908 | February 18, 2014 | Fang |
D703162 | April 22, 2014 | Tamaso |
D704155 | May 6, 2014 | Chang et al. |
D720313 | December 30, 2014 | Flynn |
D733960 | July 7, 2015 | Howe |
D739363 | September 22, 2015 | Sharma et al. |
D740035 | October 6, 2015 | Teherani |
D751999 | March 22, 2016 | Sharma et al. |
D761745 | July 19, 2016 | Shinkai |
D766850 | September 20, 2016 | Morisaki |
D768115 | October 4, 2016 | Kazanchian |
20050170616 | August 4, 2005 | Murata |
20060079160 | April 13, 2006 | Balagani |
20090247057 | October 1, 2009 | Kobayashi |
- U.S. Appl. No. 29/524,912, filed Apr. 24, 2015, Tokyo Electron Limited.
- U.S. Appl. No. 29/524,898, filed Apr. 24, 2015, Tokyo Electron Limited.
Patent History
Patent number: D784937
Type: Grant
Filed: Apr 24, 2015
Date of Patent: Apr 25, 2017
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yutaka Motoyama (Iwate), Kohei Fukushima (Iwate)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/524,897
Type: Grant
Filed: Apr 24, 2015
Date of Patent: Apr 25, 2017
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yutaka Motoyama (Iwate), Kohei Fukushima (Iwate)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/524,897
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)